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781 records · Page 19

Demonstration of gold nanorod systems for enhanced total efficiency: Experimental and numerical analysis

This study investigates the photothermal performance of gold nanorods engineered to exhibit longitudinal plasmon resonances at 695 nm, 780 nm, and 970 nm. The work combines synthesis, structural characterization, extinction measurements, numerical modeling, and controlled temperature experiments to quantify how nanorod geometry, resonance tuning, concentration, and chamber shape jointly influence heat generation. Transmission electron microscopy confirms that increasing nanorod aspect ratio systematically shifts the longitudinal plasmon peak toward the near-infrared region. Extinction measurements show strong agreement with theoretical predictions, validating the numerical model across two independent datasets. Three chamber geometries were tested under laser excitation at 640 nm, 808 nm, and 980 nm: an ascending stepped base, a flat base, and a descending stepped base. Without nanorods, the ascending geometry produced the highest efficiency due to enhanced natural convection. After introducing gold nanorods, all geometries exhibited substantial thermal enhancement, with total efficiencies exceeding 20%. The strongest improvement was obtained for nanorods resonant at 780 nm with a mass concentration of 4.6 mg/mL implemented on the descending stepped-base geometry. This performance resulted from the combined effect of spectral overlapping with the 808 nm laser, the highest nanorod concentration, and localized heat accumulation that intensified buoyancy-driven flow. The findings demonstrate that total efficiency is governed by a synergistic interplay between optical resonance, nanoparticle concentration, and macroscopic chamber design, revealing the system-level coupling between nanoscale plasmonic absorption and macroscale heat-transfer phenomena. The results provide a validated framework for tuning nanoscale plasmonic absorbers and optimizing thermal systems for applications requiring efficient light-to-heat conversion.

77 NANOSCIENCE AND NANOTECHNOLOGY

Electronic structure of the kagome compound CaTi 3⁢ Bi 4 using high-field torque magnetometry and density functional theory

Here, we report systematic torque magnetometry measurements to investigate the electronic properties of the newly discovered kagome compound CaTi 3 ⁢Bi 4 . Electrical transport, magnetic susceptibility, and thermal measurements reveal no evidence of a magnetic ground state in this material. Torque data obtained in magnetic fields up to 41.5 T exhibit clear de Haas–van Alphen (dHvA) oscillations, with nine distinct frequencies ranging from 13 to 6164 T. Angular-dependent dHvA measurements show that, with the exception of the lowest frequency (13 T), all observed frequencies nearly follow a 1/cos ⁡𝜃 dependence, where 𝜃 is the angle between the crystallographic 𝑐 axis and the magnetic field direction. This behavior is characteristic of quasi-two-dimensional Fermi-surface sheets with nearly circular cross sections. To further elucidate the electronic structure, we performed density functional theory (DFT) calculations of the band structure and Fermi surface. The calculated bands reveal the presence of multiple Dirac points (DP), flat bands (FB), and van Hove singularities (VHS) near the Fermi level. The resulting Fermi surface consists of several quasi-two-dimensional cylindrical sheets, consistent with the experimentally observed 1/cos⁡ 𝜃 dependence. Notably, the theoretical dHvA frequencies, derived from extremal Fermi-surface cross-sectional areas, agree well with the experimental values and reproduce their angular dependence. Remarkably, all experimentally observed frequencies are captured by the DFT predictions. Pressure-dependent calculations up to 10 GPa show that the electronic features—DP, FB, and VHS—evolve systematically with pressure. In particular, the VHS shifts closer to the Fermi level, demonstrating that pressure acts as an effective tuning parameter in this material. These combined experimental and theoretical results provide a comprehensive understanding of the electronic structure of CaTi 3 ⁢Bi 4 and demonstrate how pressure can be used to tune its key electronic features, offering valuable guidance for exploring related kagome materials.

