FPAA-based control of a high-speed flexure-guided AFM nanopositioner

Khodabakhshi, Erfan (ORCID:0000000150457592); Moheimani, S. O. Reza (ORCID:0000000212254126)

doi:10.1016/j.mechatronics.2024.103268

DOE OSTI · 2478037

FPAA-based control of a high-speed flexure-guided AFM nanopositioner

Khodabakhshi, Erfan (ORCID:0000000150457592)·Moheimani, S. O. Reza (ORCID:0000000212254126)

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Khodabakhshi, Erfan (ORCID:0000000150457592), Moheimani, S. O. Reza (ORCID:0000000212254126). 2024-12-01. FPAA-based control of a high-speed flexure-guided AFM nanopositioner. https://doi.org/10.1016/j.mechatronics.2024.103268

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