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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 73 records · Page 4
All sourcesNASA NTRSDOE OSTI
NASA NTRS2016

AlMn Transition Edge Sensors for Advanced ACTPol

Advanced ACTPol (Adv ACT) will use an array of multichroic polarization sensitive AIMn transition edge sensor (TES) bolometers read out through time-division multiplexing. Aluminum doped with a low concentration of manganese can be deposited to a bulk film thickness for a more reliable superconducting critical temperature uniformity compared to thin bilayers. To build the TES, the AlMn alloy is deposited, over Nb wiring, to a specific thickness to set the TES normal resistance. The doping concentration of manganese coarsely defines the TES critical temperature, while a fine tuning is achieved by heating the deposited film to a specific temperature. The TES island is connected to the thermal bath via four silicon-nitride membranes, where their geometry defines the thermal conductance to the temperature of the bath. Lastly, the TES heat capacity is increased by addition of PdAu electrically connected to the AlMn film. Designs and performance characteristics of these AlMn TESs are presented for use in AdvACT.

Advanced ACTPol (AdvACT)↗
NASA NTRS2016

Fabrication of X-ray Microcalorimeter Focal Planes Composed of Two Distinct Pixel Types

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

Terms—Arrays↗
NASA NTRS2017

Design and Fabrication of Electrostatically Actuated Silicon Microshutters Arrays

We have developed a new fabrication process to actuate microshutter arrays (MSA) electrostatically at NASA Goddard Space Flight Center. The microshutters are fabricated on silicon with thin silicon nitride membranes. A pixel size of each microshutter is 100 x 200 micrometers 2. The microshutters rotate 90 degrees on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The atomic layer deposition (ALD) of aluminum oxide was used to insulate electrodes on the back side of walls; the insulation can withstand over 100 V. The ALD aluminum oxide is dry etched, and then the microshutters are released in vapor HF.

microshutter arrays↗
NASA NTRS2018

Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter Arrays

We have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substrate has light shields. The microshutters with a pixel size of 100 x 200 sq micrometers are fabricated on silicon with thin silicon nitride membranes. The microshutters rotate 90 deg on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The substrate has the light shield to block lights around the microshutters. Also, electrical connections are made from the MSA to a controller board via the substrate.

microshutter array (MSA) sub-assembly↗
NASA NTRS2018

Performance of an X-ray Microcalorimeter with a 240 μm Absorber and a 50 μm TES Bilayer

Superconducting transition-edge sensor (TES) microcalorimeters are being developed for a variety of potential astrophysics missions, including Athena. The X-ray integral field unit instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. In this work, we describe a new approach with 50 μm square TESs consisting of a Mo/Au bilayer, deposited on silicon nitride membranes to provide a weak thermal conductance to a ~50 mK heat bath. Larger TESs usually have additional normal metal stripes on top of the bilayer to reduce the noise. However, we have found that excellent spectral performance can be achieved without the need for any normal metal stripes on top of the TES. A spectral performance of 1.58+/-0.12 eV at 5.9 keV has been achieved, the best resolution seen in any of our devices with this pixel size.

Miniussi, Antoine R.↗
NASA NTRSDate not supplied

Refinement of the Transition-edge Sensor Design for ATHENA X-IFU

The X-ray Integral Field Unit (X-IFU) instrument on the Advanced Telescope for High ENergy Astrophysics (ATHENA) is baselined to have 2376 transition-edge sensor (TES) microcalorimeter pixels in a single array. The required performance for X-IFU has been demonstrated on a kilo-pixel array of square TES’s with 50 m side length, and this is considered the baseline pixel design. However, over the last few years we have explored small modifications to this design in search of a globally optimized instrument performance. We have previously reported on investigations of extending the length of the TES’s and variations in the number of X-ray absorber support stems. Here we report on investigations of TES designs with a length of 50 m but narrower width. We will discuss the consequence of this on magnetic field sensitivity, resistive transition parameters, spectral performance, and ease of multiplexing. We will also discuss how the number and position of the absorber attachments influences the vibrational modes of the pixels, and the impact this may have on performance. Finally, we will present measurements of more substantial change options of our TES design, including more extreme TES geometries, the use of metal islands or etched holes in the silicon nitride membranes, and the position of wiring to minimize current-induced magnetic field effects. The exploration of all these changes to the design are not only useful for optimizing performance on X-IFU, but also guide our fundamental understanding of the key physics of TES microcalorimeters.