Shtefiienko, Kyryl [West Texas A & M University, C

Healable Coatings as a Mechanism to Repair Leading Edge Erosion in Wind Energy

Wind turbine blades are highly engineered structures designed to face temperature extremes and high winds. However, erosion of the blade's leading edge and subsequent repair remains a significant and costly challenge for the wind energy industry. Repair of these leading edges can lead to large amounts of downtime for the turbine and significant operational inefficiencies. In this work, the strength of adhesion and healing ability of a commercially available vitrimer (Mallinda's VITRIMAX) was compared to that of a thermoplastic resin, which has previously been demonstrated in wind energy applications (Arkema's Elium) to evaluate their efficacy as surface coatings for wind turbine blades, particularly their leading edges. Vitrimers are a class of inherently reprocessable thermosets, and it was theorized that vitrimer-based leading edge coatings could enable more robust and efficient wind turbine blades with decreased operational downtime and safer maintenance practices. It was found that the VITRIMAX adhered better to the wind blades' surfaces than both the manufacturer's paint and Elium, with increases in pull-off strength of adhesion ranging from 24% to 83% above that of the original paint. Furthermore, the VITRIMAX adhered strongly to the underlying composite of each blade with strength of adhesion values increasing in ranges from 42% to 97% above that of the original paint. Finally, the vitrimer coating showed an 88% decrease in surface roughness compared to end-of-life blade materials, and initial healing demonstrations in which coatings were manually scratched and subsequently healed exhibited an ~84.5% decrease in scratch depths.

Hubbard, Amber [ORNL]

Stellar Population Properties in the Stellar Streams around SPRC047

Abstract We have investigated the properties (e.g., age, metallicity) of the stellar populations of a ringlike tidal stellar stream (or streams) around the edge-on galaxy SPRC047 (z= 0.031) using spectral energy distribution (SED) fits to integrated broadband aperture flux densities. We used visual images in six different bands and Spitzer/IRAC 3.6μm data. We have attempted to derive best-fit stellar population parameters (metallicity, age) in three noncontiguous segments of the stream. Due to the very low surface brightness of the stream, we have performed a deconvolution with a Richardson–Lucy–type algorithm of the low spatial resolution 3.6μm IRAC image, thereby reducing the effect of the point-spread function aliasedemissionfrom the bright edge-on central galaxy at the locations of our three stream segments. Our SED fits that used several different star formation (SF) history priors, from an exponentially decaying SF burst to continuous SF, indicate that the age–metallicity–dust degeneracy is not resolved, most likely because of inadequate wavelength coverage and low signal-to-noise ratios of the low surface brightness features. We also discuss how future deep visual–near-infrared observations, combined with absolute flux calibration uncertainties at or below the 1% level, complemented by equally well absolute flux-calibrated observations in ultraviolet and mid-infrared bands, would improve the accuracy of broadband SED fitting results for low surface brightness targets, such as stellar streams around nearby galaxies that are not resolved into stars.

Astronomy & Astrophysics

Reanalysis of the Apollo Cosmic Gamma-Ray Spectrum in the 0.3 to 10 Mev Energy Region

Additional data obtained from the Apollo 16 and 17 missions, together with collateral calculations on background radiation effects, have made possible an improved subtraction of unwanted backgrounds from the diffuse cosmic gamma ray data previously reported from Apollo 15. As a result, the 1 to 10 MeV spectrum is lowered significantly and connects smoothly with recent data at other energies. The inflection reported previously is much less pronounced and has no more than 1.5 sigma significance. Sky occultation by the Apollo 16 spacecraft shows the bulk of the 0.3 to 1 MeV radiation to be diffuse. The analysis of spurious backgrounds points to important improvements for future experiments designed for this spectral region. A light-weight satellite design can give a fourfold improvement in the signal to noise for such a measurement. Use of an anisotropic central crystal, which spins quickly compared with possible time variations in detector background, would enable sensitive limits to be set on galactic plane and point source contributions.

