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Results for “microelectromechanical systems”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 253 records · Page 14

MEMS adaptive optics

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stroke actuator membrane transfer segmented space ↗

COTS MEMS

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MicroElectroMechanical Systems MEMS COTS technolog↗

Comparison of IC and MEMS packaging reliability approaches

This paper reviews the current status of IC and MEMS packaging technology with emphasis on reliability, compares the norm for IC packaging reliability evaluation and identifies challenges for development of reliability methodologies for MEMS, and finally, proposes the use of COTS MEMS in order to start generating statistically meaningful reliability data as a vehicle for future standardization of reliability test methodology for MEMS packaging.

microelectromechanical systems (MEMS) chip scale p↗

NEPP Cots Mems Programs

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COTS Microelectromechanical Systems MEMS reliabili↗

Isolated post resonator mesogyroscope

A new symmetric vibratory gyroscope principle has been devised in which a central post proof mass is counter-rocked against an outer sensing plate such that the motion is isolated from the gyroscope case. Prototype gyroscopes have been designed and fabricated with micromachined silicon at mesoscale (20-cm resonator width), vs. microscale (e.g., 2-mm resonator width) to achieve higher sensitivity and machined precision. This novel mesogyro design arose out of an ongoing technical cooperation between JPL and Boeing begun in 1997 to advance the design of micro-inertial sensors for low-cost space applications. This paper describes the theory of operation of the mesogyro and relationships with other vibratory gyroscopes, the mechanical design, closed loop electronics design, bulk silicon fabrication and packaged gyroscope assembly and test methods. The initial packaged prototype test results are reported for what is believed to be the first silicon mesogyroscope.

mesogyroscope↗

MEMS-Based Micro Instruments for In-Situ Planetary Exploration

NASA's planetary exploration strategy is primarily targeted to the detection of extant or extinct signs of life. Thus, the agency is moving towards more in-situ landed missions as evidenced by the recent, successful demonstration of twin Mars Exploration Rovers. Also, future robotic exploration platforms are expected to evolve towards sophisticated analytical laboratories composed of multi-instrument suites. MEMS technology is very attractive for in-situ planetary exploration because of the promise of a diverse and capable set of advanced, low mass and low-power devices and instruments. At JPL, we are exploiting this diversity of MEMS for the development of a new class of miniaturized instruments for planetary exploration. In particular, two examples of this approach are the development of an Electron Luminescence X-ray Spectrometer (ELXS), and a Force-Detected Nuclear Magnetic Resonance (FDNMR) Spectrometer.

micro instruments↗

Tuning of MEMS Devices using Evolutionary Computation and Open-loop Frequency Response

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

evolvable hardware↗

Evolutionary Computation Applied to the Tuning of MEMS Gyroscopes

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

evolvable hardware↗

Multi-Dimensional Sensors and Sensing Systems

A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.

Stetter, Joseph R.↗

Advanced Microgravity Acceleration Measurement Systems Being Developed

The Advanced Microgravity Acceleration Measurement Systems (AMAMS) project at the NASA Glenn Research Center is part of the Instrument Technology Development program to develop advanced sensor systems. The primary focus of the AMAMS project is to develop microelectromechanical (MEMS) acceleration sensor systems to replace existing electromechanical-sensor-based systems presently used to assess relative gravity levels aboard spacecraft. These systems are used in characterizing both vehicle and payload responses to low-gravity vibroacoustic environments. The collection of microgravity acceleration data has cross-disciplinary utility to the microgravity life and physical sciences and the structural dynamics communities. The inherent advantages of semiconductor-based systems are reduced size, mass, and power consumption, while providing enhanced stability.

Sicker, Ronald J.↗

Avionics for a Small Robotic Inspection Spacecraft

A report describes the tentative design of the avionics of the Mini-AERCam -- a proposed 7.5-in. (approximately 19-cm)-diameter spacecraft that would contain three digital video cameras to be used in visual inspection of the exterior of a larger spacecraft (a space shuttle or the International Space Station). The Mini-AERCam would maneuver by use of its own miniature thrusters under radio control by astronauts inside the larger spacecraft. The design of the Mini-AERCam avionics is subject to a number of constraints, most of which can be summarized as severely competing requirements to maximize radiation hardness and maneuvering, image-acquisition, and data-communication capabilities while minimizing cost, size, and power consumption. The report discusses the design constraints, the engineering approach to satisfying the constraints, and the resulting iterations of the design. The report places special emphasis on the design of a flight computer that would (1) acquire position and orientation data from a Global Positioning System receiver and a microelectromechanical gyroscope, respectively; (2) perform all flight-control (including thruster-control) computations in real time; and (3) control video, tracking, power, and illumination systems.

Abbott, Larry↗