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At least 19 records

Acoustic MEMS Sensor Array for Quench Detection of CICC Superconducting Cables

Here, a novel quench detection method using micro-electro-mechanical system (MEMS) sensor technology has been investigated in use for high temperature superconducting (HTS) conductors such REBCO tape cables. The sensor array along a superconducting cable, such as a cable-in-conduit-conductor (CICC), is installed in a cooling channel. It will allow sensitive and quick detection for a local quench of a superconducting cable. This work has confirmed that a quench of a single REBCO tape can be detected in liquid nitrogen by a MEMS piezoelectric microphone sensor. The quench detection design utilizing a MEMS sensor array method is discussed for the case of a toroidal field (TF) magnets of a fusion Tokamak device.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Acoustic MEMS Sensor Array for Quench Detection of CICC Superconducting Cables

A novel quench detection method using microelectro- mechanical system (MEMS) sensor technology has been investigated in use for high temperature superconducting (HTS) conductors such REBCO tape cables. The sensor array along a superconducting cable, such as a cable-in-conduit-conductor (CICC), is installed in a cooling channel. It will allow sensitive and quick detection for a local quench of a superconducting cable. This work has confirmed that a quench of a single REBCO tape can be detected in liquid nitrogen by a MEMS piezoelectric microphone sensor. The quench detection design utilizing a MEMS sensor array method is discussed for the case of a toroidal field (TF) magnets of a fusion Tokamak device.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

The Application of Quaternions to Strap-Down MEMS Sensor Data

We describe the mathematical transformations required to convert the data recorded using typical 6-axis microelectromechanical systems (MEMS) sensor packages (3-axis rate gyroscopes and 3-axis accelerometers) when attached to an object undergoing a short duration loading event, such as blast loading, where inertial data alone are sufficient to track the object motion. By using the quaternion description, the complex object rotations and displacements that typically occur are translated into the more convenient earth frame of reference. An illustrative example is presented where a large and heavy object was thrown by the action of a very strong air blast in a complex manner. The data conversion process yielded an accurate animation of the object’s subsequent motion.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection

Helium is integral in several industries, including nuclear waste management and semiconductors. Thus, developing a sensing method for detecting helium is essential to ensure the proper operation of such facilities. Several approaches can be used for helium detection, including based on the high thermal conductivity of helium, which is several times higher than air. This work utilizes the high thermal conductivity of helium to design and analyze a bimorph MEMS sensor for helium sensing applications. COMSOL Multiphysics software (version 6.2) is used to carry out this investigation. The sensor is constructed from poly-silicon and SiO 2 materials with a trenched cantilever beam configuration. The sensor is electrically heated, and its morphed displacement depends on the surrounding gas’s composition, which decreases in the presence of helium. Several factors were investigated to probe their effect on the sensor’s sensitivity to helium, including the thickness of the poly-silicon layer, the configuration of the trench, and the thickness and location of SiO 2 layer. The simulations showed that the best performance, up to 2 ppm helium detection level, can be achieved with thinner beams and medium trench lengths.

47 OTHER INSTRUMENTATION↗

A sensing material-free and simple readout MEMS sensor for detecting Helium

Abstract In this work, we report a method that enables a standard electrostatic MEMS device to perform complex sensing functionalities, such as detecting the presence of helium without a sensing material or a conditioning circuit. Helium is a noble, odorless, non-reactive gas that is very challenging to detect. It is used in critical applications such as storing nuclear fuel waste inside a dry cask. In these applications, its leakage from the dry cask may indicate the cask's safe operation's degradation. A departure from the common practice of exciting the MEMS around its mechanical resonance, the method is based on exciting the MEMS around its electrical resonance circuit. This method shows that the tiny difference between the air dielectric constant (1.00059) and helium (1.000067) corresponding to only a few Femtofarad level capacitances produces a 25 mV difference without a conditioning circuit. Simulation results confirmed those findings and explored the sensor response at different operation conditions. This method eliminates the need for a heated microstructure and the need for absorption material. This method is not limited to gas sensing. It can be applied to other sensing mechanisms, such as acceleration and pressure measurements, and eliminate the complex circuit to read small capacitance in these applications.

