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Microshutter Arrays for the JWST NIRSpec

A primary goal of the James Webb Space Telescope (JWST) is to characterize the birth and evolution of galaxies by imaging and spectroscopic observations. The telescope will use a Near Infrared Camera and a Near Infrared Spectrometer (NIRSpec) to carry out this program. The 3.6 x 3.6 field of NIRSpec will contain thousands of candidate high redshift galaxies. With such a high candidate object density, simultaneous multi-object capability is essential. This capability requires a programmable object selection mask to eliminate sky background and to reduce source confusion caused. We are developing a two-dimensional programmable field mask for NIRSpec. These masks employ micromechanical (MEMS) techniques to provide source selection over the NIRSpec field of view. The first flight format arrays (171x365 shutters) have been fabricated and full functionality of these arrays has been demonstrated in lab tests. Qualification tests are in progress to demonstrate readiness for flight, and will be complete in the early fall of 2006. In this paper, I describe performance of this critical new technology, and progress in making the devices ready for a 2008 delivery to ESA for inclusion in the NIRSpec.

Moseley, Samuel H.↗

Radiation Test Results for a MEMS Microshutter Operating at 60 K

The James Webb Space Telescope (JWST), the successor to the Hubble Space Telescope, is due to be launched in 2013 with the goal of searching the very distant Universe for stars that formed shortly after the Big Bang. Because this occurred so far back in time, the available light is strongly red-shifted, requiring the use of detectors sensitive to the infrared portion of the electromagnetic spectrum. HgCdTe infrared focal plane arrays, cooled to below 30 K to minimize noise, will be used to detect the faint signals. One of the instruments on JWST is the Near Infrared Spectrometer (NIRSPEC) designed to measure the infrared spectra of up to 100 separate galaxies simultaneously. A key component in NIRSPEC is a Micro-Electromechanical System (MEMS), a two-dimensional micro-shutter array (MSA) developed by NASA/GSFC. The MSA is inserted in front of the detector to allow only the light from the galaxies of interest to reach the detector and to block the light from all other sources. The MSA will have to operate at 30 K to minimize the amount of thermal radiation emitted by the optical components from reaching the detector array. It will also have to operate in the space radiation environment that is dominated by the MSA will be exposed to a large total ionizing dose of approximately 200 krad(Si). Following exposure to ionizing radiation, a variety of MEMS have exhibited performance degradation. MEMS contain moving parts that are either controlled or sensed by changes in electric fields. Radiation degradation can be expected for those devices where there is an electric field applied across an insulating layer that is part of the sensing or controlling structure. Ionizing radiation will liberate charge (electrons and holes) in the insulating layers, some of which may be trapped within the insulating layer. Trapped charge will partially cancel the externally applied electric field and lead to changes in the operation of the MEMS. This appears to be a general principle for MEMS. Knowledge of the above principle has raised the concern at NASA that the MSA might also exhibit degraded performance because, i) each shutter flap is a multilayer structure consisting of metallic and insulating layers and ii) the movement of the shutter flaps is partially controlled by the application of an electric field between the shutter flap and the substrate (vertical support grid). The whole mission would be compromised if radiation exposure were to prevent the shutters from opening and closing properly. energetic ionizing particles. Because it is located A unique feature of the MSA is that, as outside the spacecraft and has very little shielding, previously mentioned, it will have to operate at temperatures near 30 K. To date, there are no published reports on how very low temperatures (- 30K) affect the response of MEMS devices to total ionizing dose. Experiments on SiO2 structures at low temperatures (80 K) indicate that the electrons generated by the ionizing radiation are mobile and will move rapidly under the application of an external electric field. Holes, on the other hand, that would normally move in the opposite direction through the SiO2 via a "thermal hopping" process, are effectively immobile at low electric fields as they are trapped close to their generation sites. However, for sufficiently large electric fields (greater than 3 MV/cm) holes are able to move through the SiO2. The larger the field, the more rapidly the holes move. The separation of the electrons and holes leads to a reduced electric field within the insulating layer. To overcome this reduction in electric field, a greater external voltage will have to be applied that alters the normal operation of the device. This report presents the results of radiation testing of the MSA at 60 K. The temperature was higher than the targeted temperature because of a faulty electrical interconnect on the test board. Specifically, our goal was to determine whether the MSA would function propey after a TID of 200 krad(Si).

