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Semiconductor technology program. Progress briefs

The current status of NBS work on measurement technology for semiconductor materials, process control, and devices is reported. Results of both in-house and contract research are covered. Highlighted activities include modeling of diffusion processes, analysis of model spreading resistance data, and studies of resonance ionization spectroscopy, resistivity-dopant density relationships in p-type silicon, deep level measurements, photoresist sensitometry, random fault measurements, power MOSFET thermal characteristics, power transistor switching characteristics, and gross leak testing. New and selected on-going projects are described. Compilations of recent publications and publications in press are included.

Bullis, W. M.↗

Semiconductor technology program. Progress briefs

Measurement technology for semiconductor materials, process control, and devices is reviewed. Activities include: optical linewidth and thermal resistance measurements; device modeling; dopant density profiles; resonance ionization spectroscopy; and deep level measurements. Standardized oxide charge terminology is also described.

Bullis, W. M.↗

Absolute photoionization cross sections of atomic oxygen

The absolute values of photoionization cross sections of atomic oxygen were measured from the ionization threshold to 120 A. An auto-ionizing resonance belonging to the 2S2P4(4P)3P(3Do, 3So) transition was observed at 479.43 A and another line at 389.97 A. The experimental data is in excellent agreement with rigorous close-coupling calculations that include electron correlations in both the initial and final states.

Samson, J. A. R.↗

Absolute photoionization cross sections of atomic oxygen

The absolute values of photoionization cross sections of atomic oxygen were measured from the ionization threshold to 120 A. An auto-ionizing resonance belonging to the 2S2P4(4P)3P(3Do, 3So) transition was observed at 479.43 A and another line at 389.97 A. The experimental data is in excellent agreement with rigorous close-coupling calculations that include electron correlations in both the initial and final states.

Samson, J. A. R.↗

Rhenium-osmium isotope systematics in meteorites. I - Magmatic iron meteorite groups IIAB and IIIAB

Resonance ionization mass spectrometry is used to determine the Re and Os abundances by isotope dilution (ID) and to measure Os-187/Os-186 ratios from 19 iron meteorites. Abundances range from 1.4 to 4800 ppb Re, and from 13 to 65,000 ppb Os, and generally agree well with previous ID and neutron activation results. The Re and Os data suggest that abundance trends in these iron groups may be entirely explained by fractional crystallization. Whole-rock isochrons for the IIAB and IIIAB groups are statistically indistinguishable. Pooled data yield an initial Os-187/Os-186 of 0.794 +/- 0.010 Ga. Given the errors in the slope and half life, this age does not differ significantly from the canonical chondrite age of 4.56 Ga, but could be as young as 4.46 Ga.

Morgan, John W.↗

The ultraviolet spectrum of the gravitational lens candidate UM 425 = QSO 1120+019: Evidence for broad absorption line (BAL) structure

The UV line profile structure of high-ionization resonance lines found with the International Ultraviolet Explorer (IUE) in the brightest of four multiply imaged sources (images-A) in the candidate gravitational lens UM 425 = QSO 1120+019 indicates broad absorption line (BAL) structure. The deep-broad trough associated with the O IV line extends to velocities approiximately -12,000 km/s, and contains disrete features that suggest multicomponent velocity structure. This structure may include contributions from C IV absorption from the early-type galaxy that is believed to lens UM 425. A strong absorption feature in the blue wing of the Lyman-alpha lambda 1216 emission line may be a Lyman alpha absorption system at a Z(sub Ly alpha) = 1.437 +/- 0.003, or it may be formed by the superposition of the broad N V lambda lambda 1238, 1242 absorption trough on the extended blue emission wing of the QSO Lyman-alpha line. We obtained a redshift of Z(sub QSO) = 1.471 +/- 0.003 from Lyman-alpha lambda 1215, consistent with the redshift found by Meylan and Djorgovski in the optical. The Lyman-alpha line appears unusally weak due to the presence of N V lambda 1240 BAL absorption. A Lyman-limit absorption system at lambda 912 was not observed in the QSO rest frame. The detection of BAL structure in the other weaker ground-state resonance lines of N II (l) and S IV (l) was not found, suggesting these lines are formed in a region that is distinct from the BAL component. Detection of BAL structure in the other fainter images in this system with Hubble Space Telescope (HST) instrumentation, similar to structure observed here in image A, could provide evidence that UM 425 is a gravitational lens.

Michelitsianos, A. G.↗

Barium Isotopes in Single Presolar Grains

Barium isotopic compositions of single presolar grains were measured by laser ablation laser resonant ionization mass spectrometry and the implications of the data for stellar processes are discussed. Additional information is contained in the original extended abstract.

