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High spatial resolution direct conversion amorphous selenium X-ray detectors with monolithically integrated CMOS readout

Recent progress in the field of micron-scale spatial resolution direct conversion X-ray detectors for high-energy synchrotron light sources serve applications ranging from nondestructive and noninvasive microscopy techniques which provide insight into the structure and morphology of crystals, to medical diagnostic measurement devices. Amorphous selenium ( a -Se) as a wide-bandgap thermally evaporated photoconductor exhibits ultra-low thermal generation rates for dark carriers and has been extensively used in X-ray medical imaging. Being an amorphous material, it can further be deposited over large areas at room temperatures and at substantially lower costs as compared to crystalline semiconductors. Here, to address the demands for a high-energy and high spatial resolution X-ray detector for synchrotron light source applications, we have thermally evaporated a -Se on a Mixed-Mode Pixel Array Detector (MM-PAD) Application Specific Integrated Circuit (ASIC). The ASIC format consists of 128 × 128 square pixels each 150 μm on a side. A 200 μm a -Se layer was directly deposited on the ASIC followed by a metal top electrode. The completed detector assembly was tested with 45 kV Ag and 23 kV Cu X-ray tube sources. The detector fabrication, performances, Modulation Transfer Function (MTF) measurements, and simulations are reported.

36 MATERIALS SCIENCE↗

Development of the Coastal Zone Color Scanner for NIMBUS 7. Volume 2: Test and performance data, revision A

The results of the Coastal Zone Color Scanner protoflight tests are examined in detail while some of the test results are evaluated with respect to expected performance. Performance characteristics examined include spectral response, signal to noise ratio as a function of radiance input, radiance response, the modulation transfer function, and the field of view and coregistration. The results of orbital sequence tests are also included. The in orbit performance or return of radiometric data in the six spectral bands is evaluated along with the data processing sequence necessary to derive the final data products. Examples of the raw data are given and the housekeeping or diagnostic data which provides information on the day to day health or status of the instrument are discussed.

Source record↗

Spatial Characterization of PACE OCI ETU Using Time-Delay Mode

The OCI (Ocean Color Instrument) is the main sensor on the upcoming PACE (Plankton Aerosol Cloud ocean Ecosystem) mission. OCI has two hyperspectral CCD sensors covering 340nm to 885nm and 9 SWIR (Short Wave IR) bands from 940nm to 2260nm. SWIR bands have nominal 1km ground pixel size and CCD bands have native 1/8 km ground pixel size in diagnostic mode that will be aggregated into 1km pixels to improve SNR and meet the data rate constraints. OCI has a rotating telescope that is synchronized to the readout of the CCD and SWIR detectors. Full pre-launch system level testing for the OCI ETU (Engineering Test Unit) was completed in June 2021.With time-delayed scan mode, a sub-pixel level time-delay step is applied to the detector readout. This sub-pixel level time-delay step causes a sub-pixel level shift in the start of the data collection. After collecting time-delay step scans with different step sizes, a scan profile with sub-pixel resolution can be constructed. 1/8 and 1/4 of CCD pixel resolutions were achieved using this mode. In this paper, the OCI time-delayed scan mode will be described as well as how it was used to calculate OCI’s high spatial resolution PSF (Point Spread Function), IFOV (instantaneous Field of View), MTF (Modulation Transfer Function), and BBR (Band to Band Registration).

PACE↗

Neutron imaging with lithium indium diselenide: Surface properties, spatial resolution, and computed tomography

An array of lithium indium diselenide (LISe) scintillators were investigated for application in neutron imaging. The sensors, varying in thickness and surface roughness, were tested using both reflective and anti-reflective mounting to the aluminum window. The spatial resolution of each LISe scintillator was calculated using the knife-edge test and a modulation transfer function analysis. It was found that the anti-reflective backing yielded a significantly higher spatial resolution over the reflective backing, and in most cases far exceeded the spatial resolution of a 50 μm-thick ZnS(Cu): 6 LiF scintillation screen. Further, an apparent relationship between the observed increase in spatial resolution when using an anti-reflective backing and the quotient of the surface roughness to the thickness of the LISe scintillator was observed. Lastly, the LISe scintillator array was used in neutron computational tomography to investigate the features of halyomorpha halys.

