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DOE OSTI · 1325765

Fabrication method for small-scale structures with non-planar features

Burckel, David Bruce·Ten Eyck, Gregory A.
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Abstract

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

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Burckel, David Bruce, Ten Eyck, Gregory A.. 2016-09-20. Fabrication method for small-scale structures with non-planar features. https://www.osti.gov/biblio/1325765

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