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At least 469 records · Page 26

Energy-efficient, Large-scale Molecular Dynamics Simulations via Hardware- and Algorithm-level Optimization

This work aims to develop a framework for energy-efficient computing that will enable molecular dynamics (MD) simulations of large-scale phenomena with atomic precision and simultaneously remove computational bottlenecks limiting the speed of MD simulations. We seek to implement such an approach through the development of surrogate models for the interatomic force calculation combined with the use of mixed numerical precision formats. For a model system of neutral atoms (only pairwise interactions), significant force calculation efficiency improvements were achieved, without detrimental effects on atomic structures or average energies, using single precision, by developing a surrogate model (deep neural network), and by quantizing this surrogate model. For a model system of charged atoms, the reciprocal-space calculation of electrostatic interactions was identified as the main bottleneck, and the development of a surrogate model should be pursued to achieve an estimated one-order-of-magnitude additional speedup.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Interactive Mesh Generation and Comparison Tools for Nuclear Energy Advanced Modeling & Simulation Phase I. Final Report

The promise of computer simulations for nuclear reactor designs is the opportunity to speed up the design process while also improving safety, providing more detail and higher fidelity, reducing cost, minimizing schedule risk, and avoiding many other potential problems; because simulations have the potential to be much less expensive and time-consuming than traditional development – where scale models and physical tests require construction and long lead times – it is possible to consider more alternatives and complete more comprehensive assessments before the design is finalized and constructed. As more design scenarios are studied by simulation, the speed that simulations promise is only available as long as bottlenecks are addressed for these scenarios. A frequent bottleneck is the amount of human labor required to describe the shape of the objects being designed and decompose the shape into simple elements, such as hexahedra, that are small enough to capture the physical phenomena of interest without being so small that even fast computers cannot perform the simulation in a reasonable amount of time. Recently, techniques for creating all-hexahedral decompositions have been developed, but they require some human input. Many simulation codes prefer all-hexahedral decompositions, so we proposed to evaluate the feasibility of these techniques on nuclear reactor geometries to see whether they required too much human input to be commercially viable. Our study concluded that they can be made viable with some additional software tools to reduce the amount of user input required.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

TOUGH3-FLAC3D: a modeling approach for parallel computing of fluid flow and geomechanics

The recent development of the TOUGH3 code allows for a faster and more reliable fluid flow simulator. At the same time, new versions of FLAC3D are released periodically, allowing for new features and faster execution. In this paper, we present the first implementation of the coupling between TOUGH3 and FLAC3Dv6/7, maintaining parallel computing capabilities for the coupled fluid flow and geomechanical codes. We compare the newly developed version with analytical solutions and with the previous approach, and provide some performance analysis on different meshes and varying the number of running processors. Finally, we present two case studies related to fault reactivation during CO 2 sequestration and nuclear waste disposal. The use of parallel computing allows for meshes with a larger number of elements, and hence more detailed understanding of thermo-hydro-mechanical processes occurring at depth.

58 GEOSCIENCES↗

Performance portable ice-sheet modeling with MALI

High-resolution simulations of polar ice sheets play a crucial role in the ongoing effort to develop more accurate and reliable Earth system models for probabilistic sea-level projections. These simulations often require a massive amount of memory and computation from large supercomputing clusters to provide sufficient accuracy and resolution; therefore, it has become essential to ensure performance on these platforms. Many of today’s supercomputers contain a diverse set of computing architectures and require specific programming interfaces in order to obtain optimal efficiency. In an effort to avoid architecture-specific programming and maintain productivity across platforms, the ice-sheet modeling code known as MPAS-Albany Land Ice (MALI) uses high-level abstractions to integrate Trilinos libraries and the Kokkos programming model for performance portable code across a variety of different architectures. In this article, we analyze the performance portable features of MALI via a performance analysis on current CPU-based and GPU-based supercomputers. The analysis highlights not only the performance portable improvements made in finite element assembly and multigrid preconditioning within MALI with speedups between 1.26 and 1.82x across CPU and GPU architectures but also identifies the need to further improve performance in software coupling and preconditioning on GPUs. We perform a weak scalability study and show that simulations on GPU-based machines perform 1.24–1.92x faster when utilizing the GPUs. The best performance is found in finite element assembly, which achieved a speedup of up to 8.65x and a weak scaling efficiency of 82.6% with GPUs. We additionally describe an automated performance testing framework developed for this code base using a changepoint detection method. The framework is used to make actionable decisions about performance within MALI. We provide several concrete examples of scenarios in which the framework has identified performance regressions, improvements, and algorithm differences over the course of 2 years of development.

