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Hard X-ray imaging with sub-10 nm resolution by scanning bonded 2D multilayer Laue lenses

Multilayer Laue lenses (MLLs) offer significant advantages over traditional diffractive focusing optics, such as zone plates (ZPs), in terms of efficiency and durability when focusing hard X-rays to 10 nm and below. Typically, a pair of 1D MLLs is aligned independently to achieve point focusing. This approach only permits scanning microscopy by moving the sample stage, which presents a limitation when it comes to scanning large or bulky objects at high speed. In this study, we present an experimental demonstration of scanning monolithically bonded 2D MLLs while keeping the sample stationary, effectively addressing the limitation of the sample’s size and weight. We characterized the system’s positional and angular stabilities during scanning, which are critical parameters to the nanofocusing performance of MLLs. In addition, we provided the X-ray measurement results and corresponding image resolution analysis.

36 MATERIALS SCIENCE↗

Achieving High-Resolution Hard X-ray Microscopy using Monolithic 2D Multilayer Laue Lenses

This article introduces the 2D multilayer Laue lens (MLL) nanofocusing optics recently developed for high-resolution hard X-ray microscopy. The new optics utilized a micro-electro-mechanical-system (MEMS)-based template to accommodate two linear MLL optics in a pre-aligned configuration. Angular misalignment between the two lenses was controlled in tens of millidegrees, and the lateral position error was on a micrometer scale. Using the developed 2D MLLs, an astigmatism-free point focus of approximately 14 nm by 13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy was obtained. In conclusion, the success of 2D MLL optics with an approaching 10 nm resolution is a significant step forward for the development of high-resolution hard X-ray microscopy and applications of MLL optics in the hard X-ray community.

36 MATERIALS SCIENCE↗

Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.

36 MATERIALS SCIENCE↗

Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case

Here, we report a new machine-learning-based approach to automatically measure the small angle between multiple planar surfaces characterized by white light interferometers. By applying an unsupervised clustering algorithm, DBSCAN (Density-Based Spatial Clustering of Applications with Noise), the multiple surfaces in an interferometer image are automatically identified as distinct surfaces. The angles between every two surfaces are then calculated through the surface fitting. This method can be applied to multiple surfaces regardless of their shapes and locations and significantly simplifies the angle measurement procedure. Using the developed method, we have demonstrated a quick and precise angle measurement for the alignment of 2D Multilayer Laue Lenses (MLLs) for the development of high-resolution x-ray microscopy. This automatic, accurate, and robust small-angle measurement method is compatible with widely used white light interferometers and can be further applied to other metrology applications of interferometer results.

36 MATERIALS SCIENCE↗

X-ray near-field multi-slice ptychography for in-situ imaging

Abstract In-situ imaging of chemical reactions can provide valuable insight into nanoparticle growth and structural evolution. Hard X-ray imaging is an excellent tool for this purpose, as it combines high spatial resolution with high penetration depth, allowing for realistic reaction environments. While far-field ptychography is a well-established method at synchrotron radiation sources, its near-field analog has received less attention. In this work we show that near-field multi-slice ptychography is a competitive method for high-resolution in-situ imaging by studying the formation of gold nanocages via galvanic replacement. Our work extends near-field X-ray ptychography to sub-50 nm spatial resolution by using multilayer Laue lenses. These high numerical aperture optics enable to distinguish sample layers that are separated by less than 100 µm by multi-slicing techniques.

Science & Technology - Other Topics↗

Design of multilayer-based diagnostics for measurement of high energy x rays and gamma rays

We investigate several possible multilayer-based optic designs for future hard x-ray and gamma ray diagnostics, including the detection and measurement of the positron annihilation radiation at 511 keV. The focus is set on increasing the photon efficiency and signal-to-noise ratio, compared to a previous multilayer-based system that was successfully employed to measure spectra in the 55 keV–100 keV range. Several possible designs using multilayer coatings are discussed, including mirror-based optics and multilayer Laue lenses.

Burcklen, C. (ORCID:0000000271566357)↗

A versatile high-speed x-ray microscope for sub-10 nm imaging

We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.

36 MATERIALS SCIENCE↗