An overview of MEMS-based micropropulsion developments at JPL
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micropropulsion microspacecraft MEMS↗
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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion
This paper presents a leak-tight piezoelectric microvalve, operating at extremely high upstream pressures for microspacecraft applications.
valve MEMS micropropulsion microspacecraft microth↗
Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion
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valve MEMS micropropulsion microspacecraft microth↗
Piezoelectric bimorph-based microvavle for liquid-based micropropulsion
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valve MEMS micropropulsion microspacecraft microth↗
A CMOS-compatible process technique for fabricating laterally embedded multi-nanaochannels without sacrificial etching
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vavle MEMS micropropulsion microspacecraft microth↗
An overview of MEMS-based micropropulsion development at JPL
Development of MEMS (Microelectromechanical Systems) micropropulsion at the Jet Propulsion Laboratory (JPL) is reviewed. This includes a vaporizing liquid micro-thruster for microspacecraft attitude control, a micro-ion emgine for microspacecraft primary propulsion or large spacecraft fine attitude control, as well as several valve studies, including a solenoid valve studied in collaboration with Moog Space Products Division, and a piezoelectric micro-valve.
MEMS micropropulsion↗
A Review and Applicability Assessment of MEMS Based Microvalve Technologies for Microspacecraft Propulsions
A survey and evaluation of MEMS-based microvalves has been conducted to assess the applicability of this valve technology for propulsion applications on future microspacecraft.
microvalves↗
MEMS Micropropulsion Activities at JPL
A status of MEMS-based micropropulsion activities conducted at JPL will be given. These activities include work conducted on the so called Vaporizing Liquid Micro-Thruster (VLM) which recently underwent proof-of-concept testing, demonstrating the ability to vaporize water propellant at 2 W and 2 V. Micro-ion engine technologies, such m field emitter arrays and micro-grids are being studied. Focus in the field emitter area is on arrays able to survive in thruster plumes and micro-ion engine plasmas to serve as neutralizers aW engine cathodes. Integrated, batch-fabricated Ion repeller grid structures are being studied as well as different emitter tip materials are being investigated to meet these goals. A micro-isolation valve is being studied to isolate microspacecraft feed system during long interplanetary cruises, avoiding leakage and prolonging lifetime and reliability of such systems. This concept relies on the melting of a thin silicon barrier. Burst pressure values as high as 2,900 psig were obtained for these valves and power requirements to melt barriers ranging between 10 - 50 microns in thickness, as determined through thermal finite element calculations, varied between 10 - 30 W to be applied over a duration of merely 0.5 ms.
Mueller, Juergen↗