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DOE OSTI · 22482093

Surface modifications with Lissajous trajectories using atomic force microscopy

Cai, Wei·Yao, Nan
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Abstract

In this paper, we report a method for atomic force microscopy surface modifications with single-tone and multiple-resolution Lissajous trajectories. The tip mechanical scratching experiments with two series of Lissajous trajectories were carried out on monolayer films. The scratching processes with two scan methods have been illustrated. As an application, the tip-based triboelectrification phenomenon on the silicon dioxide surface with Lissajous trajectories was investigated. The triboelectric charges generated within the tip rubbed area on the surface were characterized in-situ by scanning Kelvin force microscopy. This method would provide a promising and cost-effective approach for surface modifications and nanofabrication.

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71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICSATOMIC FORCE MICROSCOPYFABRICATIONFILMSNANOSTRUCTURESRESOLUTIONSILICON OXIDESSURFACESTRAJECTORIES

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Cai, Wei, Yao, Nan. 2015-09-14. Surface modifications with Lissajous trajectories using atomic force microscopy. https://doi.org/10.1063/1.4931087

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