C S Dyer

Exploring the Model Design Space for Battery Health Management

Battery Health Management (BHM) is a core enabling technology for the success and widespread adoption of the emerging electric vehicles of today. Although battery chemistries have been studied in detail in literature, an accurate run-time battery life prediction algorithm has eluded us. Current reliability-based techniques are insufficient to manage the use of such batteries when they are an active power source with frequently varying loads in uncertain environments. The amount of usable charge of a battery for a given discharge profile is not only dependent on the starting state-of-charge (SOC), but also other factors like battery health and the discharge or load profile imposed. This paper presents a Particle Filter (PF) based BHM framework with plug-and-play modules for battery models and uncertainty management. The batteries are modeled at three different levels of granularity with associated uncertainty distributions, encoding the basic electrochemical processes of a Lithium-polymer battery. The effects of different choices in the model design space are explored in the context of prediction performance in an electric unmanned aerial vehicle (UAV) application with emulated flight profiles.

Saha, Bhaskar

Activating magnetite ores for aqueous ironmaking at high current densities

Low-temperature electrochemical cells reducing iron oxides to metal in alkaline electrolytes can support fully electrified steelmaking processes. Previous studies on these cells have primarily focused on high-surface-area hematite, Fe 2 O 3 , reactants whereas attempts to reduce suspensions of magnetite, Fe 3 O 4 —one of the two feedstocks for existing ironmaking reactors—have generally been limited to low rates of reaction (<30 mA cm −2 ). Here, in this study, we control the crystalline domain size of Fe 2 O 3 and Fe 3 O 4 particles in 10 M NaOH electrolytes to study how the nanoscale morphology of oxides controls the rate of electrochemical ironmaking. Rotating-ring disk electrode measurements of Fe 2+ , in situ Raman spectroscopy of the electrode surface, and ex situ electron microscopy were consistent with a hypothesized passivation process at Fe 3 O 4 surfaces that may prevent the continuous formation of soluble intermediates. Sufficiently small (<100 nm diameter) oxide particles yielded Fe partial current densities >160 mA cm −2 , a fivefold increase relative to previously reported rates for Fe 3 O 4 suspensions and comparable to active Fe 2 O 3 . Electron microscopy revealed that electrodeposited films were composed of micron-scale crystalline Fe domains with a porous film of Fe 3 O 4 nanoparticles and supports a model where Fe is grown primarily from soluble Fe 2+ intermediates. Based on these insights, inactive blast-furnace-grade iron-oxides were transformed into high surface area nanoparticles (1.6 to 229.2 m 2 g −1 ) via reprecipitation, leading to a ninefold enhancement in faradaic efficiency and an Fe partial current density of 120 mA cm −2 . When integrated with chlor-iron cells producing reagents for reprecipitation, this approach could lead to a cost-competitive process for electrochemical ironmaking from industrially relevant feedstocks.

TEM

A Case Study of AI-assisted Creation of a Thermodynamics Model of Precipitation Formation During Rapid Depressurization of a Vented Container

Precipitation may form in humid containers undergoing rapid depressurization. This precipitation may be liquid, i.e. fog, if the dewpoint is crossed above the freezing point of water, or direct snow crystallization if the dewpoint is crossed below the freezing point. Accurate modeling of this effect is potentially important for rapidly ascending vented containers in aircraft, spacecraft, and launch vehicles, as well as rapidly depressurizing vacuum chambers. A transient thermodynamics model of precipitation formation during the rapid depressurization of a container was developed in python. The model is written for a generic container and includes an optional water pool and water vapor source. Details of the model and results from several example cases spanning the full capabilities of the model, including a validation case, will be presented. Although the model is not novel, in contrast to prior works, this one was treated as a case study of the assistance of AI Large Language Models (LLMs) to create physical models. Impressions, performance, time, and cost of using AI for this task will be discussed.

