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Molybdenum disulfide lubricant film is deposited on two substrates, niobium and nickel-chromium alloys, by means of physical direct-current sputtering. The sputtering system uses a three-electrode /triode/ geometry - a thermionic cathode, an anode, and the target, all enclosed in a vacuum chamber.
Sputtering technique uses pulsed high voltage direct current to the object to be plated and a radio frequency sputtered film source. Resultant film has excellent adhesion, and objects can be plated uniformly on all sides.
RF sputtering system and techniques for sputtering high ohms/square resistive films to form thin film resistors used in Apollo communication systems
Sputtered MoS2 films (2000-6500 A) were deposited on highly polished metal surfaces. These films have a low coefficient of friction (0.03-0.04) at speeds of 40-80 rpm and loads of 250-1000 grams. At loads of 250 grams, the wear lives are over 0.5 million cycles, but at 1000 gram loads, it decreases to 38,000 cycles. Friction experiments and tensile tests have indicated that sputtered films have a strong adherence to metal surfaces. Electron transmission, diffraction, and scanning electron microscopy show that these films have an extremely small particle size less than 30 A in diameter and are very dense and free from observable pinholes.
Electron diffraction patterns and electron micrographs of molybdenum disulfide films sputtered on single-NaCl-crystal and electropolished-aluminum substrates are presented as evidence that crystalline MoS2 films can be sputtered onto various substrates in thicknesses up to 2 microns. Applied to Falex test pins and V-blocks, some of these films exhibited a wear life as long as 65 minutes at 1000 lb jaw load.
A technique and instrument design for calorimetric detection of the neutral atom content of a 60 keV argon ion beam. A beam sampling method is used to measure local heat flux to a small platinum wire at steady state; integration of power density profiles leads to a determination of equivalent neutral beam current. The fast neutral production occurs as a result of charge transfer processes in the region of the beam system between analyzing magnet and beam stop where the pressure remains less than .00001 torr. A description of the neutral beam detector is given in section along with a presentation of results. An elementary analysis of sputter material transport from target to substrate was performed; the analysis relates to semiconductor sputtering.
It is shown experimentally that isoepitaxial growth of Ge films on Ge substrates can be obtained by dc sputtering at substrate temperatures as low as 100 C. The crystallographic structure and orientation of the films are strongly influenced by such deposition parameters as substrate temperature, growth rate, surface contamination, and sputtering-gas purity. The amorphous-polycrystalline transition occurs between 110 and 115 C, while the polycrystalline-single crystalline transition occurs at roughly 140 C. The crystallographic order increases with increasing substrate temperature.
A prerequisite for conducting valid corrosion experiments by in situ electron microscopy techniques is not only the achievement of UHV background pressure conditions at the site of the specimen but also the ability to clean the surface of the thin metal substrate specimen before initiation of the corrosive interaction. A miniaturized simple ion gun has been constructed for this purpose. The gun is small enough to be incorporated into an UHV electron microscope specimen chamber with hot stage in such a way as to permit bombardment of the substrate specimen while observing it by transmission electron microscopy TEM. It is shown that the ion beam generated is confined well enough to cause a sputtering removal of substrate material at a rate of approximately 5-10 A/min and to prevent the sputter deposition of contaminating material from the specimen holder.
Hydrogen ion irradiation of powdered igneous rocks, including Apollo rocks, has been observed in the laboratory to darken the powders and to make their optical properties similar to the moon's. An extensive series of investigations shows that this darkening is not spurious. These results are consistent with those of other investigators, including Nash (1967). Darkening of lunar igneous rock powders by the formation of solar wind-sputtered glass films is a real process which occurs on the moon. The time scale for darkening of undisturbed lunar soil is of the order of 50,000-100,000 yr. Comparison of the rates of the formation of glasses on the lunar surface by solar wind sputter-deposition, meteorite impact melting, and impact vaporization-deposition indicates that these processes are of comparable importance under the present flux of meteorites.
Sputter-deposited alloys of dispersion-hardenable Cu-0.25 vol% SiC and Cu-0.50 vol% SiC and precipitation-hardenable Cu-0.15 wt% Zr and Cu-0.05 wt% Mg-0.15 wt% Zr-0.40 wt% Cr were investigated for selection to evaluate fatigue specimen performance with potential application in fabricating regeneratively cooled rocket thrust chambers. Yield strengths in the 700 to 1000-MN/sq m range were observed with uniform elongation ranging from 0.5 to 1.5% and necking indicative of greater ductility. Electrical conductivity measured as an analog to thermal conductivity gave values 90% IACS for Cu-0.15 wt% Zr and Cu-0.05 wt% Mg-0.15 wt% Zr-0.40 wt% Cr. A 5500-g sputtered deposit of Cu-0.15 wt% Zr alloy, 12.29 mm (0.484 in.) average thickness in the fatigue specimen gage length, was provided to NASA on one of their substrates.
