Float Zone Workshop
Presentations made on space based float zone crystal growth and melt behavior are summarized and handouts illustrating the presentations are presented.
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Presentations made on space based float zone crystal growth and melt behavior are summarized and handouts illustrating the presentations are presented.
The role of float zone silicon in integrated circuits is surveyed. The problem of oxygen thermal donors and their inhomogeneous distribution is predicted to be a critical issue.
The present work provides an improved fluid flow and heat-transfer modeling of float-zone growth by introducing a RF heating model so that an ad hoc heating temperature profile is not necessary. Numerical simulations were carried out to study the high-temperature float-zone growth of titanium carbide single crystal. The numerical results showed that the thermocapillary convection occurring inside the molten zone tends to increase the convexity of the melt-crystal interface and decrease the maximum temperature of the molten zone, while the natural convection tends to reduce the stability of the molten zone by increasing its height. It was found that the increase of induced heating due to the increase of applied RF voltage is reduced by the decrease of zone diameter. Surface tension plays an important role in controlling the amount of induced heating. Finally, a comparison of the computed shape of the free surface with a digital image obtained during a growth run showed adequate agreement.
The energy-stability theory has been used to study the stability properties of thermocapillary convection in a half-zone model of the float-zone crystal-growth process. It is concluded that the energy theory provides a sufficient condition for stability to disturbances of arbitrary amplitude. Results of the computation of energy-stability limits are found to be in good agreement with experimentally measured bounds for oscillatory thermocapillary convection.
Energy-stability theory has been applied to investigate the stability properties of thermocapillary convection in a half-zone model of the float-zone crystal-growth process. An earlier axisymmetric model has been extended to permit nonaxisymmetric disturbances, thus determining sufficient conditions for stability to disturbances of arbitrary amplitude. The results for nonaxisymmetric disturbances are compared with earlier axisymmetric results, with linear-stability results for a geometry with an infinitely long aspect ratio and with stability boundaries from recent laboratory experiments.
The present study demonstrated that calculated thermocapillary convection in a non-cylindrical floating zone can now be compared with measured one, by considering the lens effect of the floating zone. Flow visualization and computer simulation of thermocapillary convection in a silicone oil zone and a molten zone in an NaNO3 rod were conducted. The calculated results agree very well with the measured ones, including the free surface shapes, the solid/melt interface shapes and the velocity fields.
In an effort to grow single crystal SiC fibers for seed crystals the following two growth methods have been coupled in this work: traveling solvent and laser heated floating zone to create the solvent-laser heated floating zone (Solvent-LHFZ) crystal growth method. This paper discusses the results of these initial experiments, which includes: source material, laser heating, and analysis of the first ever Solvent-LHFZ SiC crystals (synchrotron white beam x-ray topography confirmed).
A CO2 laser heated, floating zone fiber growth process was developed. The resulting Al2O3 fibers exhibited the high room temperature strengths for large diameter fibers as well as high specific creep rupture strengths observed at 1093 C and 1316 C (2000 F and 2400 F). Single crystal fibers of TiC and Y2O3 were also grown. An optical system was developed to focus four CO2 laser beams onto the surface of a feed rod permitting the formation of highly controllable molten zones. The optical system permitted energy densities and angle of incidence of the beams to be adjusted over wide ranges. This optical system was incorporated into a controlled atmosphere, fiber growth furnace. The two principal advantages of a CO2 laser heat source are that ambient atmospheres may be freely selected to optimize fiber properties and the laser has no inherent temperature limit, so extremely high melting point materials can be melted. Both advantages were demonstrated.
A ground-based experiment has validated the effectiveness of a noncontaminating method developed to reduce Marangoni (thermal capillary) convection in float-zone processing of corrosive materials in space microgravity. A drop of silicone oil 1.5 mm high was enclosed in a transparent box, and the small size of the drop was shown to suppress the 1-g thermal-buoyant convection. A vertical jet of air was blown tangentially over a vertical free surface, producing a viscous shear drag which opposes the Marangoni surface shear. A 66 percent reduction in Marangoni velocities was found in the lowest one-third of the drop, corresponding to the resolidification surface in a float-zone melt.
