DOE OSTI · 1783599
An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.
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Titze, Michael, Chandrasekaran, Vigneshwaran, Htoon, Han, Bielejec, Edward S.. 2020-02-01. An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.. https://www.osti.gov/biblio/1783599
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