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DOE OSTI · 21371763

High-Angular-Resolution Microbeam X-Ray Diffraction with CCD Detector

Imai, Yasuhiko·Kimura, Shigeru·Sakaia, Akira·Sakata, Osami
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Abstract

We have introduced a CCD-type two-dimensional X-ray detector for a microbeam X-ray diffraction system using synchrotron radiation, so that we can measure local reciprocal space maps (RSM) of samples rapidly. A local RSM of a strain-relaxed SiGe 004 grown on a Si (001) substrate was measured in higher-angular-resolution and faster than a conventional way. The measurement was achieved in 1 h 40 min. with the 2theta resolution of 80 murad and the spatial resolution of 1.4(h)x0.5(v) {mu}m{sup 2}. The introduction of the CCD enabled us to measure RSMs at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high-angular- and high-spatial-resolution.

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36 MATERIALS SCIENCE46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITYBREMSSTRAHLUNGCHARGE-COUPLED DEVICESCOHERENT SCATTERINGCRYSTAL GROWTHCRYSTAL LATTICESCRYSTAL STRUCTUREDIFFRACTIONELECTROMAGNETIC RADIATIONELEMENTSGERMANIUM COMPOUNDSGERMANIUM SILICIDESMAPSPLATESRADIATIONSRESOLUTIONSCATTERINGSEMICONDUCTOR DEVICESSEMIMETALSSILICIDESSILICONSILICON COMPOUNDSSPATIAL RESOLUTIONSTRAINSSUBSTRATESSYNCHROTRON RADIATIONX-RAY DIFFRACTION

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BibTeXRIS

Imai, Yasuhiko, Kimura, Shigeru, Sakaia, Akira, Sakata, Osami. 2010-04-06. High-Angular-Resolution Microbeam X-Ray Diffraction with CCD Detector. https://doi.org/10.1063/1.3399252

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