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NASA NTRS2017

Fabrication of Ultrasensitive Transition Edge Sensor Bolometric Detectors for HIRMES

The high resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R approx. 100,000) instrument operating in the 25-122 micron spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA) in 2019. Central ot HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8x16 detector high resolution array and a 64x16 detector low resolution array. Both types of detectors consist of MoAu TES fabricated on leg-isolated Si membranes. Whereas the high resolution detectors, with noise equivalent power (NEP) approx. 2 aW/square root of (Hz), are fabricated on 0.45 micron Si substrates, the low resolution detectors, with NEP approx. 10 aW/square root of (Hz), are fabricated on 1.40 micron Si. Here we discuss the similarities and difference in the fabrication methodologies used to realize the two types of detectors.

Detectors↗

NASA NTRS2020

Excess Heat Capacity in Mo/Au Transition Edge Sensor Bolometric Detectors

Excessheat capacity in a bolometric detector has the consequence of increasing or leading to multiple device time con-stants.The Mo/Au bilayer transition edge sensor (TES) bolo-metric detectors intended for the high resolution mid-infrared spectrometer (HIRMES) have two response time, one of which is a few times longer than that estimated from materials used in the design. The relative contribution of this settling time to the overall time response of the detectors is roughly proportional with the pixel area, which ranges between ~0.3 and 2.6 mm2.Use of laser ablation to remove sections of the silicon membranes comprising the pixels results in a detector response with a smaller contribution from the secondary time constant.Additional information about the nature of this excess heat capacity is gleaned from glancing in-cidence x-ray diffraction, which reveals the presence of molyb-denum silicides near the silicon surface from the bi-layer deposi-tion.Quantitative analysis of the concentration of excess molyb-denum, estimated with secondary ion mass spectroscopy, is com-mensurate to the additional heat capacity needed to explain the anomalous time response of the detectors.

HIRMES↗

NASA NTRS2020

GPU Supported Simulation of Transition-edge Sensor Arrays

We present numerical simulations of full transition-edge sensor (TES) arrays utilizing graphical processing units (GPUs). With the support of GPUs, it is possible to perform simulations of large pixel arrays to assist detector development. Comparisons with TES small-signal and noise theory confirm the representativity of the simulated data. In order to demonstrate the capabilities of this approach, we present its implementation in xifusim, a simulator for the X-ray Integral Field Unit, a cryogenic X-ray spectrometer on board the future Athena X-ray observatory.

M Lorenz↗

NASA NTRS2012

Small Pitch Transition-Edge Sensors with Broadband High Spectral Resolution for Solar Physics

We are developing small pitch transition-edge sensor (TES) X-ray detectors optimized for solar astronomy. These devices are fabricated on thick Si substrates with embedded Cu heat-sink layer. We use 35 x 35 square micrometers Mo/Au TESs with 4.5 micrometer thick Au absorbers. We have tested devices with different geometric absorber stem contact areas with the TES and surrounding substrate area. This allows us to investigate the loss of athermal phonons to the substrate. Results show a correlation between thc stem contact area and a broadening in the spectral line shape indicative of athermal phonon loss. When the contact area is minimized we have obtained exceptional broadband spectral resolution of 1.28 plus or minus 0.03 eV at an energy of 1.5 keV, 1.58 plus or minus 0.07 eV at 5.9 keV and 1.96 plus or minus 0.08 eV at 8 keV. The linearity in the measured gain scale is understood in the context of the longitudinal proximity effect from the electrical bias leads resulting in transition characteristics that are strongly dependent upon TES size.

Smith, S. J.↗

NASA NTRS2011

Study of the Dependence on Magnetic Field and Bias Voltage of an AC-Biased TES Microcalorimeter

At SRON we are studying the performance of a Goddard Space Flight Center single pixel TES microcalorimeter operated in the AC bias configuration. For x-ray photons at 6keV the AC biased pixel shows a best energy resolution of 3.7eV, which is about a factor of 2 worse than the energy resolution observed in identical DC-biased pixels. To better understand the reasons of this discrepancy, we investigated the detector performance as a function of temperature, bias working point and applied magnetic field. A strong periodic dependence of the detector noise on the TES AC bias voltage is measured. We discuss the results in the framework of the recent weak-link behaviour observed inTES microcalorimeters.