Several earlier (micro)g experiments have shown that time-dependent thermocapillary (Marangoni) convection is the major cause for the formation of dopant striations in floating-zone grown semiconductor crystals, at least in small-scale systems not employing RF heating. To quantify this correlation, a silicon floating-zone experiment was performed on the TEXUS36 flight (February 7, 1 998) in the monoellipsoid mirror furnace TEM02-ELLI. During the experiment, temperature fluctuations in the silicon melt zone and the microscopic growth rate were simultaneously measured. Temperature fluctuations of 0.5 C - 0.7 C with main frequencies between 0.1 Hz and 0.3 Hz were detectable. The microscopic growth rate fluctuated considerably around the average growth rate of 1 mm/min: rates from 4mm/min to negative values (backmelting) were observed. Dopant striations are clearly visible in the Sb-doped crystal. The frequencies associated with the dopant inhomogeneities correspond quite well with those of the temperature fluctuations and microscopic growth rates. 3D numerical simulations were performed to predict the optimum position of the temperature sensor, to evaluate characteristic temperature amplitudes and frequencies, and to give insight into the instability mechanisms of Maran-goni convection in this configuration. The simulations were in good agreement with the experimental values, showing temperature fluctuations with frequencies f? 0.25 Hz and amplitudes up to 1.8 C at a position equivalent to that of the sensor tip in the experiment.
Several pg experiments on sounding rockets and the Space Shuttle have shown that time-dependent thermocapillary (Marangoni) convection is the major cause for the formation of dopant striations in floating-zone grown semiconductor crystals, at least in small-scale systems not employing RF heating. To quantify this correlation, a silicon floating-zone experiment was performed during the TEXUS36 flight (February 7, 1 998) in the monoellipsoid mirror furnace TEM02-ELLI. During the experiment, temperature fluctuations in the silicon melt zone and the microscopic growth rate were simultaneously measured. Temperature fluctuations of 0.5 C - 0.7 C with main frequencies between 0.1 Hz and 0.3Hz were detectable. The microscopic growth rate fluctuated considerably around the average growth rate of 1 mm/min: rates from 4mm/min to negative values (backmelting) were observed. Dopant striations are clearly visible in the Sb-doped crystal. They were characterized by Spreading Resistance measurements and Differential Interference Contrast microscopy. The frequencies associated with the dopant inhomogeneities correspond quite well with those of the temperature fluctuations and microscopic growth rates. 3D numerical simulations were performed to predict the optimum position of the temperature sensor, to evaluate characteristic temperature amplitudes and frequencies, and to give insight into the instability mechanisms of Marangoni convection in this configuration. The simulations were in good agreement with the experimental values, showing temperature fluctuations with frequencies? 0.25 Hz and amplitudes up to 1.8 C at a position equivalent to that of the sensor tip in the experiment.
USA Several microgravity experiments on sounding rockets and the Space Shuttle have shown that time-dependent thermocapillary (Marangoni) convection is the major cause for the formation of dopant striations in floating-zone grown semiconductor crystals, at least in small-scale systems not employing RF heating. To quantify this correlation, a silicon floating-zone experiment was performed during the TEXUS36 flight (February 7, 1998) in the monoellipsoid mirror furnace TEM02-ELLI. During the experiment, temperature fluctuations in the silicon melt zone and the microscopic growth rate were simultaneously measured. Temperature fluctuations of 0.5 C - 0.7 C with main frequencies between 0.1 Hz and 0.3 Hz were detectable. The microscopic growth rate fluctuated considerably around the average growth rate of 1 mm/min: rates from 4 mm/min to negative values (backmelting) were observed. Dopant striations are clearly visible in the Sb-doped crystal. They were characterized by Spreading Resistance measurements and Differential Interference Contrast microscopy. The frequencies associated with the dopant inhomogeneities correspond quite well with those of the temperature fluctuations and microscopic growth rates. 3D numerical simulations were performed to predict the optimum position of the temperature sensor, to evaluate characteristic temperature amplitudes and frequencies, and to give insight into the instability mechanisms of Marangoni convection in this configuration. The simulations were in good agreement with the experimental values, showing temperature fluctuations with frequencies ? 0.25 Hz and amplitudes up to 1.8 C at a position equivalent to that of the sensor tip in the experiment.