precipitation

Using Open Innovation in Reducing Risk to Crews

In the exploration of destinations outside of Earth's neighborhood, specifically Mars, scientific and engineering inquiries have occurred by two means; observations from satellites and observations by landed spacecraft. Satellite observations (Mariner, MRO, Mars Odyssey, provide global-scale spatial and temporal data while landed spacecraft (Viking, Mars Pathfinder, Spirit, Opportunity, Phoenix Mars Lander) investigate highly localized areas of the surface of the planet. In preparation for human exploration, extensive knowledge of the surface and atmospheric environments should be known before the first human leaves Earth. The primary goal of performing reconnaissance on Mars on a sub-global scale is to know as much as possible about the environment to which crews will be subjected. At the current rate of launching and landing probes to Mars, it will take a very long time to understand the surface and atmospheric conditions associated with the regions where prospective crews may land. Meanwhile electronics and electrical systems are rapidly getting smaller. One can argue that to acquire the knowledge of the region, one must take hundreds, maybe thousands of measurements simultaneously. One means to perform such a task is to deploy a swarm of sensors. Such a swarm would perform an in-situ assessment of the region. Imagine a close flyby mission to Mars for example, where mini- to micro-sensors are deposited into the atmosphere over half an orbit or more. The sensors, captured by the atmospheric drag and Martian gravity slowly descend buffeted about by Martian winds and weather until they settle on the surface a great time later (think of how long dust takes to settle). As they descend they communicate a vast array of data; temperature, chemistry, pressure, radiation dose, electric or magnetic properties from a region of the planet and an individual sensor need not measure the same quantity as its neighbors. Initially, they could move at the whim of the environment but later versions could have locomotion or propulsion mechanisms. Humans wouldn't need to decide where the sensors go, the sensors do that for themselves. This is a key strength of a sensor swarm. The intelligence relies on the group not on a decision maker on earth. Real time sensor inputs direct what the swarm considers most interesting to investigate resulting in emergent behavior. We issued a $20,000 challenge to the global innovators to provide solutions as to how such a swarm could be initialized and by what protocols and methodologies by which they operate. Over 400 innovators from 49 countries took a look at the problem, with three receiving partial awards for solutions.

Mel Ferebee

Surveyor Project Final Report: Part 1 - Project Description and Performance, Volume 1

The Surveyor Project planned and conducted seven unmanned lunar missions for which spacecraft were launched between May 1966 and January 1968. Each of the spacecraft was successfully launched with the then newly developed Atlas/Centaur vehicle which utilized for the first time a high-specific-impulse, liquid hydrogen/liquid oxygen fueled stage. Five of the spacecraft successfully soft-landed and returned a great quantity of engineering and scientific data on extensive postlanding operations, accomplishing all mission and project objectives. Four of the spacecraft soft-landed at selected mare sites to provide data which were required to support the Apollo Program. The final spacecraft was then successfully used for scientific investigation of a contrasting site in the rugged lunar highlands. Surveyor was a fully attitude-stabilized spacecraft designed to receive and execute a wide variety of earth commands, as well as to perform certain automatic functions including the critical terminal-descent and soft-landing sequences. Significant new and advanced subsystems that were developed and/or used in combination to enable Surveyor to execute the complex terminal phase of flight were: (1) a solid-propellant main retro motor, (2) throttlable liquid-propellant vernier engines (also used for midcourse velocity correction), (3) highly sensitive velocity- and altitude-sensing radars, and (4) an automatic closed-loop guidance and control system. The first Surveyor spacecraft carried a survey television camera which, together with other engineering instrumentation, obtained in-flight and postlanding data. The complement of instruments carried on later missions included various combinations of the following additional devices: (1) a soil mechanics/surface sampler instrument for picking, digging, and handling lunar surface material; (2) an alpha scattering instrument for performing a chemical analysis of the lunar surface material; and (3) magnets attached to the spacecraft for determining magnetic properties of the soil.