Rapchun, David A.↗

Testing Microshutter Arrays Using Commercial FPGA Hardware

NASA is developing micro-shutter arrays for the Near Infrared Spectrometer (NIRSpec) instrument on the James Webb Space Telescope (JWST). These micro-shutter arrays allow NIRspec to do Multi Object Spectroscopy, a key part of the mission. Each array consists of 62414 individual 100 x 200 micron shutters. These shutters are magnetically opened and held electrostatically. Individual shutters are then programmatically closed using a simple row/column addressing technique. A common approach to provide these data/clock patterns is to use a Field Programmable Gate Array (FPGA). Such devices require complex VHSIC Hardware Description Language (VHDL) programming and custom electronic hardware. Due to JWST's rapid schedule on the development of the micro-shutters, rapid changes were required to the FPGA code to facilitate new approaches being discovered to optimize the array performance. Such rapid changes simply could not be made using conventional VHDL programming. Subsequently, National Instruments introduced an FPGA product that could be programmed through a Labview interface. Because Labview programming is considerably easier than VHDL programming, this method was adopted and brought success. The software/hardware allowed the rapid change the FPGA code and timely results of new micro-shutter array performance data. As a result, numerous labor hours and money to the project were conserved.

Rapchun, David↗

Microshutter Arrays for the JWST NIRSpec

A primary goal of the James Webb Space Telescope (JWST) is to characterize the birth and evolution of galaxies by imaging and spectroscopic observations. The telescope will use a Near Infrared Camera and a Near Infrared Spectrometer (NIRSpec) to carry out this program. The 3.6' x 3.6' field of NIRSpec will contain thousands of candidate high redshift galaxies. With such a high candidate object density, simultaneous multi-object capability is essential. This capability requires a programmable object selection mask to eliminate sky background and to reduce source confusion caused. We are developing a two-dimensional programmable field mask for NIRSpec. These masks employ micromechanical (MEMS) techniques to provide source selection over the NIRSpec field of view. The first flight format arrays (171x365 shutters) have been fabricated and full functionality of these arrays has been demonstrated in lab tests.

Moseley, Samuel H.↗

High Contrast Programmable Field Masks for JWST NIRSpec

Microshutter arrays are one of the novel technologies developed for the James Webb Space Telescope (JWST). It will allow Near Infrared Spectrometer (NIRSpec) to acquire spectra of hundreds of objects simultaneously therefore increasing its efficiency tremendously. We have developed these programmable arrays that are based on Micro-Electro Mechanical Structures (MEMS) technology. The arrays are 2D addressable masks that can operate in cryogenic environment of JWST. Since the primary JWST science requires acquisition of spectra of extremely faint objects, it is important to provide very high contrast of the open to closed shutters. This high contrast is necessary to eliminate any possible contamination and confusion in the acquired spectra by unwanted objects. We have developed and built a test system for the microshutter array functional and optical characterization. This system is capable of measuring the contrast of the microshutter array both in visible and infrared light of the NIRSpec wavelength range while the arrays are in their working cryogenic environment. We have measured contrast ratio of several microshutter arrays and demonstrated that they satisfy and in many cases far exceed the NIRSpec contrast requirement value of 2000.

Kutyrev, Alexander S.↗

Programmable 2-D Addressable Cryogenic Aperture Masks

We are developing a two-dimensional array of square microshutters (programmable aperture mask) for a multi-object spectrometer for the James Webb Space Telescope (JWST). This device will provide random access selection of the areas in the field to be studied. The device is in essence a close packed array of square slits, each of which can be opened independently to select areas of the sky for detailed study.The device is produced using a 100-micron thick silicon wafer as a substrate with 0.5-micron thick silicon nitride shutters on top of it. Silicon nitride has been selected as the blade and flexure material because its stiffness allows thinner and lighter structures than single crystal Si, the chief alternative, and because of its ease of manufacture. The 100 micron silicon wafer is backetched in a high aspect ratio Deep Reactive Ion Etching (Deep RIE) to leave only a support grid for the shutters and the address electronics. The shutter actuation is done magnetically whereas addressing is electrostatic. 128x128 format microshutter arrays have been produced. Their operation has been demostarted on 32x32 subarrays. Good reliability of the fabrication process and good quality of the microshutters has been achieved. The mechanical behavior and optical performance of the fabricated arrays at cryogenic temperature are being studied.