54 ENVIRONMENTAL SCIENCES↗

Simulating nonlinear optical processes on a superconducting quantum device

Simulating plasma physics on quantum computers is difficult because most problems of interest are nonlinear, but quantum computers are not naturally suitable for nonlinear operations. In weakly nonlinear regimes, plasma problems can be modelled as wave–wave interactions. In this paper, we develop a quantization approach to convert nonlinear wave–wave interaction problems to Hamiltonian simulation problems. We demonstrate our approach using two qubits on a superconducting device. Unlike a photonic device, a superconducting device does not naturally have the desired interactions in its native Hamiltonian. Nevertheless, Hamiltonian simulations can still be performed by decomposing required unitary operations into native gates. To improve experimental results, we employ a range of error-mitigation techniques. Apart from readout error mitigation, we use randomized compilation to transform undiagnosed coherent errors into well-behaved stochastic Pauli channels. Moreover, to compensate for stochastic noise, we rescale exponentially decaying probability amplitudes using rates measured from cycle benchmarking. We carefully consider how different choices of product-formula algorithms affect the overall error and show how a trade-off can be made to best utilize limited quantum resources. This study provides an example of how plasma problems may be solved on near-term quantum computing platforms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Computer Simulation of Proton Transport in Fuel Cell Membranes (Final Report)

This DOE-supported research grant focused on understanding the nature of proton transport in complex systems such as proton exchange membranes (PEMs). The most unique aspect of the research was the development and implementation of a novel multiscale reactive molecular dynamics (MS-RMD) methodology. In this approach, covalent bonds can dynamically break and form, allowing one to accurately treat the proton hopping process essential to capturing the physics of proton transport. The Voth group applied this method to proton exchange membrane systems, providing insight into their proton transport mechanism. They found that protons can diffuse most rapidly in the water-rich regions, but that protons actually spend so little time in such regions that transport along the hydrophobic – hydrophilic interface controls the membrane performance. In addition, the group worked to increase understanding of acidic solutions, developing methods for simulating and interpreting experimental infrared vibrational spectroscopy for excess protons (acidic solutions). The group also implemented novel tools for developing proton transport reactive MD models using a relative entropy minimization scheme.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Development of a Gibbs Energy Minimiser for the MOOSE-based Corrosion Modelling App Yellowjacket and Validation of MSTDB

Nuclear materials are highly complex multiscale, multiphysics systems,and an effective prediction of nuclear reactor performance and safety requires simulation capabilities that tightly couple different physical phenomena. The Idaho National Laboratory’s Multiphysics Object Oriented Simulation Environment (MOOSE) provides the computational foundation for performing such simulations. With the move towards advanced reactors, such as the Molten Salt Reactor (MSR), that employ high temperature fluids compared to conventional reactors, corrosion has become a problem of great interest. A new application called Yellowjacket is currently under development to directly couple thermodynamic equilibrium and kinetics with phase field models in order to model corrosion in MSRs. As part of Yellowjacket, a Gibbs energy minimiser is being developed to perform thermochemical equilibrium calculations for a range of different materials, which is currently in its infancy. This report describes the further progress towards the development of Yellowjacket Gibbs energy minimiser. Ontario Tech University is developing a new Gibbs energy minimiser for Yellowjacket which is the primary contribution of this work. The aim to develop a thermochemistry solver for the MOOSE framework following the same development philosophy and using the same tools and libraries. A special focus is on performance, documentation and SQA. Furthermore through a scope extension partway through the fiscal year a thorough assessment of the MSTDB-TC v1.3 was performed at Ontario Tech University in the context of continuous improvement and quality assurance. The objective of the work was to have an arm’s length review of the database to give confidence that the database is performing as it was intended while assessing its current state to give recommendations to future developments. This assessment involved two parts: A) a quantitative assessment, and B) a qualitative assessment. Part A involved developing an automated test-suite that would compute values from the database using Thermochimica with comparisons to experimental measurements for validation purposes, which gives confidence to the database’s stakeholders that its functioning properly. Part B involved reviewing all binary systems in the database and making a qualitative assessment with two performance indicators: comprehensiveness and overall confidence. It is important to note that the models in the database are empirical, which is to say that the quality of any model is highly dependent on the experimental data used to inform its development.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Evaluating Variable-Impedance Magnetically-Insulated Transmission Lines as a Risk-Mitigation Measure for Next-Generation Pulsed Power