Nick Wakeham↗
NASA NTRS1993

Fabrication of high-quality superconductor-insulator-superconductor junctions on thin SiN membranes

We have successfully fabricated high-quality and high-current density superconductor-insulator-superconductor (SIS) junctions on freestanding thin silicon nitride (SIN) membranes. These devices can be used in a novel millimeter-wave and THz receiver system which is made using micromachining. The SIS junctions with planar antennas were fabricated first on a silicon wafer covered with a SiN membrane, the Si wafer underneath was then etched away using an anisotropic KOH etchant. The current-voltage characteristics of the SIS junctions remained unchanged after the whole process, and the junctions and the membrane survived thermal cycling.

Garcia, Edouard↗
NASA NTRS2019

Fabrication of Phononic-Isolated Kinetic Inductance Detectors

Kinetic inductance detectors (KID) have received increased interest due to their relative ease of fabrication, low noise, and scalability to large format arrays required by next generation of astronomical telescopes. The development of KIDs has progressed rapidly, with very low noise equivalent power demonstrated by several groups and KIDs arrays implemented in several ground-based and air-borne instruments. In this paper, we describe a new fabrication process which consists of a membrane isolated KID incorporating a phononic bandgap structure tuned to block recombination phonons from escaping to the thermal bath. This architecture is designed to increase the quasi-particle lifetime and results in increased responsivity to signal photons and lower noise. These devices have been fabricated as lumped-element resonators with hafnium inductors and Nb capacitors on low stress silicon nitride and silicon-on-insulator membranes. We discuss the fabrication process, which uses a combination of sub-micron laser based direct write lithography and nanoscale electron beam lithography.

Denis, Kevin L.↗
NASA NTRS1996

Infrared bolometers with silicon nitride micromesh absorbers

Sensitive far infrared and millimeter wave bolometers fabricated from a freestanding membrane of low stress silicon nitride are reported. The absorber, consisting of a metallized silicon nitride micromesh thermally isolated by radial legs of silicon nitride, is placed in an integrating cavity to efficiently couple to single mode or multiple mode infrared radiation. This structure provides low heat capacity, low thermal conduction and minimal cross section to energetic particles. A neutron transmutation doped Ge thermister is bump bonded to the center of the device and read out with evaporated Cr-Au leads. The limiting performance of the micromesh absorber is discussed and the recent results obtained from a 300 mK cold stage are summarized.

Bock, J. J.↗
NASA NTRS2004

THz Hot-Electron Photon Counter

We present a concept for the hot-electron transition-edge sensor capable of counting THz photons. The main need for such a sensor is a spectroscopy on future space telescopes where a background limited NEP approx. 10(exp -20) W/H(exp 1/2) is expected at around 1 THz. Under these conditions, the rate of photon arrival is very low and any currently imaginable detector with sufficient sensitivity will operate in the photon counting mode. The Hot-Electron Photon Counter based on a submicron-size Ti bridge has a very low heat capacity which provides a high enough energy resolution (approx.140 GHz) at 0.3 K. With the sensor time constant of a few microseconds, the dynamic range would be approx. 30 dB. The sensor couples to radiation via a planar antenna and is read by a SQUID amplifier or by a 1-bit RSFQ ADC. A compact array of the antenna-coupled counters can be fabricated on a silicon wafer without membranes.

radiation detectors↗
NASA NTRSDate not supplied

Space Biofilms - Phenotypic and Transcriptomic Behaviour of Pseudomonas Aeruginosa Biofilms on Board the International Space Station

Bacterial biofilms in space can have a positive or negative impact on the success of a mission. For example, in some instances, biofilms can improve plant growth, facilitate synthesis/recovery of metals from regolith, or bioremediate wastewater. On the other hand, biofilms can deteriorate or cause malfunctions of spaceflight hardware. Biofilms have been found on the wastewater tank of the Environmental Control and Life Support System (ECLSS), which poses a risk to the system. Even more alarming, some biofilms cause infections that may threaten astronauts’ health, like urinary tract infections that if left unclear could cause permanent damage to the kidneys. Given that biofilms can contribute to or hinder the efforts of space exploration, it is necessary to understand the effects of microgravity on biofilm behaviour. The Space Biofilms experiment intends to contribute to such understanding by analysing the morphology and transcriptomic profiles of Pseudomonas aeruginosa PA14 biofilms grown in spaceflight compared to matched ground controls. P. aeruginosa biofilms were grown onboard the International Space Station for 1, 2, or 3 days at 37°C over six surface materials: Stainless Steel 316 (SS316), passivated SS316, and a novel Lubricant Impregnated Surface (LIS) were grown in rich media supplemented with potassium nitrate (LBK) to simulate wastewater. While cellulose membrane, catheter grade silicone, and silicone with special nanotopography (DLIP) were grown in modified Artificial Urine Media supplemented with glucose and high phosphate (mAUMg-hi Pi) to simulate urine. Asynchronous ground controls replicated spaceflight procedures. Morphology analysis revealed that flight samples had a significant decrease in mass, thickness and surface area coverage in LBK. Additionally, biofilm surface coverage on LIS was only 11% of the equivalent samples on SS316 (p<0.001). Associated preliminary transcriptomic data will also be addressed.