Jet Propulsion Laboratory

Surveyor Project Final Report: Part 1 - Project Description and Performance, Volume 2

The Surveyor Project planned and conducted seven unmanned lunar missions for which spacecraft were launched between May 1966 and January 1968. Each of the spacecraft was successfully launched with the then newly developed Atlas/Centaur vehicle which utilized for the first time a high-specific-impulse, liquid hydrogen/liquid oxygen fueled stage. Five of the spacecraft successfully soft-landed and returned a great quantity of engineering and scientific data on extensive postlanding operations, accomplishing all mission and project objectives. Four of the spacecraft soft-landed at selected mare sites to provide data which were required to support the Apollo Program. The final spacecraft was then successfully used for scientific investigation of a contrasting site in the rugged lunar highlands. Surveyor was a fully attitude-stabilized spacecraft designed to receive and execute a wide variety of earth commands, as well as to perform certain automatic functions including the critical terminal-descent and soft-landing sequences. Significant new and advanced subsystems that were developed and/or used in combination to enable Surveyor to execute the complex terminal phase of flight were: (1) a solid-propellant main retro motor, (2) throttlable liquid-propellant vernier engines (also used for midcourse velocity correction), (3) highly sensitive velocity- and altitude-sensing radars, and (4) an automatic closed-loop guidance and control system. The first Surveyor spacecraft carried a survey television camera which, together with other engineering instrumentation, obtained in-flight and postlanding data. The complement of instruments carried on later missions included various combinations of the following additional devices: (1) a soil mechanics/surface sampler instrument for picking, digging, and handling lunar surface material; (2) an alpha scattering instrument for performing a chemical analysis of the lunar surface material; and (3) magnets attached to the spacecraft for determining magnetic properties of the soil.

Jet Propulsion Laboratory

Swamp Works Regolith Compaction Technologies

While the level of compaction below the lunar surface increases quickly after only a few cm of depth, in many cases during a construction mission there will be a need to excavate and transport regolith to a new location for cut-and-fill or horizontal construction of structures such as berms. In these cases to achieve high levels of bulk density, compaction must be per-formed. Additionally, in some cases surface technologies such as systems that sinter/melt the surface may desire the maximum possible compaction at the sur-face to improve melting/heating performance and the final material strength properties. Kennedy Space Center’s (KSC) Swamp Works has developed two means of compaction, lunar and mar-tian compaction. Planetary Autonomous Compaction Technology (PACT) which is part of the Multifunction End Effector for Regolith Compaction Acquisition and Transfer (MEERCAT) robotic arm end effector system’s capabilities and the Site Preparation Tooling for Operations on Mobility Platforms (STOMP) vibratory roller compactor. PACT on MEERCAT has been demonstrated to a TRL 5 and STOMP to a TRL 4 in ambient testing. The results of PACT on MEERCAT and STOMP testing will be shared with results for various simulants including BP-1, ICN-LHT-1G (aka CSM-LHT-1G), RDW-LHT-1GH (a simulant developed for the Mason Tipping Point to match characteristics of ICN-LHT-1G), and Exolith LHS-1E. This will also include discussions on methods used to verify relative density before and after compaction and means to verify density effects below depth. To calculate relative density, maximum and minimum densities for simulants were taken from literature and additional lab testing (publication in work).

redwire

Design of a Cryogenic Assembly for Comparing Qubit Infrared Packaging Inefficiencies

It is well known that everything emits infrared (IR) light in the form of thermal radiation. IR radiation on superconducting qubits carries enough energy to cause decoherence and so-called “quasiparticle poisoning.” Therefore, proper IR shielding is needed to keep the qubit in a high coherence state. However, trying to extract IR-specific information from a qubit is difficult, so a microwave kinetic inductance detector (MKID) can be used instead. We show that the IR shielding inefficiencies of MKID packages can only be compared with other packaging inefficiencies. We create a cryogenic assembly CAD design, consisting of magnetic shield cans, a copper mounting plate and mounts, and an MKID enclosure, which thermalizes the assembly to dilution refrigerator temperatures. Phase 1 of this design involves using a narrowband IR laser source to test the IR shielding of packaging at the laser’s wavelength. When the best IR shielding packaging is determined, the superconducting qubit can replace the MKID, allowing the qubit to avoid decoherence due to IR radiation and boost its performance and coherence lifetime.

