Position-Dependent Transport of n-p-n Junctions in Axially Doped SiGe Nanowire Transistors.
Abstract not provided.
Delker, Collin James↗
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Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
Etching of high aspect ratio features into alternating SiO 2 and SiN layers is an enabling technology for the manufacturing of 3D NAND flash memories. In this paper, we study a low-temperature or cryo plasma etch process, which utilizes HF gas together with other gas additives. Compared with a low-temperature process that uses separate fluorine and hydrogen gases, the etching rate of the SiO 2 /SiN stack doubles. Both materials etch faster with this so-called second generation cryo etch process. Pure HF plasma enhances the SiN etching rate, while SiO 2 requires an additional fluorine source such as PF 3 to etch meaningfully. Further, the insertion of H 2 O plasma steps into the second generation cryo etch process boosts the SiN etching rate by a factor of 2.4, while SiO 2 etches only 1.3 times faster. We observe a rate enhancing effect of H 2 O coadsorption in thermal etching experiments of SiN with HF. Ammonium fluorosilicate (AFS) plays a salient role in etching of SiN with HF with and without plasma. AFS appears weakened in the presence of H 2 O. Density functional theory calculations confirm the reduction of the bonding energy when NH 4 F in AFS is replaced by H 2 O.
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
Crickets{sup TM} and Curies: Lessons Learned from the Steel Industry - 18221
The global nuclear power industry, and to a lesser extent, the decommissioning and demolition of old nuclear weapons plants, obviously present challenges to those in the radioactive waste management field. Some if not many of these challenges have already been dealt with, and resolved, in the steel industry, including its recycling component. This paper presents proven state-of-the-art radiation detection systems used in steel and related recycling facilities, emphasizing current, reliable and flexible technologies for characterization, volume reduction, and remote handling of recyclable solid wastes contaminated and, just as important, not contaminated, with a wide range of radioactive isotopes. It will also cover features of remotely operated waste handling equipment effective in reducing or eliminating exposure of workers engaged in decontamination and demolition work on active and/or inactive nuclear installations. The industry group identified above has a long-standing policy regarding any radioactivity in potentially recyclable as well as waste materials it receives: if it is detected, it is rejected. The US Steel Manufacturers Association (SMA) put it this way in one of their Public Policy Statements: 'SMA members have not, and will not, accept scrap that is known to be radioactively contaminated' (emphasis included in the original) (1). This policy, adopted around the globe, obviously has major implications for decommissioning and demolition projects. To put it bluntly, if rad-contaminated metal, concrete, or other materials are sent to a facility for possible recycling, reuse or even disposal, they may well be rejected. If so, the materials will be returned to the generator--at the generator's cost-and a new solution will have to be found. This also results in additional costs for the generator. Facilities in the steel making and metal recycling industries have access to, and routinely count on, a wide range of proven detection technologies and techniques for monitoring incoming shipments and sorting the materials in them. The approaches range from using sensitive handheld instruments for pinpointing and isolating small devices such as isotope-containing gauges and radium dials all the way up to technologies effective for large volumes and weights of contaminated construction and demolition material. In this latter realm, the most suitable, robust, and field-proven system for decommissioning and demolition work is a radiation detection system fitted to a grappling and/or magnetic device, known as the Crickets{sup TM} technology, which automatically scans bulk material with no added effort or time in material handling operations. Highly versatile, a Crickets{sup TM} system can be put to work on any material-handling system, including grapples handling volumes ranging from 1 up to 18 cubic yards, while detecting radioactivity in real-time over a very wide dose range, from nSv to Sv levels. Other field-proven real-time measuring radiation detection devices can be fixed to conveyor belts with traverse speeds up 3 meters/second, also measuring in real time and over the same dose range, allowing both recyclable and waste materials with a pre-set level of radioactivity to be diverted off the belt. Finally, there are highly sensitive radiation portal installations for detecting radiation from materials being transported by vehicles, including those with roll-offs, dump trailers, and other containers, again in real-time and for the same dose ranges. For vehicles, the speed must be carefully controlled-the vehicles need to travel from 5 to 10 km/h