Automating Experiments Using Charged Particle Beam Nanofabrication Tools.

Belianinov, Alex; Titze, Michael; Jonathan, Poplawsky; Bielejec, Edward

doi:10.2172/2006266

DOE OSTI · 2006266

Automating Experiments Using Charged Particle Beam Nanofabrication Tools.

Belianinov, Alex·Titze, Michael·Jonathan, Poplawsky·Bielejec, Edward

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Belianinov, Alex, Titze, Michael, Jonathan, Poplawsky, Bielejec, Edward. 2022-12-01. Automating Experiments Using Charged Particle Beam Nanofabrication Tools.. https://doi.org/10.2172/2006266

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