DOE OSTI · 1823812
Planar electrode arrays and fabrication methods thereof
Abstract
The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.
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Schindelholz, Eric John, Finnegan, Patrick Sean. 2021-04-06. Planar electrode arrays and fabrication methods thereof. https://www.osti.gov/biblio/1823812
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