Kutyrev, A. S.↗

Magnetic Characterization of Micro Shutters for James Web Space Telescope (JWST)

Summary of Research that was part of the grant: NASA NAG5 - 13405: Magnetic Characterization of Micro Shutters for James Web Space Telescope (JWST) Period: May 1 2003-October 31 2005 The above funding resulted in following major achievements related to microshutter system for JWST. 1. The original rectangular pattern of magnetic material was changed into magnetic striped pattern to prevent unnecessary twisting during the actuation. The Original geometry favored magnetic remanence vector being oriented along the longer side of the shutter and thus resulting torque caused out of plane twist. Stripe pattern minimizes the out of plane motion and thus prolongs the life-time of microshutter device. 2. We built a new magnetic system (magnetic rotisserie) allowing an accelerated life test of microshutters at various temperatures. This system identified that shutter are capable to withstand as many as several millions of actuating cycles. Our system also identified fabrication related features, like bowing with temperature, collisions with the frame due to misalignment, delaminating of the light shields due to uncontrolled voltage release and poorly fabricated light shields.

Wasilewski, P.↗

Technological Developments of NexGen Micro-Shutter Array (NGMSA) for the Future Habitable Worlds Observatory (HWO) Flagship Mission

We present the most up to date advancements in production, design, and performance of the NexGen Micro-Shutter Array (NGMSA) for Multi-object Spectroscopy (MOS), intended for the future Habitable Worlds Observatory (HWO) Flagship. A microshutter array functions as a programmable slit mask, to generate slits corresponding to sparsely distributed sources in the field of view of a telescope. In contrast to the magnetic/electrostatic microshutter arrays used in the James Webb Space Telescope (JWST), the NGMSA is fully operated by electrostatics, simplifying overall system. Our small pilot array proved its capability from FORTIS sounding rocket mission in 2019. As we are switching to a larger HWO flight size array process, we encounter multiple processing related issues. Also, there has been individual shutter level issue that impairs operation and performance. We will discuss those problems and strategies to overcome the challenges to achieve an on/off contrast of >1e5 with near 100% shutter operability.

Microshutter↗

Wavefront Sensing using a Multi-Object Spectrograph (NIRSpec)

An analysis is presented that illustrates how the JWST fine-phasing process can be carried out using NIRSpec data collected at the science focal plane. The analysis is based on a multi-plane diffraction model which properly accounts for the microshutter diffractive element placed at the first relay position of the spectrograph. Wavefront sensing results are presented based on both simulated as well as real data collected from the NASA Goddard Microshutter Testbed.

Dean, Bruce↗

Wavefront Sensing Using a Multi-Object Spectrograph (NIRSpec)

An analysis is presented that illustrates how the James Webb Space Telescope (JWST) fine-phasing process can be carried out using the Near-Infrared Spectrograph (NIRSpec) data collected at the science focal plane. The analysis considers a multi-plane diffraction model which properly accounts for the microshutter diffractive element placed at the first relay position of the spectrograph. Wavefront sensing results are presented based on data collected from the NASA Goddard Microshutter Testbed.