Mohaidat, Sulaiman↗

Additive Manufacturing of Energy Harvesting Material System for Active Wireless MEMS Sensors

Combustion systems make up a large sum of the world’s yearly energy production despite advances in renewable energy sources. Precise control of pressure and temperature in combustion chambers allows for lower carbon emissions, and overall higher efficiency. Wireless temperature and pressure sensors are critical for the operation of combustion chambers. Energy harvesters have emerged as a viable way to power wireless sensors when heat and mechanical energy are available. Lithium niobate (LNB), barium titanate (BTO), and lead zirconate titanate (PZT) pyroelectric ceramics were studied and fabricated through additive manufacturing (AM) for use as energy harvesting structures in combustion environments. The electric power generation potential of LNB and PZT ceramics was studied by varying the temperature from 50 to 60 °C and by introducing cyclic compression loads of 2000 N amplitude. It was found that thermal energy conversion had the highest output of 500 nW and that combined thermal and mechanical conversion did not increase the harvesting potential because of the competing contributions of both effects. Powder bed and slurry extrusion AM methods were used to fabricate BTO and PZT ceramic structures. Optimization of the powder-based binder jetting method produced BTO ceramics with a relative density of 36.77% a piezoelectric coefficient of 153 pC/N. The density of the ceramics increased up to 56% when increasing the saturation of binder in the powder to because of liquid phase sintering. Finally, PZT structures were manufactured through AM and fin features were added to the design to enhance the heat transfer along the material. The harvested power density of the flat samples was 3.643 μW/cm 3 and of the finned samples was 3.034 μW/cm3. This research paves the ways for the development of self-powered wireless sensors in critical areas of operation such as combustion.

01 COAL, LIGNITE, AND PEAT↗

Using non-invasive MEMS pressure sensors for measuring building envelope air leakage

Micro-electromechanical systems (MEMS)-based sensors have seen significant improvements in accuracy and cost over the past several years, and due to the need for altitude sensing in unmanned aerial vehicles and wearable technologies, absolute pressure sensors have shown the most dramatic improvements. This paper investigates applications of MEMS sensors in commercial buildings, including pairing two absolute pressure sensors to determine differential pressures between different locations in and around buildings. Differential pressure measurements are commonly made in commercial buildings for a number of applications, including static pressure measurements for variable-speed supply fan control, air balancing in hospitals, and for envelope and duct air leakage testing. This paper focuses specifically on envelope air-leakage testing applications of these sensors. The use of continuous pressure measurements in addition to one-time non-intrusive outdoor airflow measurements of rooftop packaged units is investigated. A comparison with standardized leakage testing indicated that continuous measurements with MEMS pressure-sensors were able to estimate envelope leakage to within 3–16% of the standardized test result. In addition, the magnitude and stability of differential pressure differences that can be resolved with absolute pressure sensors are also investigated in the laboratory and the field. Results show that the sensors can be effectively used for pressures seen in low rise buildings with rooftop units.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Coolant Pressure Evaluations for a MEMS Sensor-Array Quench Detection in REBCO CICC Superconducting Cables

Here, the initial quench pressure developments for a CICC cable of REBCO tapes have been investigated by numerical analyzing the first law of thermodynamics. The temperature and pressure rise due to the quench has been evaluated for a REBCO CICC conductor operated in helium gas coolant at 26 K. Additionally, a MEMS sensor-in-tube array method has been proposed and discussed for quench detection.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