through the scanning zone to ensure that maximum detection capability is maintained. When radiation detection systems at recycling and steel making facilities detect radioactive material in an incoming shipment, these facilities have a zero tolerance for accepting the cargo. Therefore, it is imperative that material from a demolition operation that is slated to be sent for recycling or other reuse be checked at the point of demolition at similar detection levels to avoid possible rejection later of a shipment because of its radioactivity. In addition to measuring overall radiation levels (for example, total gamma), when necessary, combinations of different radiation detection media can be used to detect the presence and intensities of specific isotopes such as U-235, Cs-137, Co-60, Am-241, etc., again in real-time and over a similar dose range. These detection technologies can be fixed or transportable. More important for the rad-waste management profession, this overall systems approach can be tailored and adapted during use on-site in any dismantling, demolition or remediation project, to allow materials to be thoroughly scanned before being released to the recycling stream for reuse, or to appropriate long-term storage and disposal facilities. Potentially recyclable materials with contamination such as steel beams and rebar will set off alarms at recycling facilities, resulting in unnecessary added expenses to the generator, primarily due to increased transportation costs, time delays and additional rad-waste handling and disposal charges. Additionally, there are situations where relatively lightly contaminated materials, once identified and appropriately characterized, can be reused in new construction applications, such as concrete from demolition being used in the base layer for roads or recycled steel used for repair or construction of bridges. In other cases, specific smaller volumes can be sent to specialized rad-waste disposal sites. These radiation detection systems can also be custom tailored to ensure proper handling and disposition of contaminated materials destined for reuse in specific applications where, for example, acceptable levels of radioactivity in NORM or TENORM can be reused or safely disposed of. (authors)
12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
magnetoARPES: Angle Resolved Photoemission Spectroscopy with magnetic field control
Angle-Resolved Photoemission Spectroscopy (ARPES) is a premier technique for understanding the electronic excitations in conductive, crystalline matter, in which the induced photocurrent is collected and dispersed in energy and angle of emission to reveal the energy- and momentum-dependent single particle spectral function A (k,ω). So far, ARPES in a magnetic field has been precluded due to the need to preserve the electron paths between the sample and detector. Here, in this paper we report progress towards “magnetoARPES”, a variant of ARPES that can be conducted in a magnetic field. It is achieved by applying a microscopic probe beam (≲10 μm) to a thinned sample mounted upon a special sample holder that generates magnetic field confined to a thin layer near the sample surface. In this geometry we could produce ARPES in magnetic fields up to around ±100 mT. The magnetic fields can be varied from purely in-plane to nearly purely out-of-plane, by scanning the probe beam across different parts of the device. We present experimental and simulated data for graphene to explore the aberrations induced by the magnetic field. These results demonstrate the viability of the magnetoARPES technique for exploring symmetry breaking effects in weak magnetic fields.
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
Analysis of Interpretable Data Representations for 4D-STEM Using Unsupervised Learning
Abstract Understanding the structure of materials is crucial for engineering devices and materials with enhanced performance. Four-dimensional scanning transmission electron microscopy (4D-STEM) is capable of mapping nanometer-scale local crystallographic structure over micron-scale field of views. However, 4D-STEM datasets can contain tens of thousands of images from a wide variety of material structures, making it difficult to automate detection and classification of structures. Traditional automated analysis pipelines for 4D-STEM focus on supervised approaches, which require prior knowledge of the material structure and cannot describe anomalous or deviant structures. In this article, a pipeline for engineering 4D-STEM feature representations for unsupervised clustering using non-negative matrix factorization (NMF) is introduced. Each feature is evaluated using NMF and results are presented for both simulated and experimental data. It is shown that some data representations more reliably identify overlapping grains. Additionally, real space refinement is applied to identify spatially distinct sample regions, allowing for size and shape analysis to be performed. This work lays the foundation for improved analysis of nanoscale structural features in materials that deviate from expected crystallographic arrangement using 4D-STEM.