This project has produced the first detailed characterizations of power flow resulting from applying the “variable-impedance MITL” concept to real-life systems in Sandia’s pulsed power program (Z and next-generation pulsed power (NGPP)). We present simulation results and analyses for constant-impedance versions of both Z and NGPP and survey the operational viability of several variable-impedance re-designs in the parameter space of linear tapers. Circuit modeling (SCREAMER/Bertha) was used to pinpoint promising candidate designs, and EM-PIC (Empire) simulations were used to evaluate these candidates more rigorously. This approach was particularly successful in the Z regime which resulted in the identification of several viable variable-impedance MITL designs for each level. The approach was more challenged in the operating space NGPP occupies, producing data points that speak to a more restrictive design space due to anode plasma turn-on. In the end, we were able to converge on one viable variable-impedance design for the highest inductance line (level “F”) and one for the highest current line (level “A”). Altogether, the body of simulation evidence presented in this report suggest there does exist flexibility in operating space for magnetically-insulated transmission lines (MITLs) having variable geometric impedance to be a potential enabling technology for safely increasing current delivery (and potentially lowering stack voltage) in pulsed-power drivers by manipulating electron losses; however, operating points for a particular design must be carefully screened. Circuit and EM-PIC modeling provided consistent verdicts in safe operating regimes for operational viability, but additional physics such as anode plasma turn-on which is included in Empire but not in SCREAMER/Bertha was found to be a critical factor affecting power flow that lead to different assessments between the codes. It is not always the case that the occurrence of anode plasma caused a design to fail (some designs turned on anode plasma yet still delivered load currents meeting design targets); the details matter such as how early in the pulse anode surfaces break down (and how large a region). However, in every case that it did fail it was found that the feedback from anode plasma was the cause (i.e., turning off the anode plasma model in Empire restored agreement with the circuit model prediction). As circuit simulations represent an efficient and practical means of surveying design space compared to more computationally-expensive approaches such as EM-PIC, it could be prudent to invest in the research and development of models to include the effects of anode plasma such as ion emission in circuit codes. The variable-impedance MITL design is a new concept that enables controlled manipulation of the initial electron losses in the outer MITL and can be tested on Z today. We encourage follow-on work to explore further optimization (including alternative variable-impedance profiles, e.g., having constant dZ/dR), and to confirm the major findings presented in this report by fielding test hardware on actual Z shots.

24 POWER TRANSMISSION AND DISTRIBUTION↗

Machine Learning Algorithms for Matching Theories, Simulations, and Observations in Cosmology (Final Project)

