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Carbon Utilization and Storage Partnership of the Western United States

This technical report documents research conducted under DOE Award No. DE-FE0031837 focused on evaluating the feasibility of carbon capture, utilization, and storage (CCUS) systems in the central and western United States. The project integrated geologic characterization, reservoir simulation, infrastructure modeling, and economic analysis to assess CO₂ storage potential near industrial sources and develop strategies for transport and sequestration. The work included subsurface modeling, risk assessment, monitoring and verification (MRV) planning, and evaluation of regulatory pathways such as EPA Underground Injection Control (UIC) Class VI permitting and IRS 45Q tax credit eligibility. Results demonstrate the viability of multiple storage approaches, including saline formations, enhanced coalbed methane recovery, and basalt mineralization, supported by data-driven workflows and regional analyses. The project also produced permitting templates, technology transfer activities, and stakeholder engagement efforts to support deployment readiness. These findings contribute to the development of scalable, economically viable CCUS systems and provide a repeatable framework for future carbon management projects.

20 FOSSIL-FUELED POWER PLANTS

Thermo-Poro-Mechanical Modeling of RTV Intumescence

Room temperature vulcanizing (RTV) silicone is a high-temperature adhesive used as a gap-filler between heatshield tiles in numerous entry missions. Its propensity to intumesce, or swell upon exposure to heat, is a well-known effect that needs to be carefully quantified during design. At tile interfaces of charring ablators, intumescence, combined with differential recession, could cause the gap filler to protrude past the ablator outer mold line, forming a “fence”. Fencing can in turn cause transition to turbulence of the flow wetting the heat shield, leading to augmented surface heating. Recent experiments conducted at the Plasmatron X facility, the high enthalpy wind tunnel of the Center for Hypersonics and Entry Systems Studies, have shown prominent fencing of RTV gap fillers in PICA, under both nitrogen and air plasmas. Similar observations are well known in the arcjet literature. Further experiments under controlled environment, performed using in situ X-ray micro-computed tomography (micro-CT) at the Advanced Light Source (ALS), have shown heating rate-dependent swelling and shrinkage of RTV during pyrolysis. To simulate RTV intumescence, a novel model was introduced in the Porous Materials Analysis Toolbox based on OpenFOAM, PATO, to account for pore-pressure buildup within both closed- and open-pores. The governing equation for the thermo-poro-mechanical response were developed, assuming linear elasticity for the charring silicone. A new multi-pyrolysis model that tracks non-monotonic advancement of material properties with pyrolysis was proposed. This model addresses the limitations of state-of-the-art ablator models to capture the different stages of thermal degradation and coupled thermomechanics. Swelling of RTV was simulated using the new thermo-poro-mechanical model and compared against in situ micro-CT data. Results showed good agreement in intumescence height and temperature profiles at all heating rates, indicating that the key factor contributing to RTV swelling is the internal pressure build-up within closed- and open-pores. As RTV is cured into a soft (rubbery) compound with low-porosity and permeability, initial temperature increase and pyrolysis gas production cause a significant increase of internal pressure, causing a pronounced volume growth. As thermal degradation progresses, rigidization of the silicone occurs due to char hardening which counteract volume shrinkage after gas pressure relief. Overall, our model shows that accounting for changes in properties such porosity, permeability and key thermomechanical coefficients is crucial for capturing the RTV volume change during ablation and enable a predictive capability for heatshield tile interface response. A plan for future calibration of thermomechanical properties evolution during degradation is discussed, as a key next step to close the new model.

