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NASA NTRS1997

A LIGA Fabricated Quadrupole Array for Mass Spectroscopy

A linear array of nine quadrupoles was fabricated using the LIGA process. Pole heights ranging from 1 to 3 mm were fabricated using synchrotron X-ray exposures to form free standing polymethylmethacrylate (PMMA) molds into which copper, gold or nickel were electroplated.

Quadrupole Array synchrotron X-ray↗