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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 145 records · Page 8

Dynamic Species Reduction for Multi-Cycle CFD Simulations (Final Technical Report)

This project primarily sought to address some of the computational cost concerns of detailed simulations by developing improved methods of handling species transport, and chemical kinetics evaluation in a commercial 3D Computational Fluid Dynamics (CFD) environment. Secondary goals were to apply these techniques to fuels and conditions of interest to better understand the key species and reactions required to adequately capture cycle to cycle coupling. Improved modeling will lead to better understanding of these combustion modes and their dependence on fuel composition, which can then enable more clean and efficient engines, ultimately benefiting the consumer as well as the general public. Two approaches were used to address the computational cost. A “Dynamic Species Reduction” (DSR) procedure was developed to remove chemical species from the simulation during periods when chemical reactions were not expected to be important, particularly during gas exchange when temperatures are low and little fuel remains. This modelling procedure automatically detects relevant species to retain in the simulation domain based on their local concentration, removes species below a specified concentration threshold, and then adjusts the remaining species mass to conserve not only the number of H, C, and O atoms in each cell, but also the relative proportions between species and the heating value of the mixture in every cell. The second procedure was a “Product Directed Remapping” (PDR) updates the algorithm used to group individual computational cells for chemical kinetics evaluation to account for non-uniform temperature distributions and the CO to CO 2 ratio in the cells. The model techniques developed in this work successfully demonstrated computational performance improvements for a range of conditions relevant for Highly Dilute SI and HCCI engine operation. Runtime reductions of 10% were observed for small mechanisms, with further reductions of up to 36% observed for larger mechanisms. Improvements were primarily related to reducing the number of chemical species tracked during the gas exchange process using the Dynamic Species Reduction method. With smaller benefits observed from changes to the kinetics binning and evaluation strategy in the post combustion region using the PDR method. The results of this work show the potential for improved computational runtime for complicated simulations. They can and should be extended to additional conditions and new bio-derived and renewable fuels as they are developed and new kinetic mechanisms become available.

10 SYNTHETIC FUELS↗

Field Validation of Innovative Air-Source Heat Pumps for Cold-Climate Heating Applications

Air-source heat pumps (ASHPs) have historically found application in milder climates in the United States (US). Their application in cold climates has been hindered by reduced performance as outdoor temperatures fall below freezing and the need for backup or auxiliary electric resistance heaters to meet peak heating loads. Recent advances in cold-climate air-source heat pumps (ccASHPs) with features such as variable-speed compressors, multistage systems, and highly optimized thermal design have improved performance by increasing the coefficient of performance (COP), low-ambient-temperature capacity, and heating seasonal performance factor (HSPF) dramatically. Despite their benefits, ccASHPs are still not widely prescribed for cold climate conditions. This is due in part to a lack of verified, demonstrated performance and analysis in cold climates. Ultimately, high-efficiency ccASHPs play a key role in emerging energy/grid renovation efforts in addition to their potential energy savings and avoided carbon emissions, but their actual performance in various cold climate field settings must be better understood. The primary objective of this project was to measure the in-field performance of variable-capacity air-source heat pumps in cold climates with the goal of enabling the development of field-based performance maps. Specifically, the study looked at how the heat pumps operated in the field, the frequency of cycling, the frequency of defrost events, and the time spent in each mode of operation. The results are intended to be used by DOE to inform research and development of energy-efficient equipment and to develop guidelines for optimizing primary energy savings when using air-source heat pumps in heating-dominated regions.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Thermally Grown Oxide Stress in PS-PVD and EB-PVD Thermal Barrier Coatings Observed at Various Lifetimes Via Synchrotron X-ray Diffraction

The current standard application method for thermal barrier coatings (TBCs) on turbine blades for jet engines is electron-beam physical vapor deposition (EB-PVD) due to its high strain tolerance and low thermal conductivity. An emerging deposition method, plasma-spray physical vapor deposition (PS-PVD), presents an opportunity for a tailorable microstructure, and non-line-of-sight deposition that is faster and less expensive. To compare the lifetime behavior of both PS-PVD and EB-PVD coatings, samples subjected to 300 and 600 thermal cycles were measured during a 1 h thermal cycle to determine the strains, which were converted to stress, in the thermally grown oxide (TGO) layer of the TBCs using synchrotron X-ray diffraction (XRD). Room temperature XRD measurements indicated among samples that PS-PVD coatings experienced greater variation in in-plane room temperature strain in the TGO after cycling than the EB-PVD coatings. In-situ XRD measurements indicated similar high-temperature strain and no spallation after 600 thermal cycles for both coatings. Further, microscopy imaging after cycling showed greater rumpling in PS-PVD coatings that led to different failure modes between the two coatings’ TGO layers. The tailorability of PS-PVD coatings allows for adjustments in the processing parameters to improve their overall performance after aging and bridge the differences between the two deposition methods.