Pellin, M. J.↗

Fe Isotopic Composition of Presolar SiC Mainstream Grains

Iron isotopic distribution was measured in SiC mainstream grains from the Murchison meteorite by time-of-flight resonance ionization mass spectrometry. All grains exhibit 54Fe depletions of 50 to 200, lower than what are predicted by calculations of s-process nucleosynthesis in AGB stars. Additional information is contained in the original extended abstract.

Tripa, C. E.↗

(1 + 1) resonant enhanced multiphoton ionization via the A2Sigma(+) state of NO - Ionic rotational branching ratios and their intensity dependence

Rotational branching ratios resulting from the (1 + 1) resonant enhanced multiphoton ionization spectroscopy of NO via the 0-0 transition of the A-X band for the four possible branches that can be assigned as R(21.5) are explored using calculation performed in the frozen-core approximation at the Hartree-Fock level. The four different branches, of which three are distinctly different in the perturbative limit, have rather different branching ratios. The mixed R12 + Q22(21.5) branch, which is not intense and has the lowest transition energy, appears to give the best agreement with experimental branching ratio for parallel detection. The agreement is less satisfactory for perpendicular detection. Neither the effect of finite-acceptance angle of the photoelectron detector nor high intensities can explain the discrepancy.

Rudolph, H.↗

(2 + 1) resonant enhanced multiphoton ionization of H2 via the E,F 1Sigma(+)g state

In this paper, the results of ab initio calculations of photoelectron angular distributions and vibrational branching ratios for the (2 + 1) resonant enhanced multiphoton ionization (REMPI) of H2 via the E,F 1Sigma(+)g state are reported, and these are compared with the experimental data of Anderson et al. (1984). These results show that the observed non-Franck-Condon behavior is predominantly due to the R dependence of the transition matrix elements, and to a lesser degree to the energy dependence. This work presents the first molecular REMPI study employing a correlated wave function to describe the Rydberg-valence mixing in the resonant intermediate state.

Rudolph, H.↗

Ionic rotational branching ratios in resonant enhanced multiphoton ionization of NO via the A2Sigma(+)(3s sigma) and D2Sigma(+)(3p sigma) states

Results are presented for the rotationally resolved photoelectron spectra resulting from a (2 + 1) one-color resonant enhanced multiphoton ionization (REMPI) of NO via the rotationally clean S21(11.5) and mixed S11(15.5) + R21(15.5) branches of the 0-0 transition in the D-X band. The calculations were done in the fixed-nuclei frozen core approximation. The resulting photoionization spectra, convoluted with a Lorentzian detection function, agree qualitatively with experimental results of Viswanathan et al. (1986) and support their conclusion that the nonspherical nature of the molecular potential creates a substantial l-mixing in the continuum, which in turn leads to the intense Delta N = 0 peak. The rather strong photoelectron energy dependence of the rotational branching ratios of the D 2Sigma(+) S21(11.5) line was investigated and compared to the weak energy dependence of the A 2Sigma(+) R22(21.5) line.

Rudolph, H.↗

Resonant coupling of ionization waves and acoustic gravity waves in the presence of a magnetic field

The nature of the two resonant directions that occur for a single frequency in the presence of a magnetic field is demonstrated, along with the manner in which the resonances change with the dip angle and the angle of propagation from the meridian plane. The conditions under which acoustic branch resonances may occur are outlined. It is found that the calculated frequencies and directions for resonance are in the range of observed values for TID's obtained from ground and satellite measurements. This result is indicative of a possible connection between TID's and the resonance phenomenon. It is shown that a strong resonance type of response may be possible in the F region at a particular frequency from a region that can be as great as 100 km in altitude.

Eun, H.↗

Measurement and calculation of the Stark-broadening parameters for the resonance lines of singly ionized calcium and magnesium.

The electron-impact-broadened profiles of the resonance lines of singly ionized calcium and magnesium have been measured using an electromagnetically driven shock tube and a rapid-scanning Fabry-Perot spectrometer. For an electron density of 10 to the 17th power per cu cm and a temperature of 19,000 K, we found the Lorentzian half-width of the Ca+ line to be 0.086 A plus or minus 10% and of the Mg+ line to be 0.044 A plus or minus 10%. Using the quantum-mechanical theory of Barnes and Peach and our semiclassical calculation for the calcium lines, we found that the temperature dependence of the theoretical curves is close to that measured, although both theories predict actual values which are somewhat large.

Jones, W. W.↗