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Improved microbolometers of superconducting-transition type developed with view toward eventual fabrication of staring, infrared-imaging planar arrays of such microbolometers integrated with addressing electronic circuitry. Superconducting thin films in microbolometers epitaxial. These devices exhibit high sensitivity and low noise.
Uncooled infrared microbolometer array detectors have application for space borne spectral imaging radiometer of several types to lower size, power and cost and provide improved performance. Other advantages of eliminating cooling requirement are simplified systems, simplified satellite integration and improved reliability. A prototype microbolometer instrument for cloud observations was flown on the STS-85 space shuttle mission. Extensive data were acquired at_km resolution at four thermal infrared wavelength bands. From the 320x280 detector array both spectral and angular information can be used to advantage in cloud retrievals and has been demonstrated. An engineering model Compact Visible and Infrared Imaging Radiometer (COVIR) for small satellite missions has been developed. Application of advanced microbolometer array detectors for three axis stabilized GOES thermal imagers has been studied.
A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate, a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power 28 pW/sq rt Hz. A thermal model is also presented that accurately fits the response of the detector.
In August 2003, NASA's In-Space Propulsion Program contracted with our team to develop a prototype on-board Optical Diagnostics System (ODS) for solar sail flight tests. The ODS is intended to monitor sail deployment as well as structural and thermal behavior, and to validate computational models for use in designing future solar sail missions. This paper focuses on the thermography aspects of the ODS. A thermal model was developed to predict local sail temperature variations as a function of sail tilt to the sun, billow depth, and spectral optical properties of front and back sail surfaces. Temperature variations as small as 0.5 C can induce significant thermal strains that compare in magnitude to mechanical strains. These thermally induced strains may result in changes in shape and dynamics. The model also gave insight into the range and sensitivity required for in-flight thermal measurements and supported the development of an ABAQUS-coupled thermo-structural model. The paper also discusses three kinds of tests conducted to 1) determine the optical properties of candidate materials; 2) evaluate uncooled microbolometer-type infrared imagers; and 3) operate a prototype imager with the ODS baseline configuration. (Uncooled bolometers are less sensitive than cooled ones, but may be necessary because of restrictive ODS mass and power limits.) The team measured the spectral properties of several coated polymer samples at various angles of incidence. Two commercially available uncooled microbolometer imagers were compared, and it was found that reliable temperature measurements are feasible for both coated and uncoated sides of typical sail membrane materials.
A potentially important application of high-temperature superconducting microbolometers is infrared staring arrays. In many such staring arrays, sensitivity is more important than speed of response. Thus, it is desirable to design low-thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBa_2Cu_3O_7(-x) (YBCO) sandwiched between layers of Si_3N_4 (SN). The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers. These devices showed responsivities up to 60 kV/W with a 16 micro-A bias, and a noise equivalent power of 9x10^(-13) W/Hz^(1/2) at 7 Hz with a 5 micro-A bias (neglecting contact noise)...
Niobium microbolometers approximately 1 micron wide x 2 micron long x 10 nm thick have been integrated at the feeds of equiangular spiral antennas made of 200 nm thick Nb. The device's current-voltage characteristics and infrared responsivity as a function of DC bias voltage were measured over a range of temperature spanning approximately plus or minus 2 percent around T(sub c). The greatest voltage responsivity occurs well below T(sub c), in a regime where the I-V curve is significantly hysteretic due to self-heating and resembles the I-V curve of a superconducting microbridge.
Thermal infrared imagery from several satellite instruments, such as the NOAA AVHRR and the NASA MODIS, is presently used to detect and map forest fires. But while these radiometers can identify fires they are designed and optimized for cloud detection, providing relatively low spatial resolution and quickly saturating even for small fires. Efforts to detect and monitor forest fires from space would benefit from the development of single-sensor satellites designed specifically for this purpose. With the advent of uncooled thermal detectors, and thus the absence of aggressive cooling, the possibility of developing small satellites for the purpose of fire detection and monitoring becomes practical and cost-effective. Thus is the case with the Economical Microbolometer Based Environmental Radiometer Satellite (EMBERSat) program. The objective of this program is to develop a single, prototype satellite that will provide multiband thermal imagery with a spatial resolution of 250m and a dynamic range of 300-1000K. The thermal imaging payload has flight heritage in the Infrared Spectral Imaging Radiometer that flew aboard mission STS-85 and the spacecraft is a variant of the SimpleSat bus launched from the shuttle Columbia as part of STS-109. The EMBERSat program is a technology demonstration initiative with the eventual goal of providing high-resolution thermal imagery to both the scientific community and the public.
