Laser Metrology Heterodyne Phase-Locked Loop
A method reduces sensitivity to noise in a signal from a laser heterodyne interferometer. The phase-locked loop (PLL) removes glitches that occur in a zero-crossing detector s output [that can happen if the signal-to-noise ratio (SNR) of the heterodyne signal is low] by the use of an internal oscillator that produces a square-wave signal at a frequency that is inherently close to the heterodyne frequency. It also contains phase-locking circuits that lock the phase of the oscillator to the output of the zero-crossing detector. Because the PLL output is an oscillator signal, it is glitch-free. This enables the ability to make accurate phase measurements in spite of low SNR, creates an immunity to phase error caused by shifts in the heterodyne frequency (i.e. if the target moves causing Doppler shift), and maintains a valid phase even when the signal drops out for brief periods of time, such as when the laser is blocked by a stray object.