Dirty ice mantles are destroyed efficiently by sputtering of He atoms when clouds encounter shock velocities greater than 13-15 km/sec. Destruction due to grain-grain collisions is found to be about .001 times less efficient. Sputtering in the hot intercloud medium should make intercloud grains smaller than cloud grains.
Short-term tensile and low-cycle fatigue data are reported for five advance copper-base alloys: Sputtered Zr-Cu as received, sputtered Zr-Cu heat-treated, Glidcop AL-10, and NASA alloys 1-1A and 1-1B. Tensile tests were performed in argon at 538 C using an axial strain rate of 0.002/sec. Yield strength and ultimate tensile strength data are reported along with reduction in area values. Axial strain controlled low-cycle fatigue tests were performed in argon at 538C using an axial strain rate of 0.002/sec to define the fatigue life over the range from 100 to 3000 cycles for the five materials studied. It was found that the fatigue characteristics of the NASA 1-1A and NASA 1-1B compositions are identical and represent fatique life values which are much greater than those for the other materials tested. The effect of temperature on NASA 1-1B alloy at a strain rate of 0.002/sec was evaluated along with the effect of strain rates of 0.0004 and 0.01/sec at 538 C. Hold-time data are reported for the NASA 1-1B alloy at 538 C using 5 minute hold periods in tension only and compression only at two different strain range values. Hold periods in tension were much more detrimental than hold periods in compression.
A study was undertaken to investigate the sputtered efflux from 5-, 8-, and 30-cm diameter mercury ion thrusters. Quartz crystal microbalances and fused silica samples were used to analyze the sputtered flux. Spectral transmittance measurements and spectrographic analysis of the samples were made after they were exposed to different thruster effluence by operating the thrusters at various conditions and durations of time. These measurements were used to locate the source of the efflux and determine its accumulated effect at various locations near the thruster. Comparisons of in situ and ex situ transmittance measurements of samples exposed to thruster efflux are also presented.
A technique has been developed which uses spectral transmittance of samples exposed to thruster efflux to determine and characterize the effect of the efflux on spacecraft surfaces and optical devices. An investigation of facility backsputter revealed that efflux samples must be protected (e.g., by small shield boxes) from materials from tank walls and targets. The composition of the sputter efflux deposited on the samples was mostly molybdenum with trace amounts of tantalum, iron and/or mercury. The efflux from a 5-cm diameter thruster was deposited on samples located in the plane of the accelerator grid; the 8-cm diameter thruster efflux results showed that the location of ion beam sputtering and efflux deposition equilibrium occurred at 57 deg with respect to the thruster axis; and the 30-cm diameter thruster had an ion beam erosion-efflux deposition equilibrium at 45 deg.
Bulk-sputtered OFHC Cu and Cu-0.15 Zr used as inner walls of advanced regeneratively cooled thrust chambers are evaluated as to microstructure, surface topography, and fractography. It is found that under conditions of low substrate temperature, crystallite size and openness of the structure increase with increasing deposition rate for both materials. At elevated temperatures, an equiaxed ductile structure of OFHC Cu is produced only at low deposition rates; at higher deposition rate, open structures are observed with recrystallized equiaxed grains within large poorly bonded crystallites. The Cu-0.15 Zr alloy sputtered from the hollow cathode using a diode discharge shows open-type structures for all conditions evaluated. The use of a triode discharge in generating a dense non-voided structure of Cu-0.15 Zr is discussed.
The surface chemistry and texture of materials used for biological implants may significantly influence their performance and biocompatibility. Recent interest in the microscopic control of implant surface texture has led to the evaluation of ion beam sputtering as a potentially useful surface roughening technique. Ion sources, similar to electron bombardment ion thrusters designed for propulsive applications, are used to roughen the surfaces of various biocompatible alloys or polymer materials. These materials are typically used for dental implants, orthopedic prostheses, vascular prostheses, and artificial heart components. Masking techniques and resulting surface textures are described along with progress concerning evaluation of the biological response to the ion beam sputtered surfaces.
This paper discusses conditions and results of several tests of a DC sputtered MoS2 dry lubricant film. The test components were miniature precision ball bearings and rings and blocks; the surrounding atmospheres were laboratory air, pure helium, vacuum to 10 to the -8th power torr, and a perfluoroalkylpolyether oil. The results showed that the lubricant would perform satisfactorily under lightly loaded (450 gm) ball bearings in vacuum and would not perform well under a 66-kg load in air, a 132-kg load in helium, or a 330-kg load under oil. These tests and others show that the sputtered MoS2 film has some desirable features for space applications as well as some definite limitations.
Ion-beam sputtering, fabrication of oxide-semiconductor-on-silicon (OSOS) solar cells, results in cells of 12% efficiency. Ion-beam sputtering technique is compatible with low-cost continuous fabrication and requires no high-temperature processing.