36 MATERIALS SCIENCE↗

Sorption-enhanced steam reforming of toluene using multifunctional perovskite phase transition sorbents in a chemical looping scheme

Abstract Sorption-enhanced steam reforming (SESR) of toluene (SESRT) using catalytic CO 2 sorbents is a promising route to convert the aromatic tar byproducts formed in lignocellulosic biomass gasification into hydrogen (H 2 ) or H 2 -rich syngas. Commonly used sorbents such as CaO are effective in capturing CO 2 initially but are prone to lose their sorption capacity over repeated cycles due to sintering at high temperatures. Herein, we present a demonstration of SESRT using A- and B-site doped Sr 1− x A’ x Fe 1− y B’ y O 3− δ (A’ = Ba, Ca; B’ = Co) perovskites in a chemical looping scheme. We found that surface impregnation of 5–10 mol% Ni on the perovskite was effective in improving toluene conversion. However, upon cycling, the impregnated Ni tends to migrate into the bulk and lose activity. This prompted the adoption of a dual bed configuration using a pre-bed of NiO/ γ –Al 2 O 3 catalyst upstream of the sorbent. A comparison is made between isothermal operation and a more traditional temperature-swing mode, where for the latter, an average sorption capacity of ∼38% was witnessed over five SESR cycles with H 2 -rich product syngas evidenced by a ratio of H 2 : CO x > 4.0. XRD analysis of fresh and cycled samples of Sr 0.25 Ba 0.75 Fe 0.375 Co 0.625 O 3- δ reveal that this material is an effective phase transition sorbent—capable of cyclically capturing and releasing CO 2 without irreversible phase changes occurring.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Advancing reliability assessments of photovoltaic modules and materials using combined-accelerated stress testing

Previously undiscovered failure modes in photovoltaic (PV) modules continue to emerge in field installations despite passing protocols for design qualification and quality assurance. Failure to detect these modes prior to widespread use could be attributed to the limitations of present-day standard accelerated stress tests (ASTs), which are primarily designed to identify known degradation or failure modes at the time of development by applying simultaneous or sequential stress factors (usually two at most). Here, we introduce an accelerated testing method known as the combined-accelerated stress test (C-AST), which simultaneously combines multiple stress factors of the natural environment. Simultaneous combination of multiple stress factors allows for improved identification of failure modes with better ability to detect modes not known a priori. A demonstration experiment was conducted that reproduced the field-observed cracking of polyamide- (PA-) and polyvinylidene fluoride (PVDF)–based backsheet films, a failure mode that was not detected by current design qualification and quality assurance testing requirements. In this work, a two-phase testing protocol was implemented. The first cycle (“Tropical”) is a predominantly high-humidity and high-temperature test designed to replicate harsh tropical climates. The second cycle (“Multi-season”) was designed to replicate drier and more temperate conditions found in continental or desert climates. Testing was conducted on 2 × 2-cell crystalline-silicon cell miniature modules constructed with both ultraviolet (UV)–transmitting and UV-blocking encapsulants. Cracking failures were observed within a cumulative 120 days of the Tropical condition for one of the PA-based backsheets and after 84 days of Tropical cycle followed by 42 days of the Multi-season cycle for the PVDF-based backsheet, which are both consistent with failures seen in fielded modules. In addition to backsheet cracking, degradation modes were observed including solder/interconnect fatigue, various light-induced degradation modes, backsheet delamination, discoloration, corrosion, and cell cracking. The ability to simultaneously apply multiple stress factors may allow many of the test sequences within the standardized design qualification procedure to be performed using a single test setup.

