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Results for “green chart bias instabilities STS DRIE 8-electrode layout electrostatic tuning”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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NASA NTRS2002

High performance MEMS micro-gyroscope

This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.

green chart bias instabilities STS DRIE 8-electrod↗