Understanding the mechanism of detached Bridgman growth and establishing the growth of large scale germanium-silicon crystals by the float-zone technique are the key points of the project "RDGS - Reduction of Defects in Germanium-Silicon". The contact angle of the melt and the growth angle of the crystal are essential parameters which allow a controlled use of detached growth. The contact angle was determined for a variety of different substrates and melt compositions; pBN showed the highest value for pure germanium as well as for germanium-rich GeSi melts. The growth angle of Ge(sub 0.95) Si(sub 0.05) was measured to be 8.5-10.5 degrees which concurs with the values of pure germanium and silicon, respectively. The temperature dependence and the concentration dependence of the surface tension were determined for concentrations up to 10at% silicon (partial derivative (gamma)/partial derivative T=-0.08 (raised dot) 10(exp -3)N/m (raised dot) K, partial derivative (gamma)/partial derivative (C)=2.2 (raised dot) 10(exp -3)N/m (raised dot) at%). Using these values, the critical Marangoni number indicating the transition to time-dependent thermocapillary flow will be exceeded for the growth of large scale float-zone crystals onboard the ISS. Therefore, suitable tools for flow control are required.
Floating zone technique for vanadium carbide single crystal growth
It has been demonstrated in floating-zone configurations utilizing silicone oil and nitrate salts that mechanically induced vibration effectively minimizes detrimental, gravity independent, thermocapillary flow. The processing parameters leading to crystal improvement and aspects of the on-going modeling effort are discussed. Plans for applying the crystal growth technique to commercially relevant materials, e.g., silicon, as well as the value of processing in a microgravity environment are presented.
Heat and mass transfer in semiconductor float-zone processing are strongly influenced by convective flows in the zone, originating from sources such as buoyancy convection, thermocapillary (Marangoni) convection, differential rotation, or radio frequency heating. Because semiconductor melts are conducting, flows can be damped by the use of static magnetic fields to influence the interface shape and the segregation of dopants and impurities. An important objective is often the suppression of time-dependent flows and the ensuing dopant striations. In RF-heated Si-FZ - crystals, fields up to O.STesla show some flattening of the interface curvature and a reduction of striation amplitudes. In radiation-heated (small-scale) SI-FZ crystals, fields of 0.2 - 0.5 Tesla already suppress the majority of the dopant striations. The uniformity of the radial segregation is often compromised by using a magnetic field, due to the directional nature of the damping. Transverse fields lead to an asymmetric interface shape and thus require crystal rotation (resulting in rotational dopant striations) to achieve a radially symmetric interface, whereas axial fields introduce a coring effect. A complete suppression of dopant striations and a reduction of the coring to insignificant values, combined with a shift of the axial segregation profile towards a more diffusion-limited case, are possible with axial static fields in excess of 1 Tesla. Strong static magnetic fields, however, can also lead to the appearance of thermoelectromagnetic convection, caused by the interaction of thermoelectric currents with the magnetic field.
Our previous experiments with NaNO3 float-zones revealed that steady thermocapillary flow can be balanced/offset by the controlled surface streaming flow induced by end-wall vibration. In the current experiments we are examining the effects of streaming flow on steadying/stabilizing nonsteady thermocapillary flow in such zones. To this effect we have set up a controlled NaNO3 half-zone experiment, where the processing parameters, like zone dimensions and temperature gradients, can be easily varied to generate nonsteady thermocapillary flows. In the present paper we present preliminary results of our investigations into stabilizing such flows by employing end-wall vibration.
Our previous experiments with NaNO3 float-zones revealed that steady thermocapillary flow can be balanced/offset by the controlled surface streaming flow induced by end-wall vibration. In the current experiments we are examining the effects of streaming flow on steadying/stabilizing nonsteady thermocapillary flow in such zones. To this effect we have set up a controlled NaNO3 half-zone experiment, where the processing parameters, like zone dimensions and temperature gradients, can be easily varied to generate nonsteady thermocapillary flows. In the present paper we present preliminary results of our investigations into stabilizing such flows by employing endwall vibration.