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At least 199 records · Page 11

Use of prismatic films to control light distribution

Piping light for illumination purposes is a concept which has been around for a long time. In fact, it was the subject of an 1881 United States patent which proposed the use of mirrors inside a tube to reflect light from wall to wall down the tube. The use of conventional mirrors for this purpose, however, has not worked because mirrors do not reflect well enough. On the other hand, optical fibers composed of certain glasses or plastics are known to transport light much more efficiently. The light that enters is reflected back and forth within the walls of the fiber until it reaches the other end. This is possible by means of a principle known as 'total internal reflection'. No light escapes through the walls and very little is absorbed in the bulk of the fiber. However, while optical fibers are very efficient in transporting light, they are impractical for transporting large quantities of light. Lorne Whitehead, as a student at the University of British Columbia, recognized that prismatic materials could be used to create a 'prism light guide', a hollow structure that can efficiently transport large quantities of light. This invention is a pipe whose transparent walls are formed on the outside into precise prismatic facets. The facets are efficient total internal reflection mirrors which prevent light travelling down the guide from escaping. Very little light is absorbed by the pipe because light travels primarily in the air space within the hollow guide. And, because the guide is hollow, weight and cost factors are much more favorable than would be the case with very large solid fibers. Recent advances in precision micromachining, polymer processing, and certain other manufacturing technologies have made the development of OLF (Optical Lighting Film) possible. The process is referred to as 'microreplication' and has been found to have broad applicability in a number of diverse product areas.

Kneipp, K. G.↗

Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications

The recent evolution of microelectronic technologies coupled with the growth of micro-electro-mechanical systems (MEMS) has had significant impact in the commercial sector. The focus of this conference was to anticipate and extend the incorporation of nano-electronics and MEMS into application specific integrated microinstruments (ASIM's) in space systems. Presentations ranged from mission application of nano-satellites to silicon micromachining for photonic applications.

Source record↗

Subminiaturization for ERAST instrumentation (Environmental Research Aircraft and Sensor Technology)

We are focusing on the Argus as an example to demonstrate our philosophy on miniaturization of airborne analytical instruments for the study of atmospheric chemistry. Argus is a two channel, tunable-diode laser absorption spectrometer developed at NASA for the measurement of nitrogen dioxide (N2O) (4.5 micrometers) and ammonia (CH3) (3.3 micrometers) at the 0.1 parts per billion (ppb) level from the Perseus aircraft platform at altitudes up to 30 km. Although Argus' mass is down to 23 kg from the 197 kg Atlas, its predecessor, our goal is to design a next-generation subminiaturized instrument weighing less than 1 kg, measuring a few cm(exp 3) and able to eliminate dewars for cooling. Current designs enable use to make a small,inexpensive, monolithic spectrometer without the required sensitivity range. Further work is on its way to increase sensitivity. We are continuing to zero-base the technical approach in terms of the specifications for the given instrument. We are establishing a check list of questions to hone into the best micromachining approach and to superpose on the answers insights in scaling laws and flexible engineering designs to enable more relaxed tolerances for the smallest of the components.

Madou, Marc↗

Advanced Modeling of Micromirror Devices

The flexure-beam micromirror device (FBMD) is a phase only piston style spatial light modulator demonstrating properties which can be used for phase adaptive corrective optics. This paper presents a complete study of a square FBMD, from advanced model development through final device testing and model verification. The model relates the electrical and mechanical properties of the device by equating the electrostatic force of a parallel-plate capacitor with the counter-acting spring force of the device's support flexures. The capacitor solution is derived via the Schwartz-Christoffel transformation such that the final solution accounts for non-ideal electric fields. The complete model describes the behavior of any piston-style device, given its design geometry and material properties. It includes operational parameters such as drive frequency and temperature, as well as fringing effects, mirror surface deformations, and cross-talk from neighboring devices. The steps taken to develop this model can be applied to other micromirrors, such as the cantilever and torsion-beam designs, to produce an advanced model for any given device. The micromirror devices studied in this paper were commercially fabricated in a surface micromachining process. A microscope-based laser interferometer is used to test the device in which a beam reflected from the device modulates a fixed reference beam. The mirror displacement is determined from the relative phase which generates a continuous set of data for each selected position on the mirror surface. Plots of this data describe the localized deflection as a function of drive voltage.

