Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.

Dominguez, Daniel; Hackett, Lisa Anne Plucinski; Miller, Michael Ross; Restrepo, Jennifer; Casper, Katya Marie; Eichenfield, Matt

doi:10.2172/1847615

DOE OSTI · 1847615

Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.

Dominguez, Daniel·Hackett, Lisa Anne Plucinski·Miller, Michael Ross·Restrepo, Jennifer·Casper, Katya Marie·Eichenfield, Matt

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Dominguez, Daniel, Hackett, Lisa Anne Plucinski, Miller, Michael Ross, Restrepo, Jennifer, Casper, Katya Marie, Eichenfield, Matt. 2021-02-01. Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.. https://doi.org/10.2172/1847615

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