RTV

Thermo-Poro-Mechanical Modeling of RTV Intumescence

Room temperature vulcanizing (RTV) silicone is a high-temperature adhesive used as a gap-filler between heatshield tiles in numerous entry missions. Its propensity to intumesce, or swell upon exposure to heat, is a well-known effect that needs to be carefully quantified during design. At tile interfaces of charring ablators, intumescence, combined with differential recession, could cause the gap filler to protrude past the ablator outer mold line, forming a “fence”. Fencing can in turn cause transition to turbulence of the flow wetting the heat shield, leading to augmented surface heating. Recent experiments conducted at the Plasmatron X facility, the high enthalpy wind tunnel of the Center for Hypersonics and Entry Systems Studies, have shown prominent fencing of RTV gap fillers in PICA, under both nitrogen and air plasmas. Similar observations are well known in the arcjet literature. Further experiments under controlled environment, performed using in situ X-ray micro-computed tomography (micro-CT) at the Advanced Light Source (ALS), have shown heating rate-dependent swelling and shrinkage of RTV during pyrolysis. To simulate RTV intumescence, a novel model was introduced in the Porous Materials Analysis Toolbox based on OpenFOAM, PATO, to account for pore-pressure buildup within both closed- and open-pores. The governing equation for the thermo-poro-mechanical response were developed, assuming linear elasticity for the charring silicone. A new multi-pyrolysis model that tracks non-monotonic advancement of material properties with pyrolysis was proposed. This model addresses the limitations of state-of-the-art ablator models to capture the different stages of thermal degradation and coupled thermomechanics. Swelling of RTV was simulated using the new thermo-poro-mechanical model and compared against in situ micro-CT data. Results showed good agreement in intumescence height and temperature profiles at all heating rates, indicating that the key factor contributing to RTV swelling is the internal pressure build-up within closed- and open-pores. As RTV is cured into a soft (rubbery) compound with low-porosity and permeability, initial temperature increase and pyrolysis gas production cause a significant increase of internal pressure, causing a pronounced volume growth. As thermal degradation progresses, rigidization of the silicone occurs due to char hardening which counteract volume shrinkage after gas pressure relief. Overall, our model shows that accounting for changes in properties such porosity, permeability and key thermomechanical coefficients is crucial for capturing the RTV volume change during ablation and enable a predictive capability for heatshield tile interface response. A plan for future calibration of thermomechanical properties evolution during degradation is discussed, as a key next step to close the new model.

silicone intumescence

Interaction of magnetic fields with spinons in a fractionalized state

The 4d-electron trimer lattice Ba₄Nb₁₋ₓRu₃₊ₓO₁₂ exhibits either a quantum spin liquid (QSL) or a heavy-fermion strange metal (HFSM) phase, depending on Nb content. In the QSL state, itinerant spinons act as effective heat carriers, enhancing thermal conductivity. Strikingly, applying a magnetic field up to 14 T causes an abrupt, up-to-5000% increase in heat capacity below 150 mK, disrupting the linear temperature dependence typical of both phases. Meanwhile, AC susceptibility and electrical resistivity remain nearly unchanged, while thermal conductivity drops by up to 40% below 4 K. These results suggest spinons, despite being charge-neutral, are highly sensitive to magnetic fields at low temperatures. We propose that the magnetic field could induce Anderson localization of spinons, creating emergent non-magnetic two-level systems responsible for the Schottky-like anomaly in heat capacity. These findings point to a previously unexplored regime of spinon dynamics, potentially governed by field-induced localization and distinct from conventional magnetic or transport signatures.

Condensed-matter physics

3D Woven Mid-Density Carbon Phenolic (3MDCP) Full-Scale Heatshield Development for Mars Sample Return (MSR) Earth Entry System (EES)

The Mars Sample Return (MSR) mission will be returning samples of Martian soil to Earth. The samples will be returned in the Earth Entry System (EES). The EES capsule is protected by a new thermal protection system; the 3-Dimensionally Woven, Mid-Density, Carbon Phenolic (3MDCP) material which is derived from the Heatshield for Extreme Entry Environment Technology (HEEET). The baseline 3MDCP design is a single piece thermal protection system that avoids the manufacturing and certification challenges associated with a tiled configuration. A 3MDCP heatshield begins as a flat woven preform that is formed to the final heatshield shape and then infused with phenolic resin. A NASA Ames lead team, in collaboration with Spirit Textiles (formerly TEAM Inc.), Fiber Materials Inc. (FMI, a Spirit AeroSystems Company), and Kratos SRE, has been developing and demonstrating the processes to fabricate the 3MDCP heatshield and characterize the resulting properties. The process of forming the flat woven preform into the final heatshield shape, a sphere-cone geometry with a 52.5° cone angle, involves local but substantial movement of the yarns in the weave. This results in continuous fibers across the single piece heatshield, albeit with property variations between different regions of the heatshield. This presentation will provide a high-level status of 3MDCP development for the MSR EES heatshield. This will include an overview of the manufacturing processes with an emphasis on the impact of forming on fiber orientation, material properties, and performance. Results comparing preliminary formed and flat materials will be shown. Additionally, the presentation will layout the broader plan for property testing and tie-in to aerothermal performance.