36 MATERIALS SCIENCE↗

Binary pseudo-random array standard for extreme ultraviolet lithography tool characterization

Extreme ultraviolet (EUV) imaging tools play a crucial role in EUV lithography. Achieving high accuracy in EUV metrology is essential for advanced semiconductor manufacturing. A thorough characterization of the instrumentation in use is required. Binary pseudo-random arrays (BPRAs) are an established standard for calibrating and characterizing optical instruments in the frequency domain. Here, we expand the BPRA standard to applications in EUV imaging. To extend the technology to the EUV spectral range, a high-resolution BPRA target with the smallest feature size of 40 nm is developed. The EUV BPRA target establishes an in situ and portable calibration and alignment standard for EUV imaging. The target is patterned by means of electron-beam lithography, using a nickel absorber with a thickness of 39 nm. The substrate is a 4″ silicon wafer with a molybdenum/silicon multilayer coating. To demonstrate the efficacy of the target and develop the instrument calibration protocol, the target is imaged on the Sharp Hyper-NA Actinic Reticle Review Project EUV mask microscope. Power spectral density (PSD) data are presented. The characteristics of the imaging system are imprinted on the PSD. The modulation transfer function is extracted from the PSD data. A partially coherent imaging model is used as a reference to the experimental results.

BPRA↗

WE-G-204-03: Photon-Counting Hexagonal Pixel Array CdTe Detector: Optimal Resampling to Square Pixels

Purpose: Detectors with hexagonal pixels require resampling to square pixels for distortion-free display of acquired images. In this work, the presampling modulation transfer function (MTF) of a hexagonal pixel array photon-counting CdTe detector for region-of-interest fluoroscopy was measured and the optimal square pixel size for resampling was determined. Methods: A 0.65mm thick CdTe Schottky sensor capable of concurrently acquiring up to 3 energy-windowed images was operated in a single energy-window mode to include ≥10 KeV photons. The detector had hexagonal pixels with apothem of 30 microns resulting in pixel spacing of 60 and 51.96 microns along the two orthogonal directions. Images of a tungsten edge test device acquired under IEC RQA5 conditions were double Hough transformed to identify the edge and numerically differentiated. The presampling MTF was determined from the finely sampled line spread function that accounted for the hexagonal sampling. The optimal square pixel size was determined in two ways; the square pixel size for which the aperture function evaluated at the Nyquist frequencies along the two orthogonal directions matched that from the hexagonal pixel aperture functions, and the square pixel size for which the mean absolute difference between the square and hexagonal aperture functions was minimized over all frequencies up to the Nyquist limit. Results: Evaluation of the aperture functions over the entire frequency range resulted in square pixel size of 53 microns with less than 2% difference from the hexagonal pixel. Evaluation of the aperture functions at Nyquist frequencies alone resulted in 54 microns square pixels. For the photon-counting CdTe detector and after resampling to 53 microns square pixels using quadratic interpolation, the presampling MTF at Nyquist frequency of 9.434 cycles/mm along the two directions were 0.501 and 0.507. Conclusion: Hexagonal pixel array photon-counting CdTe detector after resampling to square pixels provides high-resolution imaging suitable for fluoroscopy.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Quantifying spatial resolution in a fast neutron radiography system

Neutron imaging is a powerful nondestructive examination modality that has been employed in various applications. Fast neutrons provide advantages over lower energy neutrons, such as examining thicker samples and inducing negligible activation and transmutations. However, fast neutrons interact mostly via elastic scattering with both the neutron detector and the object, causing degradation in spatial resolution. This study explores the quantification of spatial resolution caused by the testing target itself and suggests proper candidate materials for characterizing spatial resolution in terms of modulation transfer function. Knife-edge radiographs of 3 mm, 6 mm, and 5 cm thick Tantalum (Ta) foils, and a 2.54 cm Tungsten (W) cube were acquired using a CCD-based imaging system and a Polyvinyl Toluene (PVT) scintillator at the Ohio State Research Reactor (OSURR)’s fast neutron beam facility. The spatial resolutions calculated were 195 ± 20 μm, 224 ± 22 μm, 248 ± 25 μm, and 435 ± 44 μm for 3 mm, 6 mm, and 5 cm Ta foils, and 2.54 cm W cube, respectively. The results showed a worsening spatial resolution with increasing target thickness. Simulations and calculations estimate that elastic scattering kinematics between neutrons and protons in the PVT medium also limits spatial resolution, and it sets a lower limit of ~44 μm on the spatial resolution for 2 MeV neutrons.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Characterization of electron microscopes with binary pseudo-random multilayer test samples

