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NASA NTRS2004

Thermal-Stress Control of Microshutter Arrays in Cryogenic Applications for the James Webb Space Telescope

We report on methods to minimize thermally-induced deformation in a MEMS-based reconfigurable aperture. The device is an enabling component of the Near-Infrared Spectrometer, a principle instrument on NASA's James Webb Space Telescope. The Microshutter Array consists of 384 x 175 individually addressable shutters which can be magnetically rotated 90 deg into the plane of the array and electrostatically latched open. Each shutter is a 100 x 200 micron rectangular membrane suspended by a small neck region and torsion flexure. The primary materials in the shutter are a 5000A Si3N4 layer for mechanical rigidity, 2000A Al for opacity and electrostatic latching, and 2800A CoFe for magnetic actuation. This multi-layer stack presents a challenge due to the operating temperatures required for the device: both room temperature (300K) and cryogenic temperature (35K). Thermal expansion of the materials causes the shutters to bow out of plane excessively, which can prevent actuation of the shutters, cause damage to portions of the array, and allow light leakage around closed shutters. Here we present our investigation of several methods to prevent microshutter bowing including deposition of additional materials on the shutters to create a symmetrical layer stack and replacing the current stack with low-coefficient of thermal expansion materials. Using shutter-size suspended cantilever beams as a rapid-development test bed, we have reduced out-of-plane bowing between 300K and 35K to 10% or better. We are currently applying these results to microshutter arrays to develop shutters that remain flat from room temperature to cryogenic temperature while retaining the required mechanical, optical, and magnetic properties.

Kelly, Daniel P.↗
NASA NTRS2001

Microshutter Arrays for the NGST NIRSpec

We are developing a programmable multiobject field selector for the NGST NIRSpec. This device is a microshutter array, a close-packed 2000 x 2000 array of 100 micrometer x 100 micrometer shutters fabricated with Micro-ElectroMechanical Systems (MEMS) technologies. The shutters are opened using a magnet scanned over the array. The shutters are held open by electrostatic potentials on adjacent vertical electrodes. Modeling of the magnetic actuation of the microshutters allowed optimization of the magnetic field configuration, the distance between magnet and shutters, and the force and torque produced by the magnet. The results of laboratory tests are consistent with our modeling. We have demonstrated actuation, latching and addressing. We are able to rotate shutters out of the plane up to 90 degree and more, to latch them electrostatically to the walls and release them selectively. During the last six month all critical elements of the array have been demonstrated. Fabrication processes were developed to deposit vertical electrodes on support grid side walls and insulated light-shields that block the gaps between shutters and the support grid. Physical optics analysis was performed to assess the expected optical performance of the microshutters. A preliminary Fourier optics analysis on the microshutter array performance has been carried out. More detailed analysis of wave propagation through 3D structures is a next step. An optical test station for verifying optical parameters of the shutter array at room temperature has been developed. It allows to measure parameters, such as transmission, scattering, contrast ratio, and diffraction of the array structure. Initial data have been acquired and are being analyzed and compared to theoretical predictions.

Moseley, Harvey↗
NASA NTRS2004

Cryogenic Characterization and Testing of Magnetically-Actuated Microshutter Arrays for the James Webb Space Telescope

Two-dimensional MEMS microshutter arrays (MSA) have been fabricated at the NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST) to enable cryogenic (approximately 35 K) spectrographic astronomy measurements in the near-infrared region. Functioning as a focal plane object selection device, the MSA is a 2-D programmable aperture mask with fine resolution, high efficiency and high contrast. The MSA are close- packed silicon nitride shutters (cell size of 100 x 200 microns) patterned with a torsion flexure to allow opening to 90 degrees. A layer of magnetic material is deposited onto each shutter to permit magnetic actuation. Two electrodes are deposited, one onto each shutter and another onto the support structure side-wall, permitting electrostatic latching and 2-D addressing. New techniques were developed to test MSA under mission-similar conditions (8 K less than or equal to T less than 300K). The magnetic rotisserie has proven to be an excellent tool for rapid characterization of MSA. Tests conducted with the magnetic rotisserie method include accelerated cryogenic lifetesting of unpackaged 128 x 64 MSA and parallel measurement of the magneto-mechanical stiffness of shutters in pathfinder test samples containing multiple MSA designs. Lifetest results indicate a logarithmic failure rate out to approximately 10(exp 6) shutter actuations. These results have increased our understanding of failure mechanisms and provide a means to predict the overall reliability of MSA devices.

