Search NASA⌕ Search

SEARCH · Search NASA

Results for “plasma–surface interaction”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 37 records · Page 2
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Operando XPS in reactive plasmas: The importance of the wall reactions

In this article, advancements in differential pumping and electron optics over the past few decades have enabled x-ray photoelectron spectroscopy (XPS) measurements at (near-)ambient pressures, bridging the pressure gap for characterizing realistic sample chemistries. Recently, we have demonstrated the capabilities of an ambient pressure XPS setup for in situ plasma environment measurements, allowing plasma-surface interactions to be studied in operando rather than using the traditional before-and-after analysis approach. This new “plasma-XPS” technique facilitates the identification of reaction intermediates critical for understanding plasma-assisted surface processes relevant to semiconductor nanomanufacturing, such as physical vapor deposition, etching, atomic layer deposition, and many other plasma applications. In this paper, we apply the plasma-XPS approach to monitor real-time surface chemical changes on a model Ag(111) single crystal exposed to oxidizing and reducing plasmas. We correlate surface-sensitive data with concurrent gas-phase XPS measurements and residual gas mass-spectrum analysis of species generated during plasma exposure, highlighting the significant role of plasma-induced chamber wall reactions. Ultimately, we demonstrate that plasma-XPS provides comprehensive insights into both surface and gas-phase chemistry, establishing it as a versatile and dynamic characterization tool with broad applications in microelectronics research. Finally, we outline potential enhancements and future metrology directions to advance plasma-XPS investigations further.

36 MATERIALS SCIENCE↗
DOE OSTI2026

Development of a deep potential model for F and CF 2 etching of Si and SiO 2

An understanding of plasma-surface interactions at increasingly smaller scales is invaluable for the development of novel technologies and processing techniques. Molecular dynamics (MD) simulations can provide insights into atomic-scale interactions, though they are restricted by the availability of interatomic potentials. Machine learning methods, such as Deep Potential Molecular Dynamics (DeepMD), provide a systematic framework for the development of accurate and flexible ab initio-based models. In this work, we develop DeepMD models for the ion-enhanced etching of Si and SiO 2 by F and CF 2 radicals. We employ an active learning process to expand the data set on which the model is trained and demonstrate its effect on the model accuracy. The DeepMD results are compared to data from classical MD simulations and experiments. Physical sputtering yields of SiO 2 by Ar + ions show good agreement with previous simulation results using conventional interatomic potentials, though the predicted depth profiles are different. Etching yields are calculated as a function of ion energy and neutral to ion flux ratio for the Ar + ion-enhanced etching of SiO 2 and Si by F atoms, as well as for etching of SiO 2 by CF 2 radicals, showing reasonable agreement with experimental data. Finally, an ion-enhanced surface kinetic model is fitted to the DeepMD etch yields, and the fitted parameters are compared to quantities computed directly from DeepMD simulations. This study illustrates how molecular dynamics simulations using machine learning potentials can provide an accurate model of etching processes relevant to device manufacturing.

Kounis-Melas, Andreas [Princeton Univ., NJ (United↗
DOE OSTI2026

Plasma processing of SRF cavities at Jefferson Lab: Experiment results and simulation insight

Plasma processing of superconducting radio frequency (SRF) cavities has been an active research effort at Jefferson Lab (JLab) since 2019, aimed at enhancing cavity performance by removing hydrocarbon contaminants and reducing field emission. In this experiment, processing using argon-oxygen and helium-oxygen gas mixtures to find minimum ignition power at different cavity pressure was investigated. Ongoing simulations are contributing to a better understanding of the plasma surface interactions and the fundamental physics behind the process. These simulations, combined with experimental studies, guide the optimization of key parameters such as gas type, RF power, and pressure to ignite plasma using selected higher-order mode (HOM) frequencies. This paper presents experimental data from argon-oxygen and helium-oxygen gas mixture C75 and C100 cavity plasma ignition studies, as well as simulation results for the C100-type cavity based on the COMSOL model previously applied to the C75 cavity.