The search for simple and elegant equations to explain and predict observable natural phenomena has been a driving force in scientific theory for several centuries. The great successes of Newton's laws, Maxwell's equations, the Schrodinger equation, and the theory of General Relativity have encouraged this perspective, and perhaps a beautiful equation comprising a “theory of everything” remains to be discovered. But now scientists are grappling with systems of ever-increasing complexity, fraught with nonlinearity, and with the quantities of interest often only indirectly observed. Nature may resist a simple description, and the most important discoveries of the next century may be complex theories with countless variables and parameters. The era of big data opens up a promising new approach to scientific discovery in this setting. The predictions of modern theories, even if complex or nonlinear, can be examined through detailed and computationally-intensive simulations that take days or weeks to run and fill petabytes of disk space. The upcoming generation of scientific instruments will provide petabytes of observations at unprecedented resolution and depth. The challenge is to compare data to simulations so as to test theories and identify those that best match the observations. The data are numerous and rich but are subject to noise and various systematic biases. The simulations are large and detailed but are so costly that the effective sample size is small. Moreover, the mapping from data to simulation to the parameters of interest is typically complicated and ill-conditioned. Although these challenges, and the solutions we propose, apply across the sciences, we will ground our efforts by focusing on cosmology. Here, we are truly entering the era of big data in several senses. Ever larger experiments survey larger and larger cosmological volumes, resulting in enormous amounts of pixel data to process and extract the information of cosmological interest. These include large imaging surveys, which collect all the light in broad wavelength ranges over significant fractions of the sky, and spectroscopic surveys, which measure the light as a function of wavelength to map out 3D distances. These experiments are designed to shed light on the big unanswered questions in cosmology. Distilling the petabytes of data into observed quantities for comparison with theory is a daunting task. But these large experiments do not only result in large amounts of data to analyze: if we wish to compare to theories of physics, then we need increasingly extensive predictions for the observed quantities as well, which requires ever-larger cosmological simulations that take substantial -- and at times prohibitive -- computational resources to produce. Our goal is to develop statistical and machine learning methods for using observed and simulated data to advance machine learning with applications cosmology. In particular, we focus our research efforts on the following tasks: The challenge for automated science is that it is computationally impossible and statistically dangerous to consider every possible model in order to find the best one. We will develop Bayesian Optimization based active-learning methods that accelerate both the execution of the simulations and the search for best-fitting parameters. The key idea is to make the simulations adaptive -- across resolutions, time, and parameters -- using the data to search as the simulation runs; Most ML methods operate on simple finite dimensional feature vectors. However, many cosmology and other science applications require ML methods that can operate on more complex objects as inputs or outputs such as functions, distributions, or sets and point clouds. Our goal is to develop efficient ML methods for this problem and demonstrate their applicability in Cosmology, Astrophysics, and other science problems.

79 ASTRONOMY AND ASTROPHYSICS↗

Simulating Catalysis with Realistic Pellet Geometries Using Mesoflow: A Case Study of Catalytic Propane Dehydrogenation

We present a case study of catalytic propane dehydrogenation with our open-source multiphysics solver, Mesoflow. The solver was developed to simulate reactive flow coupled to heterogeneous catalytic reactions and deactivation in the context of complex, mesoscale geometry. The method leverages cartesian block-structured adaptive mesh refinement to capture realistic catalyst microstructural features acquired directly from X-ray computed tomography data. A kinetic model for propane dehydrogenation and catalyst deactivation was developed based on temporal analysis of products (TAP) reactor experiments. The TAP reactor experiments allow for precise characterization of intrinsic kinetic reaction steps which are implemented into Mesoflow simulations to model the spatial and temporal evolution of reactants, products, and catalyst active sites. The short-term and long-term deactivation behavior is studied by using XCT data collected from fresh and aged catalyst pellets, which exhibit different microstructural features. This study employs time-splitting algorithms to connect disparate reaction and flow timescales, enabling the simulations to achieve realistic deactivation timescales on the order of minutes while the flow time-scales for small particles (100 microns) are several milliseconds. We also introduce a flexible automated python script that writes the necessary files to construct a Mesoflow simulation from user-created chemical mechanisms. We will also introduce a few new features that are added to Mesoflow such as higher order schemes, implicit chemistry integrators and the ability to run on AMD and NVIDIA graphics-processing-units.

AMReX↗

Insight into the deformation features and capacity loss mechanisms of lithium-ion pouch cells under spherical indentation conditions

Mechanical deformation under extreme conditions is one of the important reasons for the failure of lithium-ion batteries in automotive application. However, the deformation features and component failure of lithium-ion cells to external loading has never been a design consideration. Here, in this study, we conduct spherical indentation tests on a dozen of lithium-ion cells with different capacities under different control mode conditions to investigate their deformation features and capacity loss mechanisms. The experimental results show that, under mechanical deformation conditions, internal faults of cells occur in stages, and energy accumulation and sudden release are two key processes of cell's mechanical failure. The cells' state of charge is the main factor affecting their thermal runaway behaviors. In addition, a finite element model is developed to simulate the deformation features and the failure mechanism of key components of lithium-ion pouch cells; the 3D x-ray computed tomography is employed to demonstrate its internal configuration. With this model, the force-strain response, the deformation features as well as the size of the failure area of lithium-ion cells under spherical indentation conditions are accurately predicted. In 3D x-ray computed tomography images, unique mud cracks in cooper current collector are observed, and the influence mechanisms of the isolated fragments on the cell capacities are revealed. These results may provide useful information for the mechanical structure design of the components of lithium-ion pouch cells.