King, T. T.↗
NASA NTRS2009

Improving the Visible and Infrared Contrast Ratio of Microshutter Arrays

Three device improvements have been developed that dramatically enhance the contrast ratio of microshutters. The goal of a microshutter is to allow as much light through as possible when the shutters are in the open configuration, and preventing any light from passing through when they are in the closed position. The ratio of the transmitted light that is blocked is defined here as the contrast ratio. Three major components contribute to the improved performance of these microshutters: 1. The precise implementation of light shields, which protect the gap around the shutters so no light can leak through. It has been ascertained that without the light shield there would be a gap on the order of 1 percent of the shutter area, limiting the contrast to a maximum of 100. 2. The precise coating of the interior wall of each microshutter was improved with an insulator and metal using an angle deposition technique. The coating prevents any infrared light that finds an entrance on the surface of the microshutter cell from being emitted from a sidewall. Since silicon is in effect transparent to any light with a wavelength longer than .1 micrometer, these coatings are essential to blocking any stray signals when the shutters are closed. 3. A thin film of molybdenum nitride (MoN) was integrated onto the surface of the microshutter blade. This film provides the majority of light blockage over the microshutter and also ensures that the shutter can be operated over a wide temperature range by maintaining its flatness. These improvements were motivated by the requirements dictated by the James Webb Space Telescope NIRSpec instrument. The science goals of the NIRSpec require observing some of the very faintest objects in a given field of view that also may contain some very bright objects. To observe the faint objects, the light from the bright objects - which could be thousands of times brighter - must be completely blocked. If a closed microshutter is even slightly transmissive, a very bright object will still transmit a small signal, which can be larger than a signal from a very faint object transmitted through an open shutter. Since this situation can completely corrupt the results, it was necessary that the closed shutters be able to attenuate light by at least a factor of 2,000. There currently exist four flight-quality microshutter arrays that have been fully or are currently undergoing testing and the results support that the three improvements described above have successfully led to contrast levels greater than 50,000 in over 99 percent of the microshutters at an operating temperature of 35 K. Applications for these high-contrast microshutters are in the photomask generation and stepper equipment used to make integrated circuits and microelectromechanical (MEMS) devices. Since microshutters are a reconfigurable optical element, their versatility in these industries provides an improvement over printed masks and fixed projection alignment systems.

Jhabvala, Murzy↗
NASA NTRS2004

Microshutters Arrays for the JWST Near Infrared Spectrometer

The Near Infrared Spectrograph (NIRSpec) for the James Webb Space Telescope (JWST) is an essential instrument for measuring the number and density evolution of galaxies following the epoch of initial formation. The NIRSpec is a multi-object spectrograph, allowing simultaneous observation of more than 100 candidate high redshift galaxies. A critical element of the instrument is the programmable field selector, the Microshutter Array. The system consists of four 175 x 384 arrays of individually openable shutters, close packed on a 100 x 200 micron pitch, which allow selection of over 200 candidate objects over the 3 min x 3 min field of the NIRSpec. We will describe the development, production, and test of this critical element of the NIRSpec.

Moseley, Harvey↗
NASA NTRS2008

Microshutter Arrays for NIRSpec

A primary science goal of the 6.5 m James Webb Space Telescope is to characterize the epoch of initial galaxy formation, observing the early universe as the first stars and galaxies formed. This program will be accomplished using a combination of multi-band imaging and spectroscopic measurements of large numbers of faint galaxies. Since these objects are in general sparse on the sky, a multi object spectrometer is required to enable this critical scientific investigation. We have developed a microshutter array which is to be used as a high contrast, remotely programmable field selector for the Near Infrared Spectrometer (NIRSpec) on JWST. This device allows slits to be opened at the locations of selected galaxies in the field of view, and blocks sources and background light from the rest of the field. The first flight design devices have been built and were tested. These first generation of devices were used to demonstrate performance and flight readiness. Devices of the same design will be delivered to ESA for installation into the NIRSpec instrument.