Peter Edward Marshall

Testing and Validation of Wireless Communication Architecture for Heliostat Fields: SIPS Final Report

This work focuses on the development and testing of a low-cost wireless communication system for heliostat fields, enabling significant capital costs reductions for concentrating solar thermal systems. Outputs of this work include a working demonstration of a multi-node communication system, clear reporting of system performance, and technical documentation of system development and architecture for reproducibility. Through this process, an open-source repository was created for manufacturing hardware at ~$30/heliostat. The system includes software for cybersecurity, achieving sub-second communication latencies and derisking of hardware for eventual scale-up to tens of thousands of heliostats. While the system is not currently off-the-shelf ready, there is now a clearly defined pathway for scaling up and completing the commercial development process.

14 SOLAR ENERGY

Fast lithium ion diffusion in brownmillerite Li x Sr 2 Co 2 O 5

Transition metal oxides not only exhibits novel magnetic properties but also provides outstanding ionic transports. Ionic conductors have great potential for interesting tunable physical properties via ionic liquid gating and novel energy storage applications such as all-solid-state lithium batteries. In particular, low migration barriers and high hopping attempt frequency are the keys to achieve fast ion diffusion in solids. Taking advantage of the oxygen-vacancy channel in Li x Sr 2 Co 2 O 5 , we show that migration barriers of lithium ion are as small as 0.28–0.17 eV depending on the lithium concentration rates. Our first-principles calculation also investigated hopping attempt frequency and concluded the room temperature ionic diffusivity and ion conductivity are high as 10 −7 –10 −6 cm 2 s −1 and 10 −3 –10 −2 Scm −1 , respectively, which outperform most of perovskite-type, garnet-type, and sulfide Li-ion solid-state electrolytes. This work proves Li x Sr 2 Co 2 O 5 as a promising super-ionic conductor.

Crystallographic defects

Model-based, in-situ, non-destructive qualification and certification of parts made by autonomous additive manufacturing

To address the significant productivity challenges associated with the qualification and certification (Q&C) tasks of additively manufactured (AM) parts, which have traditionally relied on rigorous post‐build inspection and testing, we propose an integrated framework that combines model‐based qualification and certification (MBQ&C) with autonomous additive manufacturing (AAM). MBQ&C employs high‐fidelity predictive models, developed within the Integrated Computational Materials Engineering (ICME) paradigm, to simulate process–structure–property–performance relationships for assessing a part’s fitness for use. Since predictive models are commonly machine learning (ML)-based or reduced-order surrogates of validated physics models, they run efficiently, enabling timely inference. In parallel, the self-driving AAM utilises ML-based adaptive, closed‐loop control strategies to avoid, mitigate, or repair defects and anomalies during fabrication, thereby increasing the likelihood of producing acceptable parts. A key feature of the combined AAM-MBQ&C framework is that predictive models explicitly incorporate defects or anomalies that persist after the build, using instance-specific data captured via in-situ sensing. This customisation enables a build‐specific assessment of fitness for use, rather than relying on nominal or generic parameters. Such individualised evaluation provides a robust basis for Q&C-related acceptance decisions relating to each build. Additionally, the rapid solution capabilities of ML or reduced-order models enable the determination of a part’s suitability for service shortly after build completion. As the framework matures, it has the potential to substantially reduce reliance on conventional point‐design approaches—such as time‐consuming post‐build computed tomography scanning and costly destructive testing. Thus, the AAM-MBQ&C framework represents a transformative, scalable strategy for quality assurance of AM components, as parts produced within a stable, validated, and certified envelope can be certified with reduced testing. Key benefits include: (1) significant gains in Q&C productivity through efficient, model-centric assessment; (2) performance-based classification of defects into critical and non-critical categories; (3) the ability to predict potential deviations in the performance of parts affected by real-time, adaptive process control interventions relative to those produced under a certified process, and (4) the enabling of virtual Q&C for service environments that are difficult, hazardous, or impractical to access or reproduce experimentally. Collectively, these capabilities strengthen the business case for AM, particularly for high‐consequence and mission‐critical applications. Finally, although this work focuses on powder-based AM, the proposed techniques could be extended to AM processes employing alternative feedstock forms.