Bandler, Simon↗

NASA NTRS2011

High Broadband Spectral Resolving Transition-Edge Sensors for High Count-Rate Astrophysical Applications

We are developing arrays of transition-edge sensor (TES) X-ray detectors optimized for high count-rate solar astronomy applications where characterizing the high velocity motions of X-ray jets in solar flares is of particular interest. These devices are fabricated on thick Si substrates and consist of 35x35micron^2 TESs with 4.5micron thick, 60micron pitch, electroplated absorbers. We have tested devices fabricated with different geometric stem contact areas with the TES and surrounding substrate area, which allows us to investigate the loss of athermal phonons to the substrate. Results show a correlation between the stem contact area and a non-Gaussian broadening in the spectral line shape consistent with athermal phonon loss. When the contact area is minimized we have obtained remarkable board-band spectral resolving capabilities of 1.3 plus or minus 0.leV at an energy of 1.5 keV, 1.6 plus or minus 0.1 eV at 5.9 keV and 2.0 plus or minus 0.1 eV at 8 keV. This, coupled with a capability of accommodating 100's of counts per second per pixel makes these devices an exciting prospect of future x-ray astronomy applications.

Smith, Stephen↗

NASA NTRS2012

Study of the Dependency on Magnetic Field and Bias Voltage of an AC-Biased TES Microcalorimeter

At SRON we are studying the performance of a Goddard Space Flight Center single pixel TES microcalorimeter operated in an AC bias configuration. For x-ray photons at 6 keV the pixel shows an x-ray energy resolution Delta E(sub FWHM) = 3.7 eV, which is about a factor 2 worse than the energy resolution observed in an identical DC-biased pixel. In order to better understand the reasons for this discrepancy we characterized the detector as a function of temperature, bias working point and applied perpendicular magnetic field. A strong periodic dependency of the detector noise on the TES AC bias voltage is measured. We discuss the results in the framework of the recently observed weak-link behaviour of a TES microcalorimeter.

Gottardi, L.↗

DOE OSTI2024

Optically induced quantum transitions in direct probed mesoscopic NbSe 2 for prototypical bolometers

Superconducting transition-edge sensors (TES) have emerged as fascinating devices to detect broadband electromagnetic radiation with low thermal noise. The advent of metallic transition metal dichalcogenides, such as NbSe 2 , has also created an impetus to understand their low-temperature properties, including superconductivity. Interestingly, NbSe 2 -based sensor within the TES framework remains unexplored. In this work, direct-probed superconducting NbSe 2 absorbers led to a proof-of-concept demonstration for the transduction of incoming light to heat, where a thermodynamic superconducting phase transition in NbSe 2 was evident to switch it to the normal-state, when biased below its superconducting transition temperature. A wavelength-dependent response of its optical absorption properties was observed, based on the incident optical excitation source used. Furthermore, extensive optical characterization studies were conducted using Raman spectroscopy, where the in-plane and out-of-plane thermal conductivity was empirically determined. Our results open new possibilities for the use of NbSe 2 in superconducting radiation detectors, including in a TES framework

47 OTHER INSTRUMENTATION↗

DOE OSTI2023

Development of the microcalorimeter and anticoincidence detector for the Line Emission Mapper x-ray probe

The Line Emission Mapper (LEM) is an x-ray probe mission concept that is designed to provide unprecedented insight into the physics of galaxy formation, including stellar and black-hole feedback and flows of baryonic matter into and out of galaxies. LEM incorporates a light-weight x-ray optic with a large-format microcalorimeter array. The LEM detector utilizes a 14k pixel array of transition-edge sensors (TESs) that will provide <2.5 eV spectral resolution over the energy range 0.2 to 2 keV, along with a field-of-view of 30 arcmin. The microcalorimeter array and readout builds upon the technology developed for the European Space Agency’s (ESA’s) Athena/x-ray Integral Field Unit. Here, we present a detailed overview of the base- line microcalorimeter design, its performance characteristics, including a detailed energy resolution budget and the expected count-rate capability. In addition, we outline the current status and plan for continued technology maturation. Behind the LEM array sits a high-efficiency TES-based anticoincidence (antico) detector that will reject cosmic-ray background events. We will briefly describe the design of the antico and plan for continued development.