Verification of the reliability of metrology data from high quality x-ray optics requires that adequate methods for test and calibration of the instruments be developed. For such verification for optical surface profilometers in the spatial frequency domain, a modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays has been suggested [Proc. SPIE 7077-7 (2007), Opt. Eng. 47(7), 073602-1-5 (2008)} and proven to be an effective calibration method for a number of interferometric microscopes, a phase shifting Fizeau interferometer, and a scatterometer [Nucl. Instr. and Meth. A 616, 172-82 (2010)]. Here we describe the details of development of binary pseudo-random multilayer (BPRML) test samples suitable for characterization of scanning (SEM) and transmission (TEM) electron microscopes. We discuss the results of TEM measurements with the BPRML test samples fabricated from a WiSi2/Si multilayer coating with pseudo randomly distributed layers. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize x-ray microscopes. Corresponding work with x-ray microscopes is in progress.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

SU-G-206-02: Impact of Focal Spot Sizes On CT Image Quality

Purpose: To quantify a radiology team’s assessment of image quality differences between two CT scanner models currently in clinical use, with emphasis on spatial resolution that could be impacted by focal spot size. Methods: Modulation Transfer Functions (MTF) measurements were performed by scanning the impulse source insert module of the Catphan 600 at 120/140 kVp with both large (LFS) and small (SFS) focal spots and reconstructed to 2.5mm and 5.0mm thicknesses on a GE Discovery CT750 HD and a LightSpeed VCT CT scanner. MTFs were calculated by summing the 2D PSF along one-dimension to obtain line-spread-function (LSF), and calculating the Fourier Transform of the zero-padded and background corrected LSF. Spatial resolution performance was evaluated by comparing MTF curves, 50% and 10% MTF cutoff, and total area under the MTF curve (AUC). In addition, images of the Catphan high-contrast module and a Kagaku anthropomorphic body phantom were acquired from the HD scanner for visual comparisons. Results: For each scanner model, SFS was superior to LFS spatial resolution with respect to 50%/10% MTF cutoff and AUC. For the HD, 50%/10% cutoff was 4.29/7.22cm-1 for the LFS and 4.43/7.45cm-1 for the SFS. VCT outperformed HD, with 50%/10% cutoff of 4.40/7.29 cm-1 for LFS and 4.62/7.47cm-1 for SFS. Scanner model performance in order of decreasing AUC performance was VCT SFS (7.43), HD SFS (7.20), VCT LFS (7.09) and HD LFS (6.93). Visual evaluations of Kagaku phantom images confirmed that VCT outperformed HD. Conclusion: VCT outperformed HD and small focal spot is desired for either model over large focal spot in term of spatial resolution – in agreement with radiologist feedback of overall image quality. In-depth evaluations of clinical impact and focal spot selection mechanisms is currently being assessed.

60 APPLIED LIFE SCIENCES↗

Modeling the interactions between the ocean and the environment for microwave radar sensing

An extensive set of X-band microwave backscatter measurements has been analyzed to determine its dependence on winds near the surface, atmospheric stability, and long-wave slopes. These radar measurements, made from a tower in the Gulf of Mexico, were performed in conjunction with an extensive set of simultaneous environmental measurements. The CW microwave system operated at an incidence angle of 45 deg, with antennas directed into winds and waves. Model functions for the radar cross section (RCS) and the modulation transfer function (MTF) are developed that depend on the geophysical variables, including wind stress. Statistical analysis shows that these models functions yield a significant smaller error when fit to the RCS data than a simple wind-speed function displays. A Taylor-series expansion of the returned power from a small area provides a unified function that demonstrates the complementary roles of wave slope and atmospheric fluctuations on both the RCS, the MTF, and the coherence. The issue of linearity of the MTF is addressed with this data set, yielding evidence that this is a valid assumption. These results have direct application to the remote sensing of the mean and fluctuating winds, and the wave spectrum with coherent and incoherent active radars.

