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DOE OSTI2014

Single-layer graphene on silicon nitride micromembrane resonators

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2014

Computational evaluation of the flexoelectric effect in dielectric solids

Flexoelectricity is a size-dependent electromechanical mechanism coupling polarization and strain gradient. It exists in a wide variety of materials, and is most noticeable for nanoscale objects, where strain gradients are higher. Simulations are important to understand flexoelectricity because experiments at very small scales are difficult, and analytical solutions are scarce. Here, we computationally evaluate the role of flexoelectricity in the electromechanical response of linear dielectric solids in two-dimensions. We deal with the higher-order coupled partial differential equations using smooth meshfree basis functions in a Galerkin method, which allows us to consider general geometries and boundary conditions. We focus on the most common setups to quantify the flexoelectric response, namely, bending of cantilever beams and compression of truncated pyramids, which are generally interpreted through approximate solutions. While these approximations capture the size-dependent flexoelectric electromechanical coupling, we show that they only provide order-of-magnitude estimates as compared with a solution fully accounting for the multidimensional nature of the problem. We discuss the flexoelectric mechanism behind the enhanced size-dependent elasticity in beam configurations. We show that this mechanism is also responsible for the actuation of beams under purely electrical loading, supporting the idea that a mechanical flexoelectric sensor also behaves as an actuator. The predicted actuation-induced curvature is in a good agreement with experimental results. The truncated pyramid configuration highlights the critical role of geometry and boundary conditions on the effective electromechanical response. Our results suggest that computer simulations can help understanding and quantifying the physical properties of flexoelectric devices.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2023

Acoustic Radiation From a Superconducting Qubit: From Spontaneous Emission to Rabi Oscillations

Hybrid quantum systems that utilize controllable coupling between phonons and superconducting qubits could pave the way for a new generation of compact quantum memories and sensor technologies. However, the same electromechanical interaction mechanisms that enable coherent qubit-phonon coupling can also lead to decoherence due to the spontaneous phonon emission. In this paper we study the dynamics of a qubit coupled to an acoustic resonator by a piezoelectric film. By varying the surface topography of the resonator from rough to flat to shaped, we explore the crossover from fast decay of an excited qubit to quantum-coherent coupling between the qubit and an isolated phonon mode. The developed theoretical model allows us to establish and check quantitative links between the results obtained for the rough and shaped topographies. Discrepancy between the theory and the data for the flat resonator points to the imperfections of the studied device. Our experimental approach may be used for precision measurements of crystalline vibrations, the design of quantum memories, and the study of electromechanical contributions to dielectric loss.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2025

Observation of interface piezoelectricity in superconducting devices on silicon

The development of superconducting quantum processors relies on understanding and mitigating decoherence in superconducting qubits. Piezoelectric coupling contributes to decoherence by mediating energy exchange between microwave photons and acoustic phonons. Although bulk centrosymmetric materials like silicon and sapphire are non-piezoelectric and commonly used as qubit substrates, the lack of centrosymmetry at interfaces may induce piezoelectric losses. This effect was predicted decades ago but never experimentally observed in superconducting devices. Here, we report interface piezoelectricity at aluminum-silicon junctions and demonstrate it as a significant loss channel in superconducting devices. Using aluminum interdigital transducers on silicon, we observe piezoelectric transduction from room to millikelvin temperatures, with an effective electromechanical coupling factor K 2 ≈ (3 ± 0.4) × 10−5%, comparable to weakly piezoelectric substrates. Modeling shows this mechanism limits qubit quality factors to Q ~ 10 4 − 10 8 , depending on surface participation and mode matching. These findings reveal interface piezoelectricity as a major dissipation channel and highlight the need for heterostructure and phononic engineering in next-generation superconducting qubits.

