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At least 19 records

Three-dimensional stylus profilometry

The method of three-dimensional stylus profilometry is presented together with a computer-based system for transforming the surface topography of a specimen into an intensity image. Examples are given in which intensity images obtained by stylus profilometry are compared with scanning electron micrographs and two other representations of the stylus data. The comparisons are made for three types of surface irregularities: a discrete feature, a periodic profile surface, and a random profile surface. It is shown that stylus profilometry provides high vertical resolution for low sloped surfaces and thus can be useful in revealing features not easily detectable with other methods.

Teague, E. C.↗

Detecting defects that reduce breakdown voltage using machine learning and optical profilometry

Abstract Semiconductor wafer manufacturing relies on the precise control of various performance metrics to ensure the quality and reliability of integrated circuits. In particular, GaN has properties that are advantageous for high voltage and high frequency power devices; however, defects in the substrate growth and manufacturing are preventing vertical devices from performing optimally. This paper explores the application of machine learning techniques utilizing data obtained from optical profilometry as input variables to predict the probability of a wafer meeting performance metrics, specifically the breakdown voltage (V bk ). By incorporating machine learning techniques, it is possible to reliably predict performance metrics that cause devices to fail at low voltage. For diodes that fail at a higher (but still below theoretical) breakdown voltage, alternative inspection methods or a combination of several experimental techniques may be necessary.

42 ENGINEERING↗

Application and performance of the novel Elcomat 5000 autocollimator in slope-measuring profilometry of beamline optics

Autocollimators are used in profilometers for the precise form measurement of beam-shaping optics for synchrotron light sources and x-ray free-electron lasers. This application requires using an aperture stop, typically 2.5 mm in diameter, which limits the footprint of the autocollimator’s measuring beam on the optics to achieve a sufficiently high lateral resolution. Central to the development of profilometry has been the availability of commercial autocollimators, such as the Elcomat 3000 from Möller–Wedel Optical. Although autocollimators are generally not designed for use with small apertures, this device has proven capable and has become the de facto standard. Now that it has been replaced by the Elcomat 5000, we evaluate the performance of several autocollimators of this type at small apertures, including the characterization of instrument transfer functions with a chirped height profile. We demonstrate that the Elcomat 5000 is capable of repeatable angle measurements with a standard deviation of 0.014 arcsec at an aperture diameter of 1.6 mm, whereas the Elcomat 3000 achieves 0.03 arcsec at 2.5 mm, comparing models with modified reticle designs. Here, we also investigate the influence of optical aberrations of the autocollimator’s objective and their changes with the path length to the surface under test. We characterize the sensitivity of the angle measurement to changes in environmental parameters, in particular, barometric pressure. These efforts are aimed at approaching fundamental limits in the characterization of the shape of optical surfaces with autocollimator-based profilometers so that these are ready for characterizing the next generation of synchrotron and XFEL beamline optics.

angle metrology↗

Measuring 3D Profilometry of SAVY-4000 Nuclear Material Storage Containers: Novacam TubeInspect Capabilities Report

The SAVY-4000 container series is a general-purpose interim storage container for nuclear materials, developed and maintained by Los Alamos National Laboratory (LANL). It is the first vented, general-use nuclear material container to be demonstrated as meeting the requirements outlined in DOE M 441.1-1, the Nuclear Material Packaging Manual. Due to the challenging radiation, thermal, and corrosive storage conditions that the SAVY containers must endure, continuous surveillance techniques are employed to ensure the containers meet all safety standards and specifications. These inspections are typically performed by human operators, who check for issues such as corrosion, O-ring deterioration, corrosion, filter integrity, and potential manufacturing defects. However, human inspections alone are not sufficient, and automated inspection technologies, such as the ATIS system, as well as other automated systems are also utilized. The MicroCam TubeInspect, developed by Novacam Technologies Inc., is designed to address the challenges of understanding how manufacturing variations in the SAVY-4000 container series may affect performance. It is a 3D profilometry measurement system that enables detailed analysis of surface features, including defects, surface roughness, and manufacturing variations. This advanced tool significantly enhances rapid surveillance techniques for both pristine and used containers. In this study, container properties such as surface roughness, thickness, and geometric attributes like circularity are measured for SAVY-4000 containers. Artificially corroded or dented containers are examined to demonstrate the MicroCam's ability to quantify defects. A sensitivity analysis is also conducted, comparing the MicroCam results to those obtained using more precise instruments such as confocal microscopy. This comparison aims to provide valuable insights into container quality, durability, and potential improvements in manufacturing processes.

42 ENGINEERING↗

Radial Profilometry

Radial profilometry is combination of optical and electronic techniques for measurement of inner surfaces of cylindrical or nearly cylindrical cavities. Profilometer inserted in pipe or other cavity to measure its shape optically. Illumination supplied through optical fiber, and image of inspected area of cavity transmitted through bundle of optical fibers. Applications include inspection of pipes, tubes, boreholes, and possibly measurements of contours in blood vessels or other internal organs.

