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DOE OSTI · 1882314

Compact, Pull-in-Free Electrostatic MEMS Actuated Tunable Ring Resonator for Optical Multiplexing.

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BibTeXRIS

Ruyack, Alexander, Grine, Alejandro, Finnegan, Patrick, Serkland, Darwin, Robinson, Samuel, Weatherred, Scott, Frost, Megan, Nordquist, Christopher, Wood, Michael. 2021-07-01. Compact, Pull-in-Free Electrostatic MEMS Actuated Tunable Ring Resonator for Optical Multiplexing.. https://doi.org/10.1364/fio.2021.ftu6b.5

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