25 ENERGY STORAGE↗

Evaluation of a thermomechanical model for prediction of residual stress during laser powder bed fusion of Ti-6Al-4V

The build-up of residual stresses in a part during laser powder bed fusion provides a significant limitation to the adoption of this process. These residuals stresses may cause a part to fail during a build or fall outside the specified tolerances after fabrication. In the present work a thermomechanical model is used to simulate the build process and calculate the residual stress state for Ti–6Al–4V specimens built with continuous and island scan strategies. A layer agglomeration, or lumping, approach is used to speed up the computations. A material model is developed to naturally capture the strain-rate dependence and annealing behavior of Ti–6Al–4V at elevated temperatures. Conclusions from the thermomechanical simulations showed good agreement with synchrotron X-ray diffraction measurements used to determine the residual elastic strains in these parts. Yet, the experimental measurements showed higher residual strains for the specimen built with an island scan strategy; a trend not fully captured by the simulations. Parameter studies were performed to fully understand the advantages and limitations of the current simulation methodology. Reasons for both the computational and experimental findings are discussed.

36 MATERIALS SCIENCE↗

Identifying Entangled Physics Relationships Through Sparse Matrix Decomposition to Inform Plasma Fusion Design

We report a sustainable burn platform through inertial confinement fusion (ICF) has been an ongoing challenge for over 50 years. Mitigating engineering limitations and improving the current design involves an understanding of the complex coupling of physical processes. While sophisticated simulation codes are used to model ICF implosions, these tools contain necessary numerical approximation but miss physical processes that limit predictive capability. Identification of relationships between controllable design inputs to ICF experiments and measurable outcomes (e.g., neutron yield, neutron velocity, areal density) from performed experiments can help guide the future design of experiments and development of simulation codes, to potentially improve the accuracy of the computational models used to simulate ICF experiments. We use sparse matrix decomposition methods to identify clusters of a few related design variables. Sparse principal component analysis (SPCA) identifies groupings that are related to the physical origin of the variables (laser, hohlraum, and capsule). A variable importance analysis finds that in addition to variables highly correlated with neutron yield, such as picket power and laser energy, variables that represent a dramatic change of the ICF design, such as number of pulse steps, are also very important. The obtained sparse components are then used to train a random forest (RF) regression surrogate for predicting total yield. The RF performance on the training and testing data compares with the performance of the RF trained using all the design variables considered. This work is intended to inform design changes in future ICF experiments by augmenting the expert intuition and simulation results.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

A simplified parameterization of isoprene-epoxydiol-derived secondary organic aerosol (IEPOX-SOA) for global chemistry and climate models: a case study with GEOS-Chem v11-02-rc

Secondary organic aerosol derived from isoprene epoxydiols (IEPOX-SOA) is thought to contribute the dominant fraction of total isoprene SOA, but the current volatility-based lumped SOA parameterizations are not appropriate to represent the reactive uptake of IEPOX onto acidified aerosols. A full explicit modeling of this chemistry is however computationally expensive owing to the many species and reactions tracked, which makes it difficult to include it in chemistry–climate models for long-term studies. Here we present three simplified parameterizations (version 1.0) for IEPOX-SOA simulation, based on an approximate analytical/fitting solution of the IEPOX-SOA yield and formation timescale. The yield and timescale can then be directly calculated using the global model fields of oxidants, NO, aerosol pH and other key properties, and dry deposition rates. The advantage of the proposed parameterizations is that they do not require the simulation of the intermediates while retaining the key physicochemical dependencies. We have implemented the new parameterizations into the GEOS-Chem v11-02-rc chemical transport model, which has two empirical treatments for isoprene SOA (the volatility-basis-set, VBS, approach and a fixed 3% yield parameterization), and compared all of them to the case with detailed fully explicit chemistry. The best parameterization (PAR3) captures the global tropospheric burden of IEPOX-SOA and its spatiotemporal distribution ( R 2 =0.94 ) vs. those simulated by the full chemistry, while being more computationally efficient ( ~5 times faster), and accurately captures the response to changes in NO x and SO 2 emissions. On the other hand, the constant 3 % yield that is now the default in GEOS-Chem deviates strongly ( R 2 =0.66 ), as does the VBS ( R 2 =0.47 , 49% underestimation), with neither parameterization capturing the response to emission changes. With the advent of new mass spectrometry instrumentation, many detailed SOA mechanisms are being developed, which will challenge global and especially climate models with their computational cost. The methods developed in this study can be applied to other SOA pathways, which can allow including accurate SOA simulations in climate and global modeling studies in the future.