14 SOLAR ENERGY↗

Mapping the combustion modes of a dual-fuel compression ignition engine

Compression-ignition (CI) engines can produce higher thermal efficiency (TE) and thus lower carbon dioxide (CO 2 ) emissions than spark-ignition (SI) engines. Unfortunately, the overall fuel economy of CI engine vehicles is limited by their emissions of nitrogen oxides (NO x ) and soot, which must be mitigated with costly, resource- and energy-intensive aftertreatment. NO x and soot could also be mitigated by adding premixed gasoline to complement the conventional, non-premixed direct injection (DI) of diesel fuel in CI engines. Several such “dual-fuel” combustion modes have been introduced in recent years, but these modes are usually studied individually at discrete conditions. This paper introduces a mapping system for dual-fuel CI modes that links together several previously studied modes across a continuous two-dimensional diagram. This system includes the conventional diesel combustion (CDC) and conventional dual-fuel (CDF) modes; the well-explored advanced combustion modes of HCCI, RCCI, PCCI, and PPCI; and a previously discovered but relatively unexplored combustion mode that is herein titled “Piston-split Dual-Fuel Combustion” or PDFC. Tests show that dual-fuel CI engines can simultaneously increase TE and lower NO x and/or soot emissions at high loads through the use of Partial HCCI (PHCCI). At low loads, PHCCI is not possible, but either PDFC or RCCI can be used to further improve NO x and/or soot emissions, albeit at slightly lower TE. These results lead to a “partial dual-fuel” multi-mode strategy of PHCCI at high loads and CDC at low loads, linked together by PDFC. Drive cycle simulations show that this strategy, when tuned to balance NO x and soot reductions, can reduce engine-out CO 2 emissions by about 1% while reducing NO x and soot by about 20% each with respect to CDC. This increases emissions of unburnt hydrocarbons (UHC), still in a treatable range (2.0 g/kWh) but five times as high as CDC, requiring changes in aftertreatment strategy.

Engineering↗

Lean-Stratified Combustion System with Miller Cycle for Downsized Boosted Application - Part I

Automotive manufacturers relentlessly explore engine technology combinations to achieve reduced fuel consumption under continued regulatory, societal and economic pressures. For example, technologies enabling advanced combustion modes, increased expansion to effective compression ratio, and reduced parasitics continue to be developed and integrated within conventional and hybrid propulsion strategies across the industry. A high-efficiency gasoline engine capable for use in conventional or hybrid electric vehicle platforms is highly desirable. This paper is the first to two papers describing the development of a combustion system combining lean-stratified combustion with Miller cycle for downsized boosted applications. The work was completed under a multi-year US DOE project. The goal was to define a light-duty engine package capable of achieving a 35% fuel economy improvement at US Tier 3 emission standards over a naturally aspirated stoichiometric baseline vehicle. A multi-mode combustion system was developed enabling highly efficient lean-stratified operation at light-load and stoichiometric Miller-cycle operation at mid- to highloads. Some of the unique challenges in synergistically combining the two concepts are highlighted in this paper. Here, a central direct-injection four-valve layout was designed with high-tumble ports and a bowl-in-piston capable of stable operation under highly dilute (lean plus EGR) mixtures when properly matched to fuel spray characteristics, a multiple-injection strategy, and a high-energy ignition system. Other challenges specific to meeting exhaust emissions requirements with a high-efficiency engine are also explored in this study. In this Part 1 of the paper, the single-cylinder combustion system design, analysis, and testing is described. Multicylinder engine system design, analysis and development is described in Part 2 of the paper.

33 ADVANCED PROPULSION SYSTEMS↗

Impact of shape on pedestal characteristics in the wide pedestal quiescent H-mode in the DIII-D tokamak

Experiments on the DIII-D tokamak have advanced the operational limits of wide pedestal quiescent H-mode (WPQH) plasmas towards increased ITER relevance by simultaneously demonstrating well-matched plasma shape and net zero injected torque. Wide pedestal QHmodes are a compelling candidate regime for a future power producing device because they maintain a stationary pedestal without ELMs via additional edge transport. The pedestal is wider than what would be predicted from kinetic ballooning mode physics due to enhanced edge transport generated by broadband turbulence, a limit cycle oscillation, or some combination thereof. Here, compared to the double null shape, the lower single null shape is observed to have a lower density, narrower pedestal width, larger density fluctuations over a broad range of wavenumber, and operates closer to the peeling-ballooning instability boundary calculated from the simple pedestal scaling, Δ ψΝ , which is still observed to be wider than the EPED prediction.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

High-current conduction cooled superconducting radio-frequency cryomodule

A high-current, compact, conduction cooled superconducting radio-frequency cryomodule for particle accelerators. The cryomodule will accelerate an electron beam of average current up to 1 ampere in continuous wave (CW) mode or at high duty factor. The cryomodule consists of a single-cell superconducting radio-frequency cavity made of high-purity niobium, with an inner coating of Nb3Sn and an outer coating of pure copper. Conduction cooling is achieved by using multiple closed-cycle refrigerators. Power is fed into the cavity by two coaxial couplers. Damping of the high-order modes is achieved by a warm beam-pipe ferrite damper.