Gunasegaram, Dayalan

Evaluation of U10Mo Fuel Plate Performance Modeling Over Hot Isostatic Press and Hydraulic Bending for MURR DDE Plates

The United States High Performance Research Reactor Program’s objective is to reduce the amount of highly enriched uranium currently implemented in research reactors. The conversion of these research reactors requires designing a monolithic U10Mo plate fuel, with the fuel plate geometry being dependent on each research reactor. The process of forming the plates includes a hot isostatic pressing (HIP) to manufacture a prototypic plate. In the case of the Missouri University Research Reactor (MURR) design demonstration element (DDE) plate manufacture, plates that have been through HIP are then curved using dies and a hydraulic press to impart the desired curvature. Both fabrication processes impart residual stresses into each fuel plate region, with the curvature of the plates taking some regions of the fuel plate up to their material yield stresses, accompanied by plastic strain. The amount of plastic strain and stress imparted onto each MURR DDE plate is determined by the radius of curvature, thickness of each region, and overall width of the fuel plates. Furthermore, this work aims to predict the yield stresses and strain using ABAQUS to simulate the proposed fabrication process of the MURR DDE plates, accompanied by discussion over the stresses and strains as to their relation to nuclear fuel performance and the impact they will have during early irradiation.

ABAQUS

X-ray tomography of damage dynamics in advanced materials using a laser wakefield accelerator

Additively manufactured (AM) metals offer the potential for customizable, cost-effective components, but qualification and certification are crucial. Key to this process is understanding pore dynamics under stress, typically analyzed using micro-computed tomography. This study introduces laboratory-scale “betatron” x-rays from laser wakefield acceleration as a high-throughput alternative for x-ray tomography of advanced materials, such as AM AlSi10Mg alloys. Coupled with 3D finite element modeling, this method provides detailed insights into stress-porosity interactions. The approach delivers high-resolution scans, revealing that pore shape and local triaxiality significantly influence fracture dynamics, supporting advanced material characterization. This work also demonstrates the potential and versatility of laser-betatron x-ray μCT for generating large datasets to accelerate our understanding of the stochastic, process-specific nature of pore formation in AM alloys.

Senthilkumaran, Vigneshvar

Optimization of X-ray Absorbers for High-Resolution TES Detectors in NewATHENA X-IFU

NewATHENA’s X-ray Integral Field Unit (X-IFU) uses a large-format array of Transition Edge Sensor (TES) microcalorimeters coupled with absorbers made of gold and bismuth providing 4 eV FWHM resolution up to 7 keV in the 0.2- 12 keV band. X-ray absorbers must be thick enough for photon absorption, maintain low heat capacity for energy resolution, and have good thermalization properties. The X-IFU requires total Quantum Efficiency (QE) of 96%, 87%, and 63% at 1, 7, and 9.5 keV, respectively. Optimal thicknesses are 1.05 µm gold and 5.5 µm bismuth to achieve 0.731 pJ/K at 90 mK and 87% QE at 7 keV. While typical TES absorbers are 3-4 µm thick, producing the required 5.5 µm Bi absorbers via standard electroplating creates enlarged grains and surface roughness. The increased roughness and grain size variability produced with our standard recipe have resulted in instances of 1) low energy spectral tails 2) spectral broadening of the energy resolution and 3) thermal shorts between pixels when a large grain bridges the gap between absorbers. In this study, we have introduced a new fabrication process and altered the morphology of the thick Bi through changes in the electroplating process. The process changes are intended to address all three issues as well as reduce particulate contamination observed on the finished detector arrays.

Absorber

Next-Generation Hard X-ray Missions: SuperHERO and HEROIX

High-energy X-ray observations have transformed our understanding of astrophysical systems where non-thermal processes dominate, from shock-accelerated particles in supernova remnants to relativistic jets and hot coronae in active galactic nuclei. NuSTAR’s pioneering focusing images of the hard X-ray sky have demonstrated the immense scientific potential of this band, while also highlighting how limited angular resolution constrains our ability to fully characterize complex physical processes in faint extended sources and resolving faint sources in crowded sky regions. In this presentation, I will discuss a pathway to overcome these challenges through NASA Marshall Space Flight Center’s replicated NiCo full-shell X-ray mirror technology. Specifically, I will discuss the SuperHERO hard X-ray telescope to achieve better than 10-arcsecond half-power diameter (HPD) angular resolution on a balloon flight observing the Crab Nebula, and the High EneRgy Observatory for Imaging X-rays (HEROIX) Medium-Class Mission concept to achieve an integrated effective area of 570 cm2 at 30 keV with 5 arcsec HPD angular resolution.

