DOE OSTI · 2431425
Large RF plasma data set for training plasma processing machine learning models
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Fierro, Andrew Steven, Hardin, Thomas James, Lietz, Amanda Marie, Hopkins, Matthew M., Belianinov, Alex Andrei, Bentz, Brian Zahler. 2023-05-01. Large RF plasma data set for training plasma processing machine learning models. https://doi.org/10.2172/2431425
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