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DOE OSTI · 22927483

Measurement Error of Interferometers with Diffraction Reference Wave

Akhsakhalyan, A. A.·Gavrilin, D. A.·Malyshev, I. V.·Salashchenko, N. N.·Ulasevich, B. A.·Tsybin, N. N.·Chkhalo, N. I.
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Abstract

An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.

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46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGYACCURACYAPERTURESDIFFRACTIONERRORSINTERFEROMETERSMINIMIZATIONOPTICAL FIBERSOPTICAL MODESOPTICSPRODUCTIONRECORDING SYSTEMSSPHERICAL CONFIGURATION

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Akhsakhalyan, A. A., Gavrilin, D. A., Malyshev, I. V., Salashchenko, N. N., Ulasevich, B. A., Tsybin, N. N., Chkhalo, N. I.. 2019-11-15. Measurement Error of Interferometers with Diffraction Reference Wave. https://doi.org/10.1134/s1063784219110021

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