Michalicek, M. Adrian↗

Recent Developments in Microsystems Fabricated by the Liga-Technique

As an example of microsystems fabricated by the LIGA-technique (x-ray lithography, electroplating and molding), three systems are described and characterized: a triaxial acceleration sensor system, a micro-optical switch, and a microsystem for the analysis of pollutants. The fabrication technologies are reviewed with respect to the key components of the three systems: an acceleration sensor, and electrostatic actuator, and a spectrometer made by the LIGA-technique. Aa micro-pump and micro-valve made by using micromachined tools for molding and optical fiber imaging are made possible by combining LIGA and anisotropic etching of silicon in a batch process. These examples show that the combination of technologies and components is the key to complex microsystems. The design of such microsystems will be facilitated is standardized interfaces are available.

Schulz, J.↗

Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

Koester, D. A.↗

Surface Micro-Machining: Progress Towards Micro-Electro Mechanical Systems

Surface micromachining is a technique for building electromechanical systems in silicon. A number of electromechanical systems have been implemented in miniature using the fundamental structural building blocks of tensile and non-tensile springs, differential capacitance sensing cells, and electrostatic drive. The integration of complicated mechanical structures and electrical circuits onto a single chip is expected to improve reliability and testability of systems. Reduction in interconnect wiring, the increased use of automation, and the inherent reliability of integrated circuits will all contribute to increased reliability of systems.

Doscher, James↗

Thermal Switch for Satellite Temperature Control

An active radiator tile (ART) thermal valve has been fabricated using silicon micromachining. Intended for orbital satellite heat control applications, the operational principal of the ART is to control heat flow between two thermally isolated surfaces by bring the surfaces into intimate mechanical contact using electrostatic actuation. Prototype devices have been tested in a vacuum and demonstrate thermal actuation voltages as low as 40 volts, very good thermal insulation in the OFF state, and a large increase in radiative heat flow in the ON state. Thin, anodized aluminum was developed as a coating for high infrared emissivity and high solar reflectance.

Ziad, H.↗

Director's Discretionary Fund Report for Fiscal Year 1996

Topics covered include: Waterproofing the Space Shuttle tiles, thermal protection system for Reusable Launch Vehicles, computer modeling of the thermal conductivity of cometary ice, effects of ozone depletion and ultraviolet radiation on plants, a novel telemetric biosensor to monitor blood pH on-line, ion mobility in polymer electrolytes for lithium-polymer batteries, a microwave-pumped far infrared photoconductor, and a new method for measuring cloud liquid vapor using near infrared remote sensing. Also included: laser-spectroscopic instrument for turbulence measurement, remote sensing of aircraft contrails using a field portable imaging interferometer, development of a silicon-micromachined gas chromatography system for determination of planetary surface composition, planar Doppler velocimetry, chaos in interstellar chemistry, and a limited pressure cycle engine for high-speed output.

Source record↗

Development of High Temperature Gas Sensor Technology

The measurement of engine emissions is important for their monitoring and control. However, the ability to measure these emissions in-situ is limited. We are developing a family of high temperature gas sensors which are intended to operate in harsh environments such as those in an engine. The development of these sensors is based on progress in two types of technology: (1) The development of SiC-based semiconductor technology; and (2) Improvements in micromachining and microfabrication technology. These technologies are being used to develop point-contact sensors to measure gases which are important in emission control especially hydrogen, hydrocarbons, nitrogen oxides, and oxygen. The purpose of this paper is to discuss the development of this point-contact sensor technology. The detection of each type of gas involves its own challenges in the fields of materials science and fabrication technology. Of particular importance is sensor sensitivity, selectivity, and stability in long-term, high temperature operation. An overview is presented of each sensor type with an evaluation of its stage of development. It is concluded that this technology has significant potential for use in engine applications but further development is necessary.

