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NASA NTRS1982

High density circuit technology, part 3

Dry processing - both etching and deposition - and present/future trends in semiconductor technology are discussed. In addition to a description of the basic apparatus, terminology, advantages, glow discharge phenomena, gas-surface chemistries, and key operational parameters for both dry etching and plasma deposition processes, a comprehensive survey of dry processing equipment (via vendor listing) is also included. The following topics are also discussed: fine-line photolithography, low-temperature processing, packaging for dense VLSI die, the role of integrated optics, and VLSI and technology innovations.

Wade, T. E.↗

NASA NTRS1983

Laboratory detection of the C3N an C4H free radicals

The millimeter-wave spectra of the linear carbon chain free radicals C3N and C4H, first identified in IRC + 10216 and hitherto observed only in a few astronomical sources, have been detected with a Zeeman-modulated spectrometer in laboratory glow discharges through low pressure flowing mixtures of N2 + HC3N and He + HCCH, respectively. Four successive rotational transitions between 168 and 198 GHz have been measured for C3N, and five rotational transitions between 143 and 200 GHz for C4H; each is a well-resolved spin doublet owing to the unpaired electron present in both species. Precise values for the rotational, centrifugal distortion, and spin doubling constants have been obtained, which, with hyperfine constants derived from observations of the lower rotational transitions in the astronomical source TMC 1, allow all the rotational transitions of C3N and C4H at frequencies less than 300 GHz to be calculated to an absolute accuracy exceeding 1 ppm.

Gottlieb, C. A.↗

NASA NTRS1985

Frictional and structural characterization of ion-nitrided low and high chromium steels

Low Cr steels AISI 41410, AISI 4340, and high Cr austenitic stainless steels AISI 304, AISI 316 were ion nitrided in a dc glow discharge plasma consisting of a 75 percent H2 - 25 percent N2 mixture. Surface compound layer phases were identified, and compound layer microhardness and diffusion zone microhardness profiles were established. Distinct differences in surface compound layer hardness and diffusion zone profiles were determined between the low and high Cr alloy steels. The high Cr stainless steels after ion nitriding displayed a hard compound layer and an abrupt diffusion zone. The compound layers of the high Cr stainless steels had a columnar structure which accounts for brittleness when layers are exposed to contact stresses. The ion nitrided surfaces of high and low Cr steels displayed a low coefficient of friction with respect to the untreated surfaces when examined in a pin and disk tribotester.

Spalvins, T.↗

NASA NTRS1985

Optical properties of hydrogenated amorphous carbon films grown from methane plasma

A 30 kHz ac glow discharge formed from methane gas was used to grow carbon films on InP substrates. Both the growth rate, and the realitive Ar ion sputtering rate at 3 keV varied monotonically with deposition power. Results from the N-15 nuclear reaction profile experiments indicated a slight drop in the hydrogen concentration as more energy was dissipated in the ac discharge. Values for the index of refraction and extinction coefficient ranged from 1.721 to 1.910 and 0 to -0.188, respectively. Optical bandgaps as high as 2.34 eV were determined.

Pouch, J. J.↗

NASA NTRS1985

Advances in sputtered and ion plated solid film lubrication

The glow discharge or ion assisted vacuum deposition techniques, primarily sputtering and ion plating, have rapidly emerged and offer great potential to deposit solid lubricants. The increased energizing of these deposition processes lead to improved adherence and coherence, favorable morphological growth, higher density, and reduced residual stresses in the film. These techniques are of invaluable importance where high precision machines tribo-components require very thin, uniform lubricating films (0.2 m), which do not interface with component tolerances. The performance of sputtered MoS2 films and ion plated Au and Pb films are described in terms of film thickness, coefficient of friction, and wear lives.

Spalvins, T.↗

NASA NTRS1985

Heaterless ignition of inert gas ion thruster hollow cathodes

Heaterless inert gas ion thruster hollow cathodes were investigated with the aim of reducing ion thruster complexity and increasing ion thruster reliability. Cathodes heated by glow discharges are evaluated for power requirements, flowrate requirements, and life limiting mechanisms. An accelerated cyclic life test is presented.

