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Results for “VACUUM SYSTEM”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 55 records · Page 3
All sourcesNASA NTRSDOE OSTI
NASA NTRS2007

Multiple internal seal right micro-electro-mechanical system vacuum package

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

Hayworth, Ken J.↗
NASA NTRS2008

Multiple internal seal ring micro-electro-mechanical system vacuum packaging method

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

Hayworth, Ken J.↗
NASA NTRS2017

New Mathematical Functions for Vacuum System Analysis

A new bivariate function has been found that provides solutions of integrals having the form u (sup minus eta) e (sup u) du which arise when developing predictions for the behavior of pressure within a rigid volume under high vacuum conditions in the presence of venting as well as sources characterized by power law transient decay over the range [0,1] for eta and for u greater than or equal to 0. A few properties of the new function are explored in this work. For instance the eta equals 1/2 case reproduces the Dawson function. In addition, a slight variation of the solution technique reproduces the exponential integral for eta equals 1. The technique used to generate these functions leads to an approach for solving a more general class of nonlinear ordinary differential equations, with the potential for identifying other new functions that solve other integrals.

Dawson Function↗
NASA NTRS1994

Depth Profiling Analysis of Aluminum Oxidation During Film Deposition in a Conventional High Vacuum System

The oxidation of aluminum thin films deposited in a conventional high vacuum chamber has been investigated using x-ray photoelectron spectroscopy (XPS) and depth profiling. The state of the Al layer was preserved by coating it with a protective MgF2 layer in the deposition chamber. Oxygen concentrations in the film layers were determined as a function of sputter time (depth into the film). The results show that an oxidized layer is formed at the start of Al deposition and that a less extensively oxidized Al layer is deposited if the deposition rate is fast. The top surface of the Al layer oxidizes very quickly. This top oxidized layer may be thicker than has been previously reported by optical methods. Maximum oxygen concentrations measured by XPS at each Al interface are related to pressure to rate ratios determined during the Al layer deposition.

Kim, Jongmin↗
NASA NTRS2000

Outgassing Total Mass Loss Obtained with Micro-CVCM and other Vacuum Systems

Several instruments including the Cahn Microbalance the Knudsen Cell, the micro-CVCM, and the vacuum Thermogravimetric Analyzer (TGA) were used in the testing of a graphite epoxy (GR/EP) composite that is proposed for use as a rigidizing element of an inflatable deployment system. This GR/EP will be cured in situ. The purpose of this testing is to estimate the gaseous production resulting from the curing of the GR/EP composite, to predict the resulting pressure, and to calculate the required venting. Every test was conducted under vacuum at 125 C for 24 hours. Upon comparison of the results, the ASTM E-595 was noted to have given readings that were consistently lower than those obtained using the other instruments, which otherwise provided similar results. The GR/EP was tested using several different geometric arrangements. This paper describes the analysis evaluating the molecular and continuum flow of the outgassing products issuing from the exit port of the ASTM E-595 system. The effective flow conductance provided by the physical dimensions of the vent passage of the ASTM E-595 system and that of the material sample among other factors were investigated to explain the reduced amount of outgassing released during the 24-hour test period

Scialdone, John J.↗
NASA NTRS2000

Outgassing Total Mass Loss Obtained with Micro-CVCM and Other Vacuum Systems

Several instruments including the Cahn Microbalance, the Knudsen Cell, the micro-CVCM, and the vacuum Thermogravimetric Analyzer (TGA) were used in the testing of a graphite epoxy (GR/EP) composite that is proposed for use as a rigidizing element of an inflatable deployment system. This GR/EP will be cured in situ. The purpose of this testing is to estimate the gaseous production resulting from the curing of the GR/EP composite, to predict the resulting pressure, and to calculate the required venting. Every test was conducted under vacuum at 125 C for 24 hours. Upon comparison of the results, the ASTM E-595 was noted to have given readings that were consistently lower than those obtained using the other instruments, which otherwise provided similar results. The GR/EP was tested using several different geometric arrangements. This paper describes the analysis evaluating the molecular and continuum flow of the outgassing products issuing from the exit port of the ASTM E-595 system. The effective flow conductance provided by the physical dimensions of the vent passage of the ASTM E-595 system and that of the material sample among other factors were investigated to explain the reduced amount of outgassing released during the 24-hour test period,

Scialdone, John↗
NASA NTRS1989

Introduction to total- and partial-pressure measurements in vacuum systems

An introduction to the fundamentals of total and partial pressure measurement in the vacuum regime (760 x 10 to the -16th power Torr) is presented. The instrument most often used in scientific fields requiring vacuum measurement are discussed with special emphasis on ionization type gauges and quadrupole mass spectrometers. Some attention is also given to potential errors in measurement as well as calibration techniques.

Outlaw, R. A.↗
NASA NTRS1973

Vacuum system for an infrared calibration facility.

Calibration facilities for large aperture (up to 56 cm diam) infrared radiometers require commeasurable size vacuum chambers with full thermal shrouding and ultraclean pumping systems. Such a facility has been fabricated and is described in detail. The chamber is 106 cm in diameter and 4.87 m long. It utilizes integral ion pumping for operation in the 1 microtorr region. Economic considerations and time constraints of the total system program required local fabrication and, therefore, nonproprietary-type flange sealing.The sealing mechanism used was the flat flange with aluminum wire effecting the seal. Included in the discussion is the description of the cryogen distribution system which allows complete constant temperature control of the several shroud structures.

Uhlin, J.↗
DOE OSTI2025

Combining molecular beam epitaxy and low-energy electron microscopy with in situ magnetic susceptibility measurements within an integrated ultrahigh vacuum system

Quantum two-dimensional materials, including ultrathin superconducting films, are of great current research interest. These films are typically fabricated under ultra-high vacuum (UHV) conditions and are sensitive to the environment—prone to oxidation and contamination when exposed to the atmosphere. This hampers the study of their intrinsic properties by standard ex situ techniques. Here, we present a variable-temperature mutual inductance probe system integrated under UHV with molecular beam epitaxy (MBE) synthesis and low-energy electron microscopy, enabling nondestructive in situ characterization of superconducting thin films. The system employs a reflection-type configuration and reaches a low temperature (∼4 K) using a high-cooling-power, vibration-isolated cryocooler. In conclusion, we demonstrate the system performance by measuring the superconducting critical temperature in a copper-oxide thin film.

2D materials↗
NASA NTRS1972

Preventing oil migration in vacuum systems

Method which uses a disposable metal gasket that is removed when system is deactivated eliminates oil migration from mechanical pump to other areas of the system.

Cridlin, M.↗
NASA NTRS1976

Field sampling fine-vacuum system

Small portable pumping station, consisting of roughing pump, air cooled diffusion pump, and liquid nitrogen cold trap, permits onsite sampling followed by quantitative laboratory analysis of residual gases.

Fickey, E. W.↗
NASA NTRS1977

Design and fabrication of a basic mass analyzer and vacuum system

A two-inch hyperbolic rod quadrupole mass analyzer with a mass range of 400 to 200 amu and a sensitivity exceeding 100 packs per billion has been developed and tested. This analyzer is the basic hardware portion of a microprocessor-controlled quadrupole mass spectrometer for a Gas Analysis and Detection System (GADS). The development and testing of the hyperbolic-rod quadrupole mass spectrometer and associated hardware are described in detail.

Judson, C. M.↗