Search NASASearch

SEARCH · Search NASA

Results for “accelerometers sensors position detectors”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

A New Force Balanced Accelerometer Using Tunneling Tip Position Sensing

In this paper, we report the initial development of a single-axis bulk micromachined accelerometer. The device employs an electron tunneling tip as a position detector in a force feedback control system. Control electrodes are placed above and below the proof mass and act as electrostatic force plates. Using the force plates, the position of the proof mass relative to the tunneling tip can be controlled.

accelerometers sensors position detectors

Electron tunnel sensor technology

The recent development of Scanning Tunneling Microscopy technology allows the application of electron tunneling to position detectors for the first time. The vacuum tunnel junction is one of the most sensitive position detection mechanisms available. It is also compact, simple, and requires little power. A prototype accelerometer based on electron tunneling, and other sensor applications of this promising new technology are described.

Waltman, S. B.

Tunnel-Effect Displacement Sensor

Tunnel position sensor simple device measuring small displacements or accelerations. Used to make compact, sensitive accelerometers or strain gauges or to measure impacts of particles. Variation in distance between two electrodes measured via variation in tunneling current between them. Tunnel microsensors provide versatility for application as accelerometers, force sensors, strain sensors, particle detectors, and other devices for space applications.

Kaiser, William J.

Micromachined Tunneling Displacement Transducers for Physical Sensors

We have designed and constructed a series of tunneling sensors which take advantage of the extreme position sensitivity of electron tunneling. In these sensors, a tunneling displacement transducer, based on scanning tunneling microscopy principles, is used to detect the signal-induced motion of a sensor element. Through the use of high-resonant frequency mechanical elements for the transducer, sensors may be constructed which offer wide bandwidth, and are robust and easily operated. Silicon micromachining may be used to fabricate the transducer elements, allowing integration of sensor and control electronics. Examples of tunneling accelerometers and infrared detectors will be discussed. In each case, the use of the tunneling transducer allows miniaturization of the sensor as well as enhancement of the sensor performance.

Kenny, T. W.