High-Precision Low-Cost Micro Birdbath Resonating Gyroscope (CRADA Final Report)
As part of the Cyclotron Road program, Enertia Microsystems Inc. (EMI) investigated a high-performance micro mechanical resonator called the micro birdbath resonator and a high-precision micro electromechanical systems (MEMS) gyroscope called the birdbath resonator gyroscope (BRG). The BRG is a novel fused-silica MEMS gyroscope. The BRG can obtain significantly greater accuracy, comparable size, and comparable cost with MEMS gyroscopes made of silicon that are currently on the market.
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