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DOE OSTI2023

Quantum bath augmented stochastic nonequilibrium atomistic simulations for molecular heat conduction

Classical molecular dynamics (MD) has been shown to be effective in simulating heat conduction in certain molecular junctions since it inherently takes into account some essential methodological components which are lacking in the quantum Landauer-type transport model, such as many-body full force-field interactions, anharmonicity effects and nonlinear responses for large temperature biases. However, the classical MD reaches its limit in the environments where the quantum effects are significant (e.g. with low-temperatures substrates, presence of extremely high frequency molecular modes). Here, we present an atomistic simulation methodology for molecular heat conduction that incorporates the quantum Bose–Einstein statistics into an “effective temperature” in the form of a modified Langevin equation. We show that the results from such a quasi-classical effective temperature MD method deviates drastically when the baths temperature approaches zero from classical MD simulations and the results converge to the classical ones when the bath approaches the high-temperature limit, which makes the method suitable for full temperature range. In addition, we show that our quasi-classical thermal transport method can be used to model the conducting substrate layout and molecular composition (e.g. anharmonicities, high-frequency modes). Anharmonic models are explicitly simulated via the Morse potential and compared to pure harmonic interactions to show the effects of anharmonicities under quantum colored bath setups. Finally, the chain length dependence of heat conduction is examined for one-dimensional polymer chains placed in between quantum augmented baths.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2025

Electron–positron pair annihilation in kinetic plasma

The process of electron–positron pair annihilation, driven by strong fields (inverse Schwinger mechanism) and high-frequency waves, is studied using the Dirac–Heisenberg–Wigner formalism. In an electron–positron plasma, the presence of a strong field leads to both pair creation and annihilation. Depending on plasma properties such as non-degeneracy and the momentum distribution, pair annihilation can dominate over pair creation. The energy released from annihilated pairs can lead to an enhancement of the field energy, provided that the plasma effectively blocks the creation of new pairs. Additionally, pair annihilation induced by high-frequency waves is shown to occur when the photon energy matches the energy of the pairs in the plasma.

Al-Naseri, Haidar [SLAC National Accelerator Labor↗

DOE OSTI2022

Seeking Repeating Anthropogenic Seismic Sources: Implications for Seismic Velocity Monitoring at Fault Zones

Abstract Seismic velocities in rocks are highly sensitive to changes in permanent deformation and fluid content. The temporal variation of seismic velocity during the preparation phase of earthquakes has been well documented in laboratories but rarely observed in nature. It has been recently found that some anthropogenic, high‐frequency (>1 Hz) seismic sources are powerful enough to generate body waves that travel down to a few kilometers and can be used to monitor fault zones at seismogenic depth. Anthropogenic seismic sources typically have fixed spatial distribution and provide new perspectives for velocity monitoring. In this work, we propose a systematic workflow to seek such powerful seismic sources in a rapid and straightforward manner. We tackle the problem from a statistical point of view, considering that persistent, powerful seismic sources yield highly coherent correlation functions (CFs) between pairs of seismic sensors. The algorithm is tested in California and Japan. Multiple sites close to fault zones show high‐frequency CFs stable for an extended period of time. These findings have great potential for monitoring fault zones, including the San Jacinto Fault and the Ridgecrest area in Southern California, Napa in Northern California, and faults in central Japan. However, extra steps, such as beamforming or polarization analysis, are required to determine the dominant seismic sources and study the source characteristics, which are crucial to interpreting the velocity monitoring results. Train tremors identified by the present approach have been successfully used for seismic velocity monitoring of the San Jacinto Fault in previous studies.

58 GEOSCIENCES↗

DOE OSTI2026

Measurement of Local Impedance Characteristics of In-Plane PEM Electrolyzer Component Features via Segmented Cell