Thermal infrared imagery from several satellite instruments, such as the NOAA AVHRR and the NASA MODIS, is presently used to detect and map forest fires. But while these radiometers can identify fires they are designed and optimized for cloud detection, providing relatively low spatial resolution and quickly saturating even for small fires. Efforts to detect and monitor forest fires from space would benefit from the development of single-sensor satellites designed specifically for this purpose. With the advent of uncooled thermal detectors, and thus the absence of aggressive cooling, the possibility of developing small satellites for the purpose of fire detection and monitoring becomes practical and cost-effective. Thus is the case with the Economical Microbolometer Based Environmental Radiometer Satellite (EMBERSat) program. The objective of this program is to develop a single, prototype satellite that will provide multiband thermal imagery with a spatial resolution of 250m and a dynamic range of 300-1000K. The thermal imaging payload has flight heritage in the Infrared Spectral Imaging Radiometer that flew aboard mission STS-85 and the spacecraft is a variant of the SimpleSat bus launched from the shuttle Columbia as part of STS-105. The EMBERSat program is a technology demonstration initiative with the eventual goal of providing high-resolution thermal imagery to both the scientific community and the public.
High-temperature superconducting staring arrays are potentially important for both space and terrestrial applications which require the combination of high sensitivity over a broad wavelength range and relatively high temperature operation. In many such array applications sensitivity is more important than speed of response. Thus, it is desirable to design low-thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBCO sandwiched between layers of silicon nitride on silicon substrates. The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers.
We present a new device concept for a mixer element for THz frequencies. This uses a superconducting transition-edge microbridge biased at the center of its superconducting transition near 4.2 K. It is fed from an antenna or waveguide structure. Power from a local oscillator and an RF signal produce a temperature and resulting resistance variation at the difference frequency. The new aspect is the use of a very short bridge in which rapid (less than 0.1 ns) outdiffusion of hot electrons occurs. This gives large intermediate frequency (IF) response. The mixer offers about 4 GHz IF bandwidth, about 80 ohm RF resistive impedance, good match to the IF amplifier, and requires only 1-20 nW of local oscillator power. The upper RF frequency is determined by antenna or waveguide properties. Predicted mixer conversion efficiency is 1/8, and predicted double-sideband receiver noise temperatures are 260 and 90 K for transition widths of 0.1 and 0.5 Tc, respectively.
The Infrared Spectral Imaging Radiometer experiment was flown on a space shuttle mission as a shuttle hitchhiker experiment in August of 1997. The goals of the experiment were to test uncooled array detectors for infrared spectral imaging from space and to apply for the first time retrieval from space of brightness temperatures of cloud, land and sea along with direct laser measurements of cloud top height. The instrument operates in 3 narrow and one broad spectral band, all between 7 and 13 microns in either stare or time-delay and integration mode. The nominal spatial resolution was 1/4 kilometer. Using onboard calibrations along with periodic views of deep space, radiometric calibration of imagery was carried out and performance analyzed. The noise equivalent temperature difference and absolute accuracy reported here varied with operating mode, spectral band and scene temperature but were within requirements. This paper provides a description of the instrument, its operating modes, the method of brightness temperature retrieval, the method of spectral registration and results from the flight.
The present invention generally provides a terahertz (THz) imaging system that includes a source for generating radiation (e.g., a quantum cascade laser) having one or more frequencies in a range of about 0.1 THz to about 10 THz, and a two-dimensional detector array comprising a plurality of radiation detecting elements that are capable of detecting radiation in that frequency range. An optical system directs radiation from the source to an object to be imaged. The detector array detects at least a portion of the radiation transmitted through the object (or reflected by the object) so as to form a THz image of that object.