58 GEOSCIENCES↗

Advancing Catalytic Fast Pyrolysis Through Integrated Experimentation and Multi-Scale Computational Modeling

This webinar will highlight recent results from a multi-disciplinary research effort in which integrated reaction testing was coupled with particle- and reactor-scale computational modeling to advance catalytic fast pyrolysis (CFP) for the production of renewable hydrocarbon fuels. Data will be presented from a series of ex situ CFP experiments in which a fixed bed of Pt/TiO2 was utilized with co-fed H2 to upgrade woody biomass pyrolysis vapors. Further discussion will include the application of these data towards the development of (1) a multiscale simulation framework to de-couple apparent kinetics from both intraparticle and reactor-scale transport phenomena and (2) a finite element computational model to understand and predict thermal excursions during catalyst regeneration. Throughout the presentation, the speakers will emphasize synergistic outcomes derived from the collaborative approach and highlight ongoing research efforts to accelerate technology maturation.

29 ENERGY PLANNING, POLICY, AND ECONOMY↗

The Influence of Environment on Post-Detonation Chemistry and Debris Formation (Abbreviated Final Report: 20-SI-006)

Predicting, responding to, or interpreting the chemical record preserved in debris derived from nuclear events can be challenging due to chemical fractionation. Chemical fractionation is where different species of the evolving radionuclide inventory segregate and/or are lost from the system over the timescales of debris formation. Both historic data and recent research suggest that the interaction and character of the local environment may exert controls on chemical fractionation by influencing the cooling and evolution of the associated fireball as well as the composition of the vapor term and resultant speciation. Prior to this work, an integrated platform permitting dynamic and concurrent consideration of physical and chemical evolution of early time post-detonation event environments did not exist. Our work merged historic data and experimental approaches to support development of a computational framework able to simulate fundamental processes (e.g., entrainment of local environment, oxidation chemistry, and cooling time scales) that may perturb the radionuclide inventory captured in post-detonation debris. Work with historic debris confirmed that entrained environmental material affect debris composition, structure, and radionuclide incorporation. Complementary work utilizing a readily controllable and tunable benchtop setup (a plasma flow reactor) simulated the late cooling of a nuclear fireball (e.g., T < 6000 K) and bounded the sensitivity of actinide speciation and particle size distribution to variations in oxygen concentration and cooling rates. Concurrent laser ablation and laser heating experiments were used to investigate the chemistry and physics of processes occurring in vaporized and/or rapidly heated actinides and other elements in the presence of oxygen. A more computationally efficient microphysical model was developed for predicting and evolving size distributions of particles forming from mixed vapor terms and simulating particle formation processes under a variety of extreme conditions. Continued study of historic nuclear event film confirmed that shockwave data and physics codes agree to within the uncertainty of the data. Good agreement was achieved for thermal emission from an airburst, however the paucity of low-temperature molecular opacity data for mixtures of air, bomb debris, entrained dirt, and water vapor complicate agreement for more elaborate scenarios. A multiphysics code (ALE3D) was modified to bring the necessary physics and chemistry, including these new data and insights, onto a single platform. Code development included improved initialization of large physical systems, modernization of chemistry capabilities, and modifications to enable inclusion of particle transport.

07 ISOTOPE AND RADIATION SOURCES↗

CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

The effective operation of atomic layer deposition (ALD) feeding system is the premise of realizing specific ALD processes. In the present work, a detailed computational fluid dynamics (CFD) model of the feeding system has been developed and validated, which accounts for the roles of ALD valves and manifolds. A numerical simulation of the compressible fluid flow and heat/mass transfer within the feeding system was conducted. The dosing amounts and the spatiotemporal distributions of the precursors can be accurately predicted using the CFD model, as validated by experimental results. Different precursors, operating conditions, and structures of the feeding system were simulated and analyzed to examine the operating flexibility of the feeding system. The simulation results can be adopted as the upstream boundary conditions for simulations of the ALD process in the reaction chamber. The substrate-scale simulation indicates that the effect of the feeding system on the film deposition is highly related to the surface kinetics of ALD. The present work can serve as a guide for the development and optimization of different ALD-based processes via proper operation and even the design of the feeding system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