Bruefach, Alexandra (ORCID:0000000209323477)↗
Imaging collective behavior in an rf-SQUID metamaterial tuned by DC and RF magnetic fields
In this study, we examine the collective behavior of two-dimensional nonlinear superconducting metamaterials using a non-contact spatially resolved imaging technique. The metamaterial is made up of sub-wavelength nonlinear oscillators in a strongly coupled 27x27 planar array of radio-frequency Superconducting QUantum Interference Devices (rf SQUIDs). By using low-temperature laser scanning microscopy we image microwave currents in the driven SQUIDs while in non-radiating dark modes and identify the clustering and uniformity of like-oscillating meta-atoms. We follow the rearrangement of coherent patterns due to meta-atom resonant frequency tuning as a function of external dc and rf magnetic flux bias. We find that the rf current distribution across the SQUID array at zero dc flux and small rf flux reveals a low degree of coherence. By contrast, the spatial coherence improves dramatically upon increasing of rf flux amplitude, in agreement with simulation.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Safer and optimized vulnerability scanning for operational technology through integrated and automated passive monitoring and active scanning
Vulnerability scanning of embedded sensors and controllers have a history of causing disruption and malfunction within operation technology environments. Traditional information technology vulnerability scanning generally consists of blunt exercising all or a large population of test conditions to understand how equipment responds. Often the large number and varied conditions of the tests are too much for embedded systems to handle. This paper presents a methodology and framework for integrating passive monitoring and active scanning techniques to optimize the type and amount of necessary active communication tests while achieving acceptable levels of device and vulnerability discovery. Bayesian probability and networks are leveraged for inference to drive the automation of the scanning actions to achieve confidence in discovery. Through inference, selecting the optimal active scans with the least risk and highest confidence impact is possible, thereby eliminating unnecessary scans with uncertain effects. Results of experimenting with real power systems and the following probabilities are provided.
Key Management, ICS, SCADA, Authentication↗
Light field X-ray optics
Devices, systems and methods for performing X-ray scans with a single line of sight using a lens array for capturing the light field of the X-rays are described. In one example aspect, an X-ray optical system includes a primary optics subsection positioned to receive incoming X-rays after traversal through an object and to redirect the received incoming X-rays onto an intermediate image plane. The system also includes a microlens array positioned at or close to the intermediate image plane to receive at least some of the received incoming X-rays after redirection by the primary optics subsection to diffract the X-rays that are incident thereupon.
Kozioziemski, Bernard J.↗
Electric current paths in a Si:P delta-doped device imaged by nitrogen-vacancy diamond magnetic microscopy
The recently-developed ability to control phosphorous-doping of silicon at an atomic level using scanning tunneling microscopy, a technique known as atomic precision advanced manufacturing (APAM), has allowed us to tailor electronic devices with atomic precision, and thus has emerged as a way to explore new possibilities in Si electronics. In these applications, critical questions include where current flow is actually occurring in or near APAM structures as well as whether leakage currents are present. In general, detection and mapping of current flow in APAM structures are valuable diagnostic tools to obtain reliable devices in digital-enhanced applications. In this report, we used nitrogen-vacancy (NV) centers in diamond for wide-field magnetic imaging (with a few-mm field of view and micron-scale resolution) of magnetic fields from surface currents flowing in an APAM test device made of a P delta-doped layer on a Si substrate, a standard APAM witness material. We integrated a diamond having a surface NV ensemble with the device (patterned in two parallel mm-sized ribbons), then mapped the magnetic field from the DC current injected in the APAM device in a home-built NV wide-field microscope. The 2D magnetic field maps were used to reconstruct the surface current densities, allowing us to obtain information on current paths, device failures such as choke points where current flow is impeded, and current leakages outside the APAM-defined P-doped regions. Analysis on the current density reconstructed map showed a projected sensitivity of ~0.03 A m -1 , corresponding to a smallest-detectable current in the 200 μm wide APAM ribbon of ~6 μA. These results demonstrate the failure analysis capability of NV wide-field magnetometry for APAM materials, opening the possibility to investigate other cutting-edge microelectronic devices.
77 NANOSCIENCE AND NANOTECHNOLOGY↗
Direct Deposition of Nonaqueous SnO 2 Dispersion by Blade Coating on Perovskites for the Scalable Fabrication of p–i–n Perovskite Solar Cells
Tin(IV) oxide materials have been extensively used as electron transport materials in n–i–p perovskite solar cells (PSCs) due to their superior optoelectronic properties, low-temperature processability, and high chemical stability. However, solvent incompatibility and processing temperature have limited the direct deposition of fully solution-processed SnO 2 in p–i–n devices. In this study, we overcome this limitation by the functionalization of SnO 2 nanoparticles with acetate through ligand exchange, allowing their dispersion in anhydrous ethanol. The SnO 2 dispersion was deposited on the perovskite absorber by blade coating without damaging the underlying perovskite layer, as determined by X-ray diffraction and scanning electron microscopy. Photoluminescence spectroscopy confirmed effective electron extraction. The champion device shows 14.1% initial power conversion efficiency (PCE) which is unprecedented for a p–i–n device employing solution-phase SnO 2 . Finally, PSCs stored for 40 days in a nitrogen flow box retained an average of 95.8% of the initial PCE.