Accelerator Physics↗
DOE OSTI2024

Center for Tokamak Transient Simulations (RPI Unstructured Mesh Developments for FES SciDAC4 Partnerships) (Final Report)

The goal of this project was the development of unstructured mesh technologies for fusion simulation codes” for FES SciDAC partnerships and to integrate those technologies into the simulation workflows of those partnerships. Specific developments were executed in support of the following FES SciDAC4 partnerships: Partnership Center for High‐fidelity Boundary Plasma Simulation (HBPS), Center for Integrated Simulation of Fusion Relevant RF (RF‐SciDAC), Center for Plasma Surface Interactions: Predicting the Performance and Impact of Dynamic PFC Surfaces (PSI2), and Center for Tokamak Transient Simulations (CTTS). The key unstructured mesh development areas addressed in this project include (i) methods to most effectively perform PIC calculations on unstructured meshes; (ii) creating meshes for fusion systems accounting for any desired level of geometric complexity and providing physics aware mesh configurations, (iii) adapting unstructured meshes to control the discretization errors, (iv) executing unstructured mesh calculations on GPU accelerated systems, (v) supporting physics/application‐specific PIC operations including surface/wall interactions of particles, (vi) providing infrastructure tools to support the interactions of solvers with unstructured meshes, and (vii) providing advanced methods for coupling plasma physics codes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Krash-ESL-Final report

During the period of the current Grant, the effort of the UCSD researchers was focused on: i) The application of the gyrokinetic code COGENT code to study the kinetic drift wave instability and its impact on blob dynamics, and ii) The modeling of edge plasma transport in collisional and semi-collisional regimes, and iii) Impurity transport in edge plasma and the incorporation of plasma-impurity collision operator (hereafter unlike particle collision operator) into COGENT. Over the years four UCSD graduate students (J. Angus, W. Lee, Y. Zhang, and A. Knyazev), funded under this Grant, contributed to the COGENT development/utilization and defended their PhD theses, which are based, partly, on their research related to the COGENT. Three of them (J. Angus, W. Lee, and Y. Zhang) have received “The Best MAE Graduate Student of the Year” awards. Whereas W. Lee after defending his PhD thesis returned back to his home country (South Korea), J. Angus, and Y. Zhang are continuing their research in plasma physics in the LLNL and LANL, whereas A. Knyazev currently is a postdoctoral fellow at Columbia University working on the theoretical aspects of advanced stellarators. The results obtained in our studies were disseminated in many papers published in first-class refereed scientific journals and presented on prestigious scientific meetings including the Annual APS DPP Meeting, Sherwood Fusion Theory Conference, IAEA Fusion Energy Conferences, International Conferences on Plasma-Surface Interactions in Controlled Fusion Devices, International Workshops on Edge Plasma Theory in Fusion Devices, etc. In what follows we highlight the major accomplishments of the UCSD Team in the main areas of our research.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Final Technical Report - Rapid Surface Microanalysis using a Low Temperature Plasma

This project focused on improving our current understanding and scientific knowledge in the area of plasma-surface interactions and plasma assisted material synthesis related to advanced microelectronics and nanotechnology. Current challenges include: controlling the interaction of Low Temperature Plasma (LTP) with a single layer of atoms to manufacture integrated circuits, continued miniaturization of integrated circuits, LTP processing of material surfaces and thin films to enable industrial scale fabrication of advanced microelectronics, synthesis of new materials, nanomaterials, nanotubes, and complex materials, Technology developed in this subtopic is of value to either (i) enable scans of surfaces (~1 sq. cm area) using various microscopies (electron, optical, other) at high resolution (micron or sub-micron resolution) rapidly (hours or days rather than years to complete a high-resolution scan of such a large surface area), or (ii) enable scans of surfaces (~1 sq. cm area) using various microscopies (electron, optical, other) at relatively low resolution rapidly, then apply algorithms to select spots for micron-scale imaging. Sputtering occurs when particles of a solid material are ejected from its surface by energetic particles from a plasma. While the degradation of the solid material and the subsequent deposition of the ejected material onto vulnerable surfaces are the usual subjects of sputtering studies, plasma science has yet to be combined with sputtering to create new diagnostics devices and systems. Small changes in the design of the plasma discharge device make it possible to create broad plasma beams for rapid scanning or small plasma beams to obtain the distribution of ejected elements with micron resolution. In the high-resolution use, the ion flux is extracted from the gas-discharge plasma and focused by a spherical emission surface to micron sizes onto the target specimen, providing very local sputtering and local elemental analysis. We call this “self-focusing”. The radiation from the excited and ionized sputtered atoms is recorded by a spectrometer through a window and fiberglass cable and analyzed with standard software packages used for optical glow discharge spectroscopy. Computer simulations of beam formation were used to verify and optimize the designs to be tested. A prototype was designed, constructed, and used to start experiments of beam formation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2026