Hunter, Gary W.↗

Chemical Gas Sensors for Aeronautic and Space Applications

Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Two areas of particular interest are safety monitoring and emission monitoring. In safety monitoring, detection of low concentrations of hydrogen at potentially low temperatures is important while for emission monitoring the detection of nitrogen oxides, hydrogen, hydrocarbons and oxygen is of interest. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: (1) Micromachining and microfabrication technology to fabricate miniaturized sensors. (2) The development of high temperature semiconductors, especially silicon carbide. The detection of each type of gas involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this general area of sensor development a field of significant interest.

Hunter, Gary W.↗

SiGe/Si Monolithically Integrated Amplifier Circuits

With recent advance in the epitaxial growth of silicon-germanium heterojunction, Si/SiGe HBTs with high f(sub max) and f(sub T) have received great attention in MMIC applications. In the past year, technologies for mesa-type Si/SiGe HBTs and other lumped passive components with high resonant frequencies have been developed and well characterized for circuit applications. By integrating the micromachined lumped passive elements into HBT fabrication, multi-stage amplifiers operating at 20 GHz have been designed and fabricated.

Katehi, Linda P. B.↗

Noncontact Acousto-Ultrasonics for Material Characterization

A NdYAG 1064 nm, laser pulse was employed to produce ultrasonic waves in specimens of SiC/SiC and SiC/Ti 6-4 composites which are high temperature materials of interest for aerospace applications. Air coupled transducers were used to detect and collect the signals used for acousto-ultrasonic analysis. Conditions for detecting ultrasonic decay signals were examined. The results were compared to those determined on the same specimens with contact coupling. Some non-contact measurements were made employing conventional air focused detectors. Others were performed with a more novel micromachined capacitance transducer. Concerns of the laser-in technology include potential destructiveness of the laser pulse. Repeated laser pulsing at the same location does lead to deterioration of the ultrasonic signal in some materials, but seems to recover with time. Also, unlike contact AU, the frequency regime employed is a function of laser-material interaction rather than the choice of transducers. Concerns of the air coupled-out technology include the effect of air attenuation. This imposes a practical upper limit to frequency of detection. In the case of the experimental specimens studied ultrasonic decay signals could be imaged satisfactorily.

Kautz, Harold E.↗

Chemical Gas Sensors for Aeronautic and Space Applications 2

Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.

Hunter, Gary W.↗

Low Power Polysilicon Sources for IR Applications

We have designed and fabricated polysilicon thin film infrared (IR) sources by micromachining technology. These sources are made with a lightly doped middle region for light emission and heavy doping of the supporting legs. The sources are fabricated on a 10 mm thick, low temperature process parameters in the fabrication of these silicon dioxide layer. Different doping levels were used to achieve various source resistances. From the power requirement to reach the required light emission versus source resistance curve it is seen that there exists a resistance value which minimizes the necessary input power.

Das, N. C.↗

Microfabricated Chemical Sensors for Safety and Emission Control Applications

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

Hunter, G. W.↗

Advanced Exploration Technologies: Micro and Nano Technologies Enabling Space Missions in the 21st Century

Some of the many new and advanced exploration technologies which will enable space missions in the 21st century and specifically the Manned Mars Mission are explored in this presentation. Some of these are the system on a chip, the Computed-Tomography imaging Spectrometer, the digital camera on a chip, and other Micro Electro Mechanical Systems (MEMS) technology for space. Some of these MEMS are the silicon micromachined microgyroscope, a subliming solid micro-thruster, a micro-ion thruster, a silicon seismometer, a dewpoint microhygrometer, a micro laser doppler anemometer, and tunable diode laser (TDL) sensors. The advanced technology insertion is critical for NASA to decrease mass, volume, power and mission costs, and increase functionality, science potential and robustness.

Krabach, Timothy↗

MEMS Rate Sensors for Space

Micromachined Electro Mechanical System Rate sensors offer many advantages that make them attractive for space use. They are smaller, consume less power, and cost less than the systems currently available. MEMS Rate Sensors however, have not been optimized for use on spacecraft. This paper describes an approach to developing MEMS Rate Sensors systems for space use.

Gambino, Joel P.↗