Ciovati, Gianluigi↗

Observationally constrained analysis on the distribution of fine- and coarse-mode nitrate in global models

Nitrate plays an important role in the Earth system and air quality. A key challenge in simulating the life cycle of nitrate aerosol in global models is to accurately represent mass size distribution of nitrate aerosol. In this study, we evaluate the performance of the Energy Exascale Earth System Model version 2 (E3SMv2) and the Community Earth System Model version 2 (CESM2), along with Aerosol Comparisons between Observations and Models (AeroCom) phase III models, in simulating spatial distribution of fine-mode nitrate, the mass size distribution of fine- and coarse-mode nitrate, and the gas–aerosol partitioning between nitric acid gas and nitrate, using long-term ground-based observations and measurements from multiple aircraft campaigns. We find that most models underestimate the annual mean PM 2.5 (particulate matter with diameter less than 2.5 µm) nitrate surface concentration averaged over all sites. The observed nitrate PM 2.5 / PM 10 and PM 1 / PM 4 ratios are influenced by the relative contribution of fine sulfate or organic particles and coarse dust or sea salt particles. Overall, the ground-based observations give an annual mean surface nitrate PM 2.5 / PM 10 ratio of 0.7. Most models underestimate the annual mean PM 2.5 / PM 10 ratio in all regions. There are large spreads in the modeled nitrate PM 1 / PM 4 ratios, which span the full range from 0 to 1. Most models underestimate the surface molar ratio of nitrate to total inorganic nitrate averaged across all sites. Our study indicates the importance of gas–aerosol partition parameterization and the simulation of dust and sea salt in correctly simulating the mass size distribution of nitrate.

Nitrate↗

Thermal Assessment and In-Situ Monitoring of Insulated Gate Bipolar Transistors in Power Electronic Modules: Preprint

Insulated gate bipolar transistor (IGBT) power modules are devices commonly used for switching of high voltages and currents. Usage and environmental conditions can cause these power modules to degrade over time, and this gradual process may eventually lead to catastrophic failure of the device. This degradation process may cause some early performance symptoms related to the state of health of the power module, making it possible to detect reliability degradation of the IGBT module. Testing can be used to accelerate this process, permitting a rapid determination of whether specific declines in device reliability can be characterized. In this study, thermal cycling was conducted on multiple power modules simultaneously in order to assess the effect of thermal cycling on the degradation of the power module. In-situ monitoring of temperature was performed from inside each power module using high temperature thermocouples. Device imaging and characterization was performed along with temperature data analysis, to assess failure modes and mechanisms within the power modules. While the experiment was aimed to assess the potential damage effects of thermal cycling on die attach, results indicated that wirebond degradation was the life limiting failure mechanism.

33 ADVANCED PROPULSION SYSTEMS↗

Lean-Stratified Combustion System with Miller Cycle for Downsized Boosted Application - Part 2

Automotive manufacturers relentlessly explore engine technology combinations to achieve reduced fuel consumption under continued regulatory, societal and economic pressures. For example, technologies enabling advanced combustion modes, increased expansion to effective compression ratio and reduced parasitics continue to be developed and integrated within conventional and hybrid propulsion strategies across the industry. Here, a high-efficiency gasoline engine capable for use in conventional or hybrid electric vehicle platforms is highly desirable. This paper is the second of two papers describing the multi-cylinder integration of a technology package combining lean-stratified combustion with Miller cycle for downsized boosted applications. The first paper describes the design, analysis and single-cylinder testing conducted to down-select the combustion system deployed to the multi-cylinder engine. This paper defines a light-duty engine package capable of achieving a 35% fuel economy improvement at US Tier 3 emission standards over a naturally aspirated stoichiometric baseline vehicle. A multi-mode combustion system was developed enabling highly efficient lean-stratified operation at light-load and stoichiometric Miller-cycle operation at mid- to high-loads. A central direct-injection four-valve layout was designed with high-tumble ports and a bowl-in-piston capable of stable operation under highly dilute mixtures when properly matched to fuel spray characteristics, injection strategy, and a high-energy ignition system. Boost system layout and base engine architecture were selected to minimize parasitics and maximize after treatment effectiveness. A multi-cylinder engine was developed and calibrated over a steady-state map. Results fed vehicle simulations over the EPA city and highway test cycles to predict the fuel economy improvement and tailpipe emissions potential. Fuel economy improvements over the baseline vehicle were projected at 42% and 39% for active-urea and passive-ammonia SCR after treatment systems respectively. Controls complexity to achieve regulatory compliance and the cost of the lean after treatment system were identified as the primary challenges to commercial viability.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