Zhou, Haoxin [University of California, Berkeley, ↗

DOE OSTI2017

A compliant mechanism for inspecting extremely confined spaces

We present here a novel, compliant mechanism that provides the capability to navigate extremely confined spaces for the purpose of infrastructure inspection. Extremely confined spaces are commonly encountered during infrastructure inspection. Examples of such spaces can include pipes, conduits, and ventilation ducts. Often these infrastructure features go uninspected simply because there is no viable way to access their interior. In addition, it is not uncommon for extremely confined spaces to possess a maze-like architecture that must be selectively navigated in order to properly perform an inspection. Efforts by the imaging sensor community have resulted in the development of imaging sensors on the millimeter length scale. Due to their compact size, they are able to inspect many extremely confined spaces of interest, however, the means to deliver these sensors to the proper location to obtain the desired images are lacking. To address this problem, we draw inspiration from the field of endoscopic surgery. Specifically we consider the work that has already been done to create long flexible needles that are capable of being steered through the human body. These devices are typically referred to as 'steerable needles.' Steerable needle technology is not directly applicable to the problem of navigating maze-like arrangements of extremely confined spaces, but it does provide guidance on how this problem should be approached. Specifically, the super-elastic nitinol tubing material that allows steerable needles to operate is also appropriate for the problem of navigating maze-like arrangements of extremely confined spaces. Furthermore, the portion of the mechanism that enters the extremely confined space is completely mechanical in nature. The mechanical nature of the device is an advantage when the extremely confined space features environmental hazards such as radiation that could degrade an electromechanically operated mechanism. Here, we present a compliant mechanism developed to navigate maze-like arrangements of extremely confined spaces. The mechanism is shown to be able to selectively navigate past three 90° bends. The ability to selectively navigate extremely confined spaces opens up new possibilities to use emerging miniature imaging technology for infrastructure inspection.

47 OTHER INSTRUMENTATION↗

DOE OSTI2019

Real-time studies of ferroelectric domain switching: a review

Ferroelectric materials have been utilized in a broad range of electronic, optical, and electromechanical applications and hold the promise for the design of future high-density nonvolatile memories and multifunctional nano-devices. The applications of ferroelectric materials stem from the ability to switch polarized domains by applying an electric field, and therefore a fundamental understanding of the switching dynamics is critical for design of practical devices. In this review, we summarize the progress in the study of the microscopic process of ferroelectric domain switching using recently developed in situ transmission electron microscopy (TEM). We first briefly introduce the instrumentation, experimental procedures, imaging mechanisms, and analytical methods of the state-of-the-art in situ TEM techniques. The application of these techniques to studying a wide range of complex switching phenomena, including domain nucleation, domain wall motion, domain relaxation, domain-defect interaction, and the interplay between different types of domains, is demonstrated. The underlying physics of these dynamic processes are discussed.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2017

Investigating the Electromechanical Response Mechanism of Ionic Block Copolymers

One of the rapidly developing frontiers in research and engineering applications is focused on the rational design of materials that have targeted functionalities and tunable responses to external stimuli. Such materials stand to revolutionize how structural components are designed for applications including flexible electronics, biomimetic devices, nanofluidics, as well as separation chemistry. A chief obstacle to achieving this capability is the lack of a fundamental understanding of how chemical structure and morphology give rise to macromolecular properties. With this in mind, our research explores how polymer structure, counterion species, and film morphology affects the electromechanical response of materials when exposed to external electric fields. While the actuating behavior of materials such as Nafion have been commonly investigated, the literature lacks a thorough understanding of how the aforementioned factors drive the electrostatic and mechanical stresses that result in material deformation. Our research has investigated how thin film morphology and counterion species affect the electromechanical response of diblock copolymers containing charged imidazolium groups using neutron reflectometry. The sensitivity of neutron reflectometry to scattering length density as well as sub-nanometer changes in thickness make it an ideal tool for investigating polymer and counterion mobility under applied fields. To this end, we have designed a vacuum chamber capable of applying electric fields to thin films during reflectometry measurements. This chamber was used at the liquids reflectometer (BL-4B) at the Spallation Neutron Source (SNS) at Oak Ridge National Laboratory (ORNL) to explore the electromechanical response of ionic block copolymers.

