A Physics-Informed Neural Network for Accurate Prediction of Sheath Plasma within Wall Bounded Devices

Osborne, Garrison Scott [SurfPlasma, Inc.] (ORCID:0009000648661467); Roy, Sarthak [SurfPlasma, Inc.] (ORCID:0009000407660201); Roy, Trisha [SurfPlasma, Inc.]; Roy, Subrata [SurfPlasma, Inc.] (ORCID:0000000223160854); McDevitt, Christopher [University of Florida] (ORCID:0000000236742909)

DOE OSTI · 3000474

A Physics-Informed Neural Network for Accurate Prediction of Sheath Plasma within Wall Bounded Devices

Osborne, Garrison Scott [SurfPlasma, Inc.] (ORCID:0009000648661467)·Roy, Sarthak [SurfPlasma, Inc.] (ORCID:0009000407660201)·Roy, Trisha [SurfPlasma, Inc.]·Roy, Subrata [SurfPlasma, Inc.] (ORCID:0000000223160854)·McDevitt, Christopher [University of Florida] (ORCID:0000000236742909)

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70 PLASMA PHYSICS AND FUSION TECHNOLOGY 97 MATHEMATICS AND COMPUTING Etching GPU High-performance Computing Ion Species Machine Learning Microelectronics Multiscale Modeling PINN Plasma Plasma Sheath Plasma-surface interactions Wafer

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Osborne, Garrison Scott [SurfPlasma, Inc.] (ORCID:0009000648661467), Roy, Sarthak [SurfPlasma, Inc.] (ORCID:0009000407660201), Roy, Trisha [SurfPlasma, Inc.], Roy, Subrata [SurfPlasma, Inc.] (ORCID:0000000223160854), McDevitt, Christopher [University of Florida] (ORCID:0000000236742909). 2025-10-31. A Physics-Informed Neural Network for Accurate Prediction of Sheath Plasma within Wall Bounded Devices. https://www.osti.gov/biblio/3000474

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