47 OTHER INSTRUMENTATION↗

DOE OSTI2020

Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging

In this paper we present a strip transition-edge sensor microcalorimeter linear array detector developed for energy dispersive X-ray diffraction imaging and Compton scattering applications. The prototype detector is an array of 20 transition-edge sensors with absorbers in strip geometry arranged in a linear array. We discuss the fabrication steps needed to develop this array including Mo/Cu bilayer, Au electroplating, and proofof-principle fabrication of long strips of SiNx membranes. We demonstrate minimal unwanted effect of strip geometry on X-ray pulse response and showlinear relationship of 1/pulse height and pulse decay times with absorber length. For the absorber lengths studied, our preliminary measurements show energy resolutions of 40-180eV near 17 keV. Furthermore, we show that the heat flow to the cold bath is nearly independent of the absorber area and depends on the SiNx membrane geometry.

47 OTHER INSTRUMENTATION↗

NASA NTRS2011

Implications of Weak-Link Behavior on the Performance of Mo/Au Bilayer Transition-Edge Sensors

Understanding the physical properties of the superconducting-to-normal transition is fundamental for optimizing the design and performance of transition-edge sensors (TESs). Recent critical current measurements of Mol Au bilayer test structures show that they act as weak superconducting links, exhibiting oscillatory, Fraunhofer-like behavior with applied magnetic field. In this paper we investigate the implications of this behavior for TES X-ray detectors, under operational bias conditions. These devices include normal metal features used for absorber attachment and unexplained noise suppression, which result in modifications to the previously reported critical current behavior. We present measurements of the logarithmic resistance sensitivity with temperature, a, and current, b, as a function of applied magnetic field and bias point within the resistive transition. Results show that these important device parameters exhibit similar oscillatory behavior with applied magnetic field, which in turn affects the signal responsivity and noise, and hence the energy resolution. These results show the significance of the critical current in determining the performance of TESs and hold promise to improve future.

Smith, Stephen J.↗

DOE OSTI2021

Beamline Spectroscopy of Integrated Circuits With Hard X-Ray Transition Edge Sensors at the Advanced Photon Source

At Argonne National Laboratory, we are developing hard X-ray (2 to 20 keV) Transition Edge Sensor (TES) arrays for beamline science. The significantly improved energy resolution provided by superconducting detectors compared to semiconductor-based energy-dispersive detectors, but with better collection efficiency than wavelength-dispersive instruments, will enable greatly improved X-ray emission and absorption spectroscopic measurements. Additionally, a prototype instrument with 24 microwave-frequency multiplexed pixels is now in testing at the Advanced Photon Source (APS) 1-BM beamline. Initial measurements show an energy resolution ten times better (150 eV compared to < 15 eV) than the silicon-drift detectors currently available to APS beamline users, and in particular demonstrate the ability to resolve closely-spaced emission lines in samples containing multiple transition metal elements, such as integrated circuits. Comparing fluorescence spectra of integrated circuits measured with our TESs at the beamline to those measured with silicon detectors, we find emission lines and elements largely hidden (e.g. Hf alongside Cu) from a semiconductor-based detector but well resolved by a TES. This directly shows the strengths of TES-based instruments in fluorescence mapping.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

NASA NTRS2006

Distributed Antenna-Coupled Transition Edge Sensors

We describe progress toward realizing a new architecture for focal plane arrays for the Submillimeter and Far- Infrared (FIR) bands. This architecture is based on a detector design utilizing distributed hot{electron transition edge sensors (TES) coupled to slot antenna elements. Arrays utilizing this type of detector can be considerably easier to manufacture than membrane-isolated TES arrays, because the need for micro-machining is eliminated. We present background and rationale for this new array architecture and details of a new antenna design for an imaging polarimeter, which yields greater bandwidth than past designs. In addition, we describe a cryogenic facility for testing these arrays.

bolometer↗

NASA NTRS2006

Large format imaging arrays for the Atacama Cosmology Telescope

We describe progress in the fabrication, characterization, and production of detector arrays for the Atacama Cosmology Telescope (ACT). The completed ACT instrument is specified to image simultaneously at 145, 225, and 265 GHz using three 32x32 filled arrays of superconducting transition edge sensors (TES) read out with time-division-multiplexed SQUID amplifiers. We present details of the pixel design and testing including the optimization of the electrical parameters for multiplexed readout. Using geometric noise suppression and careful tuning of operation temperature and device bias resistance, the excess noise in the TES devices is balanced with detector speed for interfacing with the ACT optics. The design also accounts for practical tolerances such as transition temperature gradients and scatter that occur in the production of multiple wafers to populate fully the kilopixel cameras. We have developed an implanted absorber layer compatible with our silicon-on-insulator process that allows for tunable optical resistance with requisite on-wafer uniformity and wafer-to-wafer reproducibility. Arrays of 32 elements have been tested in the laboratory environment including electrical, optical, and multiplexed performance. Given this pixel design, optical tests and modeling are used to predict the performance of the filled array under anticipated viewing conditions. Integration of the filled array of pixels with a tuned backshort and dielectric plate in front of the array maximize absorption and the focal plane and suppress reflections. A mechanical design for the build of the full structure is completed and we report on progress toward the construction of a prototype array for first light on the ACT.

