Investigation of refractory dielectric for integrated circuits Second quarterly report, Dec. 1968
Process development for chemical deposition of aluminum oxide films as refractory dielectrics for integrated circuits
Doo, V. Y.↗
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Consideration of Materials for Aircraft Brakes
An exploratory investigation was conducted concerning materials and their properties for use in aircraft brakes. Primary consideration was given to the heat dissipation and the frictional behavior of materials. Used brake pads and rotors were analyzed as part of the investigation. A simple analysis was conducted in order to determine the most significant factors which affect surface temperatures. It was found that where size and weight restrictions are necessary, the specific heat of the material, and maintaining uniform contact area are the most important factors. A criterion was suggested for optimum sizing of the brake disks. Bench friction tests were run with brake materials. It was found that there is considerable friction variation due to the formation and removal of surface oxide films. Other causes of friction variations are surface softening and melting. The friction behavior at high temperature was found to be more characteristic of the steel surface rather than the copper brake material. It is concluded that improved brake materials are feasible.
Peterson, M. B.↗
Thermocapillary convection in microgravity crystal growth melts of indium-antimonide
Results of two recent crystal growth experiments conducted aboard Skylab are analyzed for thermoconvective aspects. Theoretical temperature and velocity profiles in the crystal melts are predicted via computer modeling. These results are compared with experimental data obtained from Skylab investigators. From theoretical considerations, both indium-antimonide experiments should have exhibited substantial thermocapillary convection, but did not due to probable oxide film interference and/or opposing solutal effects.
Bourgeois, S. V., Jr.↗
Quality control during IC processing
Manual gives detailed test procedures for controlling silicon-wafer processing in manufacture of integrated circuits. Included among 43 test procedures are: ionic, bacterial, and solids contamination of high-purity water needed for wafer processing; crystallographic reflection, purity, and orientation; substrate dimensions and finish; thickness of deposited epitaxial films; oxide quality; photoresist characteristics; pinholes in insulating layers; metallized adhesion; and quality of ohmic contact.
Source record↗
Materials and techniques for spacecraft static charge control 2
Results of exploratory development on the design, fabrication and testing of transparent conductive coatings, conductive bulk materials and grounding techniques for application to high resistivity spacecraft dielectric materials to obtain control of static charge buildup are presented. Deposition techniques for application of indium oxide, indium/tin oxide and other metal oxide films on Kapton, FEP Teflon, OSR and solar cell coverglasses discussed include RF and Magnetron sputtering and vapor deposition. Development, fabrication and testing of conductive glass tiles for OSR and solar cell coverglass applications is discussed. Several grounding techniques for rapid charge dissipation from the conductively coated polymer and glass dielectrics which were developed and tested in thermal cycled and electron plasma environments are described. The optical and electrical characterization and aging effects of these coatings, bulk materials and grounding techniques are reviewed as they apply to the performance of their design functions in a geosynchronous orbit environment.
Schmidt, R. E.↗
The role of oxidation in the fretting wear process
Fretting experiments were conducted on titanium, a series of Ni-Cr-Al alloys and on some high temperature turbine alloys at room temperature and at elevated temperatures in air and in various inert environments. It was found that, depending on temperature and environment, the fretting behavior of the materials examined could be classified according to four general types of behavior. Briefly, these types of behavior were: (1) the complete absence of oxidation, as in inert environments, generally leading to low rates of fretting wear but high fretting friction; (2) gradual attrition of surface oxide with each fretting stroke, found in these experiments to operate in concert with other dominating mechanisms; (3) rapid oxidation at surface fatigue damage sites, resulting in undermining and rapid disintegration of the load bearing surface; and (4) the formation of coherent, protective oxide film, resulting in low rates of fretting wear. An analytical model predicting conditions favorable to the fourth type of behavior was outlined.
Bill, R. C.↗
Thermocapillary flows and their stability
Steady convective flows for geometries of varying complexity are described. This in general involves the solution of nonlinear free boundary problems. The stability of these flows were determined to more complicated (perhaps time dependent) modes of fluid motion. These include shear flow and free surface instability modes, with possible coupling between them. The effect of surface chemical species is described, including impurities which act as surfactants and insoluble oxide films, on the convective patterns and their stability.
