DOE OSTI · 1840263
Method for fabricating superconducting devices using a focused ion beam
Abstract
Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.
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Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., Wong, Travis J.. 2021-07-13. Method for fabricating superconducting devices using a focused ion beam. https://www.osti.gov/biblio/1840263
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