Segmented cells are a class of advanced diagnostic devices that enable the measurement of current distribution within the active area of an electrochemical cell, allowing for the evaluation of localized impacts from operating conditions, flow fields and component inhomogeneities. Segmented cell devices have been applied to support R&D efforts for the advancement of polymer electrolyte membrane fuel cell technologies and more recently proton exchange membrane water electrolysis (PEMWE). Beyond current density distributions, segmented cells have been successfully deployed to collect the distribution of other relevant parameters such as high frequency resistance and electrode potentials. Very recently, a promising impedance method has been reported for water electrolysis where a one-dimensional segmented cell is coupled to a multichannel potentiostat, to enable the measurement of local cell impedances, further expanding the diagnostic capabilities of the segmented cell. In this study, we will present recent efforts to accurately measure local impedance characteristics for a PEMWE cell using a two-dimensional segmented cell device coupled with a multichannel potentiostat. The distribution of local resistances, i.e. high frequency, charge transfer, mass transport and catalyst layer, and iR-free overpotentials were successfully measured after eliminating sources of random and systematic error. We will discuss the application of this diagnostic on a cell containing a 1 cm feature simulating an ionomer skin. The results from these tests give insights if such an irregularity needs to be classified as a defect, and highlight the usefulness of coupling impedance spectroscopy with segmented cells for holistic spatial diagnostics of electrochemical devices.

08 HYDROGEN↗

DOE OSTI2020

Design and Analysis of the Staggered Double Grating Slow Wave Circuit for 263 GHz Sheet Beam TWT

The complete design process of a high-frequency circuit for a 263 GHz staggered double grating, sheet beam traveling wave tube is presented in this article. Here, this device, for use in a pulsed electron paramagnetic resonance spectrometer instrument, requires >30 dB gain and a 20 GHz bandwidth centered at 263 GHz. In addition to the standard Pierce gain analysis and point by point particle in cell (PIC) simulation, a novel fast pulse response analysis technique was utilized to determine the accurate synchronization voltage and test the ``hot” feature of the high-frequency circuit. Since this new method can evaluate the entire bandwidth in a single simulation, it can significantly reduce the computational resources normally required for the conventional PIC analysis while also illustrating the potential instabilities near the band edge. Good agreement between the fast pulse response and PIC simulation results validate the accuracy of this novel method. According to the analysis results and given the manufacturing limits of nano/micro-computer numerical control (CNC) machining, an appropriate SWS, coupler, and sever designs were chosen to complement the simulated design. Finally, a prototype circuit was manufactured and cold tested to verify the design and inspect the machining tolerances.

42 ENGINEERING↗

DOE OSTI2021

Type-II Dirac cones and electron-phonon interaction in monolayer biphenylene from first-principles calculations

In this work, we report a first-principles investigation of electronic structure, topological bands, and electron-phonon interactions in metallic biphenylene sheets. Biphenylene is a recently synthesized sp 2 -bonded carbon allotrope. We find coupling of electrons at the Fermi surface to very high frequency carbon-derived phonons, analogous to superconducting MgB 2 . This leads to low-temperature weak coupling superconductivity due to an unusual combination of exceptionally large logarithmically averaged phonon frequency ω log =1369 K and moderate electron-phonon coupling. The electronic structure shows a two-band Fermi surface dominated by C p z orbitals and a pair of type-II tilted Dirac cones along the Γ-Y line at the Brillouin zone boundary. Berry curvature and edge-state calculations show that monolayer biphenylene is a two-dimensional $\mathbb{Z}$ 2 topological material. Thus, monolayer biphenylene is predicted to be a topological superconductor based on C p orbitals and high-frequency phonons.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2023

River Geomorphology Affects Biogeochemical Responses to Hydrologic Events in a Large River Ecosystem

Shifts in the frequency and intensity of high discharge events due to climate change may have important consequences for the hydrology and biogeochemistry of rivers. However, our understanding of event-scale biogeochemical dynamics in large rivers lags that of small streams. To fill this gap, we used high-frequency sensor data collected during four consecutive summers from a main channel and backwater site of the Upper Mississippi River. We identified high discharge events and calculated event concentration-discharge responses for both physical-chemical (nitrate, turbidity, and fluorescent dissolved organic matter) and biological (chlorophyll-a and cyanobacteria) constituents using metrics of hysteresis and slope. We found a range of responses across events, particularly for nitrate. Although fluorescent dissolved organic matter (FDOM) and turbidity exhibited more consistent responses across events, contrasting hysteresis metrics indicated that FDOM was flushed to the river from more distant sources than turbidity. Biological responses (chlorophyll a and cyanobacteria) differed more between sites than physical and chemical constituents. Lastly, we found that the event characteristics best explaining concentration responses differed between sites, with event magnitude more frequently related to responses in the main channel, and antecedent wetness conditions associated with response variation in the backwater. Furthermore, our results indicate that event responses in large rivers are distinct across the diverse habitats and biogeochemical components of a large floodplain river, which has implications for local and downstream ecosystems as the climate shifts.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2026