Davis, S.↗
Surface acoustic waves/silicon monolithic sensor processor
Progress is reported in the creation of a two dimensional Fourier transformer for optical images based on the zinc oxide on silicon technology. The sputtering of zinc oxide films using a micro etch system and the possibility of a spray-on technique based on zinc chloride dissolved in alcohol solution are discussed. Refinements to techniques for making platinum silicide Schottky barrier junctions essential for constructing the ultimate convolver structure are described.
Kowel, S. T.↗
High temperature (Al2O3) insulation and light weight conductors
The of an aluminum conductor with an aluminum oxide insulation film was investigated. Aluminum oxide insulated wire or strip (with a melting point of 2050 C) is unique for applications in the electronic, missile, atomic reactor, aerospace, and aircraft industries. The oxide film is highly flexible, suitable for all windings of any size and shape of coil (magnetic). Briefly touched upon are the ultraviolet, proton gamma radiation uses, as well as high vacuum and cryogenic applications. Since the film is inorganic and chemically inert, it does not age or deteriorate in storage and has good dielectric properties (1000 volts per mil).
Walker, H.↗
Electron beam induced damage in ITO coated Kapton
Data for the stability of thin conductive indium tin oxide films on 0.003 inch thick Kapton substrates during exposure of the surface to electron beams are reported. The electron beam energy was 3 keV and the diameter was about 0.8 mm. Thermal effects and surface modifications are considered. For primary current greater than 0.6 microamperes, an obvious dark discoloration with diameter approximately that of the beam was produced. The structure of the discolored region was studied with the scanning electron microscope, and the findings are stated. Surface modifications were explored by AES, obtaining spectra and secondary emission coefficient as a function of time for different beam intensities. In all cases beam exposure results in a decrease of the secondary yield but because of thermal effects this change, as well as composition changes, cannot be directly interpreted in terms of electron beam dosage.
Krainsky, I.↗
Thermodynamics of silicon nitridation - Effect of hydrogen
Equilibrium compositions for the nitridization of Si were calculated to detect the effectiveness of H2 in removal of the oxide film and in increasing the concentration of SiO and reducing the proportions of O2. Gibbs free energy for the formation of SiN2O was computed above 1685 K, and at lower temperatures. The thermodynamic properties of SiN2O2 were then considered from 1000-3000 K, taking into account the known thermodynamic data for 39 molecular combinations of the Si, Ni, and O. The gases formed were assumed ideal mixtures with pure phase condensed species. The mole fractions were obtained for a system of SiO2 with each Si particle covered with a thin layer of SiO2 before nitridation, and a system in which the nitriding atmosphere had access to the Si. The presence of H2 was determined to enhance the removal of NiO2 in the first system, decrease the partial pressure of O2, increase the partial pressures of SiO, Si, H2O, NH3, and SiH4, while its effects were negligible in the Si system.
Shaw, N. J.↗
Fatigue crack growth and low cycle fatigue of two nickel base superalloys
The fatigue crack growth and low cycle fatigue behavior of two P/M superalloys, Rene 95 and Astroloy, in the hot isostatically pressed (HIP) condition, was determined. Test variables included frequency, temperature, environment, and hold times at peak tensile loads (or strains). Crack initiation sites were identified in both alloys. Crack growth rates were shown to increase in argon with decreasing frequency or with the imposition of hold times. This behavior was attributed to the effect of oxygen in the argon. Auger analyses were performed on oxide films formed in argon. Low cycle fatigue lives also were degraded by tensile hold, contrary to previous reports in the literature. The role of environment in low cycle fatigue behavior is discussed.
Stoloff, N. S.↗
Metallic and metalloceramic coating by thermal decomposition
Metallic and metalloceramic coatings were prepared by thermal decomposition of a number of inorganic and metallo-organic compounds. The compounds were applied by spraying and by immersion, especially on ceramic fibers and fiber forms, which are easily coated by this procedure. Penetration of low-density ceramics is examined, and procedures are described that were used for converting the deposited materials to metals, oxides, or metal oxide films. Multiple-component films were also prepared. Photomicrographs illustrate the structure of these films.