A Threshold Helium Leakage Detection Switch with Ultra Low Power Operation

Detecting helium leakage is important in many applications, such as in dry cask nuclear waste storage systems. This work develops a helium detection system based on the relative permittivity (dielectric constant) difference between air and helium. This difference changes the status of an electrostatic microelectromechanical system (MEMS) switch. The switch is a capacitive-based device and requires a very negligible amount of power. Exciting the switch’s electrical resonance enhances the MEMS switch sensitivity to detect low helium concentration. This work simulates two different MEMS switch configurations: a cantilever-based MEMS modeled as a single-degree-freedom model and a clamped-clamped beam MEMS molded using the COMSOL Multiphysics finite-element software. While both configurations demonstrate the switch’s simple operation concept, the clamped-clamped beam was selected for detailed parametric characterization due to its comprehensive modeling approach. The beam detects at least 5% helium concentration levels when excited at 3.8 MHz, near electrical resonance. The switch performance decreases at lower excitation frequencies or increases the circuit resistance. The MEMS sensor detection level was relatively immune to beam thickness and parasitic capacitance changes. However, higher parasitic capacitance increases the switch’s susceptibility to errors, fluctuations, and uncertainties.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Nonlinear modeling and performance analysis of cracked beam microgyroscopes

Cracks constitute a common structural defect in microelectromechanical systems that may arise during manufacturing, mechanical fatigue, or shock loading. Areas weakened by cracks increase the flexibility of the microstructure. Furthermore, depending on the crack severity, the increased flexibility can cause dramatic changes in the static and dynamic behaviors of electrically actuated MEMS. In this study, a numerical investigation of the depth and location of multiple edge cracks on the performance of beam microgyroscopes is conducted. Applying the Griffith strain energy release theorem for an edge crack, the vibrational characteristics of microgyroscopes with multiple cracks including the static deflection, natural frequencies, and mode shapes are studied analytically. Then, the differential quadrature method is employed to model the nonlinear dynamic behaviors of the cracked gyroscope system. Cracks initiated along the driving or sensing directions of the microgyroscope are found to have differing effects on its nonlinear dynamic response. This numerical study reveals that the onset of severe single cracks or a series of multiple cracks can significantly affect the sensitivity of the microgyroscope to base rotations and therefore leads to a degradation in the performance of the damaged MEMS sensor. This study also shows that a potential design approach for broadband microgyroscope systems manufactured with cracks can be proposed.

42 ENGINEERING↗

Editorial: Deep-sea observation equipment and exploration technology

The increasing interest in deep-sea exploration is a crucial catalyst for driving advancements in deep-sea observation technology research. Numerous sophisticated sensors have been developed to facilitate comprehensive studies in deep-sea physics, chemistry, and geology. For example, cutting-edge small and compact seabed samplers are now employed on various platforms, such as Autonomous Underwater Vehicles (AUVs), Remotely Operated Vehicles (ROVs), and Human-Operated Vehicles (HOVs), enabling observation of the hadal zone. Additionally, Micro-electromechanical systems (MEMS) sensors are routinely utilized for ocean wave observation. This Research Topic aims to foster new insights into ocean exploration and observation technology, including ocean sensor technology, ocean observation platforms, and ocean observation reliability technology.

47 OTHER INSTRUMENTATION↗

In situ detection and characterization of alkali-silica reaction damage in concrete using contactless ultrasonic wavefield imaging

Here we present work to characterize cracking damage in concrete caused by alkali-silica reactivity distress. We apply contactless ultrasonic scan inspection, exploiting Rayleigh wave scattering from concrete inhomogeneities. The scanning system utilizes a multi-channel MEMS sensor array to collect ultrasonic wavefield data from concrete subjected to ASR-promoting environments. The location and extent of ASR damage are established by internal expansion measurements from embedded strain gauges, scanning electron microscope images of cored samples, and expansion measurements from companion samples. A wavefield data processing method extracts oscillatory fields from the ultrasonic wavefield data to detect distinct zones of ASR damage. A damage index is proposed to further characterize the extent of ASR damage. The results confirm the feasibility and accuracy of the approach to characterize ASR damage in concrete. The fully contactless ultrasonic scanning measurement system does not require separate material samples and enables in situ characterization of ASR damage within concrete structures.