ANS Winter 2024 Summary: MCCAFE: The Monte Carlo Constructor for ATR Fuel Elements

The Irradiation Experiment Neutronics Analysis Department at Idaho National Laboratory (INL) has implemented a new analysis workflow for experiments in the Advanced Test Reactor (ATR). One key piece of this workflow is the Monte Carlo Constructor for ATR Fuel Elements, or MCCAFE. For each ATR operating cycle, the Reactor and Nuclear Safety Engineering (RNSE) Department first solves the core in eigenvalue mode and depletes the driver fuel materials. In a separate calculation, neutronics analysts model and deplete the materials of one or more irradiation experiments, usually in a series of fixed-source Monte Carlo N-Particle (MCNP) models of the ATR for neutron transport calculations. It was desirable to use the results of the former calculations to inform the models of the latter. MCCAFE is a Python program developed using American Society of Mechanical Engineers Nuclear Quality Assurance-1 procedures at INL. Its purpose is to take the calculated results from the RNSE depletion solutions and the measured or projected operating parameters from the Nuclear Data Management and Analysis System (NDMAS) to generate fixed-source models of the ATR core at given points in time across one or more cycles.

99 - GENERAL AND MISCELLANEOUS↗

Analysis of First-Order Gratings in Silicon Photonic Waveguides

A simple thin film effective index analysis for first order gratings in Si photonic waveguides is shown to provide highly accurate results for reflected and transmitted power spectrums as long as the waveguide remains single mode and non-radiating. A cover layer can be added to the grating region of a Si photonic waveguide to increase the strength of the grating, modify transition losses from the input waveguide to the grating waveguide region, and/or modify the width of the reflectivity spectrum. For a given grating period, the peak reflection and spectral width of the reflectivity decrease as the duty cycle is decreased or increased from ~50%. For both radiating and multimode structures, the coupling between all modes, power radiated towards the superstrate (upwards), power radiated downwards (substrate) and transmitted power analyzed by Floquet-Bloch, Eigenmode Expansion and Finite Difference Time Domain methods show excellent agreement. Coupling coefficients calculated using analytic formulas are shown to be accurate only for shallow grating depths.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Strategies for Enhancing Battery Life Under Fast Charging: Insights from NMC-Based Cell Cycling

Fast charging improves the usability of consumer electronics and electric vehicles (EVs) by reducing range anxiety and downtime but accelerates battery degradation and raises safety concerns. Optimizing operational conditions during fast-charging is critical to mitigating aging and ensuring safety. This study evaluated multilayer Gr/NMC811 cells under various conditions, including depths of discharge (DODs of 68%, 84%, and 100%), upper charge cutoff voltages (4.1–4.2 V), and post-charge rest periods (2–30 min), using a 20 min fast charging protocol for up to 500 cycles (up to 150,000 miles of EV use assuming 3.3 mi/kWh vehicle level energy efficiency). Surprisingly, higher DODs under fast charging improved battery life and performance compared to lower DODs. Reducing the upper charge cut-off voltage helped mitigate degradation. A brief 2 min rest period after charging further reduced aging effects. The primary aging modes were loss of lithium inventory and cathode active material. Although minor lithium plating was observed within 500 cycles, it did not affect performance significantly. These findings suggest that, with optimized conditions, cells can sustain hundreds of fast charge cycles—equivalent to over 100,000 miles of EV use—without significant adverse effects on performance or longevity.