Field-Coupled Water Splitting with Metal-Free Donor–Acceptor Covalent Organic-Framework Junctions

Advancing metal-free electrocatalysts for hydrogen and oxygen evolution reactions (HER/OER) across acidic and alkaline media requires coordinated control of intermediate binding thermodynamics, interfacial charge delivery, and near-electrode transport dynamics. Here, we design amide-linked benzene–triazine covalent organic frameworks (BTA/TzTA-Hz COFs) and integrate them with carbon nanotubes (CNTs) to form COF–CNT junctions that establish a built-in interfacial electric field. Density functional theory (DFT) and electrostatic potential maps indicate complementary active motifs, with benzene-proximal fragments associated with HER and triazine-proximal motifs associated with OER. CNT integration shifts the contact-potential difference by ≈0.20 V, while operando electrochemical impedance spectroscopy suggests partially separable high-frequency junction-charging and lower-frequency Faradaic/transport responses. A 300 mT static magnetic field lowers the HER and OER overpotentials by tens of millivolts. Under anodic bias, the effective interfacial charging capacitance increases, and Mott–Schottky analysis shows an apparent ∼0.15 V flat-band shift with an essentially unchanged slope. Together, these observations are consistent with field-perturbed interfacial charging and altered bias partitioning. Field-dependent impedance and bubble imaging are consistent with magnetohydrodynamic convection that promotes bubble detachment and near-electrode mass transport for both half-reactions, and they reveal an OER-specific high-frequency perturbation under anodic bias. Under field, the heterostructure reaches an OER onset overpotential of ∼261 mV and requires an overpotential of 366 mV at 10 mA cm –2 in alkaline electrolyte. These results illustrate how reticular-framework chemistry, junction engineering, and both built-in and applied fields can program reactivity through interfacial electrostatics and near-electrode transport in organic-framework electrocatalysts.

Garcia-Enriquez, Lissette [Univ. of Texas at El Pa↗

DOE OSTI2022

Two-layer transient heat transfer using impulse response methods

Solutions to the inverse heat conduction problem (IHCP) are methods that can be used to quantify surface heat flux in multi-layer materials for components in which there are limited subsurface (internal) temperature measurements, such as coated components. A critical consideration is to capture high frequency fluctuations using a practical heat flux sensor. To that end, this paper highlights key parameters for calculating accurate surface heat transfer. Specifically, this research extends the available solutions to the IHCP for multi-substrate structures through an impulse response methodology. The sensitivity of the impulse method was quantified with respect to practical measurements. Further, when compared to the inverse case, the impulse method resulted in lower errors when calculating surface heat flux over a range of conditions. Overall, this work provides a foundation for deducing heat flux from a subsurface heat flux sensor while maintaining a high-frequency response.

42 ENGINEERING↗

DOE OSTI2021

Seismic Ambient Noise Analyses Reveal Changing Temperature and Water Signals to 10s of Meters Depth in the Critical Zone

The critical zone sustains terrestrial life, but we have few tools to explore it efficiently beyond the first few meters of the subsurface. Using analyses of high-frequency ambient seismic noise from densely spaced seismometers deployed in the forested Shale Hills subcatchment of the Susquehanna Shale Hills Critical Zone Observatory (SSHCZO), we show that temporal changes in seismic velocities at depths from ~1 m to tens of m can be detected. Furthermore, these changes are driven by variations at the land surface. The Moving-Window Cross-Spectral (MWCS) method was employed to measure seismic-velocity changes in coda waves at hourly resolution in 10 different frequency bands. We observed a diurnal signal, a seasonal signal, and a meteorological-event-based signal. These signals were compared to time-series measurements of precipitation, well water levels, soil moisture, soil temperature, air temperature, latent heat flux, and air pressure in the heavily instrumented catchment. Most of the velocity changes can be explained by variations in temperature that result in thermoelastic strains that propagate to depth. But some double minima in seismic velocity time-series observed after large rain events were attributed in part to the effects of water infiltration. These results show that high-frequency ambient noise data may in some locations be used to detect changes in the critical zone from ~1 to ~100 m or greater depth with hourly resolution. But interpretation of such data requires multiple environmental data sets to deconvolve the complex interrelationships among thermoelastic and hydrological effects in the subsurface critical zone.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2025