Weissman, David E.↗

Initial On-Orbit Spatial Resolution Characterization of OrbView-3 Panchromatic Images

Characterization was conducted under the Memorandum of Understanding among Orbital Sciences Corp., ORBIMAGE, Inc., and NASA Applied Sciences Directorate. Acquired five OrbView-3 panchromatic images of the permanent Stennis Space Center edge targets painted on a concrete surface. Each image is available at two processing levels: Georaw and Basic. Georaw is an intermediate image in which individual pixels are aligned by a nominal shift in the along-scan direction to adjust for the staggered layout of the panchromatic detectors along the focal plane array. Georaw images are engineering data and are not delivered to customers. The Basic product includes a cubic interpolation to align the pixels better along the focal plane and to correct for sensor artifacts, such as smile and attitude smoothing. This product retains satellite geometry - no rectification is performed. Processing of the characterized images did not include image sharpening, which is applied by default to OrbView-3 image products delivered by ORBIMAGE to customers. Edge responses were extracted from images of tilted edges in two directions: along-scan and cross-scan. Each edge response was approximated with a superposition of three sigmoidal functions through a nonlinear least-squares curve-fitting. Line Spread Functions (LSF) were derived by differentiation of the analytical approximation. Modulation Transfer Functions (MTF) were obtained after applying the discrete Fourier transform to the LSF.

Blonski, Slawomir↗

Investigation of the spatial resolution of an online dose verification device

Purpose: The aim of this work is to characterize a new online dose verification device, COMPASS transmission detector array (IBA Dosimetry, Schwarzenbruck, Germany). The array is composed of 1600 cylindrical ionization chambers of 3.8 mm diameter, separated by 6.5 mm center-to-center spacing, in a 40 x 40 arrangement. Methods: The line spread function (LSF) of a single ion chamber in the detector was measured with a narrow slit collimator for a 6 MV photon beam. The 0.25 x 10 mm{sup 2} slit was formed by two machined lead blocks. The LSF was obtained by laterally translating the detector in 0.25 mm steps underneath the slit over a range of 24 mm and taking a measurement at each step. This measurement was validated with Monte Carlo simulation using BEAMnrc and DOSXYZnrc. The presampling modulation transfer function (MTF), the Fourier transform of the line spread function, was determined and compared to calculated (Monte Carlo and analytical) MTFs. Two head-and-neck intensity modulated radiation therapy (IMRT) fields were measured using the device and were used to validate the LSF measurement. These fields were simulated with the BEAMnrc Monte Carlo model, and the Monte Carlo generated incident fluence was convolved with the 2D detector response function (derived from the measured LSF) to obtain calculated dose. The measured and calculated dose distributions were then quantitatively compared using {chi}-comparison criteria of 3% dose difference and 3 mm distance-to-agreement for in-field points (defined as those above the 10% maximum dose threshold). Results: The full width at half-maximum (FWHM) of the measured detector response for a single chamber is 4.3 mm, which is comparable to the chamber diameter of 3.8 mm. The pre-sampling MTF was calculated, and the resolution of one chamber was estimated as 0.25 lp/mm from the first zero crossing. For both examined IMRT fields, the {chi}-comparison between measured and calculated data show good agreement with 95.1% and 96.3% of in-field points below {chi} of 1.0 for fields 1 and 2, respectively (with an average {chi} of 0.29 for IMRT field 1 and 0.24 for IMRT field 2). Conclusions: The LSF for a new novel online detector has been measured at 6 MV using a narrow slit technique, and this measurement has been validated by Monte Carlo simulation. The detector response function derived from line spread function has been applied to recover measured IMRT fields. The results have shown that the device measures IMRT fields accurately within acceptable tolerance.

61 RADIATION PROTECTION AND DOSIMETRY↗

Spatial frequency response of an optical heterodyne receiver

The analysis of a passive heterodyne receiver with respect to its imaging performance (transfer function) and its heterodyne efficiency shows departures from the results which are obtained in strictly coherent or incoherent imaging systems. The cascading property of modulation transfer function analysis must be carefully applied, since the coherent transfer function of the optical receiver and that due to the local oscillator-detector combination are not separable but are related by the convolution of their products. Application of these results to a spacelab-type optical heterodyne receiver shows that resolutions of the order of 1.5 to 2.0 km are possible for worst-case type orbital scenarios. In addition to an analysis of the derogatory effects of sampling (aliasing) a comparison of obscured-type receivers (e.g., Cassegrains) with unobscured receivers shows that both resolution and efficiency are severly degraded in an obscured-type receiver and, consequently, should not be used for passive heterodyne detection schemes.