25 - ENERGY STORAGE↗

Robust Dissimilar Metal Friction Welded Spool for Enhanced Capability for Steam Power Components (Final Program Report)

This project successfully demonstrated the feasibility and advantages of producing durable, friction-welded dissimilar-metal spools, both with and without transition pieces, as well as the use of advanced oxidation-protective coatings for steam power applications. The work encompassed the optimization and full-scale production of NFA tubing, overcoming manufacturing and processing challenges to achieve enhanced strength, creep, and fatigue properties validated by extensive microstructural characterization. Optimized welding techniques were developed and refined for joining dissimilar materials, resulting in defect-free welds optimized for both low- and high-pressure boiler circuits. Systematic evaluation of welding parameters, coupled with heat treatments, ensured reliable performance and minimized weld defects such as banding and cracking. Comprehensive mechanical and non-destructive testing, including tensile, bend, fatigue, and CT scanning, confirmed the superior integrity and durability of the friction-welded joints under representative service conditions. To address oxidation-related degradation, a range of protective alloy coatings—such as IN625, APMT, Duplex 2507, and FeCrAlY—were selected and evaluated for their ability to counteract oxide notch formation at dissimilar metal interfaces. These coatings demonstrated improved oxidation resistance and long-term stability under thermal cycling, thereby extending weld service life. Thermal cyclic testing and long-term studies captured the phase stability and diffusion behavior of coated and uncoated configurations. Validated models for low-cycle fatigue (LCF), creep, and thermal mechanical fatigue (TMF) were developed to predict component life and failure modes. These models confirmed that friction-welded configurations exhibited significantly enhanced performance compared to conventional gas-tungsten arc welding (GTAW), with up to 7× improvement in creep resistance and at least 2× enhancement in fatigue properties. The introduction of a tailored transition piece further reduced thermally induced strains, enhancing fatigue life. The results demonstrate a robust pathway for retrofitting existing steam fleet components and upgrading future equipment to deliver substantially improved cold-start cycling behavior and reduction of unplanned outages due to premature weld failures.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Evaluating temperature dependent degradation mechanisms of silicon-graphite electrodes and the effect of fluoroethylene carbonate electrolyte additive

Understanding and overcoming the relatively high rate of degradation observed with silicon (Si)-based anodes in lithium (Li)-ion batteries (LiBs) is crucial for developing cells with increased energy density. The capacity fade of Si-graphite (Gr) electrodes in electrolytes with and without 10 wt% fluoroethylene carbonate (FEC) is explored during cycling at temperatures of 25, 45, and 70 °C, focusing on the complex degradation modes arising from loss of active material, loss of Li inventory, and cell resistance growth. We first show the common half-cell testing cannot be used at elevated temperatures as the performance of Li metal overshadows the behavior of Si-Gr electrode. Symmetric cell configuration successfully eliminates the effect of foreign materials, and reveals that while the presence of FEC provides better passivation of Si, it also results in greater parasitic reactions at 70 °C and faster capacity fade. The electrolyte without FEC, on the other hand, shows higher capacity retention at 70 °C. Finally, we propose a multi-step test protocol which can successfully deconvolute the information on loss of Li inventory and of active material. By combining half-cell and symmetric cell test methods, we demonstrate that loss of active material is reduced at higher temperatures and the dominant mechanisms of capacity loss for Si-Gr electrodes at elevated temperatures is loss of Li inventory.

25 ENERGY STORAGE↗

Power matching to pulsed inductively coupled plasmas

Matching of power delivery to nonlinear loads in plasma processing is a continuing challenge. Plasma reactors used in microelectronics fabrication are increasingly multi-frequency and/or pulsed, producing a non-linear and, in many cases, non-steady state electrical termination that can complicate efficient power coupling to the plasma. This is particularly the case for pulsed inductively coupled plasmas where the impedance of the plasma can significantly change during the start-up-transient and undergo an E–H (capacitive-to-inductive) transition. In this paper, we discuss the results from a computational investigation of the dynamics of power matching to pulsed inductively coupled plasmas (Ar/Cl 2 mixtures of tens of mTorr pressure) using fixed component impedance matching networks and their consequences on plasma properties. In this investigation, we used set-point matching where the components of the matching network provide a best-case impedance match (relative to the characteristic impedance of the power supply) at a chosen time during the pulsed cycle. Matching impedance early during the pulse enables power to feed the E-mode, thereby emphasizing capacitive coupling and large excursions in the plasma potential. This early power coupling enables a more rapid ramp-up in plasma density while being mismatched during the H-mode later in the pulse. The early match also produces more energetic ion bombardment of surfaces. Matching late in the pulse diminishes power dissipated in the E-mode at the cost of also reducing the rate of increase in plasma density.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