Si-Cr-Al-Mn Alloy for High Specific Resistivity

Laboratory material produced in budget period one met the target resistivity, mechanical and magnetic requirements for the Go/No-Go decision to move to industrial trials. The chosen chemistry settled on a high Cr strategy, with moderate Mn and Al additions, providing a good comprise on core loss and induction with minimal impact on mechanical properties, important to successful downstream processing. Industrial trials began in budget period two with the chosen chemistry, referred to as Alloy X. Difficulties occurred during initial hot rolling trials. Reheating the material using the standard NOES practice caused slab cracking from high thermal gradients in areas exposed to the roof burners, this was solved using a modified reheat practice. High Cr caused poor dynamic recrystallization during hot rolling, which was solved using a modified hot rolling practice. The high Cr content of the steel also caused poor decarburization during final annealing, which necessitated lowering the melt carbon aim for the final heat, together with a modified decarburization practice. Steel was finished to final thicknesses of 0.20 – 0.50 mm and evaluated for magnetic and mechanical properties. Although the target core loss for the 0.25 and 0.35 mm material was not achieved, significant reductions in high frequency core loss were measured, compared to equivalent commercially available material. Alloy X at 0.35 mm showed a 26 % and 23 % improvement at 400 HZ and 1000 Hz respectively, over Cliffs’ M-19 (0.35 mm) commercially available NOES. At 0.25 mm, Alloy X showed a 23 % and a 26 % improvement at 400 HZ and 1000 Hz respectively, over Cliffs’ HF-10 (0.25 mm) commercially available NOES. The 0.25 mm product was chosen for motor efficiency evaluation. ORNL collaborated with Cleveland-Cliffs (CC) to build, assemble, and test two 5HP motors: a baseline motor with M19 steel and a motor made with high efficiency steel (Alloy X) developed for the project. Overall, results were as expected with comparable performance at low speeds, and with more than 8% efficiency improvement for high speeds. Increased motor steel efficiency at high frequencies not only results in direct efficiency improvements but can yield reductions in motor size and cost by facilitating higher operation speeds, or by increasing the number of poles in the machine. This allows the production of more power-dense motors which are sometimes avoided with conventional material due to increased core losses. The material developed on this project provides more viable options for achieving improved motor efficiency or reduced motor size and cost.

36 MATERIALS SCIENCE↗

DOE OSTI2024

Machine Learning Inference of Random Medium Properties

Earth materials are heterogeneous across a range of spatial scales, but the resolvability of small structures is limited by sparse data coverage, noise, bandlimitedness, and other difficulties. In practice, heterogeneities below a certain size cannot be recovered from seismic data except through statistical medium descriptions, which even then can be difficult to uniquely determine. To improve the characterization of such heterogeneities, we develop a novel supervised machine learning (ML) model that provides insight about the recoverability of statistical medium properties from elastic waveform data and succeeds despite cycle-skipping and other challenges well known from elastic waveform inversion. We demonstrate the approach using random media generated by superimposing self-affine random variations on homogeneous and layered background structures. After training on sparsely-recorded, high-frequency waveforms from hundreds of different random medium realizations, we show the ability of our ML model to recover correlation lengths and other statistical properties of interest to near-surface and crustal seismology, among other fields. For frequency passbands and spatial offsets encountered in seismology, Gaussian correlation lengths and the amplitude of the random variations relative to the background model are recovered even in challenging scenarios involving unknown medium parameters, complex crustal structures, and low signal-to-noise ratio. In comparison, von Kármán correlation lengths, which are related to larger-wavelength variations of the medium than Gaussian correlation lengths, are not as well recovered. These results provide one of the first and most systematic investigations of the recoverability of statistical properties of heterogeneities below the resolution limit of deterministic seismic tomography, and suggest practical ML strategies for high-frequency waveform seismology.