Recent progress in atomic-scale controlled plasma processing

Atomic-scale control in plasma processing is becoming increasingly critical for fabricating of advanced semiconductor devices, particularly as the industry shifts toward three-dimensional (3D) architectures and high-aspect-ratio (HAR) structures. This review presents a comprehensive overview of recent developments in atomic-scale controlled plasma processes, organized along two key directions: the hierarchical structure of plasma–surface interactions and the generational evolution of atomic layer processing (ALP) technologies. We examined the gas phase, where molecular design enables selective generation of ions and radicals; the boundary layer, where transport phenomena govern species delivery into nanoscale features, and the surface, where temperature-dependent reactions and cyclic processing determine etching selectivity and precision. Building on this foundation, we outline five generations of ALP—from thermal atomic layer deposition to transport-aware, temporally and structurally decoupled processes—highlighting the increasing sophistication of process control. The review further explores the transition from empirical recipe development to science-based, data-driven methodologies. By integrating quantum-chemical modeling, advanced diagnostics, and machine learning, we demonstrated how predictive models can link plasma species composition to process outcomes, enabling autonomous and adaptive control strategies. Finally, this review discusses the broader societal implications of plasma process innovation through the E4 quartet: energy and resource efficiency, environmental sustainability, evolutionary advancement, and educational promotion. These principles guide the development of sustainable and intelligent atomic-scale manufacturing technologies that are not only technically advanced but also socially responsible.

Ishikawa, Kenji [Nagoya Univ. (Japan)] (ORCID:0000↗
DOE OSTI2024

Segmented wall-less hall thruster

Disclosed is a miniaturized plasma propulsion device with minimized surface area of the thruster walls exposed to the plasma and, as a result, reduced plasma-surface interactions including a set of segmented electrodes to facilitate the following improvements compared to relevant existing technologies: 1) control of the plasma flow including focusing of the plasma plume 2) increase of the thrust 2) reduction of inefficiencies associated with the electron cross field current, and 3) mitigation of low frequency oscillations. The electrodes affect all these actions when a DC or modulated voltage is applied to one or all of them with the same or different amplitudes, with the same or different frequencies or phases which are all optimized to realize the best performance through changes in the acceleration and/or ionization regions. In addition, the applied voltage to the main electrodes may also be modulated.

Simmonds, Jacob↗
DOE OSTI2025

Two-dimensional mapping of absolute OH densities in an atmospheric pressure plasma effluent via planar laser-induced fluorescence: effects of He/H 2 O and He/O 2 mixtures in N 2 and air, with and without solid targets

Planar laser-induced fluorescence (LIF) was employed to measure the absolute density of hydroxyl radicals (OH) in the effluent of the COST Reference Microplasma Jet for two feed gas mixtures: He/H 2 O and He/O 2 . Experiments were conducted with the effluent propagating into air and N 2 environments. For the He/H 2 O case, measurements were also performed with the effluent impinging on a solid target at varying distances from the jet nozzle. Calibration of the OH-LIF signal from the COST-Jet was achieved by comparing it to a reference signal generated by the photofragmentation of H 2 O 2 . Results demonstrated that OH densities were sustained longer when the effluent propagates in a nitrogen environment compared to air, particularly with water added to the feed gas. The broader OH distribution in N 2 suggests slower consumption due to the absence of oxygen, which accelerates OH depletion in air via reactions involving O 2 and HO 2 . Even when water was not added to the feed, as in the He/O 2 case, appreciable OH densities were observed, due to gas impurities and reactive species interactions with atmospheric humidity, forming reaction fronts that delineate the gas flow. Two-dimensional fluid dynamics simulations elucidated the influence of atmospheric gas entrainment and solid targets on the OH distribution. Experimental trends were further compared with a zero-dimensional chemistry model to explore OH production and consumption mechanisms in air and nitrogen environments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Comparison of plasma start-up with high Z and low Z first wall in WEST