Gilbert, J. A.↗

Measurements of erosion characteristics for metal and polymer surfaces using profilometry

The surfaces of many materials exposed in low earth orbit are modified due to interaction with atomic oxygen. Chemical changes and surface roughening effects can occur which alter optical and other properties. The experiment A0114 contained 128 solid surface samples, half of which were exposed on the front and half on the rear of Long Duration Exposure Facility. Each sample was subjected to many analyses, but only the methods and techniques are described which were used to measure the changes in roughness, erosion depths, and material growth using profilometry.

Christl, Ligia C.↗

Measurements of erosion characteristics for metal and polymer surfaces using profilometry

The surfaces of many materials exposed in low earth orbit are modified due to interaction with atomic oxygen. Chemical changes and surface roughening effects can occur which alter optical and other properties. The experiment A0114 contained 128 solid surface samples, half of which were exposed on the front and half on the rear of LDEF. Each sample has been subjected to many analyses, but only the methods and techniques used to measure the changes in roughness, erosion depths, and material growth using profilometry are described.

Christl, Ligia C.↗

The interaction of atomic oxygen with copper: An XPS, AES, XRD, optical transmission, and stylus profilometry study

The University of Alabama in Huntsville (UAH) experiment A-0114 was designed to study the reaction of material surfaces with low earth orbits (LEO) atmospheric oxygen. The experiment contained 128 one-inch circular samples; metals, polymers, carbons, and semiconductors. Half of these samples were exposed on the front of the Long Duration Exposure Facility (LDEF) and remaining on the rear. Among metal samples, copper has shown some interesting new results. There were two forms of copper samples: a thin film sputter-coated on fused silica and a solid piece of OFHC copper. They were characterized by x-ray and Auger electron spectroscopies, x-ray diffraction, and high resolution profilometry. Cu 2p core level spectra were used to demonstrate the presence of Cu2O and CuO and to determine the oxidation states.

Raikar, Ganesh N.↗

Defining Probe Closure Offset and Scan Stitching Methodology for Element Contact Profilometry in the Hot Fuel Examination Facility

The Element Contact Profilometer (ECP) is a non-destructive post-irradiation examination (PIE) method established in the Materials and Fuels Complex (MFC) Hot Fuel Examination Facility (HFEF). The ECP suspends a fuel rod with a standard end-fitting in a vertical orientation and draws it between two opposed Sony probes with sapphire rod tips, which measure the diameter directly as a function of vertical stage position through contact profilometry. The ECP is equipped with concave rollers, which pinch the rod to maintain a consist position between these sapphire probe tips. A schematic of the analysis head is shown in Figure 1. The gripper that suspends the rod end-fitting is able to rotate to allow measuring of any azimuthal angle around the rod. This system is used to characterize the diameter of full-length light water reactor (LWR) irradiated fuel rods at multiple azimuthal angles in support of the Advanced Fuels Campaign (AFC).

22 - GENERAL STUDIES OF NUCLEAR REACTORS↗

Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry

Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X-ray free-electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw image data of an autocollimator, novel strategies to reduce the systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector are discussed. It is demonstrated that imaging properties such as, for example, geometrical distortions and vignetting, can be extracted from this redundant set of images without recourse to external calibration facilities. This approach is based on the fact that the properties of the reticle itself do not change – all changes in the reticle image are due to the imaging process. Firstly, by combining interpolation and correlation, it is possible to determine the shift of a reticle image relative to a reference image with minimal error propagation. Secondly, the intensity of the reticle image is analysed as a function of its position on the CCD and a vignetting correction is calculated. Thirdly, the size of the reticle image is analysed as a function of its position and an imaging distortion correction is derived. It is demonstrated that, for different measurement ranges and aperture diameters of the autocollimator, reductions in the systematic errors of up to a factor of four to five can be achieved without recourse to external measurements.

47 OTHER INSTRUMENTATION↗

3D Reconstruction of a High-Energy Diffraction Microscopy Sample Using Multi-modal Serial Sectioning with High-Precision EBSD and Surface Profilometry

High-energy diffraction microscopy (HEDM) combined with in situ mechanical testing is a powerful nondestructive technique for tracking the evolving microstructure within polycrystalline materials during deformation. This technique relies on a sophisticated analysis of X-ray diffraction patterns to produce a three-dimensional reconstruction of grains and other microstructural features within the interrogated volume. However, it is known that HEDM can fail to identify certain microstructural features, particularly smaller grains or twinned regions. Characterization of the identical sample volume using high-resolution surface-specific techniques, particularly electron backscatter diffraction (EBSD), can not only provide additional microstructure information about the interrogated volume but also highlight opportunities for improvement of the HEDM reconstruction algorithms. In this study, a sample fabricated from undeformed “low solvus, high refractory” nickel-based superalloy was scanned using HEDM. The volume interrogated by HEDM was then carefully characterized using a combination of surface-specific techniques, including epi-illumination optical microscopy, zero-tilt secondary and backscattered electron imaging, scanning white light interferometry, and high-precision EBSD. Custom data fusion protocols were developed to integrate and align the microstructure maps captured by these surface-specific techniques and HEDM. The raw and processed data from HEDM and serial sectioning have been made available via the Materials Data Facility (MDF) at https://doi.org/10.18126/4y0p-v604 for further investigation.

