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DOE OSTI · 2203635

Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing

Suratwala, T.·Ross, J.·Steele, R.·Tham, G.·Wong, L.·Wolfs, F.·Defisher, S.·Bechtold, R.·Rinkus, M.·Mah, C.
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Abstract

The tool influence function (TIF) during sub-aperture belt-on-wheel polishing has been evaluated as a function of various process conditions (belt use/wear, dwell time, displacement, belt velocity, and wheel modulus and diameter) on fused silica glass workpieces using C e O 2 polishing media. TIF spots are circular or elliptical in shape with a largely flat bottom character. Furthermore, the volumetric removal rate varies significantly with belt use (or wear), stabilizing after ~<!-- ~ --> 15 m i n of use. A modified Preston model, where the pressure dependence is adjusted using a different scaling of the wheel modulus ( E w 0.5 ), largely predicts the volumetric removal rate over the range of process conditions evaluated. The relatively high volumetric removal rate of 30 -<!-- - --> 60 m m 3 / h using a fixed C e O 2 -in-resin-host belt offers a rapid, and hence, more economical, initial polish of aspheric and freeform optics.

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71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

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Suratwala, T., Ross, J., Steele, R., Tham, G., Wong, L., Wolfs, F., Defisher, S., Bechtold, R., Rinkus, M., Mah, C.. 2022-12-16. Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing. https://doi.org/10.1364/ao.476547

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