Silverberg, Robert↗
NASA NTRS2004

Fabrication of MEMS-Based Microshutter Arrays for Optical Transmission Selection

A MEMS-based programmable aperture mask is under development at the NASA Goddard Space Flight Center. Termed the Microshutter (u-shutter) Array, the device will be used to control the transmission of light, with both high efficiency and contrast, to a multi-object spectrometer on the James Webb Space Telescope. Fabrication of the p-shutter array employs several novel designs and processing techniques. The current generation of micro-shutters consists of 128x64 pixel arrays with unit cell dimensions of 100x200 microns. Shutters are patterned in silicon nitride and sit on a 100 micron silicon frame that is DRIE etched below each shutter. The front and back sides of the device are shown. A magnetic cobalt-iron alloy patterned on top of the shutter allows it to be actuated 90 degrees out-of-plane, into the frame, by an external magnetic field. An electrode on the shutter and a vertical electrode on the sidewall of the frame, approximately 90pm deep, allow them to be electrostatically latched in their rotated position. The vertical electrode is deposited and patterned on the backside of the frame in a single step using a directionally controlled evaporation. Individual addressing of shutters for electrostatic latching is accomplished via a crosspoint addressing scheme, with no on-chip active components. A portion of an array with shutters in the open, latched, and closed positions is shown. Light loss at shutter edges is minimized by an overhanging aluminum light-shield that is anchored to the frame. A photoresist sacrificial layer is used to raise the light-shield up and over the 2 micron gap that surrounds each pixel. After completion, arrays are subjected to life cycle, environmental and optical testing. Fabricated devices have survived 10(exp 6) actuation cycles at both room and cryogenic temperatures and a 14g rms launch-simulation test. Optical testing has shown contrast measurements between open and closed shutters up to 10000:1.

Lynch, Bernard A.↗
NASA NTRS2006

Microshutter Arrays for the JWST NIRSpec

A primary goal of the James Webb Space Telescope (JWST) is to characterize the birth and evolution of galaxies by imaging and spectroscopic observations. The telescope will use a Near Infrared Camera and a Near Infrared Spectrometer (NIRSpec) to carry out this program. The 3.6 x 3.6 field of NIRSpec will contain thousands of candidate high redshift galaxies. With such a high candidate object density, simultaneous multi-object capability is essential. This capability requires a programmable object selection mask to eliminate sky background and to reduce source confusion caused. We are developing a two-dimensional programmable field mask for NIRSpec. These masks employ micromechanical (MEMS) techniques to provide source selection over the NIRSpec field of view. The first flight format arrays (171x365 shutters) have been fabricated and full functionality of these arrays has been demonstrated in lab tests. Qualification tests are in progress to demonstrate readiness for flight, and will be complete in the early fall of 2006. In this paper, I describe performance of this critical new technology, and progress in making the devices ready for a 2008 delivery to ESA for inclusion in the NIRSpec.

Moseley, Samuel H.↗
NASA NTRS2008

Testing Microshutter Arrays Using Commercial FPGA Hardware

NASA is developing micro-shutter arrays for the Near Infrared Spectrometer (NIRSpec) instrument on the James Webb Space Telescope (JWST). These micro-shutter arrays allow NIRspec to do Multi Object Spectroscopy, a key part of the mission. Each array consists of 62414 individual 100 x 200 micron shutters. These shutters are magnetically opened and held electrostatically. Individual shutters are then programmatically closed using a simple row/column addressing technique. A common approach to provide these data/clock patterns is to use a Field Programmable Gate Array (FPGA). Such devices require complex VHSIC Hardware Description Language (VHDL) programming and custom electronic hardware. Due to JWST's rapid schedule on the development of the micro-shutters, rapid changes were required to the FPGA code to facilitate new approaches being discovered to optimize the array performance. Such rapid changes simply could not be made using conventional VHDL programming. Subsequently, National Instruments introduced an FPGA product that could be programmed through a Labview interface. Because Labview programming is considerably easier than VHDL programming, this method was adopted and brought success. The software/hardware allowed the rapid change the FPGA code and timely results of new micro-shutter array performance data. As a result, numerous labor hours and money to the project were conserved.