36 MATERIALS SCIENCE↗

SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits

Performance of several readout circuits, when applied to a MEMS-based bulk piezoresistive displacement sensor is compared in this study. The sensor comprises a pair of tilted clamped-guided silicon beams whose bulk piezoresistivity is used for displacement sensing. Wheatstone half-bridge, constant-voltage, and constant-current circuits are implemented to measure resistance changes of this sensor. We report full characterization of the sensor with these circuits and explore the sensor’s important characteristics such as linearity, bandwidth, and noise. The results reveal that the constant-current circuit provides the highest sensitivity at equal-power bias condition. Here, we find that the resolution of the sensor is degraded from 1.6 nm with the Wheatstone half-bridge and constant-voltage circuits to about 4.2 nm with the constant-current configuration. In the frequency domain, the sensor captures the full dynamics of the MEMS nanopositioner up to 20 kHz with all readout circuits.

42 ENGINEERING↗

An Acoustic Quench Detection Method for CICC Conductor Operating in Gas or Liquid

A method using micro-electro-mechanical system (MEMS) acoustic sensor technology to detect a quench and abnormal behavior of a superconductor is discussed. MEMS of microphone chips are installed along the coolant space of a superconducting conductor to monitor the coolant condition. By arranging the acoustic sensor array in a coolant flow channel, it is possible to quickly detect a change in the local condition of the coolant with precise spatial resolution. This method is useful for monitoring superconducting magnets and power cables, especially those made with a cable-in-conduit-conductor (CICC) configuration. The methodology described in this work will also be very useful for a high temperature superconducting (HTS) conductor, such as REBCO tape conductors.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

All-Digital Plug and Play Passive RFID Sensors for Energy Efficient Building Control

This is the final report for the project “All-Digital Plug and Play Passive RFID Sensors for Energy Efficient Building Control”, funded by DOE, and performed by Clemson University, Phase IV Engineering and Harvard University from October 1, 2016 to December 31, 2020. The main objective of this project is to develop, demonstrate and pre-commercialize a novel, plug & play, battery-free, wireless sensor technology to enable low-cost (<$10 per node) indoor and outdoor temperature and humidity measurement for energy efficient building controls and operations. The proposed technology is based on the novel concept of all-digital sensing and its seamless integration with the passive RFID technology. This project focuses on the design, fabrication, material optimization, interrogation electronics, validation, and demonstration of the novel sensor nodes for building applications. The specific objectives of this research program include: (1) Design, fabricate and optimize a compact, robust, and high-resolution digitizer, which could convert rotation angle into digital numbers. (2) Develop the multi-physics-based modeling and simulation of the temperature/humidity transducer to derive a rational design of the architecture, dimension, structure, materials (i.e., mechanical, electrical, thermal and hygroscopic) properties and functions of the sensor node. (3) Design, fabricate and optimize the bi-material based humidity sensitive coil which could linearly transduce the environmental relative humidity variations to rotation angles. (4) Design, fabricate and optimize an UHF RFID platform which could support long-range passive wireless communications of 8-bit digital numbers. (5) Design, fabricate and optimize the miniaturized all-digital sensor using MEMS technology. (6) Validate the integrated all-digital sensing system in a real building environment to test the system’s performance.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Intelligent Proppants for Hydraulic Fracture Diagnostics

This Phase 1 Report details our Phase 1 progress in proving the feasibility of a highly integrated, highly miniaturized sensor ball. The ball contains sensors, analog to digital converters, memory, a clock, and an acoustic communications module all integrated onto a single silicon chip. Phase 2 is to focus on the application specific integrated circuit (ASIC). Phase 1 piecewise proves the feasibility of this innovation by examining a few critical subsystems including the communications module and inertial sensor performance. Acoustic simulations of an acoustically active and traceable proppant are also performed and summarized in this report.

01 COAL, LIGNITE, AND PEAT↗