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NASA NTRS · 20060030678

High performance MEMS micro-gyroscope

Abstract

This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.

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BibTeXRIS

Bae, S. Y., Hayworth, K. J., Yee, K. Y., Shcheglov, K., Challoner, A. D., Wiberg, D. V.. 2002-05-06. High performance MEMS micro-gyroscope. https://ntrs.nasa.gov/citations/20060030678

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