Dugger, Jason W.↗

DOE OSTI2018

Interferometric imaging of nonlocal electromechanical power transduction in ferroelectric domains

Significance The conversion between electrical and acoustic signals in piezoelectric materials is of fundamental importance for their applications. Because of the much slower speed of sound than speed of light in solids, mesoscopic imaging is imperative for the study of electroacoustic behaviors at microwave frequencies. In this paper, the electromechanical power transduction in lithium niobate domains is spatially resolved by microwave impedance microscopy. Because of the sign reversal of piezoelectric tensor in opposite domains, the interaction between electric fields and elastic waves leads to fringe patterns that are fundamentally different from the acoustic displacement fields. This approach uncovers hidden information in the piezoelectric transduction process and opens a frontier to explore various elastic phenomena in materials and devices.

42 ENGINEERING↗

DOE OSTI2025

Monolithic AlScN/SiC phononic waveguides for scalable acoustoelectric and quantum devices

Unlike conventional surface acoustic wave devices, phononic waveguide systems enable higher circuit density and stronger strain and piezoelectric fields, making them promising for advanced acoustoelectric and quantum applications. One such material system for generating and guiding phonons at gigahertz frequencies is AlScN on SiC, which can be synthesized by sputter depositing AlScN directly onto SiC wafers. The AlScN on the SiC platform allows for tightly vertically-confined acoustic modes with high electromechanical coupling, high speed of sound, and simple fabrication of strip and rib waveguides. Until now, this system has only been studied as a slab waveguide platform, i.e., without any lateral waveguiding. Here, we demonstrate a two-dimensionally confined phononic architecture in AlScN on SiC that supports guided modes at 2.95 and 4.05 GHz. These modes exhibit strong electromechanical coupling coefficients (k 2 = 4.27%) and propagation losses on the order of 10 dB/mm. Furthermore, this architecture is well-suited for phononic routing and power-efficient active or nonlinear devices such as amplifiers, mixers, and oscillators, and is compatible with the integration of quantum systems, including vacancy centers, charge carriers, photons, and spins, either embedded in SiC or heterogeneously integrated on the surface.

Electrical components↗

DOE OSTI2015

Ionic electroactive polymer actuators as active microfluidic mixers

On-chip sample processing is integral to the continued development of lab-on-a-chip devices for various applications. An active microfluidic mixer prototype is proposed using ionic electroactive polymer actuators (IEAPAs) as artificial cilia. A proof-of-concept experiment was performed in which the actuators were shown to produce localized flow pattern disruptions in the laminar flow regime. Suggestions for further engineering and optimization of a scaled-down, complete device are provided. Furthermore, the device in its current state of development necessitates further engineering, the use of IEAPAs addresses issues currently associated with the use of electromechanical actuators as active microfluidic mixers and may prove to be a useful alternative to other similar materials.

36 MATERIALS SCIENCE↗

DOE OSTI2015

Interface and thickness dependent domain switching and stability in Mg doped lithium niobate

Controlling ferroelectric switching in Mg doped lithium niobate (Mg:LN) is of fundamental importance for optical device and domain wall electronics applications that require precise domain patterns. Stable ferroelectric switching has been previously observed in undoped LN layers above proton exchanged (PE) phases that exhibit reduced polarization, whereas PE layers have been found to inhibit lateral domain growth. Here, Mg doping, which is known to significantly alter ferroelectric switching properties including coercive field and switching currents, is shown to inhibit domain nucleation and stability in Mg:LN above buried PE phases that allow for precise ferroelectric patterning via domain growth control. Furthermore, piezoresponse force microscopy (PFM) and switching spectroscopy PFM reveal that the voltage at which polarization switches from the “up” to the “down” state increases with increasing thickness in pure Mg:LN, whereas the voltage required for stable back switching to the original “up” state does not exhibit this thickness dependence. This behavior is consistent with the presence of an internal frozen defect field. The inhibition of domain nucleation above PE interfaces, observed in this study, is a phenomenon that occurs in Mg:LN but not in undoped samples and is mainly ascribed to a remaining frozen polarization in the PE phase that opposes polarization reversal. This reduced frozen depolarization field in the PE phase also influences the depolarization field of the Mg:LN layer above due to the presence of uncompensated polarization charge at the PE-Mg:LN boundary. These alterations in internal electric fields within the sample cause long-range lattice distortions in Mg:LN via electromechanical coupling, which were corroborated with complimentary Raman measurements.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2023

Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies

Recent advances in the growth of aluminum scandium nitride films on silicon suggest that this material platform could be applied for quantum electromechanical applications. Here, we model, fabricate, and characterize microwave frequency silicon phononic delay lines with transducers formed in an adjacent aluminum scandium nitride layer to evaluate aluminum scandium nitride films, at 32% scandium, on silicon interdigital transducers for piezoelectric transduction into suspended silicon membranes. We achieve an electromechanical coupling coefficient of 2.7% for the extensional symmetric-like Lamb mode supported in the suspended material stack and show how this coupling coefficient could be increased to at least 8.5%, which would further boost transduction efficiency and reduce the device footprint. The one-sided transduction efficiency, which quantifies the efficiency at which the source of microwave photons is converted to microwave phonons in the silicon membrane, is 10% at 5 GHz at room temperature and, as we discuss, there is a path to increase this toward near-unity efficiency based on a combination of modified device design and operation at cryogenic temperatures.

36 MATERIALS SCIENCE↗

DOE OSTI2014

Entrepreneur Grows Microswitch Company

Todd Christenson took advantage of Sandia National Laboratories’ Entrepreneurial Separation to Transfer Technology (ESTT) program to start HT MicroAnalytical (HT Micro) in 2003 in order to apply his specialized expertise in high aspect ratio microfabrication (HARM) technology gained while at Sandia to the creation of the world’s smallest electromechanical switches.

42 ENGINEERING↗

DOE OSTI2013

Carbon nanotube based pressure sensor for flexible electronics

Highlights: • The electromechanical change of vertically aligned carbon nanotubes. • Fabrication of CNT field-effect transistor on flexible substrate. • CNT based FET integrated active pressure sensor. • The integrated device yields an increase in the source-drain current under pressure. - Abstract: A pressure sensor was developed based on an arrangement of vertically aligned carbon nanotubes (VACNTs) supported by a polydimethylsiloxane (PDMS) matrix. The VACNTs embedded in the PDMS matrix were structurally flexible and provided repeated sensing operation due to the high elasticities of both the polymer and the carbon nanotubes (CNTs). The conductance increased in the presence of a loading pressure, which compressed the material and induced contact between neighboring CNTs, thereby producing a dense current path and better CNT/metal contacts. To achieve flexible functional electronics, VACNTs based pressure sensor was integrated with field-effect transistor, which is fabricated using sprayed semiconducting carbon nanotubes on plastic substrate.

36 MATERIALS SCIENCE↗

DOE OSTI2019

Stretchable ionics for transparent sensors and actuators

A class of devices enabled by ionic conductors is highly stretchable, fully transparent to light of all colors, biocompatible or biodegradable, and capable of operation at frequencies beyond 10 kilohertz and voltages above 10 kilovolts. These devices enabled by ionic conductors can be used as large strain actuators, full-range loudspeakers, as strain or pressure sensors and as stretchable interconnects. The electromechanical transduction is achieved without electrochemical reaction. When large stretchability and high optical transmittance are required, the ionic conductors have lower sheet resistance than all existing electronic conductors.