AGN

Gear Test Assembly - Experimental Testing and Analysis of Gears and Bearings - FY2026

The Gear Test Assembly (GTA) is an experimental test apparatus built and installed in the Mechanisms and Engineering Test Loop (METL) at Argonne National Laboratory (ANL). While designed to accommodate a variety of components intended for use in advanced compact in-vessel transfer machine, the focus of GTA been the testing of large radial spur gears. The performance of the components used in GTA motivates the choices made in the design, components, and material choices for the forthcoming METL test articles; the Gripper Test Assembly (GrTA), and the Bearing Test Assembly (BTA). To date, GTA has completed nine experimental testing campaigns and achieved over 21 million revolutions under prototypic sodium fast reactor loads and operating conditions. This report provides an overview and results for the two most recent experiments Campaign #8 and Campaign #9. `Campaign #8 was the first campaign to make use of a set of nickel alloy radial spur gears, made from Hastelloy C-22HS, and combined with heat-treated tapered roller bearings. The bearings and torque profile used allowed Campaign #8 to be directly compared with Campaign #1 where Inconel 718 gears were used instead. Campaign #8 attained 1,058,880 shaft revolutions within 23% of the 1,314,855 revolutions achieved in Campaign #1. These results demonstrate that the heat-treated tapered roller bearings show consistent increased lifetimes, approximately three times longer than for non heat-treated taper rollers, and that the particular material of the gear does not play a substantial role in performance. Similar to Campaign #7 where bearing failure resulted in fragmentation and transport of bearing material into the gear teeth led to tooth damage in the Inconel gears, a similar process led to the damage of the Hastelloy gears. Subsequent NDE analysis showed that the damage was only limited to the tooth surface and does not extend into the gear interiors. Based on the NDE reports, the Hastelloy gears can be reconditioned and put back into service for future campaigns as was done for the Inconel gears. Reconditioned Inconel 718 gears damaged in Campaign #7 were returned to service in Campaign #9 and paired with non heat-treated tapered roller bearings. In Campaign #9 a novel set of operating conditions were implemented whereby the gears and bearings were cycled between hot, submerged refueling conditions where fuel handling operations occurred and cold, dry, and inert conditions where the sodium was drained and the vessel was allowed to cool simulating long, ex-vessel storage of the fuel handling machine. A total of eight of these operating cycles were achieved before a bearing failure occurred after the accumulation of 475,692 shaft revolutions were achieved. During Campaign #9, one of the drive motors was damaged and over the course of a 240 day standby period, the entire GTA drive system was upgraded from a 480VAC system to a 240VAC system that provided the opportunity to consolidate wall-space in the METL facility and provide more space for additional test articles being installed in the coming year. The over 475,000 shaft revolutions achieved in Campaign #9 eclipses the previous record for lifetime of non heat-treated tapered roller bearings held by Campaign #3 of 392,000 shaft revolutions. Further analysis and future campaigns hope to shed light on the cause of this approximately 17% increase in lifetime.

42 ENGINEERING

The role of fast and slow dynamics in nonlinear resonant ultrasound spectroscopy of consolidated granular materials

Abstract Elastic nonlinearity observed in consolidated granular media can be attributed to the combination of slow and fast effects, which give rise to hysteresis and relaxation of both modulus and damping after the sample is perturbed. A consequence is a high level of complexity in the measurements of the sample linear and nonlinear elastic parameters. The results of experiments are dependent on the experimental protocol that is adopted to measure the relevant quantities and it is hard to quantify parameters with accuracy and repeatability. Here we focus on examining Nonlinear Resonant Ultrasound Spectroscopy, showing experimentally the role of slow dynamics in the process and quantifying/discussing its influence on the quantification of nonlinearity. We also propose a model to describe the process, which shows that different contributions to nonlinearity (e.g., classical and hysteretic) could be due to physical features (defects) relaxing with different relaxation times.