Dean, Bruce H.↗

NASA Tech Briefs, September 2009

opics covered include: Filtering Water by Use of Ultrasonically Vibrated Nanotubes; Computer Code for Nanostructure Simulation; Functionalizing CNTs for Making Epoxy/CNT Composites; Improvements in Production of Single-Walled Carbon Nanotubes; Progress Toward Sequestering Carbon Nanotubes in PmPV; Two-Stage Variable Sample-Rate Conversion System; Estimating Transmitted-Signal Phase Variations for Uplink Array Antennas; Board Saver for Use with Developmental FPGAs; Circuit for Driving Piezoelectric Transducers; Digital Synchronizer without Metastability; Compact, Low-Overhead, MIL-STD-1553B Controller; Parallel-Processing CMOS Circuitry for M-QAM and 8PSK TCM; Differential InP HEMT MMIC Amplifiers Embedded in Waveguides; Improved Aerogel Vacuum Thermal Insulation; Fluoroester Co-Solvents for Low-Temperature Li+ Cells; Using Volcanic Ash to Remove Dissolved Uranium and Lead; High-Efficiency Artificial Photosynthesis Using a Novel Alkaline Membrane Cell; Silicon Wafer-Scale Substrate for Microshutters and Detector Arrays; Micro-Horn Arrays for Ultrasonic Impedance Matching; Improved Controller for a Three-Axis Piezoelectric Stage; Nano-Pervaporation Membrane with Heat Exchanger Generates Medical-Grade Water; Micro-Organ Devices; Nonlinear Thermal Compensators for WGM Resonators; Dynamic Self-Locking of an OEO Containing a VCSEL; Internal Water Vapor Photoacoustic Calibration; Mid-Infrared Reflectance Imaging of Thermal-Barrier Coatings; Improving the Visible and Infrared Contrast Ratio of Microshutter Arrays; Improved Scanners for Microscopic Hyperspectral Imaging; Rate-Compatible LDPC Codes with Linear Minimum Distance; PrimeSupplier Cross-Program Impact Analysis and Supplier Stability Indicator Simulation Model; Integrated Planning for Telepresence With Time Delays; Minimizing Input-to-Output Latency in Virtual Environment; Battery Cell Voltage Sensing and Balancing Using Addressable Transformers; Gaussian and Lognormal Models of Hurricane Gust Factors; Simulation of Attitude and Trajectory Dynamics and Control of Multiple Spacecraft; Integrated Modeling of Spacecraft Touch-and-Go Sampling; Spacecraft Station-Keeping Trajectory and Mission Design Tools; Efficient Model-Based Diagnosis Engine; and DSN Simulator.

Source record↗

Engineered Edge Effect Stress Redistribution in Suspended Thin Film Stacks for Flatness Control

This paper presents the systematic study of edge effect stresses and interaction between thin film stacks to achieve flat suspended thin film structures. Finite element modeling (FEM) was used for rapid analysis of support structures on microshutter array (MSA) shutter blades. The design application aims to flatten the blades to provide ultra-high contrast to optical detectors using MSAs as field masks. This is the first comprehensive study of microscopic surface feature edge effect and film-to-film stress interaction in micro electromechanical systems (MEMS). This study demonstrates flattening of thin film stacks by stress redistribution by induced shear force at the edge of strategically designed reinforcement structures.

Thin Film MEMS↗

Simulation of MEMS for the Next Generation Space Telescope

The NASA Goddard Space Flight Center (GSFC) is developing optical micro-electromechanical system (MEMS) components for potential application in Next Generation Space Telescope (NGST) science instruments. In this work, we present an overview of the electro-mechanical simulation of three MEMS components for NGST, which include a reflective micro-mirror array and transmissive microshutter array for aperture control for a near infrared (NIR) multi-object spectrometer and a large aperture MEMS Fabry-Perot tunable filter for a NIR wide field camera. In all cases the device must operate at cryogenic temperatures with low power consumption and low, complementary metal oxide semiconductor (CMOS) compatible, voltages. The goal of our simulation efforts is to adequately predict both the performance and the reliability of the devices during ground handling, launch, and operation to prevent failures late in the development process and during flight. This goal requires detailed modeling and validation of complex electro-thermal-mechanical interactions and very large non-linear deformations, often involving surface contact. Various parameters such as spatial dimensions and device response are often difficult to measure reliably at these small scales. In addition, these devices are fabricated from a wide variety of materials including surface micro-machined aluminum, reactive ion etched (RIE) silicon nitride, and deep reactive ion etched (DRIE) bulk single crystal silicon. The above broad set of conditions combine to be a formidable challenge for space flight qualification analysis. These simulations represent NASA/GSFC's first attempts at implementing a comprehensive strategy to address complex MEMS structures.

Mott, Brent↗

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5 micrometers silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The microshutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

Loughlin, James P.↗

HST/STIS results on circumstellar disks and jets, future coronography and technology for IR multi-object spectroscopy

Results of studies of circumstellar disks and jets obtained by HST/STIS visible coronagraphy and UV spectroscopy, and by ground-based Fabry-Perot coronagraphy will be presented. Future improvements in coronagraphy will be discussed. The development of microshutter arrays as programmable multi-object selectors for the NGST near IR spectrograph will be described.

Woodgate, Bruce E.↗