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DOE OSTI · 1650896

Concentric semi-circular split profiling for computed tomographic imaging of electronic beams

Abstract

Apparatus and method for analyzing an electron beam including a circular sensor disk adapted to receive the electron beam, an inner semi-circular slit in the circular sensor disk; an outer semi-circular slit in the circular sensor disk wherein the outer semi-circular slit is spaced from the first semi-circular slit by a fixed distance; a system for sweeping the electron beam radially outward from the central axis to the inner semi-circular slit and outer second semi-circular slit; a sensor structure operatively connected to the circular sensor disk wherein the sensor structure receives the electron beam when it passes over the inner semi-circular slit and the outer semi-circular slit; and a device for measuring the electron beam that is intercepted by the inner semi-circular slit and the outer semi-circular slit.

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BibTeXRIS

Elmer, John W., Teruya, Alan T.. 2020-05-12. Concentric semi-circular split profiling for computed tomographic imaging of electronic beams. https://www.osti.gov/biblio/1650896

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