14 SOLAR ENERGY↗
Characterization of Amplification Properties of the Superconducting-Ferromagnetic Transistor
Here we report on the measurement results of the superconducting-ferromagnetic transistors (SFTs). The devices were made at Northwestern University and Hypres (SeeQC), Inc. (Nevirkovets et al., 2014; 2015). SFT is a multiterminal device with the SIS'FIFS (or SFIFS'IS) structure (where S, I, and F denote a superconductor, an insulator, and a ferromagnetic material, respectively) exploiting intense quasiparticle injection in order to modify the nonlinear I-V curve of a superconducting tunnel junction. SFT is capable of providing voltage, current, and power amplification while having good input/output isolation. We characterized the devices using different measurement techniques. We measured S parameters of the single- and double-acceptor devices at frequencies up to 5 MHz. Importantly, we confirmed that the isolation between the input and output of the device is quite good. However, the techniques typically employed to characterize semiconductor devices do not allow for revealing the full potential of our low-resistive SFT devices, especially those having two acceptors. In the latter case, we also tested the devices using the battery-powered current sources with floating grounds. Analyzing double-acceptor I-V curves recorded at different levels of injection currents, for an optimal load, we deduced a small-signal voltage gain of 33 and a power gain of 2.4. We suggest that further improvement of the SFT device parameters is possible in optimized devices, so that the device potentially may serve as a preamplifier for readout of output signals of cryogenic detectors and be useful as an element of other superconductor-based circuits. In addition, we used scanning transmission electron microscopy to identify some problems in the fabrication of the devices without any planarization.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Atomically Precise PdSe 2 Pentagonal Nanoribbons
We report atomically precise pentagonal PdSe 2 nanoribbons (PNRs) fabricated on a pristine PdSe 2 substrate with a hybrid method of top-down and bottom-up processes. The PNRs form a uniform array of dimer structure with a width of 2.4 nm and length of more than 200 nm. In situ four-probe scanning tunneling microscopy (STM) reveals metallic behavior of PNRs with ballistic transport for at least 20 nm in length. Density functional theory calculations produce a semiconducting density of states of isolated PNRs and find that the band gap narrows and disappears quickly once considering coupling between PNR stacking layers or interaction with the PdSe 2 substrate. The coupling of PNRs is further corroborated by Raman spectroscopy and field-effect transistor measurements. The facile method of fabricating atomically precise PNRs offers an air-stable functional material for dimensional control.
36 MATERIALS SCIENCE↗
Final Technical Report - Rapid Surface Microanalysis using a Low Temperature Plasma
This project focused on improving our current understanding and scientific knowledge in the area of plasma-surface interactions and plasma assisted material synthesis related to advanced microelectronics and nanotechnology. Current challenges include: controlling the interaction of Low Temperature Plasma (LTP) with a single layer of atoms to manufacture integrated circuits, continued miniaturization of integrated circuits, LTP processing of material surfaces and thin films to enable industrial scale fabrication of advanced microelectronics, synthesis of new materials, nanomaterials, nanotubes, and complex materials, Technology developed in this subtopic is of value to either (i) enable scans of surfaces (~1 sq. cm area) using various microscopies (electron, optical, other) at high resolution (micron or sub-micron resolution) rapidly (hours or days rather than years to complete a high-resolution scan of such a large surface area), or (ii) enable scans of surfaces (~1 sq. cm area) using various microscopies (electron, optical, other) at relatively low resolution rapidly, then apply algorithms to select spots for micron-scale imaging. Sputtering occurs when particles of a solid material are ejected from its surface by energetic particles from a plasma. While the degradation of the solid material and the subsequent deposition of the ejected material onto vulnerable surfaces are the usual subjects of sputtering studies, plasma science has yet to be combined with sputtering to create new diagnostics devices and systems. Small changes in the design of the plasma discharge device make it possible to create broad plasma beams for rapid scanning or small plasma beams to obtain the distribution of ejected elements with micron resolution. In the high-resolution use, the ion flux is extracted from the gas-discharge plasma and focused by a spherical emission surface to micron sizes onto the target specimen, providing very local sputtering and local elemental analysis. We call this “self-focusing”. The radiation from the excited and ionized sputtered atoms is recorded by a spectrometer through a window and fiberglass cable and analyzed with standard software packages used for optical glow discharge spectroscopy. Computer simulations of beam formation were used to verify and optimize the designs to be tested. A prototype was designed, constructed, and used to start experiments of beam formation.