Rapchun, David↗
NASA NTRS2010

Microshutter Arrays for the JWST NIRSpec

A primary goal of the James Webb Space Telescope (JWST) is to characterize the birth and evolution of galaxies by imaging and spectroscopic observations. The telescope will use a Near Infrared Camera and a Near Infrared Spectrometer (NIRSpec) to carry out this program. The 3.6' x 3.6' field of NIRSpec will contain thousands of candidate high redshift galaxies. With such a high candidate object density, simultaneous multi-object capability is essential. This capability requires a programmable object selection mask to eliminate sky background and to reduce source confusion caused. We are developing a two-dimensional programmable field mask for NIRSpec. These masks employ micromechanical (MEMS) techniques to provide source selection over the NIRSpec field of view. The first flight format arrays (171x365 shutters) have been fabricated and full functionality of these arrays has been demonstrated in lab tests.

Moseley, Samuel H.↗
NASA NTRS2020

Successful Demonstration of an Electrostatic Actuated Microshutter System for Space Telescope Flight Missions

After developing magnetically actuated microshutter array sub-systems as a field object selector for the James Webb Space Telescope (JWST), a team at the NASA Goddard Space Flight Center (GSFC) focused on the development of electrostatically actuated microshutter arrays – Next Generation Microshutter Arrays (NGMSA). The demonstration described in this late news is for the first NGMSA array that performed shutter operations for telescope imaging and spectroscopy in space. The carrier telescope, the Next-Generation Far-UV Off Roland-circle Telescope for Imaging and Spectroscopy (NG-FORTIS), has been designed and produced by Prof. Stephan McCandliss and his team at Johns Hopkins University. NG-FORTIS was launched into space successfully.

M. J. Li↗
NASA NTRS2008

High Contrast Programmable Field Masks for JWST NIRSpec

Microshutter arrays are one of the novel technologies developed for the James Webb Space Telescope (JWST). It will allow Near Infrared Spectrometer (NIRSpec) to acquire spectra of hundreds of objects simultaneously therefore increasing its efficiency tremendously. We have developed these programmable arrays that are based on Micro-Electro Mechanical Structures (MEMS) technology. The arrays are 2D addressable masks that can operate in cryogenic environment of JWST. Since the primary JWST science requires acquisition of spectra of extremely faint objects, it is important to provide very high contrast of the open to closed shutters. This high contrast is necessary to eliminate any possible contamination and confusion in the acquired spectra by unwanted objects. We have developed and built a test system for the microshutter array functional and optical characterization. This system is capable of measuring the contrast of the microshutter array both in visible and infrared light of the NIRSpec wavelength range while the arrays are in their working cryogenic environment. We have measured contrast ratio of several microshutter arrays and demonstrated that they satisfy and in many cases far exceed the NIRSpec contrast requirement value of 2000.

Kutyrev, Alexander S.↗
NASA NTRS2008

Elastic Distribution of Microshutters, Measurements Obtainable on James Web Space Telescope

Spectrographic astronomy measurements in the near-infrared region will be done by functional two-dimensional microshutter arrays that are being fabricated at the NASA Goddard Space Flight Center for the James Webb Space Telescope (JWST). These micro-shutter arrays will represent the first mission-critical MEMS devices to be flown in space. JWST will use microshutter arrays to select focal plane object. 2-D programmable aperture masks of more than 200,000 elements select such space object. The use of silicon wafer material promises high efficiency and high contrast. Microshutter operation temperature is around 35K. Microshutter arrays are fabricated as close-packed silicon nitride membranes with a unit cell size of 105 x 204 micrometers. A layer of magnetic material is deposited onto each shutter. Individual shutters are equipped with a torsion flexure. Reactive ion etching (RIE) releases the shutters so they can open up to 90 degrees using the torsion flexure. Shutter rotation is initiated into a silicon support structure via an external magnetic field. Two electrically independent aluminum electrodes are deposited, one onto each shutter and another onto the support structure side-wall, permitting electrostatic latching and 2-D addressing to hold specific shutters open via external electronics.