Mailliard, Robert J. [Fermilab] (ORCID:00090000277

The glass-ceiling convective regime and the origin and diversity of coronae on Venus

Venus and Earth are rocky planets of roughly the same size and bulk density, yet their surface volcanic and tectonic features appear substantially different. On Venus, the coexistence of large volcanic highlands—interpreted as the surface expression of long-lived mantle plumes—alongside coronae, smaller features thought to be caused by transient thermal diapirs, remains enigmatic. Using two-dimensional numerical models of mantle convection with sharp and broad mineral phase transitions for pyrolite, we show that both scales of upwellings can be generated in a stagnant lid planet with an interior temperature 250 to 400 K warmer than Earth’s. The smaller plumes originate from a ~600 km deep internal layer that exists as a consequence of the different sequence of mineral phase transitions that occur in warmer mantles less processed and differentiated by partial melting and volcanism. Future models that include melting will provide further tests of our hypothesis.

Science & Technology - Other Topics

Photophoretic Propulsion Enabling Mesosphere Exploration NIAC Phase I Final Report

This Phase I report presents a comprehensive study on photophoretic flyers—innovative, ultralight, solar-powered vehicles that harness photophoretic forces generated via Knudsen pumping to achieve sustained flight in the mesosphere (50–80 km altitude). By integrating advanced materials such as nanocardboard— characterized by its extremely low areal density (~1 g/m²) and high bending stiffness—with ultrathin light-absorbing coatings, the project converts incident solar radiation directly into a directed thrust. Extensive experimental investigations, coupled with high-fidelity computational fluid dynamics (CFD) simulations using ANSYS Fluent, validate the concept across various three-dimensional geometries, including spherical, conical, and rocket-shaped configurations. These simulations bridge the gap between free-molecular and continuum flow regimes, demonstrating that optimized designs can generate lift forces sufficient to support kilogram-scale payloads even in low-pressure environments. At the heart of this innovation is the use of Knudsen pumping, where temperature gradients across porous surfaces induce directional gas flow, creating a modest overpressure that provides lift. The report introduces an analytical framework that interpolates between the well-known low-Reynolds number drag regime and the high-Reynolds number momentum theory. This model accurately predicts lift based on design parameters such as microchannel dimensions, porous wall geometry, areal density, and nozzle exit area. For instance, simulations indicate that 10-meter-scale structures with carefully engineered porous walls can achieve the necessary pressure differential to support scientifically significant payloads (~1 kg). The study also explores a hybrid propulsion approach that combines solar buoyancy with photophoretic lift. Initially, solar heating creates a buoyant force that elevates the flyer to mesospheric altitudes. Once in the optimal pressure range, the photophoretic mechanism—powered by Knudsen pumping—takes over as the primary source of lift, ensuring stable, long-duration flight. This dual-mode operation not only facilitates the deployment of photophoretic flyers but also broadens the potential applications for mesospheric exploration. In addition to propulsion, the report investigates the integration of photophoretic thrusters for trajectory control of existing research balloons in the upper stratosphere. By dynamically adjusting the nozzle orientation and controlling the flow-through velocity, these thrusters provide precise maneuverability, enabling the flyers to counteract atmospheric disturbances and adjust their flight paths in real time. For example, a photophoretic thruster approximately 7.5 by 7.5 meters in size could be unfolded below a payload gondola of a 60 million-cubic-foot zero-pressure balloon. Such a thruster can provide horizontal speed control of approximately 1 m/s using only sunlight and no moving parts (except those needed to track the Sun and control the jet direction). Importantly, photophoretic thrusters operate more efficiently at higher altitudes, which is complementary to known trajectory control techniques, such as propellers and tethered wings, which are more effective at lower altitudes. Finally, the report identifies three scientific research thrusts where mesospheric aircraft technology can have a profound impact: atmospheric tides, characterization of gravity waves, and investigation of mesospheric instabilities. Overall, the findings of this Phase I project represent a significant advancement in photophoretic propulsion technology. By demonstrating that large-scale, ultralight structures can be powered solely by solar radiation—via carefully engineered Knudsen pumping—this work lays a robust foundation for scalable, near-space flight architectures. Future refinements in material fabrication, structural optimization, and integrated trajectory control are expected to further enhance performance, paving the way for operational demonstrations that could revolutionize atmospheric science, remote sensing, and communication networks.

