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DOE OSTI · 3365837

Pyrolyzed Carbon as a True Grayscale Mask

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Burckel, David Bruce [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000032222047X), Creason, Tielyr Dayne [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)], Kaehr, Bryan James [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000292277060). 2025-05-01. Pyrolyzed Carbon as a True Grayscale Mask. https://doi.org/10.2172/3365837

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