Kletetschka, Gunther↗
NASA NTRS2009

Silicon Wafer-Scale Substrate for Microshutters and Detector Arrays

The silicon substrate carrier was created so that a large-area array (in this case 62,000+ elements of a microshutter array) and a variety of discrete passive and active devices could be mounted on a single board, similar to a printed circuit board. However, the density and number of interconnects far exceeds the capabilities of printed circuit board technology. To overcome this hurdle, a method was developed to fabricate this carrier out of silicon and implement silicon integrated circuit (IC) technology. This method achieves a large number of high-density metal interconnects; a 100-percent yield over a 6-in. (approximately equal to 15-cm) diameter wafer (one unit per wafer); a rigid, thermally compatible structure (all components and operating conditions) to cryogenic temperatures; re-workability and component replaceability, if required; and the ability to precisely cut large-area holes through the substrate. A method that would employ indium bump technology along with wafer-scale integration onto a silicon carrier was also developed. By establishing a silicon-based version of a printed circuit board, the objectives could be met with one solution. The silicon substrate would be 2 mm thick to survive the environmental loads of a launch. More than 2,300 metal traces and over 1,500 individual wire bonds are required. To mate the microshutter array to the silicon substrate, more than 10,000 indium bumps are required. A window was cut in the substrate to allow the light signal to pass through the substrate and reach the microshutter array. The substrate was also the receptacle for multiple unpackaged IC die wire-bonded directly to the substrate (thus conserving space over conventionally packaged die). Unique features of this technology include the implementation of a 2-mmthick silicon wafer to withstand extreme mechanical loads (from a rocket launch); integrated polysilicon resistor heaters directly on the substrate; the precise formation of an open aperture (approximately equal to 3x3cm) without any crack propagation; implementation of IR transmission blocking techniques; and compatibility with indium bump bonding. Although designed for the microshutter arrays for the NIRSpec instrument on the James Webb Space Telescope, these substrates can be linked to microshutter applications in the photomask generation and stepper equipment used to make ICs and microelectromechanical system (MEMS) devices.

Jhabvala, Murzy↗
NASA NTRS2001

Simulation of MEMS for the Next Generation Space Telescope

The NASA Goddard Space Flight Center (GSFC) is developing optical micro-electromechanical system (MEMS) components for potential application in Next Generation Space Telescope (NGST) science instruments. In this work, we present an overview of the electro-mechanical simulation of three MEMS components for NGST, which include a reflective micro-mirror array and transmissive microshutter array for aperture control for a near infrared (NIR) multi-object spectrometer and a large aperture MEMS Fabry-Perot tunable filter for a NIR wide field camera. In all cases the device must operate at cryogenic temperatures with low power consumption and low, complementary metal oxide semiconductor (CMOS) compatible, voltages. The goal of our simulation efforts is to adequately predict both the performance and the reliability of the devices during ground handling, launch, and operation to prevent failures late in the development process and during flight. This goal requires detailed modeling and validation of complex electro-thermal-mechanical interactions and very large non-linear deformations, often involving surface contact. Various parameters such as spatial dimensions and device response are often difficult to measure reliably at these small scales. In addition, these devices are fabricated from a wide variety of materials including surface micro-machined aluminum, reactive ion etched (RIE) silicon nitride, and deep reactive ion etched (DRIE) bulk single crystal silicon. The above broad set of conditions combine to be a formidable challenge for space flight qualification analysis. These simulations represent NASA/GSFC's first attempts at implementing a comprehensive strategy to address complex MEMS structures.

Mott, Brent↗