Robinson, D. M.↗

Optical Imaging and Radiometric Modeling and Simulation

OPTOOL software is a general-purpose optical systems analysis tool that was developed to offer a solution to problems associated with computational programs written for the James Webb Space Telescope optical system. It integrates existing routines into coherent processes, and provides a structure with reusable capabilities that allow additional processes to be quickly developed and integrated. It has an extensive graphical user interface, which makes the tool more intuitive and friendly. OPTOOL is implemented using MATLAB with a Fourier optics-based approach for point spread function (PSF) calculations. It features parametric and Monte Carlo simulation capabilities, and uses a direct integration calculation to permit high spatial sampling of the PSF. Exit pupil optical path difference (OPD) maps can be generated using combinations of Zernike polynomials or shaped power spectral densities. The graphical user interface allows rapid creation of arbitrary pupil geometries, and entry of all other modeling parameters to support basic imaging and radiometric analyses. OPTOOL provides the capability to generate wavefront-error (WFE) maps for arbitrary grid sizes. These maps are 2D arrays containing digital sampled versions of functions ranging from Zernike polynomials to combination of sinusoidal wave functions in 2D, to functions generated from a spatial frequency power spectral distribution (PSD). It also can generate optical transfer functions (OTFs), which are incorporated into the PSF calculation. The user can specify radiometrics for the target and sky background, and key performance parameters for the instrument s focal plane array (FPA). This radiometric and detector model setup is fairly extensive, and includes parameters such as zodiacal background, thermal emission noise, read noise, and dark current. The setup also includes target spectral energy distribution as a function of wavelength for polychromatic sources, detector pixel size, and the FPA s charge diffusion modulation transfer function (MTF).

Ha, Kong Q.↗

Landsat Thematic Mapper image-derived MTF

The Landsat Image Data Quality Analysis (LIDQA) Program conducted by NASA has the objective to quantify the performance of the Thematic Mapper (TM) on the Landsat-4 and Landsat-5 spacecraft. The interest in the spatial resolution performance of the TM is partly related to the decrease of the instantaneous field of view (IFOV) from 80 m for the MSS to 30 m for the TM. Studies related to the preflight line spread function (LSF), square wave response (SWR), and theoretical component modeling of the TM system modulation transfer function (MTF) have been conducted. However, the need remains to estimate the MTF of the complete system. The present paper is concerned with investigations related to this task. Attention is given to three approaches for measuring the MTF of the TM system from imagery.

Schowengerdt, R. A.↗

Spatial Resolution of a microCT Scanner

We have measured the spatial resolution of the 450 kV test-bed microCT scanner. We have also modeled the resolution analytically. The model and measurement show correspondence within 5%. Our measurement method was to use a thin tungsten wire to act as an impulse function. Therefore, the image is the impulse response, also called the point spread function (PSF) of the system. The Fourier transform (FT) of the impulse response is the modulation transfer function (MTF) of the system. We report the MTF here. By moving the wire at different positions in the scan field of view (FOV), we can measure MTF at different positions in the FOV. Since our imaging system is radially symmetric, we report MTF in two directions, radial and tangential as shown in Figure 1. The radial direction is along the line from isocenter to the wire, and the tangential is perpendicular to it.

42 ENGINEERING↗

Characterization of submillisecond response optical addressing phase modulator based on low light scattering polymer network liquid crystal

Optically addressed conventional nematic liquid crystal spatial light modulator has attracted wide research interests. But the slow response speed limited its further application. In this paper, polymer network liquid crystal (PNLC) was proposed to replace the conventional nematic liquid crystal to enhance the response time to the order of submillisecond. The maximum light scattering of the employed PNLC was suppressed to be less than 2% at 1.064 μm by optimizing polymerization conditions and selecting large viscosity liquid crystal as solvent. The occurrence of phase ripple phenomenon due to electron diffusion and drift in photoconductor was found to deteriorate the phase modulation effect of the optical addressed PNLC phase modulator. The wavelength effect and AC voltage frequency effect on the on state dynamic response of phase change was investigated by experimental methods. These effects were interpreted by electron diffusion and drift theory based on the assumption that free electron was inhomogeneously distributed in accordance with the writing beam intensity distribution along the incident direction. The experimental results indicated that the phase ripple could be suppressed by optimizing the wavelength of the writing beam and the driving AC voltage frequency when varying the writing beam intensity to generate phase change in 2π range. The modulation transfer function was also measured.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