Knudsen Pump

Swamp Works Regolith Compaction Technologies

While the level of compaction below the lunar surface increases quickly after only a few cm of depth, in many cases during a construction mission there will be a need to excavate and transport regolith to a new location for cut-and-fill or horizontal construction of structures such as berms. In these cases to achieve high levels of bulk density, compaction must be per-formed. Additionally, in some cases surface technolo-gies such as systems that sinter/melt the surface may desire the maximum possible compaction at the sur-face to improve melting/heating performance and the final material strength properties. Kennedy Space Center’s (KSC) Swamp Works has developed two means of compaction, lunar and mar-tian compaction. Planetary Autonomous Compaction Technology (PACT) which is part of the Multifunction End Effector for Regolith Compaction Acquisition and Transfer (MEERCAT [1]) robotic arm end effector system’s capabilities and the Site Preparation Tooling for Operations on Mobility Platforms (STOMP [2]) vibratory roller compactor. PACT on MEERCAT has been demonstrated to a TRL 5 and STOMP to a TRL 4 in ambient testing. The results of PACT on MEERCAT and STOMP testing will be shared with results for various simulants including BP-1, ICN-LHT-1G (aka CSM-LHT-1G), RDW-LHT-1GH (a simulant developed for the Mason Tipping Point to match characteristics of ICN-LHT-1G), and Exolith LHS-1E. This will also include discus-sions on methods used to verify relative density before and after compaction and means to verify density effects below depth. To calculate relative density, maximum and minimum densities for simulants were taken from literature [3] [4] [5] and additional lab test-ing (publication in work).

vibration

Low thermal budget dopant activation in shallow junctions of implanted Si via Tunable plasma enhanced annealing

Low thermal budget (LTB) annealing has become increasingly critical for shallow junctions as semiconductor devices are scaled down. Plasma Enhanced Annealing (PEA) has emerged as a promising LTB annealing process, however its mechanisms remain unclear. In this study, arsenic and boron implanted silicon wafers were subjected to helium or argon ion bombardment generated by annealing plasmas under controlled ion energies and doses in a home-built annealing reactor. The structural and electrical changes were characterized by four-point probe measurements, secondary ion mass spectrometry, Raman spectroscopy and spectroscopic ellipsometry. A pronounced reduction in sheet resistance, accompanied by a decrease in the damage layer thickness demonstrates the surface selective annealing capability of PEA process. Comparative studies using He and Ar plasmas and related ion bombardment reveal a dependence of activation efficacy on both ion species and the dopant implantation profile. Furthermore, a multi-step annealing mechanism is proposed, consisting of an initial (low dose) structural recovery stage followed by the generation of “extended” defects and concluded at large doses by an enhanced dopant activation. The proposed annealing kinetics are thought to be controlled by ion flux, dose and energy. Finally, these results highlight PEA as an effective, surface-selective, LTB approach for shallow-dopant activation and near surface annealing, and provide mechanistic insights into PEA processes.

dopant activation