The choice of first wall material is of paramount importance for the plasma start-up conditions in ITER and future fusion power plants. In this context, the present work focuses on the correlations between first wall impurity sources and total radiated power during plasma start-up in the tungsten (W) Environment in Steady-state Tokamak (WEST). The objective is to highlight experimental indications for a preferable combination of start-up plasma scenario and first wall materials. Until 2019, WEST featured a full high Z first wall with all limiters exposing only W surfaces to the plasma. To study the impact of a low Z first wall in WEST, boron nitride tiles were installed in the central part of the inner and outer limiters in 2020. Although visible spectroscopy and bolometry measurements show respectively a strong weakening of the WI line intensity on the limiters and a reduction of radiated power after the changeover, a degradation occurs with the accumulation of plasma exposure. In addition, the different plasma facing elements of the main chamber do not influence equally the radiated power during start-up. In both high Z and low Z environments, a clear non-linear dependence is found between the start-up radiated power and the outer limiter W impurity source. Since W seems to be the main cause for core radiation, correlation between outer limiter W sources and other impurity sources are investigated. Finally, analysis of the legacy of B powder drops on a number of start-up plasmas suggests that it is less effective at reducing radiated power when the first wall is covered with W.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Conference Report on the 8th International Symposium on Liquid Metals Applications for Fusion (ISLA-8)

The International Symposium on Liquid Metals Applications for Fusion (ISLA) aims to assemble scientists and engineers engaged in research on lithium and liquid metal applications for fusion devices, facilitating discussions on recent advancements and challenges in an open forum to support the development of viable fusion reactors. The 8th International Symposium on Liquid Metals Applications for Fusion (ISLA-8) was organized by the Institute of Plasma Physics, Chinese Academy of Sciences, from 8 to 12 September 2024, in Hefei, China. The symposium was attended by over 70 participants, marking one of the highest attendance figures in the series. A total of 68 presentations were delivered, including 59 presented on-site, while the remainder were conducted online. The participants represented 10 countries, namely China, Japan, the Netherlands, Russia, the USA, the Czech Republic, Italy, Thailand, Spain, and Germany. The symposium covered 10 topics, structured into 13 sessions. Additionally, an opening session provided an overview of the current symposium, while a closing session summarized reports from each session chair.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2026

INFUSE:FLARED (Final Technical Report)

This report summarizes the final outcomes of the INFUSE:FLARED collaboration between Tokamak Energy (TE), the University of Illinois Urbana-Champaign (UIUC), and the Department of Energy (DOE). The project aimed to experimentally determine and model the pumping, absorption, and separation behavior of deuterium in flowing liquid lithium under gas and plasma exposure conditions. The work supports the development of lithium-based plasma-facing components (PFCs) and tritium management strategies for next-generation fusion plants.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Estimation of mean electron energy in helium surface ionization waves on dielectric substrates

Abstract The determination of basic plasma parameters in atmospheric pressure discharges is critical to advancing their use in applications. Atmospheric pressure plasma jets have found use in the fields of medicine, agriculture, material modification and others. Atmospheric pressure plasma jets often generate plasma surface ionization waves (SIW) which interact with and propagate over surfaces. Electrical diagnostics are challenging in SIW due to high collision frequencies and small scale of the plasma discharge. This work employs a passive optical emission line ratio technique to estimate the mean electron energy in SIW over planar dielectric substrates. The method uses an intensity ratio of two helium triplet lines: He( 3 3 S ) at 706.5 nm and He( 3 3 D ) at 587.56 nm. A collisional-radiative model is used to correlate line ratio to mean electron energy and determine dependencies on electron density and He/air gas mixture. Mean electron energies ranging from 3–8 eV are determined in He/air mixtures and are found to remain constant as the surface wave propagates radially. This work provides a 2D, time-resolved, mean electron energy diagnostic for surface ionization wave propagation and validation of numerical modeling in atmospheric pressure systems with spatially varying He/air gas mixtures. The model in question is designed for use with any He line ratio in the n = 3 excitation level.