Sun, Jeong Yun↗

DOE OSTI2021

A surface acoustic wave hydrogen sensor with tin doped indium oxide layers for intermediate temperatures

We report high temperature surface acoustic wave (SAW) gas sensors with conducting sensing layers require tuning of the sheet conductivity for optimal response. Conducting metal oxides are attractive sensing materials for their tunable electronic properties and high thermal stability, amongst others. Here, we have investigated the application of indium oxide (IO) and indium tin oxide (ITO) films on langasite (LGS)-based SAW reflective delay line sensor devices for monitoring hydrogen at 350 °C. Specifically, we modeled the effect of the IO and ITO sensing layer thickness on the wave velocity, attenuation, and effective electromechanical coefficient. This was followed by an experimental demonstration of tuning of the ITO film sheet conductivity by controlling the dopant concentration and yielding an improvement in the sensor sensitivity. The current study provides a pathway towards the development of conductivity-based sensing layers for high temperature SAW gas sensors with improved sensitivity.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2024

A Simplified Method for Predicting Shaker Voltage in IMMATs

Impedance Matched Multi-Axis Tests (IMMATs) can replicate in-service vibration induced stress more accurately than single axis shaker table tests as they can better match a part’s operational boundary conditions and excite it in multiple degrees of freedom simultaneously. Here, the shakers used in IMMATs are less powerful than shaker tables, so shaker force limits can be exceeded during tests if they are not placed adequately for the desired environment. The ability to predict shaker voltage and force before performing a test is, therefore, helpful in selecting shaker locations so that their limits are not exceeded. In this study, electrodynamic shakers were modeled as discrete electromechanical systems, and the shaker parameters were chosen to match experimentally obtained acceleration/voltage frequency response functions (FRFs). These models were coupled to a finite element model of the device under test (DUT) via dynamic substructuring, and the substructured model was demonstrated to accurately predict shaker voltage as well as the error in reproducing the environment at multiple accelerometer locations. A simple method called the FRF Multiplication method, in which the FRF of the substructured system is approximated as the product of two separate FRFs of the shaker and DUT respectively, was proposed and applied to the same system, yielding similar voltage and error predictions to those obtained using substructuring. Simple case studies were presented to explore the applicability of the proposed method, and it was demonstrated to have similar accuracy to the substructuring method in a range of cases. Additionally, we showed that while it was not possible to derive a unique model of the shakers from acceleration/voltage FRFs alone, the models that could be obtained were sufficient to predict test error almost perfectly and shaker voltage with less than 40 percent error.

42 ENGINEERING↗

DOE OSTI2016

Smart Novel Semi-Active Tuned Mass Damper for Fixed-Bottom and Floating Offshore Wind (Paper)

The intention of this paper is to present the results of a novel smart semi-active tuned mass damper (SA-TMD), which mitigates unwanted loads for both fixed-bottom and floating offshore wind systems. The paper will focus on the most challenging water depths for both fixed-bottom and floating systems. A close to 38m Monopile and 55m Tension Leg Platform (TLP) will be considered. A technical development and trade-off analysis will be presented comparing the new system with existing passive non-linear TMD (N-TMD) technology and semi-active. TheSATMD works passively and activates itself with low power source under unwanted dynamic loading in less than 60msec. It is composed of both variable stiffness and damping elements coupled to a central pendulum mass. The analysis has been done numerically in both FAST(NREL) and Orcaflex (Orcina), and integrated in the Wind Turbine system employing CAD/CAE. The results of this work will pave the way for experimental testing to complete the technology qualification process. The load reductions under extreme and fatigue cases reach up significant levels at tower base, consequently reducing LCOE for fixed-bottom to floating wind solutions. The nacelle acceleration is reduced substantially under severe random wind and sea states, reducing the risks of failure of electromechanical components and blades at the rotor nacelle assembly. The SA-TMD system isa new technology that has not been applied previously in wind solutions. Structural damping devices aim to increase offshore wind turbine system robustness and reliability, which eases multiple substructures installations and global stability.

17 WIND ENERGY↗