Pamela Flores↗
NASA NTRS2005

Atmospheric Electron-induced X-Ray Spectrometer (AEXS) Instrument Development

Instrument Development: The membrane properties were investigated in detail due to its critical role. A series of experiments determined that our designed membranes have high electron transmission, yet are capable of isolating high vacuum, are able to withstand differential pressure in excess of one atmosphere, survive vibrational shocks of a magnitude to be expected during a planetary mission. Our initial work has been with a 10 keV source and a 200 nm thick Silicon Nitride (SiN) encapsulation membrane micro-fabricated within a Si support frame (1.5 mm x 1.5 mm window openings. Fig 2 compares the spectra taken with the 10 keV source with spectra taken within SEM. Introduction: This paper describes the progress in the development of the AEXS instrument in our laboratory at JPL. The AEXS is a novel miniature instrument[1-3] based on the excitation of characteristic X-Ray Fluorescence (XRF) and luminescence spectra using a focused electron beam, for non-destructive evaluation of surfaces of samples in planetary ambient atmosphere. In situ operation is obtained through the use of a thin electron transmissive membrane to isolate the vacuum within the AEXS electron source from the outside ambient atmosphere. The impinging electrons excite XRF spectra from the irradiated spots on samples in external atmosphere with high-to-medium (sub-mm to cm-scale) spatial resolution at Mars atmospheric pressure. The XRF spectra are analyzed using an energy-dispersive detector to determine surface elemental composition, or in the case of electron-induced luminescence to identify unusual formations on surface that cathodo-luminescence (CL). The AEXS system (Fig 1) consists of a high-energy (>10keV) electron gun encapsulated by the isolation membrane, an EDX detection and analyzer system to determine the elemental abundance, an optional CL detection system, and a high voltage power supply. The approach to demonstrating a proof of concept of the AEXS has been through 1) demonstrating the viability of micro-fabricated membranes, 2) assembling AEXS setups with increasingly integrated functional components, and 3) simulating the AEXS observational capabilities. This paper will focus on description of the development of the instrument.

Wilcox, J. Z.↗
NASA NTRS2000

Electro-Mechanical Simulation of a Large Aperture MOEMS Fabry-Perot Tunable Filter

We are developing a micro-machined electrostatically actuated Fabry-Perot tunable filter with a large clear aperture for application in high through-put wide-field imaging spectroscopy and lidar systems. In the first phase of this effort, we are developing key components based on coupled electro-mechanical simulations. In particular, the movable etalon plate design leverages high coating stresses to yield a flat surface in drum-head tension over a large diameter (12.5 mm). In this approach, the cylindrical silicon movable plate is back etched, resulting in an optically coated membrane that is suspended from a thick silicon support ring. Understanding the interaction between the support ring, suspended membrane, and coating is critical to developing surfaces that are flat to within stringent etalon requirements. In this work, we present the simulations used to develop the movable plate, spring suspension system, and electrostatic actuation mechanism. We also present results from tests of fabricated proof of concept components.

Kuhn, Jonathan L.↗
NASA NTRS1994

Uncooled tunneling infrared sensor

An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane which would otherwise change deflection depending upon incident infrared radiation. The resulting infrared sensor will meet or exceed the performance of all other broadband, uncooled, infrared sensors and can be miniaturized to pixel dimensions smaller than 100 .mu.m. The technology is readily implemented as a small-format linear array suitable for commercial and spacecraft applications.

Kenny, Thomas W.↗
NASA NTRS1995

Uncooled tunneling infrared sensor

An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane. The resulting infrared sensor can be miniaturized to pixel dimensions smaller than 100 .mu.m. An alternative embodiment is implemented using a corrugated membrane to permit large deflection without complicated clamping and high deflection voltages. The alternative embodiment also employs a pinhole aperture in a membrane to accommodate environmental temperature variation and a sealed chamber to eliminate environmental contamination of the tunneling electrodes and undesireable accoustic coupling to the sensor.

Kenny, Thomas W.↗
NASA NTRS1995

Micromechanical Switches on GaAs for Microwave Applications

In this presentation, we describe the fabrication of micro-electro-mechanical system (MEMS) devices, in particular, of low-frequency multi-element electrical switches using SiO2 cantilevers. The switches discussed are related to micromechanical membrane structures used to perform switching of optical signals on silicon substrates. These switches use a thin metal membrane which is actuated by an electrostatic potential, causing the switch to make or break contact. The advantages include: superior isolation, high power handling capabilities, high radiation hardening, very low power operations, and the ability to integrate onto GaAs monolithic microwave integrated circuit (MMIC) chips.

Randall, John N.↗