Chervenak, J. A.↗

NASA NTRS2003

Parameter Comparison for Low-Noise MoAu TES Bolometers

We describe a comparative investigation of the parameters of MoAu-bilayer Transition Edge Sensor (TES) bolometers designed for infrared detectors. A set of devices with variations in geometry were fabricated at the NASA/GSFC detector development facility. These detectors have different bilayer aspect ratios (providing differing normal state resistances and current densities), and have varieties of normal metal regions to study the effects of geometry on noise. These normal metal regions are oriented either parallel to or transverse to the direction of current flow, or both. The lowest noise detectors are found to have normal metal regions oriented transversely. For about a dozen different devices, we have measured a large set of parameters by means of a suite of tests. These include complex impedance measurements to derive time constants; IV curves to determine resistance and power; thermal conductance measurements; noise measurements as a function of device resistance; and &rect resistance vs. temperature measurements .

Benford, D. J.↗

NASA NTRS2011

Ultra-Sensitive Transition-Edge Sensors for the Background Limited Infrared/Sub-mm Spectrograph (BLISS)

We report progress in fabricating ultra-sensitive superconducting transition-edge sensors (TESs) for BLISS. BLISS is a suite of grating spectrometers covering 35-433 micron with R approx. 700 cooled to 50 mK that is proposed to fly on the Japanese space telescope SPICA. The detector arrays for BLISS are TES bolometers readout with a time domain SQUID multiplexer. The required noise equivalent power (NEP) for BLISS is NEP = 10(exp -19) W/Hz(exp 1/2) with an ultimate goal of NEP= 5 x 10(exp -20) W/Hz(exp 1/2) to achieve background limited noise performance. The required and goal response times are tau = 150 ms and tau = 50ms respectively to achieve the NEP at the required and goal optical chop frequency 1-5 Hz. We measured prototype BLISS arrays and have achieved NEP = 6 x 10(exp -18) W/Hz(exp 1/2) and tau = 1.4 ms with a Ti TES (T(sub C) = 565 mK) and NEP approx. 2.5 x 10(exp -19) W/Hz(exp 1/2) and tau approximates 4.5 ms with an Ir TES (T(sub C) = 130 mK). Dark power for these tests is estimated at 1-5 fW.

transition-edge sensors (TESs)↗

NASA NTRS2014

Scalable Background-Limited Polarization-Sensitive Detectors for mm-wave Applications

We report on the status and development of polarization-sensitive detectors for millimeter-wave applications. The detectors are fabricated on single-crystal silicon, which functions as a low-loss dielectric substrate for the microwave circuitry as well as the supporting membrane for the Transition-Edge Sensor (TES) bolometers. The orthomode transducer (OMT) is realized as a symmetric structure and on-chip filters are employed to define the detection bandwidth. A hybridized integrated enclosure reduces the high-frequency THz mode set that can couple to the TES bolometers. An implementation of the detector architecture at Q-band achieves 90% efficiency in each polarization. The design is scalable in both frequency coverage, 30-300 GHz, and in number of detectors with uniform characteristics. Hence, the detectors are desirable for ground-based or space-borne instruments that require large arrays of efficient background-limited cryogenic detectors.

Millimeter-Wave Detectors↗

DOE OSTI2020

Characterizing TES Power Noise for Future Single Optical-Phonon and Infrared-Photon Detectors

In this letter, we present the performance of a 100 μm × 400 μm × 40 nm W Transition-Edge Sensor with a critical temperature of 40 mK. This device has a noise equivalent power of 1.5×10-18 W/Hz, in a bandwidth of 2.6 kHz, indicating a resolution for Dirac delta energy depositions of 40 ± 5 meV (rms). The performance demonstrated by this device is a critical step toward developing a O(100) meV threshold athermal phonon detector for low-mass dark matter searches.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