Schatz, M. F.↗

NASA NTRS1984

Ferm cathode operation in the test bed ion engine

A rapid start hollow cathode has been developed for high power ion thruster application. Using no low work function insert or heater, the Field Enhanced Refractory Metal (FERM) cathode electron emission occurs from a refractory metal tube concentric with the cathode barrel. Results are presented for FERM cathode operation in the high field strength Test Bed Ion Engine. Using a controlled glow discharge heating technique, cathode start up times of 1-2 secs are shown. Cathode V-I curves up to 35 ampere emission are presented and life limiting component erosion mechanisms, at these high current levels, are discussed.

Aston, G.↗

NASA NTRS1984

Phase coherent effects in a collisional turbulent plasma

The presence of mode-mode coupling in turbulent fluctuations in the positive column of a glow discharge in argon is studied experimentally and analytically. The auto-power spectra, the cross power spectra, the phase spectra, the cross correlation functions and the bispectrum are determined. The results are relevant to the theoretical speculations of Grabec and Mikac (1974) and it is shown that ionization instability is the primary cause of the turbulence. The phase spectra indicate that the system is nearly linear at low frequency and the bispectrum plots show that nonlinear wave-wave interactions play a role in the development of the fluctuation components in the turbulent spectrum. Distinctions are made between the azimuthal and axial behaviors of the fluctuations and the results imply a trend toward longer azimuthal scales and shorter axial scales for characterizing fluctuation wave-packets as the density of the turbulent environment increases.

Johnson, J. A., III↗

NASA NTRS1985

Investigation of nonlinear effects in the instabilities and noise radiation of supersonic jets

The nonlinear interactions of fluctuating components which produce noise in supersonic jet flows were studied experimentally. Attention was given to spectral components interactions and the spectral effects of increasing Re. A jet exhausted in perfectly expanded conditions was monitored by microphones in the maximum noise emission direction. Trials were run at Mach 1.4 and 2.1 and the Re was varied from 5000-20,000 and 9000-25,000, respectively. Hot-wire data were gathered to examine the mode-mode interactions and a point glow discharge was used to excite the jets. The noise was found to exhibit discrete frequency components and a single tone instability at Re below 10,000. Mode interactions were found to weaken after the instabilities reached a crescendo and then decayed, leading to a nonlinear spectral broadening effect.

Janjua, S. I.↗

NASA NTRS1985

Laboratory measurement of the P(2,1) submillimeter transition frequency of H3O(+)

The molecular ion H3O(+) is predicted to be an important component of the gas phase of interstellar clouds where it is calculated to be one of the most abundant molecular ions. Its detection would provide an indirect method of determining the abundance of the crucial species H2O. This fundamental molecule has no convenient low-lying transitions in the microwave or millimeter regions of the spectrum which can be excited under the normal low temperature conditions present in the interstellar medium. It is believed that the P(2,1) transition of H3O(+) in absorption at a frequency of 307 192.41 (5) MHz has been detected. The H3O(+) ion was produced in a magnetically enhanced negative glow discharge source.

Plummer, G. M.↗

NASA NTRS1985

Laboratory detection of the C3H radical

Millimeter-wave lines of the C3H radical, including six of the lines observed in space, were detected in a laboratory glow discharge through a flowing mixture of C2H2, He, and CO. Each of the 10 rotational transitions measured, five between 98 and 185 GHz in the 2Pi1/2 ladder and five between 80 and 194 GHz in the 2Pi3/2 ladder, is split by lambda-type doubling, and all but three possess resolved hyperfine structure. The excellent agreement between the fine-structure, rotation, lambda-doubling, and hyperfine constants derived from the laboratory data and from the astronomical observations conclusively confirms the identifications in IRC +10216 and TMC-1 by Thaddeus and colleagues (1985). An accurate set of spectroscopic constants, which allow calculation of the entire radio spectrum of C3H to a radial velocity of 0.1 km/s, was derived from a simulataneous fit to the laboratory frequencies and to the well-resolved hfs observed in the narrow-line astronomical source TMC-1.

Gottlieb, C. A.↗

NASA NTRS1986

Ion-Plated Soft Metallic Films Reduce Friction and Wear

Ion plating is ion-assisted or glow-discharge surface-deposition technique. In this process, ions or energetic atoms transfer energy, momentum, and charge to substrate and deposited surface film. Process controlled to modify physical characteristics of surface, subsurface chemical conditions, and surface and subsurface microstructures as well. Ion plating with such soft, thin metallic films as gold, silver, or lead has great potential for producing self-contained lubricating surfaces. Such films reduce friction, wear, and corrosion on sliding or rotating mechanical surfaces used in wide range of environments.