70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
Tiny Tapeout Laser Scan
Fault analysis of integrated circuits (ICs) is crucial for the understanding of the devices’ functionality. However, more traditional methods of probing and measuring signals are not possible for ICs due to their feature sizes going under the micron range.
Dominguez Rodriguez, Ever Joaquin [Sandia National↗
Effect of particle characteristics on the evolution of particle size, particle morphology, and fabric of sands loaded under uniaxial compression
This work presents the results and analyses of uniaxial compression experiments performed on three silica sands. The sands have comparable particle-size distributions, but their particles differ in morphology and strength. Cylindrical samples of the three sands were compressed in a loading device placed inside an X-ray microscope (XRM) and scanned at multiple stress levels during uniaxial compression. 3D tomography data of the samples obtained from the XRM at different stress levels were then analyzed to obtain the distributions of particle size, particle morphology, and interparticle contact normals within the sample. Results indicate that: (1) the compressibility of the sands loaded under uniaxial compression is closely tied to particle morphology and strength and (2) the anisotropy in the orientations of interparticle contact normals generally increases with axial stress; however, this increase is limited by the occurrence of particle crushing in the sample.
3D X-ray computed tomography↗
In situ nanoscale imaging of moiré superlattices in twisted van der Waals heterostructures
Abstract Direct visualization of nanometer-scale properties of moiré superlattices in van der Waals heterostructure devices is a critically needed diagnostic tool for study of the electronic and optical phenomena induced by the periodic variation of atomic structure in these complex systems. Conventional imaging methods are destructive and insensitive to the buried device geometries, preventing practical inspection. Here we report a versatile scanning probe microscopy employing infrared light for imaging moiré superlattices of twisted bilayers graphene encapsulated by hexagonal boron nitride. We map the pattern using the scattering dynamics of phonon polaritons launched in hexagonal boron nitride capping layers via its interaction with the buried moiré superlattices. We explore the origin of the double-line features imaged and show the mechanism of the underlying effective phase change of the phonon polariton reflectance at domain walls. The nano-imaging tool developed provides a non-destructive analytical approach to elucidate the complex physics of moiré engineered heterostructures.
77 NANOSCIENCE AND NANOTECHNOLOGY↗
Planar tunneling spectroscopy on van der Waals superconductors with AlO x junction grown by atomic layer deposition
Here, we demonstrate a method for fabricating a high-quality AlO x -based planar tunnel junction using atomic layer deposition, integrated with the exfoliation and transfer techniques for van der Waals (vdW) materials. The tunneling spectroscopy results on exfoliated Bi 2 Sr 2 CaCu 2 O 8+δ and 2H-NbSe 2 vdW superconductors are highly consistent with that obtained by ultrahigh vacuum scanning tunneling spectroscopy on atomically clean surfaces. The planar tunneling devices enable high-precision spectroscopy over a wide range of temperatures and magnetic fields and reveal novel features and stark contrast between high-T C cuprates and conventional superconductors. This method represents a universally applicable technique for probing the electronic structure of various two-dimensional vdW materials.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Projected global stability of high beta MAST-U spherical tokamak plasmas
Assessment of the limits of stability of tokamak plasmas is essential to operation in high fusion performance ranges without disruption of the plasma current. Projected equilibria have been generated for the MAST-U spherical tokamak experiment, an upgrade of the previous MAST device, in order to prepare for operation. These equilibria are scanned in pressure and current profiles, and assessed with the DCON and MARS-F stability codes to find the so-called 'no-wall' beta limit, above which resistive wall mode instabilities can be expected in the absence of other stabilising effects. The no-wall limit was generally found to increase as plasma internal inductance increased. The equilibria are also assessed for the 'with-wall' limit, theoretically the highest achievable performance point, again with the DCON and MARS-F codes, including different approximate axisymmetric walls, and with the VALEN code which includes a 3D model of the surrounding conducting structure. Similar limits were found, despite the difference between the 2D and 3D codes in the treatment of the wall. Conducting passive stabilisation plates, which were newly installed in MAST-U, are in a region of significant mode perturbation when the plasma β N is sufficiently high and eddy currents are driven in these structures. Due to the increased stabilising effect of the wall in MAST-U vs. MAST, a significant gap exists between the approximate no-wall limits of β N / l i = 6.71 and 7.13, found from DCON and MARS-F respectively, and the with-wall limits of β N / l i = 8.23 and 8.53 for the equilibrium profiles analysed in this study. This opens a region of high beta operating space in MAST-U for potentially stable operation if non-ideal effects or active control can stabilise the resistive wall mode.
70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