58 GEOSCIENCES↗

DOE OSTI2024

Lossless Phonon Transition Through GaN‐Diamond and Si‐Diamond Interfaces

Abstract Advancing Silicon (Si) technology beyond Moore's law through 3D architectures requires highly efficient heat management methods compatible with foundry processes. While continued increases in transistor density can be achieved through 3D architectures, self‐heating in the upper tiers degrades the performance. Self‐heating is a critical problem for high‐power, high‐frequency, wide bandgap, and ultra‐wide bandgap devices as well. Diamond, known for its exceptional thermal conductivity, offers a viable solution in both these cases. Since thermal boundary resistance (between the channel/junction and diamond plays a crucial role in overall thermal resistance, this study investigates various dielectrics for interface engineering, such as Silicon dioxide (SiO 2 ), amorphous‐ Silicon Carbide (a‐SiC), and Silicon Nitride (SiN x ), to make a phonon bridge at gallium nitride (GaN)‐diamond and Si‐diamond interfaces. The a‐SiC interlayer reduces diamond/GaN (<5 m 2 K per GW) and diamond/Si (<2 m 2 K per GW) thermal boundary resistances by linking low‐ and high‐frequency phonons, boosting phonon transport through the interface. Engineered interfaces enhance heat spreading from the channel/junction and rule out premature failure.

Malakoutian, Mohamadali↗

DOE OSTI2021

Seasonal changes in the drivers of water physico-chemistry variability of a small freshwater tidal river

Where rivers meet the sea, tides can exert a physical and chemical influence on the lower reaches of a river. How tidal dynamics in these tidal river reaches interact with upstream hydrological drivers such as storm rainfall, which ultimately determines the quantity and composition of material transferred from watersheds to estuaries, is currently unknown. We monitored a small freshwater tidal river in the Pacific Northwest, USA in high resolution over one year to evaluate the relative importance of tides versus upstream hydrological flows (i.e., base flow and precipitation events) on basic physico-chemical parameters (pH, dissolved oxygen, turbidity, specific conductivity, and temperature), and how these interactions relate to the downstream estuary. Tidal variability and diurnal cycles (i.e. solar radiation) dominated water physico-chemical variability in the summer, but the influence of these drivers was overshadowed by storm-driven sharp pulses in river physico-chemistry during the remainder of the year. Within such events, we found incidences of counterclockwise hysteresis of pH, counterclockwise hysteresis of dissolved oxygen, and clockwise hysteresis of turbidity, although systematic trends were not observed across events. The dominance of storm rainfall in the river’s physico-chemistry dynamics, and similar pulses of decreased pH observed in adjacent estuarine waters, suggest that the linkage between tidal streams and the broader system is variable throughout the year. High-frequency monitoring of tidal river biogeochemistry is therefore crucial to enable the assessment of how the relative strength of these drivers may change with future sea level rise and altered precipitation patterns to modulate biogeochemical dynamics across the land-ocean-atmosphere continuum.

aquatic↗

DOE OSTI2023

Scalable Incremental Checkpointing using GPU-Accelerated De-Duplication

Writing large amounts of data concurrently to stable storage is a typical I/O pattern of many HPC workflows. This pattern introduces high I/O overheads and results in increased storage space utilization especially for workflows that need to capture the evolution of data structures with high frequency as checkpoints. In this context, many applications, such as graph pattern matching, perform sparse updates to large data structures between checkpoints. For these applications, incremental checkpointing techniques that save only the differences from one checkpoint to another can dramatically reduce the checkpoint sizes, I/O bottlenecks, and storage space utilization. However, such techniques are not without challenges: it is non-trivial to transparently determine what data has changed since a previous checkpoint and assemble the differences in a compact fashion that does not result in excessive metadata. State-of-art data reduction techniques (e.g., compression and de-duplication) have significant limitations when applied to modern HPC applications that leverage GPUs: slow at detecting the differences, generate a large amount of metadata to keep track of the differences, and ignore crucial spatiotemporal checkpoint data redundancy. This paper addresses these challenges by proposing a Merkle tree-based incremental checkpointing method to exploit GPUs' high memory bandwidth and massive parallelism. Experimental results at scale show a significant reduction of the I/O overhead and space utilization of checkpointing compared with state-of-the-art incremental checkpointing and compression techniques.