Spalvins, T.↗

NASA NTRS1986

Auger electron spectroscopy, secondary ion mass spectroscopy and optical characterization of a-C-H and BN films

The amorphous dielectrics a-C:H and BN were deposited on III-V semiconductors. Optical band gaps as high as 3 eV were measured for a-C:H generated by C4H10 plasmas; a comparison was made with bad gaps obtained from films prepared by CH4 glow discharges. The ion beam deposited BN films exhibited amorphous behavior with band gaps on the order of 5 eV. Film compositions were studied by Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). The optical properties were characterized by ellipsometry, UV/VIS absorption, and IR reflection and transmission. Etching rates of a-C:H subjected to O2 dicharges were determined.

Pouch, J. J.↗

NASA NTRS1985

Laboratory and astronomical detection of the deuterated ethynyl radical CCD

Two rotational transitions of CCD, N = 1-2 at 144 GHz and 2-3 at 216 GHz, were detected in a laboratory glow discharge through deuterated acetylene and helium, after which one, N = 2-1, was detected toward the rich molecular cloud behind the Orion Nebula. The 144 GHz transition is a well-resolved spin doublet split by 55 MHz, the components of which contain hyperfine structure of the order of 1 MHz, so far only partially resolved. From observations toward two positions in Orion, at and near the Kleinmann-Low nebula, the column density of CCD is determined to be 1.8 x 10 to the 13th/sq cm and the isotopic ratio CCD/CCH = 0.05. CCD was not detected at two positions in TMC-1.

Vrtilek, J. M.↗

NASA NTRS1985

Frictional and structural characterization of ion-nitrided low and high chromium steels

Spalvins, T.↗

NASA NTRS1985

Heaterless ignition of inert gas ion thruster hollow cathodes

Schatz, M. F.↗

NASA NTRS1987

Ion plated gold films: Properties, tribological behavior and performance

The glow discharge energizing favorably modifies and controls the coating/substrate adherence and the nucleation and growth sequence of ion plated gold films. As a result the adherence, coherence, internal stresses, and morphology of the films are significantly improved. Gold ion plated films because of their graded coating/substrate interface and fine uniform densely packed microstructure not only improve the tribological properties but also induce a surface strengthening effect which improves the mechanical properties such as yield, tensile, and fatigue strength. Consequently significant improvements in the tribological performance of ion plated gold films as compared to vapor deposited gold films are shown in terms of decreased friction/wear and prolonged endurance life.

Spalvins, Talivaldis↗

NASA NTRS1987

Reactions of Atomic Oxygen (O(3P)) with Polybutadienes and Related Polymers

Thin films of the following polymers were exposed at ambient temperature to ground-state oxygen atoms (O(3P)), generated by a radio-frequency glow discharge in O2: cis- and trans-1,4-polybutadienes (CB and TB), amorphous 1,2-polybutadiene (VB), polybutadienes with different 1,4/1,2 contents, trans polypentenamer (TP), cis and trans polyoctenamers (CO and TO), and ethylene-propylene rubber (EPM). Transmission infrared spectra of CB and TB films revealed extensive surface recession, or etching, unaccompanied by any microstructural changes within the films, demonstrating that the reactions were confined to the surface layers. Contrary to the report by Rabek, Lucki, and Ranby (1979), there was no O(3P)-induced cis-trans isomerization in CB or TB. From weight-loss measurements, etch rates for polybutadienes were found to be markedly dependent on vinyl content, decreasing by two orders of magnitude from CB (2% 1,2) to structures with 30 to 40% 1,2 double bonds, thereafter increasing by half an order of magnitude to VB (97% 1,2). Relative etch rates for EMP and the polyalkenamers were in the order: EMP is greater than CO (or TO) is greater than TP is greater than CB. The sole non-elastomer examined, TB, had an etch rate about six times that of CB, ascribable to a morphology difference. Cis/trans content had a negligible effect on the etch rate of the polyalkenamers. Mechanisms involving crosslinking through units are proposed for the unexpected protection imparted to polybutadienes by the 1,2 double bonds.

Golub, Morton A.↗