Morsell, Joshua (ORCID:0000000331073002)↗
DOE OSTI2025

2D photofragmentation LIF imaging of H 2 O 2 and HO 2 in the effluent of an atmospheric-pressure plasma jet: effects of solid and liquid interfaces

Two-dimensional (2D) absolute measurements of hydrogen peroxide (H 2 O 2 ) and approximations of the hydroperoxyl radical (HO 2 ) in the effluent of a COST Reference Microplasma Jet operated with a He/H 2 O feed gas are presented. Gas-phase densities are mapped using photofragmentation laser-induced fluorescence (PF-LIF) under three boundary conditions: open effluent, a solid target, and a liquid target. A novel method is presented for separating PF-LIF signals from H 2 O 2 and HO 2 using comparative measurements in oxygen-rich and oxygen-free environments to exploit the preferential formation of HO 2 in the presence of molecular oxygen. This separation strategy is supported by results from a plug-flow plasma chemistry model. Measured densities agree closely with model predictions in both magnitude and trend, while the 2D experimental distributions provide additional insight into the spatial dependencies of these species. In particular, the results show distinct differences in species transport depending on the target type: solid surfaces induce lateral deflection and reduced centerline densities, whereas liquid interfaces promote axial accumulation and higher near-axis concentrations.

atmospheric-pressure plasma jet (APPJ)↗
DOE OSTI2024

Light-Matter Interaction near the Schwinger Limit Using Tightly Focused Doppler-Boosted Lasers

Strong-field quantum electrodynamics (SF QED) is a burgeoning research topic dealing with electromagnetic fields comparable to the Schwinger field (≈1.32×10 18 V/m). While most past and proposed experiments rely on reaching this field in the rest frame of relativistic particles, the Schwinger limit could also be approached in the laboratory frame by focusing to its diffraction limit the light reflected by a plasma mirror irradiated by a multipetawatt laser. Here, we explore the interaction between such intense light and matter with particle-in-cell simulations. We find that the collision with a relativistic electron beam would enable the study of the nonperturbative regime of SF QED, while the interaction with a solid target leads to a profusion of SF QED effects that retroact on the interaction. In both cases, relativistic attosecond pair jets with high densities are formed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Improving adhesive bonding of short carbon fiber thermoplastic composites to aluminum alloys with a hybrid laser-plasma surface modification strategy

This study investigates hybrid laser–plasma surface modification strategies for metal–CFRTP (carbon-fiber-reinforced thermoplastic polymer) dissimilar joints to improve their bonding performance, in contrast to existing literature that mostly focuses on either plasma or laser treatment alone. By conducting double cantilever beam (DCB) tests on adhesively-bonded AA5052 and CFRPA66 (carbon-fiber-reinforced polyamide 66) joints, as an example of metal–CFRTP joints, it was found that laser engraving on the metal surface combined with plasma treatment on the CFRTP surface significantly improved the specific fracture energy of the joint by 187% and 31% compared to as-received and plasma-treated-only joints, respectively. However, the hybrid treatment of laser engraving and plasma on the investigated CFRTP surface did not improve the bonding performance of the joints. The underlying mechanisms related to hybrid laser-plasma surface modification strategies were further investigated by examining the surface and cross-sectional morphologies after DCB testing using microscopy. Computational modeling was performed to elucidate the interaction between grooves on the metal substrate and the CFRTP–adhesive interfacial bonding in metal–CFRTP joints. This study provides new insights into developing surface modification methods for achieving strong metal–CFRTP adhesive joints, aimed at lightweighting structural components in automotive, aerospace, and other applications.

Adhesive bonding↗