DOE OSTI · 1987030
Miniaturized vacuum package and methods of making same
Abstract
The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.
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McGuinness, Hayden James Evans, Gehl, Michael, DeRose, Christopher Todd, Parazzoli, Lambert Paul, Haltli, Raymond A.. 2023-01-10. Miniaturized vacuum package and methods of making same. https://www.osti.gov/biblio/1987030
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