Tan, Nigel↗

DOE OSTI2026

Wildfire-Power Grid Interactions: Feedback, Impacts, Monitoring, Modeling, and Mitigation Strategies

Wildfires are increasingly interacting with electric power systems through a two-way hazard chain: fires damage grid assets and trigger cascading outages, while grid faults can ignite new fires under hot, dry, and windy conditions. This review synthesizes the state of knowledge across five domains: (i) physical impacts of flames, heat, and smoke on lines, towers, insulators, and substations; (ii) power-infrastructure-initiated ignitions via conductor clash, high-impedance faults, and corona discharge; (iii) widespread blackouts and disproportionate societal impacts; (iv) multi-scale monitoring spanning laboratory tests, in-situ and grid-integrated sensors, and Earth observation; (v) coupled modeling that links fire behavior with grid operations; and (vi) technological and strategic mitigation pathways spanning prevention, response, and recovery. We integrate these domains into a novel 'feedback-aware' socio-technical framework. Through a longitudinal analysis (2005-2025) of global incidents, we identify that while vegetation contact remains the most frequent ignition source, aging infrastructure failure has emerged as a critical driver of catastrophic 'mega-fires'. We further identify persistent gaps, including limited interoperability of high-frequency grid and environmental data, scarce real-time data assimilation, and under-developed equity metrics for outage management. We conclude by outlining a research agenda to (1) deploy interoperable sensing architectures, (2) advance feedback-coupled fire-grid simulations, and (3) evaluate mitigation portfolios through techno-economic and fairness lenses. Recognizing wildfire-grid interactions as coupled socio-technical systems is essential for protecting infrastructure and communities and for ensuring reliable, sustainable electricity in a changing world.

24 POWER TRANSMISSION AND DISTRIBUTION↗

DOE OSTI2026

A hybrid Penman-Monteith and machine learning model for simulating evapotranspiration and its components

Integrating physical processes with machine learning has advanced evapotranspiration (ET) simulation, yet most hybrid models fail to partition total ET into its components: soil evaporation (E) and vegetation transpiration (T). This study introduces Residual Neural Network–Penman–Monteith (RNN-PM), a novel hybrid dual-source ET model designed to overcome this limitation. The model synergizes the physically-based Penman–Monteith framework with three specialized residual neural networks trained to estimate key conductance parameters (canopy conductance, soil surface conductance, and aerodynamic conductance). Furthermore this explicit parameterization allows for the direct partitioning of total ET. Validation at National Ecological Observatory Network (NEON) flux sites using high-frequency partitioned E and T shows that RNN-PM reliably reproduces ET and the transpiration fraction (T/ET). For ET, the model achieves an average Kling–Gupta efficiency (KGE) of 0.89 and a root-mean-square error (RMSE) of 0.55 mm/day; for T/ET, the KGE is 0.87 with an RMSE of 0.06. Furthermore, RNN-PM demonstrates robust generalization, accurately simulating ET and its components well beyond the initial training dataset, even under extreme climatic conditions. This study extended the analysis by comparing the RNN-PM model with seven established dual-source ET models. The results indicate that RNN-PM outperforms both conventional machine learning models and purely physical process-based models in simulating ET components in most cases. Among the purely physical process-based dual-source models, those based on surface temperature decomposition showed improved performance as the leaf area index (LAI) decreased when evaluated against high-frequency ET component datasets. In contrast, the performance of conductance-based dual-source models declined with decreasing LAI. Although purely machine learning-based models can produce relatively accurate simulations of ET components, they often exhibit limited generalization capability, an issue that the RNN-PM model effectively overcomes. Ultimately, the RNN-PM model represents a significant advance in simulating ET components, offering a novel and scalable approach for improving the representation of land–atmosphere interactions in Earth system models.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2024

Comparative S/TEM study of superconducting Ta quantum resonators by wet and dry etching types

Superconducting resonators play a pivotal role in various quantum technology applications, such as quantum computing and high-frequency communication systems. The performance of these resonators is closely tied to the properties of the superconducting films used in their fabrication. Here, in this study, we investigated the impact of wet and dry etching on tantalum (Ta) films leveraging advanced scanning transmission electron microscopy-based characterization methods and examined the morphological, chemical, and strain changes caused by the etching processes. Consequently, we report the significant differences between the two etching methods, with dry etching resulting in straight slanted sidewalls and a thinner oxidized layer, while wet etching produced curved sidewalls and undercuts. Both methods led to the formation of a residual Ta wedge at the lower part of the sidewall, causing lattice deformation, which could adversely influence the homogeneous operations of superconducting devices. These insights enhance our understanding of how etching influences superconducting films, offering valuable guidance for optimizing resonators and related devices. Our findings mark a significant stride in advancing quantum technologies and high-frequency communication by enhancing our practical understanding of superconducting material fabrication.

36 MATERIALS SCIENCE↗