Science & Technology - Other Topics

Stationary Testing of a Pulse Tube Cryocooler Designed to Rotate at 6800 RPM with the Superconducting Rotor of an Electric Machine

Electrified aircraft are being developed to increase the efficiency and reduce the cost of operating subsonic transport aircraft. Achieving a substantial impact necessitates focusing on single- and twin-aisle aircraft which use propulsion systems with >20 MW ratings. For these aircraft, multi-MW superconducting electric machines are being developed due to their high specific power and high efficiency. Most of these electric machines employ superconductors on their rotor, thereby requiring cryogenic cooling of the rotating system. An attractive solution is to conductively cool the rotor using a cryocooler that rotates with the rotor. NASA has been developing a 50 K pulse tube cryocooler for its High Efficiency Megawatt Motor (HEMM) that can operate while rotating at up to 6,800 rpm. The first non-rotating tests of the fully assembled HEMM cryocooler have been completed, and initial testing has yielded a no-load temperature of 112 K. A small helium leak into the vacuum system has been identified as the major bottleneck to performance, and based on measurements with the motor turned off there is an observed vacuum-side heat leak of approximately 30 W at 115 K. Immediate next steps for testing are to locate and mitigate the apparent helium leaks into the vacuum chamber. Thus far, compressor performance and the apparent heat lift after correcting for the heat leak are on par with expectations.

Electrified Aircraft Propulsion

High-Intensity UV Exposure for the Rapid Screening of Silicon Photovoltaic Architectures

Advanced Si photovoltaic architectures incorporate different materials and processing pathways that influence degradation modes. Ultraviolet-induced degradation (UVID) is an understudied degradation mode for advanced cell architectures and is of increasing concern to industry due to growing adoption of UV-transparent encapsulation and bifacial technologies. In order to adopt new and evolving technologies confidently, novel component materials and processing techniques must be evaluated and designed for long-term stability, in addition to the conventional design focus on efficiency. In this work, a study protocol framework is presented for the rapid screening of unencapsulated devices against UVID. Unencapsulated passivated emitter rear contact (PERC) and tunnel oxide passivated contact (TOPCon) devices were aged under different UV irradiance intensities and measured via conventional nondestructive electrical characterization methods to assess performance degradation. Based on the results, protocol efficacy and recommendations for further study are discussed. As a result, this work is part of a broader effort to develop rapid screening processes that cut across architectures and exposure conditions to aid module manufacturers in vetting new materials choices for long-term stability.

Accelerated exposure

Laser Beam Welding Benchmark Experiments Performed in Reduced Gravity and Vacuum

Laser beam welding (LBW) is affected by the extreme temperatures, reduced pressure, and reduced gravity present in space environments. Gravity and pressure especially influence its melt pool and solidification dynamics. A compact, modular vacuum chamber adaptable to flight platforms from parabolic to orbital currently hosts an experiment to investigate the combined influence of reduced gravity and pressure on LBW. A swappable cartridge contains a rotating platen on which customizable workpieces can be welded under vacuum, greatly increasing experimental throughput. Instrumentation includes weld and thermal cameras observing the process, thermocouples placed on workpieces, accelerometers, and vacuum sensors. Experimental data gathered during the welding process will be combined with post-flight nondestructive evaluation, metallography, and mechanical testing to provide validation datasets for computational modeling. Phase I of this effort involves a parabolic flight campaign in low gravity while an anticipated Phase II would proceed to in-space demonstration to access extended duration microgravity.

in-space welding

CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

The effective operation of atomic layer deposition (ALD) feeding system is the premise of realizing specific ALD processes. In the present work, a detailed computational fluid dynamics (CFD) model of the feeding system has been developed and validated, which accounts for the roles of ALD valves and manifolds. A numerical simulation of the compressible fluid flow and heat/mass transfer within the feeding system was conducted. The dosing amounts and the spatiotemporal distributions of the precursors can be accurately predicted using the CFD model, as validated by experimental results. Different precursors, operating conditions, and structures of the feeding system were simulated and analyzed to examine the operating flexibility of the feeding system. The simulation results can be adopted as the upstream boundary conditions for simulations of the ALD process in the reaction chamber. The substrate-scale simulation indicates that the effect of the feeding system on the film deposition is highly related to the surface kinetics of ALD. The present work can serve as a guide for the development and optimization of different ALD-based processes via proper operation and even the design of the feeding system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH