The fabrication of nanoscale Bi 2 Te 3 /Sb 2 Te 3 multilayer thin film-based thermoelectric power chips
In this work, we report our method of fabricating nanoscale multilayered Bi 2 Te 3 /Sb 2 Te 3 thin film-based integrated thermoelectric devices, and detail the voltage and power produced by the device. The multilayered Bi 2 Te 3 /Sb 2 Te 3 thin film was grown via e-beam evaporation; it had 20 alternating Bi 2 Te 3 - and Sb 2 Te 3 -layers, each layer being 1.5 nm thick. We characterized the film using high-resolution transmission electron microscopy (HRTEM), revealing its excellent cross-sectional structure without any obvious interface defects. The Bi 2 Te 3 /Sb 2 Te 3 multilayer films were investigated by synchrotron x-ray scattering. An integrated device including 128×256 thermoelectric elements was fabricated from the multilayered film. An open-circuit voltage of 51 mV and a maximum power of 21 nW were produced from this 30 nm-thick Bi 2 Te 3 /Sb 2 Te 3 multilayer TE device. We found that the nanoscale multilayer structure significantly affects the voltage and power produced. Lastly, the fabrication of the integrated thermoelectric devices is compatible to that of generating standard integrated circuits (ICs), and is scalable for producing higher voltage and power, or achieving solid-state cooling for on-chip applications.