The millimeter and the submillimeter wavelengths of the electromagnetic spectrum hold a wealth of information about the evolution of the universe. In particular, cosmic microwave background (CMB) radiation and its polarization carry the oldest information in the universe, and provide the best test of the inflationary paradigm available to astronomy today. Detecting gravity waves through their imprint on the CMB polarization would have extraordinary repercussions for cosmology and physics. A transition-edge hot-electron micro - bolometer (THM) consists of a superconducting bilayer transition-edge sensor (TES) with a thin-film absorber. Unlike traditional monolithic bolometers that make use of micromachined structures, the THM em ploys the decoupling between electrons and phonons at millikelvin temperatures to provide thermal isolation. The devices are fabricated photolithographically and are easily integrated with antennas via microstrip transmission lines, and with SQUID (superconducting quantum interference device) readouts. The small volume of the absorber and TES produces a short thermal time constant that facilitates rapid sky scanning. The THM consists of a thin-film metal absorber overlapping a superconducting TES. The absorber forms the termination of a superconducting microstripline that carries RF power from an antenna. The purpose of forming a separate absorber and TES is to allow flexibility in the optimization of the two components. In particular, the absorbing film's impedance can be chosen to match the antenna, while the TES impedance can be chosen to match to the readout SQUID amplifier. This scheme combines the advantages of the TES with the advantages of planar millimeter-wave transmission line circuits. Antenna-coupling to the detectors via planar transmission lines allows the detector dimensions to be much smaller than a wavelength, so the technique can be extended across the entire microwave, millimeter, and submillimeter wavelength ranges. The circuits are fabricated using standard microlithographic techniques and are compatible with uniform, large array formats. Unlike traditional monolithic bolometers that make use of micromachined structures, the THM employs the decoupling between electrons and phonons at millikelvin temperatures to provide thermal isolation. There is no fragile membrane in the structure for thermal isolation, which improves the fabrication yield.
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The present invention relates to uncooled microbolometers which can be integrated in future thermal instruments engaged in land imaging on future observatories. The present invention includes: (1) developing and characterizing a microstructured VOx thin film, and, (2) fabricating an uncooled microbolometer array over the 8-14 micron spectral band.
A far-infrared monolithic imaging antenna array with diffraction-limited resolution has been demonstrated. The optical system is similar to an oil-immersion microscope, except that the position of the object and the image are interchanged. The array is a series of evaporated silver bow-tie antennas of 75 nm thick, spaced at 310 microns, on a fused-quartz substrate; the bow angle of 60 deg gives an impedance of 150 ohm to match to bismuth microbolometers. The measured responsivity of the array elements is 1-2 V/W at the relatively low bias of 1 mA. Previous measurements have shown that the bolometers are 1/f noise limited up to 100 kHz and that they have a frequency response of 5 MHz. The antenna array should be adequate for far-infrared plasma interferometer measurements.
Many millimeter and far-infrared imaging systems are limited in sensitivity and speed because they depend on a single scanned element. Because of recent advances in planar detectors such as Schottky diodes, superconducting tunnel junctions, and microbolometers, an attractive approach to this problem is a planar antenna array with integrated detectors. A planar line antenna array and optical system for imaging has been developed. The significant advances are a 'reverse-microscope' optical configuration and a modified bow-tie antenna design. In the 'reverse-microscope' configuration, a lens is attached to the bottom of the substrate containing the antennas. Imaging is done through the substrate. This configuration eliminates the troublesome effects of substrate surface waves. The substrate lens has only a single refracting surface, making possible a virtually aplanatic system, with little spherical aberration or coma. The array is characterized by an optical transfer function that is easily measured. An array with 19 dB crosstalk levels between adjacent antennas has been tested and it was found that the array captured 50 percent of the available power. This imaging system was diffraction limited.
A focal-plane imaging antenna array has been demonstrated at 119 microns. The array is a line of evaporated silver bow-tie antennas with bismuth microbolometer detectors on a silicon substrate. Radiation is coupled into the array by a lens placed on the back of the substrate. The bolometers are thermally isolated from the silicon substrate with a half-micron layer of polyimide. The array performance is demonstrated by coherent imaging of a series of holes at half the diffraction-limited cut-off frequency.