36 MATERIALS SCIENCE↗

On the use of laser profilometry for ocean wave studies

Airborne laser profilometer measurements of wave skewness and spectra are presented. The measurements were made during high wind and sea state conditions in the North Atlantic. The sea states ranged from 4.5 to 8.7 m and varied from swell to wind wave dominated situations. Skewness values for the five cases ranged from 0.08 to 0.28 and compare favorably with other existing measurements. Also, the Phillips and Wallops spectral models show excellent agreement with profilometer spectra of developing seas. For one case where the seas were fully developed, the Pierson-Moskowitz spectrum provides the best representation.

Mcclain, C. R.↗

Robust, sub-angstrom level mid-spatial frequency profilometry

A noncontacting measurement approach is presented that involves the measurement of the local curvature of the test piece by simultaneously measuring its slope at two slightly displaced locations. As the sensing beams are scanned along the test piece, a profile of curvature is built, from which the height profile is deduced by double integration. The sensing of curvature eliminates the need for a reference surface, and makes the approach insensitive to all types of vibration and drift, both in surface height and in surface slope. The approach is considered to be well suited to measuring grazing incidence optics with highly different transverse and longitudinal radii of curvature. Implementation features including a steering mirror and a movable detector provide for servo tracking of test pieces as fast as F-0.5, with radii as small as 20 mm (convex or concave).

Glenn, Paul↗

Robust, angstrom level circularity profilometry

A noncontacting approach is presented which involves measuring the local circumferential curvature of the test piece by simultaneously measuring its circumferential slope at two slightly displaced locations. A pair of sensing beams is scanned along the circumference, and a profile of curvature is built, from which the circularity profile is deduced. The sensing of curvature makes the approach insensitive to all types of vibration and drift and runout errors in the relative rotation. The special qualities of the approach are summarized which make it well suited to measuring cylindrical optics and enable it to accommodate radii as small as twenty millimeters.

Glenn, Paul↗

Angstrom level profilometry for sub-millimeter to meter scale surface errors

A versatile noncontacting profilimetry approach is defined which involves the measurement of the local curvature of a test piece by simultaneously measuring its slope at two slightly displaced locations. Several extensions of the measurement technique are emphasized including beam expansion for long scans, measurement of circularity and cone angle of near cylindrical optics, and measurement of absolute flatness.

Glenn, Paul↗

Precision Thickness Variation Mapping Via One-Transducer Ultrasonic High Resolution Profilometry for Sample With Irregular or Rough Surface

An apparatus and method for determination of sample thickness and surface depression utilizing ultrasonic pulses is discussed. The sample is held in a predetermined position by a support member having a reference surface. Ultrasonic pulses travel through a medium of known velocity propagation and reflect off the reference surface and a sample surface. Time of flight data of surface echoes are converted to distances between sample surfaces to obtain computer-generated thickness profiles and surface mappings.

Roth, Don J.↗

Precision Thickness Variation Mapping via One-Transducer Ultrasonic High Resolution Profilometry for Sample with Irregular or Rough Surface

An apparatus and method for determination of sample thickness and surface depression utilizing ultrasonic pulses. The sample is held in a predetermined position by a support member having a reference surface. Ultrasonic pulses travel through a medium of known velocity propagation and reflect off the reference surface and a sample surface. Time of flight data of surface echoes are converted to distances between sample surfaces to obtain computer-generated thickness profiles and surface mappings.

Roth, Don J.↗

Discerning Cell Surface Defects with 3D Optical Profilometry

This investigation seeks to establish better criteria that can be used for qualitative visual screening of cylindrical battery cells through exploration of various defects across multiple cylindrical Lithium-Ion battery cells. This investigation focuses on INR18650s and INR21700s cells from Molicel, LG, and Samsung. The principal instrument used is a high-definition 3D optical profilometer with measurement accuracy less than 0.5 microns. Through this effort, a catalog was built discerning minor surface imperfections from significant flaws. The catalog generated covers a comparison of axial and radial scratches, less than 5 microns, greater than 5 microns and greater than 15 microns, as well as the difference between surface discoloration, early-stage pitting, and late stages of corrosion. An exploration is made into cell button defects and crimp shoulder defects. When ultra-high-power optical magnification and three-dimension topological tools are not immediately available, this catalog will help determine if an individual cell is usable, worth further investigation, or failing. The purpose of this catalog is to be a field guide used for quick reference of a potential issue, with the goal of increasing screening throughput while reducing the need for costly examination. Trade names and trademarks are used in this abstract for identification only. Their usage does not constitute an official endorsement, either expressed or implied, by the National Aeronautics and Space Administration.

battery↗