Hendricks, R. C.↗
Effects on optical systems from interactions with oxygen atoms in low earth orbits
Modifications of material surface properties due to interactions with ambient atomic oxygen have been observed on surfaces facing the orbital direction in low earth orbits. Some effects are very damaging to surface optical properties while some are more subtle and even beneficial. Most combustible materials are heavily etched, and some coatings, such as silver and osmium, are seriously degraded or removed as volatile oxides. The growth of oxide films on metals and semiconductors considered stable in dry air was measured. Material removal, surface roughness, reflectance, and optical densities are reported. Effects of temperature, contamination, and overcoatings are noted.
Peters, P. N.↗
Modeling and data analysis of the NASA-WSTF frictional heating apparatus - Effects of test parameters on friction coefficient
A theoretical model is being developed jointly by the NASA White Sands Test Facility (WSTF) and the University of California at Santa Barbara (UCSB) to analyze data generated from the WSTF frictional heating test facility. Analyses of the data generated in the first seconds of the frictional heating test are shown to be effective in determining the friction coefficient between the rubbing interfaces. Different friction coefficients for carobn steel and Monel K-500 are observed. The initial condition of the surface is shown to affect only the initial value of the friction coefficient but to have no significant influence on the average steady-state friction coefficient. Rotational speed and the formation of oxide film on the rotating surfaces are shown to have a significant effect on the friction coefficient.
Zhu, Sheng-Hu↗
Flexible fluoropolymer filled protective coatings
Metal oxide films such as SiO2 are known to provide an effective barrier to the transport of moisture as well as gaseous species through polymeric films. Such thin film coatings have a tendency to crack upon flexure of the polymeric substrate. Sputter co-deposition of SiO2 with 4 to 15 percent fluoropolymers was demonstrated to produce thin films with glass-like barrier properties that have significant increases in strain to failure over pure glass films which improves their tolerance to flexure on polymeric substrates. Deposition techniques capable of producing these films on polymeric substrates are suitable for durable food packaging and oxidation/corrosion protection applications.
Banks, Bruce A.↗
Characterization of Iridium Coated Rhenium Used in High-Temperature, Radiation-Cooled Rocket Thrusters
Materials used for radiation-cooled rocket thrusters must be capable of surviving under extreme conditions of high-temperatures and oxidizing environments. While combustion efficiency is optimized at high temperatures, many refractory metals are unsuitable for thruster applications due to rapid material loss from the formation of volatile oxides. This process occurs during thruster operation by reaction of the combustion products with the material surface. Aerojet Technical Systems has developed a thruster cone chamber constructed of Re coated with Ir on the inside surface where exposure to the rocket exhaust occurs. Re maintains its structural integrity at high temperature and the Ir coating is applied as an oxidation barrier. Ir also forms volatile oxide species (IrO2 and IrO3) but at a considerably slower rate than Re. In order to understand the performance limits of Ir-coated Re thrusters, we are investigating the interdiffusion and oxidation kinetics of Ir/Re. The formation of iridium and rhenium oxides has been monitored in situ by Raman spectroscopy during high temperature exposure to oxygen. For pure Ir, the growth of oxide films as thin as approximately 200 A could be easily detected and the formation of IrO2 was observed at temperatures as low as 600 C. Ir/Re diffusion test specimens were prepared by magnetron sputtering of Ir on Re substrates. Concentration profiles were determined by sputter Auger depth profiles of the heat treated specimens. Significant interdiffusion was observed at temperatures as low as 1000 C. Measurements of the activation energy suggest that below 1350 C, the dominant diffusion path is along defects, most likely grain boundaries, rather than bulk diffusion through the grains. The phases that form during interdiffusion have been examined by x ray diffraction. Analysis of heated test specimens indicates that the Ir-Re reaction produces a solid solution phase of Ir dissolved in the HCP structure of Re.
Stulen, R. H.↗
Preliminary results for LDEF/HEPP thermal control samples
Sixty-five one inch by twelve inch strips of Kapton coated with various black paints, clear coatings, and thin film oxides were placed at three locations on the Long Duration Exposure Facility. Two sets were flown in the ram direction on top of the MLI blanket of the Cascade Variable Conductance Heat Pipe Experiment. Two other sets were flown on top of the MLI blanket of the Low Temperature Heat Pipe Experiment perpendicular to the ram direction. The last thirteen samples were taped to the perimeter of the HEPP power tray on the space end of the satellite. The solar absorptance and normal emittance measurements made on the 52 remaining samples are presented, as well as data on the above mentioned samples.
Kauder, Lon↗